CN220584938U - Single-row multi-electron-beam scanning assembly and multi-row multi-electron-beam scanning assembly - Google Patents
Single-row multi-electron-beam scanning assembly and multi-row multi-electron-beam scanning assembly Download PDFInfo
- Publication number
- CN220584938U CN220584938U CN202223538329.2U CN202223538329U CN220584938U CN 220584938 U CN220584938 U CN 220584938U CN 202223538329 U CN202223538329 U CN 202223538329U CN 220584938 U CN220584938 U CN 220584938U
- Authority
- CN
- China
- Prior art keywords
- electron beam
- row
- scanning
- beam scanning
- scanning assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 102
- 238000000605 extraction Methods 0.000 claims abstract description 36
- 238000001816 cooling Methods 0.000 claims abstract description 20
- 230000000712 assembly Effects 0.000 claims description 6
- 238000000429 assembly Methods 0.000 claims description 6
- 239000000498 cooling water Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004659 sterilization and disinfection Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 238000012356 Product development Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
The utility model discloses a single-row multi-electron beam scanning assembly and a multi-row multi-electron beam scanning assembly, which comprises a scanning box matched with 2n electron beam generating devices of a single row, 2n scanning magnets matched with the electron beam generating devices, n-1 middle check blocks with cooling functions arranged below the scanning box, and further comprises: a single-row extraction window film arranged at the electron beam output side of the scanning box; and the supporting rods are arranged between the single-row type leading-out window films and provided with cooling functions. The utility model comprises a single-row multi-electron beam scanning component and a multi-row multi-electron beam scanning component, wherein a row of electron beam generating devices are added, and meanwhile, the layout mode of a window film led out from a scanning box is improved, so that the whole electron beam device increases the volume and cost a little while keeping the structure of the scanning box and the vacuum system unchanged and the electron beam leading-out efficiency unchanged, the output electron beam power is doubled, and the production speed is doubled.
Description
Technical Field
The present utility model relates to the field of irradiation. More particularly, the present utility model relates to a single row multiple electron beam scanning assembly and a multiple row multiple electron beam scanning assembly for use in sterilization and curing.
Background
The electron beam irradiation technology can be widely applied to modification and research and development of high polymer materials, semiconductor materials, inorganic materials and metal materials, sterilization, disinfection and other technologies and product development, and good technical effects are achieved.
When the electron accelerator is used for irradiation processing, the electron beam with a small-size cross section is generally required to be scanned and widened to form a strip-shaped beam so as to facilitate irradiation processing of large-size materials. For oversized materials, the electron beam is required to have a larger widening range, and in order to ensure that the volume, the weight and the cost of the scanning box can be effectively controlled, and meanwhile, when the edge electron beam passes through the extraction window film, the loss of the electron beam, the energy deposited on the film, the heating and the service life can be effectively controlled, and the partial structure of the equipment is improved in the prior art, such as the patent names of an integral electron extraction scanning box structure and an electron extraction scanning box parallel structure.
However, the techniques of both of these patents have the following problems: the scanning box adopts a single extraction window, so that the maximum length in the Y direction (the short direction of scanning expansion) is limited, and generally only can be in the range of 40-100 mm, meanwhile, the extraction window film has limited strength, the temperature resistance of the window film is limited, the cooling effect of the window film is limited, the extraction power of the electron beam is limited, and the irradiation or solidification processing rate is influenced.
Disclosure of Invention
It is an object of the present utility model to address at least the above problems and/or disadvantages and to provide at least the advantages described below.
To achieve these objects and other advantages and in accordance with the purpose of the utility model, as embodied and broadly described herein, there is provided a single-row multi-beam scanning module including 2n electron beam generating devices, and a scanning box associated with each electron beam generating device, 2n groups of scanning magnets disposed between the electron beam generating devices and the scanning box to deflect electron beams of each electron beam generating device, further including: n-1 middle check blocks with cooling functions are arranged below the scanning box;
a single-row extraction window film arranged at the electron beam output side of the scanning box;
wherein, 2n electron beam generating devices are arranged in a single row;
and a row of extraction window films are arranged in the electron beam scanning range of each row of electron beam generating devices in space.
And the supporting rods are arranged between the single-row type leading-out window films and provided with cooling functions.
Preferably, the support rods with cooling function are arranged between the single-row type extraction window films.
Preferably, a passage through which cooling water can pass is provided inside the support rod.
A multi-row multi-electron beam scanning device comprises a plurality of single-row multi-electron beam scanning assemblies which are arranged in parallel.
Preferably, the cassettes of each single row of multiple electron beam scanning assemblies are spatially integrated.
Preferably, the multi-row multi-beam scanning device spatially matches the electron beam scanning range of each electron beam generating device.
The utility model at least comprises the following beneficial effects: the utility model improves the layout mode of the extraction window film on the scanning box by adding a row of electron beam generating devices, so that the volume and the cost of the whole electron beam device are increased by a little while the scanning box structure and a set of vacuum system are kept unchanged and the extraction efficiency of the electron beam is kept unchanged, the output power of the electron beam is doubled, and the production speed is doubled.
Additional advantages, objects, and features of the utility model will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the utility model.
Drawings
FIG. 1 is a schematic diagram of a front view of a single row multiple electron beam scanning assembly according to an embodiment of the present utility model;
FIG. 2 is a schematic side view of a single row multiple electron beam scanning assembly according to one embodiment of the present utility model;
FIG. 3 is a schematic side view of a multi-row dual electron beam scanning assembly according to one embodiment of the present utility model;
wherein, 1-electron beam, 2-scanning magnet, 3-middle baffle, 4-extraction window film, 5-irradiated object, 6-electron beam emission device, 7-scanning box, 8-bracing piece.
Detailed Description
The present utility model is described in further detail below with reference to the drawings to enable those skilled in the art to practice the utility model by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
It should be noted that, in the description of the present utility model, the orientation or positional relationship indicated by the term is based on the orientation or positional relationship shown in the drawings, which are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.
Furthermore, in the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be a direct contact of the first and second features, or an indirect contact of the first and second features through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
Fig. 1-2 illustrate a single row multiple electron beam scanning assembly implementation in accordance with the present utility model, including:
n groups of electron beam generating devices 6 arranged in a single row;
a scanning box 7 matched with the electron beam generating device;
2n groups of scanning magnets 2 which are oppositely arranged between the electron beam generating devices and the scanning box and are used for deflecting the electron beams of the electron beam generating devices;
n-1 middle check blocks 3 with cooling functions are arranged below the scanning box;
further comprises: a single-row extraction window film 4 (or referred to as extraction window) provided on the electron beam output side of the scanning box, under which the irradiated object 5 is provided;
wherein, a row of extraction window films corresponds to each row of electron beam scanning ranges of the electron beam generating devices in space (the row refers to the number of grid windows extracted by one electron gun, so that fig. 2 is called single row multiple electron beams). In the scheme, compared with the prior art, the original scanning box is widened by more than one time in the short direction, and the two rows of parallel electron beam emitting devices and the extraction window can be accommodated; on the basis of the original multiple spot electron beam emitting devices arranged in a row and a line, the multiple spot electron beam emitting devices arranged in the same row and a line are added; on the basis of the original extraction windows, a row of parallel extraction windows are added to form a single-row extraction window structure; in practical application, each electron beam emitting device keeps the scanning expansion angle unchanged in the X direction (the long direction of scanning expansion), keeps the extraction length unchanged, and keeps the scanning expansion angle unchanged in the Y direction (the short scanning expansion direction perpendicular to the X direction), and keeps the extraction length unchanged; the electron beam extraction efficiency remains unchanged; compared with the prior art, the scanning box structure and the vacuum system can be kept unchanged, the volume and the cost of the whole electron beam device are increased by a little while the output electron beam power is doubled and the production speed is doubled under the condition that the electron beam extraction efficiency is kept unchanged.
