CN220543854U - Single wafer washing basket loading equipment - Google Patents
Single wafer washing basket loading equipment Download PDFInfo
- Publication number
- CN220543854U CN220543854U CN202322032703.XU CN202322032703U CN220543854U CN 220543854 U CN220543854 U CN 220543854U CN 202322032703 U CN202322032703 U CN 202322032703U CN 220543854 U CN220543854 U CN 220543854U
- Authority
- CN
- China
- Prior art keywords
- threaded
- bevel gear
- lateral wall
- washing basket
- screw thread
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000005406 washing Methods 0.000 title claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 abstract description 28
- 238000004140 cleaning Methods 0.000 abstract description 14
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses single-wafer water-washing basket-loading equipment, which comprises the following components: the base, the dead lever is all installed in base upper end four corners, and is a plurality of the dead lever lateral wall installs a plurality of horizontal pole, and is a plurality of the horizontal pole inner wall is all installed and is connected with two first threaded rods, and is a plurality of first threaded rod outside equal threaded connection has first screw thread piece, and is a plurality of first screw thread piece lateral wall fixedly connected with movable rod, a plurality of the equal swivelling joint of movable rod inner wall has two second threaded rods, and is a plurality of the equal threaded connection of second threaded rod outside has the second screw thread piece, and is a plurality of the locating piece is all installed to second screw thread piece lateral wall, and is a plurality of the constant head tank has all been seted up to the locating piece lateral wall. Through the structure, wafers with different sizes can be positioned, and the influence on the working efficiency caused by frequent replacement of the cleaning basket is avoided.
Description
Technical Field
The utility model relates to the technical field of single wafer cleaning, in particular to single wafer water-washing basket-loading equipment.
Background
In the wafer processing process, the wafer is generally required to be cleaned for a plurality of times, the wafer is generally firstly placed in a cleaning basket, and then the cleaning basket with the wafer is put into a cleaning tank, and the cleaning tank is internally provided with a cleaning agent and an ultrasonic generating device.
When the wafer is cleaned by the cleaning basket, the wafer is required to be placed in the cleaning basket for positioning, and at present, the size of the existing cleaning basket is in a fixed state, so that different cleaning baskets are required to be replaced when the wafers with different sizes are positioned, and the working efficiency is easy to influence when the wafer cleaning basket is used. And the utilization ratio is relatively low.
Disclosure of Invention
The utility model aims to provide single-wafer water washing basket equipment, which solves the problems that in the prior art, the size of a washing basket is in a fixed state, different washing baskets are required to be replaced when wafers with different sizes are positioned, and the working efficiency is easy to influence when the single-wafer water washing basket equipment is used. And the utilization ratio is lower.
To achieve the above object, there is provided a single wafer water-washing basket apparatus comprising: the base, the dead lever is all installed in base upper end four corners, and a plurality of the dead lever lateral wall installs a plurality of horizontal pole, and a plurality of the horizontal pole inner wall is all installed and is connected with two first threaded rods, and is a plurality of the outside equal threaded connection of first threaded rod has first screw thread piece, and is a plurality of first screw thread piece lateral wall fixedly connected with movable rod, a plurality of the equal rotation of movable rod inner wall is connected with two second threaded rods, and is a plurality of the outside equal threaded connection of second threaded rod has the second screw thread piece, and is a plurality of the locating piece is all installed to second screw thread piece lateral wall, and a plurality of the constant head tank has all been seted up to the locating piece lateral wall, utilizes first threaded rod and first screw thread to cooperate, and reuse second threaded rod cooperates with the second screw thread piece for adjust the position of locating piece, can carry out the centre gripping to different size wafers fixedly, thereby ensure work efficiency, avoid frequently changing and wasing the basket and influencing work efficiency.
According to the single-wafer washing basket device, the second bevel gears are arranged at one ends of the first threaded rods, the first knobs are arranged on the side walls of the cross rods, one ends of the first knobs extend to the inside through the side walls of the cross rods and are provided with the first bevel gears, and the first bevel gears and the second bevel gears are matched to enable the two first threaded rods to rotate simultaneously.
According to the single-wafer washing basket device, a plurality of fourth bevel gears are arranged at one ends of the second threaded rods, a plurality of second knobs are arranged on the side walls of the movable rods, one ends of the second knobs penetrate through the side walls of the movable rods and extend to the inside, third bevel gears are arranged on the second knobs, and the third bevel gears and the fourth bevel gears are matched with each other to drive the two second threaded rods to rotate simultaneously.
According to the single-wafer water-washing basket device, the first bevel gear and the second bevel gear are meshed with each other.
According to the single-wafer water-washing basket device, the third bevel gear is meshed with the fourth bevel gear.
According to the single-wafer washing basket equipment, the side walls of the positioning blocks are matched with each other, the inner walls of the positioning blocks are provided with the sponge, the positioning blocks are used for positioning wafers, and the sponge is used for protecting the positioning blocks when clamping the wafers.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
The utility model aims to provide single-wafer water-washing basket-loading equipment, which mainly has the innovation points that:
according to the utility model, the first knob is utilized to drive the first bevel gear and the second bevel gear to rotate, so that the first threaded rod is driven to rotate, the first threaded block moves outside the first threaded rod, the second knob is utilized to drive the third bevel gear and the fourth bevel gear to rotate, the second threaded block drives the positioning block to move, wafers with different sizes can be positioned, and the influence on the working efficiency caused by frequent replacement of the cleaning basket is avoided.
Drawings
The utility model is further described below with reference to the drawings and examples;
FIG. 1 is a perspective view of a single wafer water-washing basket apparatus of the present utility model;
FIG. 2 is a cross-sectional view of a single wafer water-washing basket apparatus of the present utility model;
FIG. 3 is an enlarged view of the utility model at A in FIG. 2;
fig. 4 is an enlarged view of the present utility model at B in fig. 2.
Legend description:
1. a base; 2. a fixed rod; 3. a cross bar; 4. a movable rod; 5. a first threaded block; 6. a first threaded rod; 7. a second threaded block; 8. a second threaded rod; 9. a first knob; 10. a first bevel gear; 11. a second bevel gear; 12. a second knob; 13. a third bevel gear; 14. a fourth bevel gear; 15. and (5) positioning blocks.
Detailed Description
Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.
Referring to fig. 1-4, a single wafer water-washing basket apparatus according to an embodiment of the present utility model includes: the base 1, dead lever 2 is all installed in base 1 upper end four corners, dead lever 2 is provided with 4, and the lateral wall is fixed with the both ends of two horizontal poles 3 respectively, a plurality of horizontal poles 3 are installed to a plurality of dead lever 2 lateral wall, horizontal pole 3 both ends respectively with the lateral wall fixed connection of dead lever 2, a plurality of horizontal pole 3 inner walls all install and are connected with two first threaded rods 6, the outside equal threaded connection of a plurality of first threaded rods 6 has first screw thread piece 5 for drive movable rod 4 and remove in opposite directions, a plurality of first screw thread piece 5 lateral wall fixedly connected with movable rod 4, a plurality of movable rod 4 inner wall equal rotation is connected with two second threaded rods 8, a plurality of second threaded rods 8 outside equal threaded connection has second screw thread piece 7, be used for driving locating piece 15 and remove in opposite directions, locating piece 15 is all installed to a plurality of second threaded piece 7 lateral walls, the constant head tank has all been seted up to a plurality of locating piece 15 lateral walls, the constant head tank cooperates with the lateral wall of wafer, be used for fixing a position the wafer.
The second bevel gears 11 are all installed to a plurality of first threaded rods 6 one end, first knob 9 is all installed to a plurality of horizontal pole 3 lateral walls, a plurality of first knob 9 one end all extends to inside and installs first bevel gear 10 through horizontal pole 3 lateral walls, utilize first bevel gear 10 and second bevel gear 11 to drive two first threaded rods 6 and rotate simultaneously, fourth bevel gear 14 is all installed to a plurality of second threaded rods 8 one end, second knob 12 is all installed to a plurality of movable rod 4 lateral walls, a plurality of second knob 12 one end all extends to inside and installs third bevel gear 13 through movable rod 4 lateral walls, first bevel gear 10 and second bevel gear 11 intermesh, third bevel gear 13 intermesh with fourth bevel gear 14, a plurality of locating piece 15 lateral walls mutually support, a plurality of locating piece 15 inner walls all install the sponge for protect the wafer.
Working principle: when the wafer cleaning device is used, the first rotary knob 9 is utilized to drive the first bevel gear 10 and the second bevel gear 11 to rotate according to the size of the wafer, so that the first threaded rod 6 is driven to rotate, the first threaded block 5 is enabled to move outside the first threaded rod 6, the second rotary knob 12 is utilized to drive the third bevel gear 13 and the fourth bevel gear 14 to rotate, the second threaded block 7 is enabled to drive the positioning block 15 to move, the side wall of the wafer is matched with the inside of the positioning block 15, wafers with different sizes can be positioned, and the influence on the working efficiency caused by frequent replacement of the cleaning basket is avoided.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.
Claims (6)
1. A single wafer water-washing basket apparatus, comprising: base (1), dead lever (2) are all installed in base (1) upper end four corners, and a plurality of dead lever (2) lateral wall installs a plurality of horizontal pole (3), and is a plurality of horizontal pole (3) inner wall is all installed and is connected with two first threaded bars (6), and is a plurality of first threaded bar (6) outside equal threaded connection has first screw thread piece (5), and is a plurality of first screw thread piece (5) lateral wall fixedly connected with movable rod (4), a plurality of all rotate on movable rod (4) inner wall and be connected with two second threaded bars (8), a plurality of equal threaded connection of second threaded bar (8) outside second threaded piece (7), a plurality of locating piece (15) are all installed to second threaded piece (7) lateral wall, and a plurality of locating piece (15) lateral wall has all seted up the constant head tank.
2. Single-wafer water-washing basket apparatus according to claim 1, characterized in that a second bevel gear (11) is mounted at one end of each of the plurality of first threaded rods (6), a first knob (9) is mounted at one end of each of the plurality of cross rods (3), and a first bevel gear (10) is mounted at one end of each of the plurality of first knobs (9) extending through the side walls of the cross rods (3) to the inside.
3. A single wafer water washing basket apparatus according to claim 1 wherein a fourth bevel gear (14) is mounted at one end of each of the plurality of second threaded rods (8), a second knob (12) is mounted at each of the plurality of movable rods (4) side walls, and a third bevel gear (13) is mounted at one end of each of the plurality of second knobs (12) extending through the movable rods (4) side walls to the inside.
4. A single wafer water basket apparatus according to claim 2 wherein the first bevel gear (10) intermeshes with the second bevel gear (11).
5. A single-wafer water-washing basket apparatus according to claim 3, characterized in that the third bevel gear (13) is intermeshed with the fourth bevel gear (14).
6. The single-wafer water-washing basket device according to claim 1, wherein the side walls of the positioning blocks (15) are mutually matched, and the inner walls of the positioning blocks (15) are provided with sponges.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322032703.XU CN220543854U (en) | 2023-07-31 | 2023-07-31 | Single wafer washing basket loading equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322032703.XU CN220543854U (en) | 2023-07-31 | 2023-07-31 | Single wafer washing basket loading equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220543854U true CN220543854U (en) | 2024-02-27 |
Family
ID=89960494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322032703.XU Active CN220543854U (en) | 2023-07-31 | 2023-07-31 | Single wafer washing basket loading equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220543854U (en) |
-
2023
- 2023-07-31 CN CN202322032703.XU patent/CN220543854U/en active Active
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| GR01 | Patent grant |