CN220550263U

CN220550263U - Crucible structure

Info

Publication number: CN220550263U
Application number: CN202321971681.7U
Authority: CN
Inventors: 廖建成; 韩江山
Original assignee: Tongwei Microelectronics Co ltd
Current assignee: Tongwei Microelectronics Co ltd
Priority date: 2023-07-25
Filing date: 2023-07-25
Publication date: 2024-03-01
Anticipated expiration: 2033-07-25

Abstract

The embodiment of the utility model provides a crucible structure, and relates to the technical field of silicon carbide crystal growth. The crucible structure comprises: a crucible body and an inner ring. Wherein, the inner ring detachably sets up in the upper edge region of the inner wall of the crucible body. The inner surface of the inner ring is coated with a corrosion resistant coating. According to the crucible structure, the inner surface of the inner ring is coated with the corrosion-resistant coating, so that the inner ring is high in corrosion resistance, and the inner ring is arranged in a region which is easy to corrode in the crucible structure, so that the corrosion of the crucible structure can be effectively reduced, and the service life of the crucible structure is prolonged. In addition, the inner ring is detachably arranged in the upper edge area, and even if the inner ring is corroded, only the inner ring is required to be independently replaced, so that the damage to the crucible structure is reduced, and the use cost of the crucible structure is greatly reduced.

Description

Crucible structure

Technical Field

The utility model relates to the technical field of silicon carbide crystal growth, in particular to a crucible structure.

Background

Silicon carbide (SiC) is one of the wide bandgap semiconductor materials that has received extensive attention, and has the advantages of low density, large forbidden bandwidth, high breakdown field strength, high saturated electron mobility, high thermal conductivity, good chemical stability, and the like.

In silicon carbide crystal growth techniques, a crucible is used. However, in the research, the gas component is the largest in the contact position of the upper edge of the crucible and the raw material in the silicon carbide crystal growing process, so that the upper edge of the inner wall of the crucible is easily corroded, and the service life of the crucible is reduced.

Disclosure of Invention

The utility model aims to provide a crucible structure which can effectively reduce the corrosion of the crucible structure and prolong the service life of the crucible structure.

Embodiments of the present utility model are implemented as follows:

in a first aspect, the present utility model provides a crucible structure comprising:

a crucible body, and a plurality of metal tubes,

the inner ring is detachably arranged in the upper edge area of the inner wall of the crucible body;

the inner surface of the inner ring is coated with a corrosion resistant coating.

In an alternative embodiment, the inner wall of the crucible body is provided with an annular first bearing platform at the lower end of the upper edge region, and the inner ring is placed on the first bearing platform. The inner ring is arranged on the first bearing platform, so that the inner ring is not easy to fall off and is convenient to install; when the inner ring is detached, the inner ring is only required to be taken out of the first bearing platform, and the inner ring is quite convenient to detach.

In an alternative embodiment, the crucible structure further comprises a crucible cover;

the inner wall of the crucible body is provided with a matching part, the matching part is matched with the crucible cover, and the inner ring is adjacent to the matching part and is positioned below the matching part.

Through setting up the inner ring in the position that is close to the cooperation portion, and set up in the below of cooperation portion, can make the inner ring set up in the crucible structure in the region that is corroded easily as far as like this, improve the anticorrosive effect of crucible structure.

In an alternative embodiment, the upper end face of the inner ring is not higher than the bottom plane of the mating portion. When in use, the height of the inner ring is actually matched with the upper surface of the silicon carbide raw material (powder), so that the upper surface of the powder is higher than the lower end surface of the inner ring and lower than the upper end surface of the inner ring when in use. In practical application, the upper end face of the inner ring is close to the bottom plane of the matching part, but not higher than the bottom plane of the matching part, so that the inner ring is ensured not to exceed the bottom plane of the matching part.

In an alternative embodiment, the mating portion is an upper thread, and the outer diameter of the inner ring is no greater than the inner diameter of the upper thread; and/or the number of the groups of groups,

the inner diameter of the inner ring is the same as the inner diameter of the crucible body.

The outer diameter of the inner ring is not larger than the inner diameter of the upper edge screw thread, so that the inner ring can be conveniently taken out during disassembly. Through setting up the internal diameter of inner ring with the internal diameter of crucible body is the same, even add the inner ring like this, also do not influence the original performance of crucible structure, when guaranteeing long brilliant effect, improved corrosion-resistant ability.

In an alternative embodiment, a gap is provided between the outer peripheral surface of the inner ring and the upper rim region.

The gap between the outer peripheral surface of the inner ring and the upper edge area is arranged, so that the inner ring is easier to take out when being disassembled.

In an alternative embodiment, the height of the inner ring is not less than 10mm.

Through setting up the height of inner ring to be not less than 10mm, the height of inner ring is so not too little for the height of inner ring suits with carborundum raw materials upper surface, and the powder upper surface is higher than the lower terminal surface of inner ring when further guaranteeing to use, and is less than the up end of inner ring.

In an alternative embodiment, the corrosion resistant coating is a TaC coating or a WC coating.

By adopting the TaC coating or the WC coating, the corrosion resistance of the inner ring can be effectively improved.

In an alternative embodiment, the height of the upper rim region is the same as the height of the inner ring.

Through setting the height of the upper edge area to be the same as the height of the inner ring, the inner ring can fully play a role in corrosion resistance, and the service life of the crucible structure is prolonged.

In an alternative embodiment, the crucible structure further comprises a baffle;

the inner peripheral surface of the inner ring is provided with a second bearing platform, and the partition board is arranged on the second bearing platform;

the baffle is annular, the center of baffle is provided with the center hole.

Through setting up the baffle and setting up the central hole on the baffle for the central hole of baffle is used for supplying the gaseous passing through of raw materials sublimation, consequently can concentrate raw materials gas in the long brilliant region of crucible cover and carry out long brilliant. In addition, the baffle is placed on the second cushion cap, so that the installation of the baffle is convenient, and when the raw materials are placed, the upper surface of the raw materials does not exceed the second cushion cap of the inner peripheral surface of the inner ring.

The crucible structure provided by the embodiment of the utility model has the beneficial effects that: according to the crucible structure, the inner surface of the inner ring is coated with the corrosion-resistant coating, so that the inner ring is high in corrosion resistance, and the inner ring is arranged in a region which is easy to corrode in the crucible structure, so that the corrosion of the crucible structure can be effectively reduced, and the service life of the crucible structure is prolonged. In addition, the inner ring is detachably arranged in the upper edge area, and even if the inner ring is corroded, only the inner ring is required to be independently replaced, so that the damage to the crucible structure is reduced, and the use cost of the crucible structure is greatly reduced.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a cross-sectional structure of a crucible structure according to an embodiment of the present utility model;

FIG. 2 is a schematic view of an inner ring of a crucible structure in an exploded state according to an embodiment of the present utility model;

fig. 3 is a schematic structural view of an inner ring of a crucible structure provided in an embodiment of the present utility model in an installed state.

Icon:

10-crucible structure;

100-crucible body; 110-upper edge region; 120-a first bearing platform; 130-mating portion;

200-an inner ring; 210-a corrosion-resistant coating; 220-a second bearing platform;

300-crucible cover;

400-separator; 410-central hole.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

As shown in the background art, silicon carbide (SiC) is one of wide bandgap semiconductor materials that is receiving extensive attention, and has the advantages of low density, large forbidden bandwidth, high breakdown field strength, high saturated electron mobility, high thermal conductivity, good chemical stability, and the like. In silicon carbide crystal growth techniques, a crucible is used. However, the designer of the present utility model found in the study that the gas component was most likely to corrode the upper edge of the inner wall of the crucible and reduce the life of the crucible because the gas component was most rapidly and at the contact point with the raw material during the growth of silicon carbide.

Referring to fig. 1-3, an embodiment of the present utility model provides a crucible structure 10, the crucible structure 10 including a crucible body 100 and an inner ring 200. Wherein the inner ring 200 is detachably disposed at the upper edge region 110 of the inner wall of the crucible body 100. The inner surface of the inner ring 200 is coated with a corrosion resistant coating 210.

The upper edge region 110 is a region where the velocity and flow rate are the greatest where the gas contacts the raw material in the crucible structure 10, and the position of the upper edge region 110 is very easily corroded.

According to the crucible structure 10, the inner surface of the inner ring 200 is coated with the corrosion-resistant coating 210, so that the inner ring 200 is high in corrosion resistance, and the inner ring 200 is arranged in a region which is easy to corrode in the crucible structure 10, so that the corrosion of the crucible structure 10 can be effectively reduced, and the service life of the crucible structure 10 is prolonged. In addition, the inner ring 200 is detachably arranged in the upper edge area 110, and even if the inner ring 200 is corroded, only the inner ring 200 needs to be replaced independently, so that the damage to the crucible structure 10 is reduced, and the use cost of the crucible structure 10 is greatly reduced.

It should be noted that the inner ring 200 may alternatively have a circular ring shape. The material of the corrosion-resistant coating 210 is not particularly limited as long as it is capable of satisfying the high temperature resistance and corrosion resistance in the crucible body 100. Alternatively, the corrosion-resistant coating 210 is a TaC coating or a WC coating. By adopting the TaC coating or the WC coating, the high temperature resistance can be realized, and the corrosion resistance of the inner ring 200 can be effectively improved.

In addition, the inner ring 200 is a replaceable and detachable structure, and the detachable connection manner of the inner ring 200 and the crucible body 100 is not particularly limited. In the present utility model, in order to facilitate the installation and removal of the inner ring 200, the inner ring 200 is directly placed.

As an example, the inner wall of the crucible body 100 is provided with a ring-shaped first bearing cap 120 at the lower end of the upper edge region 110, and the inner ring 200 is placed on the first bearing cap 120. By placing the inner ring 200 on the first bearing platform 120, the inner ring 200 is not easy to fall off and is convenient to install; when the inner ring 200 is detached, the inner ring 200 is only required to be taken out from the first bearing platform 120, and the detachment is very convenient.

In addition, the crucible structure 10 further includes a crucible cover 300, the inner wall of the crucible body 100 is provided with a fitting portion 130, the fitting portion 130 is fitted with the crucible cover 300, and the inner ring 200 is disposed adjacent to the fitting portion 130 and below the fitting portion 130.

By disposing the inner ring 200 adjacent to the mating portion 130 and below the mating portion 130, the inner ring 200 can be disposed in a region of the crucible structure 10 that is likely to be corroded as much as possible, thereby improving the corrosion resistance of the crucible structure 10.

In addition, after the crucible cover 300 is engaged with the engaging portion 130, the crucible cover 300 limits the inner ring 200 between the crucible cover 300 and the first support base 120, so that a good limiting effect can be achieved on the inner ring 200.

In an alternative embodiment, the upper end surface of the inner ring 200 is not higher than the bottom plane of the mating portion 130. In use, the height of the inner ring 200 is substantially adapted to the upper surface of the silicon carbide material (powder) to ensure that the upper surface of the powder is higher than the lower end surface of the inner ring 200 and lower than the upper end surface of the inner ring 200 in use. In practical application, the upper end surface of the inner ring 200 is close to the bottom plane of the mating portion 130, but not higher than the bottom plane of the mating portion 130, so as to ensure that the upper end surface does not exceed the bottom plane.

Optionally, the mating portion 130 is an upper thread for mating with an external thread on the crucible cover 300. The outer diameter of the inner ring 200 is no greater than the inner diameter of the upper thread; and/or the inner diameter of the inner ring 200 is the same as the inner diameter of the crucible body 100.

By providing the outer diameter of the inner ring 200 not greater than the inner diameter of the upper thread, removal of the inner ring 200 during disassembly is facilitated. By arranging the inner diameter of the inner ring 200 to be the same as the inner diameter of the crucible body 100, even if the inner ring 200 is additionally arranged, the original use performance of the crucible structure 10 is not affected, and the corrosion resistance is improved while the crystal growth effect is ensured.

Additionally, in an alternative embodiment, there is a gap between the outer peripheral surface of the inner ring 200 and the upper rim region 110.

By providing a gap between the outer peripheral surface of the inner ring 200 and the upper rim region 110, the inner ring 200 is more easily removed when detached.

In an alternative embodiment, the height of the inner ring 200 is not less than 10mm.

By setting the height of the inner ring 200 to be not less than 10mm, the height of the inner ring 200 is not too small, so that the height of the inner ring 200 is adapted to the upper surface of the silicon carbide raw material, and the upper surface of the powder is higher than the lower end surface of the inner ring 200 and lower than the upper end surface of the inner ring 200 during use.

In an alternative embodiment, the height of the upper rim region 110 is the same as the height of the inner ring 200.

By setting the height of the upper edge region 110 to be the same as the height of the inner ring 200, the inner ring 200 can be made sufficiently corrosion-resistant, and the service life of the crucible structure 10 can be improved.

In an alternative embodiment, the crucible structure 10 further includes a baffle 400. The second bearing 220 is provided on the inner circumferential surface of the inner ring 200, and the spacer 400 is placed on the second bearing 220. The partition 400 is ring-shaped, and a center hole 410 is provided at the center of the partition 400.

By providing the partition 400 and providing the central hole 410 on the partition 400, the central hole 410 of the partition 400 is used for passing the sublimated gas of the raw material, so that the raw material gas can be concentrated in the crystal growth region of the crucible cover 300 for crystal growth. In addition, the partition 400 is placed on the second cap 220, so that the installation of the partition 400 is facilitated, and the upper surface of the raw material does not exceed the second cap 220 of the inner circumferential surface of the inner ring 200 when the raw material is placed.

In summary, according to the crucible structure 10 provided by the embodiment of the utility model, the inner ring 200 is provided with the corrosion-resistant coating 210 on the inner surface of the inner ring 200, so that the inner ring 200 has strong corrosion resistance, and the inner ring 200 is arranged in the region of the crucible structure 10 which is easy to corrode, so that the corrosion of the crucible structure 10 can be effectively reduced, and the service life of the crucible structure 10 is prolonged. In addition, the inner ring 200 is detachably arranged in the upper edge area 110, and even if the inner ring 200 is corroded, only the inner ring 200 needs to be replaced independently, so that the damage to the crucible structure 10 is reduced, and the use cost of the crucible structure 10 is greatly reduced.

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A crucible structure, comprising:

a crucible body (100) and a method for manufacturing the same,

an inner ring (200), wherein the inner ring (200) is detachably arranged on an upper edge area (110) of the inner wall of the crucible body (100);

the inner surface of the inner ring (200) is coated with a corrosion resistant coating (210).

2. The crucible structure according to claim 1, characterized in that the inner wall of the crucible body (100) is provided with a ring-shaped first abutment (120) at the lower end of the upper rim area (110), the inner ring (200) being placed on the first abutment (120).

3. The crucible structure according to claim 1 or 2, characterized in that the crucible structure (10) further comprises a crucible cover (300);

the inner wall of the crucible body (100) is provided with a matching part (130), the matching part (130) is matched with the crucible cover (300), and the inner ring (200) is adjacent to the matching part (130) and is positioned below the matching part (130).

4. A crucible structure according to claim 3, wherein the upper end face of the inner ring (200) is not higher than the bottom plane of the mating portion (130).

5. A crucible structure according to claim 3, wherein the mating portion (130) is an upper thread, the outer diameter of the inner ring (200) being no greater than the inner diameter of the upper thread; and/or the number of the groups of groups,

the inner diameter of the inner ring (200) is the same as the inner diameter of the crucible body (100).

6. The crucible structure according to claim 1, characterized in that there is a gap between the outer peripheral surface of the inner ring (200) and the upper rim region (110).

7. The crucible structure according to claim 1, characterized in that the height of the inner ring (200) is not less than 10mm.

8. The crucible structure according to claim 1, characterized in that the corrosion resistant coating (210) is a TaC coating or a WC coating.

9. The crucible structure according to claim 1, characterized in that the height of the upper edge region (110) is the same as the height of the inner ring (200).

10. The crucible structure according to claim 1, characterized in that the crucible structure (10) further comprises a baffle plate (400);

the inner peripheral surface of the inner ring (200) is provided with a second bearing platform (220), and the partition plate (400) is arranged on the second bearing platform (220);

the partition board (400) is annular, and a central hole (410) is formed in the center of the partition board (400).