In another embodiment, a supporting rod 8 with a cooling function is arranged between the single-row extraction window films, and a supporting rod for passing cooling water is additionally arranged between the two extraction window films to support and cool the single-row extraction window films;
in another embodiment, the extraction window film can be forced air cooled by a pure air cooling structure, or cooled by a water cooling grid, or cooled by a combination of the two;
if a water cooling mode is adopted, a passage capable of communicating cooling water is arranged in the support rod, and the passage is communicated with an external cooling water circulation system to finish water cooling operation.
If an air cooling mode is adopted, air channels through which cooling air can pass are arranged in the flanges at two sides, air outlet gaps which are communicated with the air channels are arranged on one sides of the flanges matched with the leading-out window films, when the air cooling device is applied, the air channels are communicated with an external air cooling circulation system, and the cooling air in the air channels is forced to sweep the leading-out window films through the air outlet gaps, so that cooling operation is completed.
The multi-row multi-electron beam scanning device shown in fig. 3 comprises a plurality of single-row multi-electron beam scanning assemblies which are arranged in parallel, wherein the width of each single-row multi-electron beam scanning assembly is widened in the short direction of the original scanning box, and the width of each single-row multi-electron beam scanning assembly is based on the number of side-by-side extraction windows and the number of side-by-side electron beam emitting devices which can be installed in a required number; the original scanning box is widened in the short direction, and the width is based on the number of the side-by-side extraction windows and the number of the side-by-side electron beam emission devices which can be installed in a required number; on the basis of the original electron beam emitting devices arranged in a row and a straight shape (namely single row and multiple electron beams), 2-m rows of single-row electron beam emitting devices which are arranged in parallel are added to form a multi-row electron beam emitting device structure. On the basis of the original extraction windows, 2-m rows of identical parallel extraction windows are added to form a multi-row extraction window structure; and each row of electron beam emission devices arranged in the same font in the single arrangement corresponds to one row of extraction windows, and the scheme controls the limited increase of the volume and cost of the whole electron beam device under the condition of only using one vacuum system, thereby realizing the effect of greatly improving the output electron beam power and the production efficiency.
In practical application, the scanning boxes of the single-row multi-electron beam scanning assemblies are designed in an integrated mode in space, namely, a plurality of groups of single-row multi-electron beam scanning assemblies are designed in a side-by-side mode in space so as to be matched with application occasions with different widths in special scenes.
In another embodiment, the multi-row multi-electron beam scanning device is spatially matched with the electron beam scanning range of each electron beam generating device, namely, the electron beams in the multi-group single-row multi-electron beam scanning assembly are subjected to constraint scanning through one scanning box, so that the integration level of the equipment is ensured.
The above embodiments are merely illustrative of a preferred embodiment, but are not limited thereto. In practicing the present utility model, appropriate substitutions and/or modifications may be made according to the needs of the user.
The number of equipment and the scale of processing described herein are intended to simplify the description of the present utility model. Applications, modifications and variations of the present utility model will be readily apparent to those skilled in the art.
Although embodiments of the utility model have been disclosed above, they are not limited to the use listed in the specification and embodiments. It can be applied to various fields suitable for the present utility model. Additional modifications will readily occur to those skilled in the art. Therefore, the utility model is not to be limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.
Claims (6)
1. A single-row multi-electron beam scanning assembly, comprising 2n electron beam generating devices, and a scanning box matched with each electron beam generating device, and 2n groups of scanning magnets oppositely arranged between the electron beam generating devices and the scanning box for deflecting electron beams of each electron beam generating device, characterized in that: n-1 middle check blocks with cooling functions are arranged below the scanning box;
a single-row extraction window film arranged at the electron beam output side of the scanning box;
wherein, 2n electron beam generating devices are arranged in a single row;
and a row of extraction window films are arranged in the electron beam scanning range of each row of electron beam generating devices in space.
2. The single row multiple electron beam scanning assembly of claim 1, wherein support bars with cooling function are disposed between the single row exit window films.
3. The single row multiple electron beam scanning assembly of claim 2, wherein the support rods are internally provided with passages through which cooling water can pass.
4. A multi-row, multi-beam scanning assembly comprising a plurality of single-row, multi-beam scanning assemblies according to any of claims 1-3 arranged in parallel.
5. The multiple row multiple electron beam scanning assembly of claim 4, wherein the cassettes of each single row multiple electron beam scanning assembly are spatially integrated.
6. The multiple row multiple electron beam scanning assembly of claim 4, wherein the multiple row multiple electron beam scanning assembly spatially matches electron beam scanning ranges of the respective electron beam generating devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223538329.2U CN220584938U (en) | 2022-12-29 | 2022-12-29 | Single-row multi-electron-beam scanning assembly and multi-row multi-electron-beam scanning assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223538329.2U CN220584938U (en) | 2022-12-29 | 2022-12-29 | Single-row multi-electron-beam scanning assembly and multi-row multi-electron-beam scanning assembly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220584938U true CN220584938U (en) | 2024-03-12 |
Family
ID=90120269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223538329.2U Active CN220584938U (en) | 2022-12-29 | 2022-12-29 | Single-row multi-electron-beam scanning assembly and multi-row multi-electron-beam scanning assembly |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220584938U (en) |
-
2022
- 2022-12-29 CN CN202223538329.2U patent/CN220584938U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0461776B1 (en) | X-ray analysis apparatus, especially computer tomography apparatus | |
| CN220584938U (en) | Single-row multi-electron-beam scanning assembly and multi-row multi-electron-beam scanning assembly | |
| CN114267848B (en) | Fuel cell bipolar plate of bionic multistage bifurcation flow field and implementation method thereof | |
| CN220307443U (en) | Double-row multi-electron-beam scanning assembly and multi-row multi-electron-beam scanning device | |
| CN113594488B (en) | Air-cooled proton exchange membrane fuel cell metal bipolar plate and fuel cell thereof | |
| Iadarola et al. | Overview on heat loads in the LHC | |
| CA2335441A1 (en) | Cooling rib arrangement for the equalization of the temperature distribution in air cooled stacks | |
| CN104703380A (en) | Single-cavity multi-beam drift tube ion acceleration device | |
| CN102196655A (en) | Multi-filament wide-beam electronic curtain | |
| CN207233409U (en) | A kind of electronics draws scan box structure | |
| CN106783485A (en) | CT system and its cold cathode X-ray tube | |
| SE469305B (en) | PROCEDURE FOR PREPARING HIGH EFFICIENT ION RIDES WITH HIGH EFFICIENCY | |
| CN115313157A (en) | Ionic wind heat dissipation device | |
| CN202711152U (en) | Large-scale heating server cabinet heat dissipation and refrigeration system | |
| CN209822590U (en) | Cooling type cold cathode X-ray tube | |
| CN209563113U (en) | Radiator and power cabinet | |
| CN220753549U (en) | Energy storage battery cabinet and energy storage system | |
| CN201540035U (en) | High-temperature material gas fast injection cooling unit | |
| Welton et al. | The design of high power, external antennas for radio frequency multicusp ion sources | |
| CN220914378U (en) | Cold and hot integrated temperature control partition wall | |
| CN218499485U (en) | Wisdom cloud cabin with accurate directional air supply structure | |
| CN103069533A (en) | Control grid design for an electron beam generating device | |
| CN218125139U (en) | Hierarchical heat dissipation formula bank server rack | |
| CN220476163U (en) | High-quality air cooling heat dissipation based modular structure of low-voltage SVG (static var generator) and APF (active power filter) module | |
| JPS61103525A (en) | High-performance low-energy electron gun for desulfurizing and denitrifying flue gas |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |