CN220603559U

CN220603559U - MEMS structure probe capable of finely adjusting probe pressure

Info

Publication number: CN220603559U
Application number: CN202322222225.9U
Authority: CN
Inventors: 卞学礼; 王向东; 刘通
Original assignee: Shenyang Shengren Electronic Technology Co ltd
Current assignee: Shenyang Shengren Electronic Technology Co ltd
Priority date: 2023-08-18
Filing date: 2023-08-18
Publication date: 2024-03-15
Anticipated expiration: 2033-08-18

Abstract

The utility model discloses an MEMS structure probe capable of finely adjusting the pressure of the probe, which comprises a base, wherein the base is connected with a probe head through a needle body, a plurality of bends are arranged on the needle body, a plurality of openings are also formed in the needle body, and a notch groove is formed between every two adjacent openings. The needle body is provided with the bending parts with the arc openings, the notch grooves are formed among the arc openings, and the pressure and the bending performance of the whole needle body are changed by adjusting the number of the connecting blocks in the notch grooves, so that the effect of providing contact pressure with a chip according to the requirement is achieved. And the acupressure of the probe is accurately adjusted by changing the setting number and the setting positions of the connecting blocks so as to ensure the signal transmission accuracy in the working process of the probe and the chip.

Description

MEMS structure probe capable of finely adjusting probe pressure

Technical Field

The utility model relates to the technical field of probes, in particular to a MEMS structure probe capable of finely adjusting the pressure of the probe.

Background

In order to meet the contact requirements for different chips, the MEMS structure probes need to be able to guarantee to fit with them with different pressures. The cantilever of the prior MEMS structure probe mostly adopts a single cantilever structure, and cannot meet the pressure difference with a certain gradient to contact with the chip.

Disclosure of Invention

The utility model aims to provide an MEMS structure probe capable of finely adjusting the pressure of the probe, and the effect that a cantilever of the MEMS structure probe is matched with a chip under a pressure of a certain gradient is achieved.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the MEMS structure probe comprises a base, wherein the base is connected with a probe head through a needle body, a plurality of bends are arranged on the needle body, a plurality of openings are further formed in the needle body, and a notch groove is formed between every two adjacent openings.

Preferably, the bottom surface of the base is provided with a plurality of mounting protrusions.

Preferably, the probe head is mounted on the upper side of the needle body.

Preferably, the base is connected with the needle body through an arc-shaped connecting part.

Preferably, the bending parts are provided with notch grooves matched with the bending parts.

Preferably, the number of the openings is 4, and the number of the notch grooves is 3.

Preferably, connecting blocks are arranged in the three notch grooves;

or connecting blocks are arranged in the two notch grooves;

or a connecting block is arranged in any notch groove.

Compared with the prior art, the utility model has the beneficial effects that:

the needle body is provided with the bending parts with the arc openings, the notch grooves are formed among the arc openings, and the pressure and the bending performance of the whole needle body are changed by adjusting the number of the connecting blocks in the notch grooves, so that the effect of providing contact pressure with a chip according to the requirement is achieved.

And the acupressure of the probe is accurately adjusted by changing the setting number and the setting positions of the connecting blocks so as to ensure the signal transmission accuracy in the working process of the probe and the chip.

Drawings

FIG. 1 is a schematic diagram of a MEMS structure probe with a tunable probe pressure according to the present utility model.

FIG. 2 is a schematic diagram of a MEMS structure probe with a tunable probe pressure according to the present utility model.

FIG. 3 is a schematic diagram of a MEMS structure probe with a tunable probe pressure according to the present utility model.

FIG. 4 is a schematic diagram of a MEMS structure probe with a tunable probe pressure according to the present utility model.

1. A base; 2. a mounting protrusion; 3. a needle body; 4. a probe head; 5. bending; 6. an opening; 7. a notch groove; 8. and (5) connecting a block.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-4, the present utility model provides a technical solution: the MEMS structure probe capable of finely adjusting the probe pressure comprises a base 1, wherein the base 1 is connected with a probe head 4 through a needle body 3, the probe head 4 is arranged on the upper side of the needle body 3, and the probe head 4 is used for being directly contacted with a chip. The base 1 is connected with the needle body 3 through an arc-shaped connecting part, so that the integral bending performance of the needle body 3 is ensured.

The bottom surface of base 1 is equipped with a plurality of installation protruding 2 for install with the circuit board, realize the output of signal.

In order to make the probe head 4 contact the chip with different pressures, the needle body 3 is provided with a plurality of bends 5, the needle body 3 is also provided with a plurality of openings 6, and a notch 7 is arranged between the adjacent openings 6. The opening 6 and the notch 7 are all formed by laser cutting. The notch groove 7 is internally provided with connecting blocks 8 selectively, and the pressure of the probe is adjusted by changing the number of the connecting blocks 8. The bending 5 is provided with openings 6 matched with the structure of the bending 5, and the specific setting positions of the notch grooves 7 are at the end parts of the openings 6.

Preferably, the number of the openings 6 is 4, and the number of the notch grooves 7 is 3.

When the three notch grooves 7 are provided with the connecting blocks 8, the needle pressure of the probe is 1.8g/mil;

when the connecting blocks 8 are arranged in the two notch grooves 7 and the two notch grooves 7 are adjacent, the acupressure is 1.5g/mil;

when any notch groove 7 is internally provided with a connecting block 8, the acupressure is 1.2g/mil;

when no connection block 8 was present in all of the notched grooves 7, the acupressure was 0.8g/mil.

Working principle: in use, the mounting protrusion 2 on the bottom surface of the base 1 is used for mounting with a circuit board, and the probe head 4 is aligned with the chip. The number and the positions of connecting blocks 8 installed in the notch groove 7 are adjusted according to the actual pressure requirement of the probe in contact with the chip, the installation protrusion 2 and the circuit board are installed, and the probe head 4 is aligned with the chip to realize the signal input and output of the chip.

While embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the present application, and that alterations, modifications, substitutions and variations may be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.

Claims

1. The MEMS structure probe capable of finely adjusting the probe pressure is characterized in that: the novel needle comprises a base (1), wherein the base (1) is connected with a probe head (4) through a needle body (3), a plurality of bends (5) are arranged on the needle body (3), a plurality of openings (6) are further formed in the needle body (3), and a notch groove (7) is formed between every two adjacent openings (6).

2. The MEMS probe with tunable probe pressure according to claim 1, wherein: the bottom surface of the base (1) is provided with a plurality of mounting protrusions (2).

3. The MEMS probe with tunable probe pressure according to claim 1, wherein: the probe head (4) is arranged on the upper side of the needle body (3).

4. The MEMS probe with tunable probe pressure according to claim 1, wherein: the base (1) is connected with the needle body (3) through an arc-shaped connecting part.

5. The MEMS probe with tunable probe pressure according to claim 1, wherein: the bending parts (5) are provided with notch grooves (7) matched with the bending parts.

6. The MEMS probe with tunable probe pressure according to claim 1, wherein: the number of the openings (6) is 4, and the number of the notch grooves (7) is 3.

7. The MEMS probe with tunable probe pressure according to claim 6, wherein: connecting blocks (8) are arranged in the three notch grooves (7);

or connecting blocks (8) are arranged in the two notch grooves (7);

or any notch groove (7) is internally provided with a connecting block (8).