CN220568350U - Vacuum cavity leakage detection equipment - Google Patents
Vacuum cavity leakage detection equipment Download PDFInfo
- Publication number
- CN220568350U CN220568350U CN202322196916.6U CN202322196916U CN220568350U CN 220568350 U CN220568350 U CN 220568350U CN 202322196916 U CN202322196916 U CN 202322196916U CN 220568350 U CN220568350 U CN 220568350U
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- Prior art keywords
- mass spectrum
- air
- chamber
- moving
- pipe
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- 238000001514 detection method Methods 0.000 title claims abstract description 22
- 238000001819 mass spectrum Methods 0.000 claims abstract description 57
- 238000007664 blowing Methods 0.000 claims abstract description 21
- 238000004949 mass spectrometry Methods 0.000 claims abstract description 8
- 238000007789 sealing Methods 0.000 claims description 10
- 238000001914 filtration Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 9
- 239000001307 helium Substances 0.000 description 9
- 229910052734 helium Inorganic materials 0.000 description 9
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 9
- 238000005507 spraying Methods 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The utility model discloses vacuum cavity leakage detection equipment, and relates to the technical field of leakage detection equipment. Comprising the following steps: the device comprises a device body, wherein a mass spectrum chamber is fixedly connected inside the device body; the air blowing assembly is arranged in the mass spectrum chamber; the blowing assembly includes: a vent pipe fixedly mounted on the mass spectrometry chamber; the air pump, the air outlet end of the air pump is fixed with the air inlet end of the breather pipe; and the moving assembly is arranged in the mass spectrum chamber. According to the utility model, through the arrangement of the air blowing assembly, the output end of the second motor rotates, so that the moving block moves back and forth, and in the process of moving the moving block back and forth, the air pump is started, so that air enters the inner wall of the mass spectrum chamber from the air jet pipe, and the moving range of the air jet pipe is almost equivalent to the bottom area of the inner part of the mass spectrum chamber due to the rotation and the movement of the air jet pipe, so that the blowing area is further increased, the inner part of the mass spectrum chamber can be fully blown, and the blowing effect is improved.
Description
Technical Field
The utility model relates to the technical field of leakage detection equipment, in particular to vacuum cavity leakage detection equipment.
Background
Vacuum cavity leak detection equipment is a technology for judging whether a vacuum system, a container or a device leaks or not by a proper method and determining the position and the leakage rate of a leakage hole, and a corresponding instrument is called a leak detector.
The utility model provides a "helium mass spectrum leak detector" as disclosed in application number "202021158619.2", includes the workstation, be equipped with the mass spectrum room on the workstation, be equipped with the lid on the mass spectrum room, be equipped with the jetting disturbance subassembly in the mass spectrum room, the jetting disturbance subassembly is including locating air compressor on the workstation, be equipped with in the mass spectrum room with air compressor adopts the jetting subassembly of pipe connection, mass spectrum room one side is equipped with the pressure release unit. After the detection is completed in the mass spectrum chamber, according to the content and the detection times of helium, the jetting disturbance component can be started, compressed air in the air compressor is guided into the mass spectrum chamber and is jetted through the jetting component, residual gas is guided into the pressure relief unit, the residual gas in the mass spectrum chamber is rapidly led out, and the influence on the detection result after helium accumulation is avoided.
Above-mentioned leak detector sprays the mass spectrum indoor through jetting disturbance subassembly, with the leading-in pressure release unit of residual gas, with the indoor residual gas of mass spectrum fast leading-out, the shower nozzle can swing along with the swing board in the above-mentioned jetting disturbance subassembly position, but swing scope is limited, leads to the jetting area limited for the blowing effect is relatively poor, for this reason has proposed vacuum chamber leak hunting equipment.
Disclosure of Invention
The utility model aims to provide vacuum cavity leakage detection equipment so as to solve the problems in the background art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: vacuum cavity leak hunting equipment includes:
the device comprises a device body, wherein a mass spectrum chamber is fixedly connected inside the device body;
the air blowing assembly is arranged in the mass spectrum chamber; the blowing assembly includes:
a vent pipe fixedly mounted on the mass spectrometry chamber;
the air pump, the air outlet end of the air pump is fixed with the air inlet end of the breather pipe;
a moving assembly mounted inside the mass spectrometry chamber;
the first motor is fixedly arranged at the moving end of the moving assembly;
the air ejector is fixedly arranged at the output end of the first motor;
the air outlet end of the rotary joint is fixed with the air inlet end of the air ejector pipe, the rotary joint is fixedly arranged on the moving end of the moving assembly, and the air inlet end of the rotary joint is fixed with the air outlet end of the vent pipe.
Preferably, the moving assembly includes:
the threaded rod, one end of the threaded rod is connected with the inside of the mass spectrum chamber in a rotating way;
the second motor is fixedly arranged in the mass spectrum chamber, and the output end of the second motor is fixed with the other end of the threaded rod;
the inner wall of the moving block is rotationally connected with the outer wall of the threaded rod, the bottom end of the moving block is slidably connected with the mass spectrum chamber, and one side of the moving block is fixed with the first motor.
Preferably, an exhaust pipe is installed at one end of the mass spectrum chamber, a filtering tank is fixedly connected to the air outlet end of the exhaust pipe, and an electric control valve is installed in the exhaust pipe.
Preferably, the top end of the mass spectrum chamber is provided with a sealing cover, the bottom end of the sealing cover is fixedly connected with a sealing ring, and one side of the moving block is fixed with one end of the rotary joint.
Preferably, the inside fixedly connected with guide rail of mass spectrum room, the bottom of movable block passes through guide rail and mass spectrum room sliding connection.
Preferably, the outer wall of the air ejector tube is respectively provided with an air ejector hole, and an electric valve is arranged in the air ejector tube.
Compared with the prior art, the utility model has the beneficial effects that:
the vacuum cavity leak detection equipment, through the setting of subassembly of blowing, the output of No. two motors rotates, thereby make movable block round trip movement, at movable block round trip movement in-process, the air pump starts, make the air enter into the inner wall of mass spectrum room from the jet-propelled pipe, and because the rotation and the removal of jet-propelled pipe, the movable range of jet-propelled pipe can be almost equivalent with the inside bottom area of mass spectrum room, thereby further improved the jetting area, can fully blow the inside of mass spectrum room, improved the effect of blowing.
Simultaneously, through rotary joint's setting, the fixed position between rotary joint and the movable block, rotary joint is used for realizing communicating inside between jet-propelled pipe and the breather pipe simultaneously, because rotary joint's inside self structure for rotary joint can be to the gas-propelled pipe in the rotation air feed, thereby guaranteed that the jet-propelled pipe can jet-propelled smoothly, with this satisfies the jet-propelled pipe and remove and rotate, and at the outside jet-propelled of this in-process, improved the feasibility of the subassembly of blowing.
Drawings
FIG. 1 is an isometric view of the present utility model;
FIG. 2 is a front view of the blowing assembly of the present utility model;
fig. 3 is a partial isometric view of a blowing assembly of the present utility model.
In the figure: 1. an equipment body; 2. an air blowing assembly; 201. a vent pipe; 202. an air pump; 203. a motor I; 204. a gas lance; 205. a rotary joint; 206. a threaded rod; 207. a motor II; 208. a moving block; 3. a mass spectrometry chamber; 4. a filter tank.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The apparatus body 1 refers to a helium mass spectrometer leak detector, which is a special apparatus for leak detection using helium as an indicator gas, and in the leak detection method thereof, for example, vacuum pressure method helium mass spectrometer leak detection and positive pressure method helium mass spectrometer leak detection require a vacuum chamber.
As shown in fig. 1-3, the present utility model provides a technical solution: vacuum cavity leak hunting equipment includes:
the device comprises a device body 1, wherein a mass spectrum chamber 3 is fixedly connected inside the device body 1;
the blowing assembly 2 is arranged inside the mass spectrum chamber 3; the blowing assembly 2 includes:
a breather pipe 201, the breather pipe 201 being fixedly installed on the mass spectrometry chamber 3;
the air pump 202, the air outlet end of the air pump 202 and the air inlet end of the air pipe 201 are fixed;
a moving assembly mounted inside the mass spectrometry chamber 3;
the first motor 203, the first motor 203 is fixedly arranged at the moving end of the moving assembly;
the air ejector tube 204, the air ejector tube 204 is fixedly arranged at the output end of the first motor 203;
the rotary joint 205, the air outlet end of the rotary joint 205 is fixed with the air inlet end of the air jet pipe 204, the rotary joint 205 is fixedly arranged on the moving end of the moving assembly, and the air inlet end of the rotary joint 205 is fixed with the air outlet end of the air pipe 201.
The moving assembly includes:
a threaded rod 206, one end of the threaded rod 206 being rotatably connected to the interior of the mass spectrometry chamber 3;
the second motor 207, the second motor 207 is fixedly arranged in the mass spectrum chamber 3, and the output end of the second motor 207 is fixed with the other end of the threaded rod 206;
the movable block 208, the inner wall of the movable block 208 is rotationally connected with the outer wall of the threaded rod 206, the bottom end of the movable block 208 is slidingly connected with the mass spectrum chamber 3, and one side of the movable block 208 is fixed with the motor 203.
An exhaust pipe is arranged at one end of the mass spectrum chamber 3, the air outlet end of the exhaust pipe is fixedly connected with a filter tank 4, and an electric control valve is arranged in the exhaust pipe.
The top of the mass spectrum chamber 3 is provided with a sealing cover, the bottom of the sealing cover is fixedly connected with a sealing ring, and one side of the moving block 208 is fixed with one end of the rotary joint 205.
The inside of the mass spectrum chamber 3 is fixedly connected with a guide rail, and the bottom end of the moving block 208 is in sliding connection with the mass spectrum chamber 3 through the guide rail.
The outer walls of the air ejector pipes 204 are respectively provided with air ejector holes, and an electric valve is arranged in the ventilating pipe 201.
The output end of the second motor 207 rotates, the threaded rod 206 rotates, the moving block 208 is influenced by the rotation of the threaded rod 206, meanwhile, due to the influence of sliding connection between the moving block 208 and the mass spectrum chamber 3, the moving block 208 moves along the length direction of the threaded rod 206, in the moving process, the air pump 202 is started, so that air enters the vent pipe 201, the rotary joint 205 is used for inputting other devices which rotate or reciprocate from the side of a pipeline, the output end of the first motor 203 rotates through the sealing device for connection discharged from the rotary joint, so that the air spraying pipe 204 rotates, the rotary joint 205 enables air in the vent pipe 201 to enter the rotating air spraying pipe 204 through the rotary joint 205, the rotating and moving of the air spraying pipe 204 can enable the air to be sprayed to all corners in the mass spectrum chamber 3, helium is easier to be discharged, the influence on subsequent detection is avoided, the air is set through the air blowing assembly 2, the output end of the second motor 207 rotates, the moving block 208 moves back and forth, in the moving block 208 moves, the air pump 202 is started, the air enters the inner wall 204 of the mass spectrum chamber 3 from the air spraying chamber 3, the inner wall of the mass spectrum chamber is nearly moves, and the mass spectrum chamber 3 is fully moved, and the mass spectrum area of the inner wall of the air spraying chamber is fully moves, and the mass spectrum chamber is fully moved, the inner wall of the mass spectrum chamber is completely is moved, and the mass spectrum area is completely is moved; through the setting of rotary joint 205, the fixed position between rotary joint 205 and the movable block 208, the inside intercommunication between rotary joint 205 is used for realizing air jet 204 and breather pipe 201 simultaneously, because rotary joint 205 inside self structure for rotary joint 205 can be to the air feed of rotating air jet 204, thereby guaranteed that air jet 204 can jet smoothly, with this satisfies air jet 204 and remove and rotate, and at the outside jet of this in-process, improved the feasibility of blowing subassembly 2.
The electric control valve is opened, so that gas in the mass spectrum chamber 3 is discharged from the exhaust pipe to the filter tank 4, and the filter tank 4 can primarily absorb dust and oil smoke in the gas, reduce pollutants in the mixed gas and reduce air pollution. When the blow module 2 is not in use, the output end of the motor No. 207 rotates, thereby moving the moving block 208 to one side inside the mass spectrometer chamber 3, avoiding affecting the operation of the helium mass spectrometer leak detector.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made hereto without departing from the spirit and scope of the utility model as defined by the appended embodiments and equivalents thereof.
Claims (6)
1. Vacuum cavity leak hunting equipment, its characterized in that includes:
the device comprises a device body (1), wherein a mass spectrum chamber (3) is fixedly connected inside the device body (1);
the blowing component (2), the blowing component (2) is installed in the mass spectrum chamber (3); the blowing assembly (2) comprises:
a vent pipe (201), wherein the vent pipe (201) is fixedly arranged on the mass spectrum chamber (3);
the air pump (202), the air outlet end of the air pump (202) is fixed with the air inlet end of the breather pipe (201);
a moving assembly mounted inside the mass spectrometry chamber (3);
the first motor (203) is fixedly arranged at the moving end of the moving assembly;
the air ejector tube (204), the air ejector tube (204) is fixedly arranged at the output end of the first motor (203);
the rotary joint (205), the air outlet end of the rotary joint (205) is fixed with the air inlet end of the air jet pipe (204), the rotary joint (205) is fixedly arranged on the moving end of the moving assembly, and the air inlet end of the rotary joint (205) is fixed with the air outlet end of the vent pipe (201).
2. The vacuum chamber leak detection apparatus as defined in claim 1, wherein: the moving assembly includes:
a threaded rod (206), one end of the threaded rod (206) is rotationally connected with the inside of the mass spectrum chamber (3);
the second motor (207), the second motor (207) is fixedly arranged in the mass spectrum chamber (3), and the output end of the second motor (207) is fixed with the other end of the threaded rod (206);
the inner wall of the moving block (208) is rotationally connected with the outer wall of the threaded rod (206), the bottom end of the moving block (208) is slidably connected with the mass spectrum chamber (3), and one side of the moving block (208) is fixed with the first motor (203).
3. The vacuum chamber leak detection apparatus as defined in claim 1, wherein: an exhaust pipe is arranged at one end of the mass spectrum chamber (3), a filtering tank (4) is fixedly connected to the air outlet end of the exhaust pipe, and an electric control valve is arranged in the exhaust pipe.
4. The vacuum chamber leak detection apparatus as defined in claim 1, wherein: the top of the mass spectrum chamber (3) is provided with a sealing cover, the bottom of the sealing cover is fixedly connected with a sealing ring, and one side of the moving block (208) is fixed with one end of the rotary joint (205).
5. The vacuum chamber leak detection apparatus as defined in claim 1, wherein: the inside fixedly connected with guide rail of mass spectrum room (3), the bottom of movable block (208) passes through guide rail and mass spectrum room (3) sliding connection.
6. The vacuum chamber leak detection apparatus as defined in claim 1, wherein: the outer wall of the air jet pipe (204) is respectively provided with an air jet hole, and an electric valve is arranged in the breather pipe (201).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322196916.6U CN220568350U (en) | 2023-08-14 | 2023-08-14 | Vacuum cavity leakage detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322196916.6U CN220568350U (en) | 2023-08-14 | 2023-08-14 | Vacuum cavity leakage detection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220568350U true CN220568350U (en) | 2024-03-08 |
Family
ID=90102986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322196916.6U Active CN220568350U (en) | 2023-08-14 | 2023-08-14 | Vacuum cavity leakage detection equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220568350U (en) |
-
2023
- 2023-08-14 CN CN202322196916.6U patent/CN220568350U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |