CN220543853U

CN220543853U - Wafer storage basket and storage device

Info

Publication number: CN220543853U
Application number: CN202322022888.6U
Authority: CN
Inventors: 王久峰
Original assignee: Jilin Sino Microelectronics Co Ltd
Current assignee: Jilin Sino Microelectronics Co Ltd
Priority date: 2023-07-28
Filing date: 2023-07-28
Publication date: 2024-02-27
Anticipated expiration: 2033-07-28

Abstract

The application discloses a wafer storage basket and a storage device, and relates to the technical field of wafer storage. The device is used for solving the problems that when wafers are stored in the prior art, the isolating pieces arranged between the wafers are directly contacted with the surfaces of the wafers, so that the isolating pieces possibly pollute the wafers, and the packaging quality of the wafers is affected. The wafer storage basket comprises a frame body, a placement opening is formed in the frame body, an accommodating space communicated with the placement opening is further formed in the frame body, a plurality of placement grooves are sequentially formed in the inner wall of the accommodating space from bottom to top, the placement grooves are used for placing wafers, and the distance between every two adjacent placement grooves is larger than the thickness of the wafers. Compared with the prior art, the wafer is not required to be isolated by the isolating piece, so that the wafer placed in the placing groove is not easy to be stained, and the packaging quality of the wafer is not easy to be affected.

Description

Wafer storage basket and storage device

Technical Field

The application relates to the technical field of wafer storage, in particular to a wafer storage basket and a wafer storage device.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, the original material is silicon, high-purity polycrystalline silicon is dissolved and then is doped with silicon crystal seeds, then the silicon crystal seeds are slowly pulled out to form cylindrical monocrystalline silicon, a silicon crystal bar is ground, polished and sliced to form a silicon wafer, namely the wafer, and the silicon wafer needs to be stored in the production process of the wafer.

In the prior art, a plurality of wafers are stacked in sequence, and in order to prevent the wafers from being scratched due to mutual contact, spacers are arranged between adjacent wafers, and the wafers are separated by the spacers, so that the mutual scratch between the wafers is reduced.

However, the spacers disposed between the wafers are in direct contact with the surfaces of the wafers, so that the spacers may contaminate the surfaces of the wafers, thereby affecting the quality of the package to the wafers.

Disclosure of Invention

The present utility model provides a wafer storage basket and a storage device, and aims to solve the technical problem that when wafers are stored in the prior art, spacers arranged between the wafers are directly contacted with the surfaces of the wafers, so that the wafers may be stained by the spacers, and the packaging quality of the wafers is affected.

To solve the above technical problem, in a first aspect, the present application provides a wafer storage basket, including:

the frame body, it has the opening of placing to open on the frame body, still be equipped with in the frame body with place the accommodation space of opening intercommunication, be equipped with a plurality of standing grooves in proper order from the bottom up on accommodation space's the inner wall, the standing groove is used for placing the wafer, adjacent two the distance between the standing groove is greater than the thickness of wafer.

In one possible embodiment, the frame body includes a first frame, a second frame, and a connecting member connected between the first frame and the second frame; the placing groove comprises a first groove and a second groove;

the first grooves are sequentially formed in the inner wall of the first frame from bottom to top, the second grooves are sequentially formed in the inner wall of the second frame from bottom to top, and the first grooves and the second grooves are in one-to-one correspondence.

In one possible embodiment, the connecting member includes a connecting plate, and the connecting plate is mounted between the first frame and the second frame by a fixing member.

In one possible implementation manner, the fixing piece comprises fixing screws, at least two groups of fixing holes are formed in the connecting plate, the first frame and the second frame respectively correspond to at least one group of fixing holes, and the fixing screws penetrate through the fixing holes and fix the connecting plate on the first frame and the second frame.

In a possible embodiment, each set of the fixing holes includes at least two locking holes, and at least two of the locking holes are arranged in a direction from the first frame to the second frame.

In one possible embodiment, the wafer storage frame further includes a baffle plate mounted in the placement groove, the wafer being placed on the baffle plate.

In one possible embodiment, the top surface of the baffle is provided with at least three supporting protrusions, and the centers of the three supporting protrusions are not located on the same straight line.

In one possible embodiment, the wafer storage frame further comprises a handle disposed on an outer surface of the frame body.

In one possible implementation manner, the wafer storage frame further includes a protective cover, a connection protrusion is provided on the protective cover, a connection groove is provided on the frame body, and the connection protrusion is clamped in the connection groove, so that the protective cover is mounted on the frame body and covers at least part of the placement opening.

In a second aspect, the present application provides a wafer storage device comprising a wafer storage basket as described herein.

Compared with the prior art, the application has the following beneficial effects:

the embodiment of the application provides a wafer storage basket and storage device, the wafer storage basket includes the framework, it has the placing opening to open on the framework, still be equipped with in the framework with place the accommodation space of opening intercommunication, be equipped with a plurality of standing grooves on accommodation space's the inner wall from the bottom up in proper order, the standing groove is used for placing the wafer, adjacent two distance between the standing groove is greater than the thickness of wafer.

That is, when the wafers are stored, the wafers to be stored are placed in the placing grooves, one wafer is placed in each placing groove, and as the distance between two adjacent placing grooves is larger than the thickness of the wafers, the wafers placed in the placing grooves cannot be contacted, so that the wafers placed in the placing grooves are not easy to be stained, and the packaging quality of the wafers is not easy to be affected.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered limiting the scope, and that other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic perspective view of a wafer storage basket according to an embodiment of the present disclosure;

fig. 2 is a schematic front cross-sectional structure of a frame provided in an embodiment of the present application;

FIG. 3 is a schematic cross-sectional view of the structure at A-A in FIG. 2 provided in an embodiment of the present application;

fig. 4 is a schematic view of a back structure of a frame provided in an embodiment of the present application;

fig. 5 is a schematic top sectional view of a protective cover provided on a frame according to an embodiment of the present application;

fig. 6 is a schematic top sectional structure of a frame provided with a connecting groove according to an embodiment of the present disclosure;

fig. 7 is a schematic top sectional structure of a connection protrusion provided on a protective cover according to an embodiment of the present application.

Description of the drawings: 1. a frame; 11. a first frame; 12. a second frame; 2. a placement groove; 21. a first groove; 22. a second groove; 3. a connecting piece; 4. an accommodation space; 5. a baffle; 51. a supporting protrusion; 6. a handle; 7. a fixing member; 8. a fixing hole; 81. a locking hole; 9. a protective cover; 91. a connection protrusion; 10. and the connecting groove.

Detailed Description

For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present application, it should be noted that the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and are not to be construed as indicating or implying relative importance.

Referring to fig. 1, the application provides a wafer storage basket, the wafer storage basket includes framework 1, it has the opening of placing to open on the framework 1, still be equipped with in the framework 1 with place the accommodation space 4 of opening intercommunication, be equipped with a plurality of standing grooves 2 on the inner wall of accommodation space 4 in proper order from the bottom up, standing groove 2 is used for placing the wafer, adjacent two distance between standing groove 2 is greater than the thickness of wafer.

The material of the frame body 1 can be rubber, the wafer can be arranged on the steel ring through the adhesive film, then the steel ring is placed in the placing groove 2, the shape of the steel ring is not limited to a round shape, and the steel ring can be set into other shapes according to actual demands.

Based on the above design, when storing the wafer, will have the steel ring of wafer to place in standing groove 2 through placing the opening, every standing groove 2 places a wafer, because the distance between two adjacent standing grooves 2 is greater than the thickness of wafer, consequently, can not contact between the wafer of placing in standing groove 2. Compared with the prior art, the wafer does not need to be isolated by the isolating piece contacted with the wafer, so that the wafer placed in the placing groove 2 is not easy to be stained, and the packaging quality of the wafer is not easy to be influenced.

In some embodiments, referring to fig. 1-3, the frame 1 includes a first frame 11, a second frame 12, and a connecting member 3 connected between the first frame 11 and the second frame 12; the placement groove 2 comprises a first groove 21 and a second groove 22; the first grooves 21 are sequentially formed in the inner wall of the first frame 11 from bottom to top, the second grooves 22 are sequentially formed in the inner wall of the second frame 12 from bottom to top, and the first grooves 21 and the second grooves 22 are in one-to-one correspondence.

The corresponding first groove 21 and the corresponding second groove 22 are mutually communicated and are positioned on the same horizontal plane, and the edge of the steel ring with the wafer is placed in the corresponding first groove 21 and second groove 22. When the wafers with different sizes are required to be stored, the connecting pieces 3 with different sizes can be selected to be connected between the first frame 11 and the second frame 12, and the connecting pieces 3 can also be connected at different positions of the first frame 11 and the second frame 12 so as to adjust the size of the accommodating space 4, so that the wafers with different sizes can be stored under different conditions through the same storage frame.

In some embodiments, referring again to fig. 3, the connecting member 3 includes a connecting plate, and the connecting plate is mounted between the first frame 11 and the second frame 12 by a fixing member 7. The connecting plate may be made of rubber or plastic, and is fixed on the first frame 11 and the second frame 12 by the fixing piece 7, and the first frame 11 and the second frame 12 may be connected by the connecting plate more easily. The connection plates of different sizes and the connection of the first frame 11 and the second frame 12 at different positions of the connection plates may make the size of the accommodation space 4 of the housing 1 formed by the first frame 11 and the second frame 12 different. Since the size of the accommodation space 4 may be different, wafers of different sizes may be stored.

In some embodiments, referring to fig. 4, the fixing member 7 includes fixing screws, at least two sets of fixing holes 8 are formed on the connecting plate, the first frame 11 and the second frame 12 respectively correspond to at least one set of fixing holes 8, and the fixing screws pass through the fixing holes 8 and fix the connecting plate on the first frame 11 and the second frame 12.

The number of the fixing screws is a plurality, and the fixing screws pass through the fixing holes 8 and enter at least part of the first frame 11 or the second frame 12. In this way, the connection plate may be mounted on the first and second frames 11 and 12, and the first and second frames 11 and 12 may be connected by the connection plate. The fixing screw is connected with the connecting plate through threads, and the threads have a self-locking function, so that the connecting plate can be more conveniently installed and detached through the fixing screw.

In some embodiments, referring again to fig. 4, each set of the fixing holes 8 includes at least two locking holes 81, and at least two locking holes 81 are arranged along a direction from the first frame 11 to the second frame 12. One fixing screw is arranged in at least one locking hole 81 in each group of fixing holes 8, when the connecting plates connect the first frame 11 and the second frame 12 together through different locking holes 81, the distance between the first frame 11 and the second frame 12 can be adjusted, so that the size of the accommodating space 4 formed by the first frame 11 and the second frame 12 can be adjusted, and wafers with different sizes can be placed in the placing groove 2.

In some embodiments, referring again to fig. 2-3, the wafer storage frame further includes a baffle 5, the baffle 5 is mounted in the placement groove 2, and the wafer is placed on the baffle 5. When the wafer is placed in the placement groove 2, the core particles on the wafer may drop on the remaining wafers. Therefore, by disposing the baffle 5 in the placement groove 2 and placing the wafer on the baffle 5, the core particles on the wafer can drop on the baffle 5, and the baffle 5 can store the core particles dropping from the wafer, thereby effectively utilizing the field space.

In some embodiments, referring again to fig. 3, the top surface of the baffle 5 is provided with at least three supporting protrusions 51, and the centers of the three supporting protrusions 51 are not located on the same line. When the wafer is placed on the supporting protrusions 51, the supporting protrusions 51 may serve as a support for the wafer. Therefore, the contact area between the wafer and the baffle plate 5 can be reduced, and the wafer is suspended towards one surface of the baffle plate 5, so that the friction between the wafer and the baffle plate 5 can be reduced, and the wafer is damaged.

In some embodiments, referring to fig. 4-5, the wafer storage frame further includes a handle 6, where the handle 6 is disposed on an outer surface of the frame 1. The first frame 11 and the second frame 12 are respectively provided with the handle 6, the handle 6 can be fixed on the first frame 11 and the second frame 12 through screws, and the handle 6 can be used for conveniently taking, placing and moving the frame body 1.

In some embodiments, referring to fig. 5-7, the wafer storage frame further includes a protective cover 9, a connection protrusion 91 is provided on the protective cover 9, a connection groove 10 is provided on the frame 1, and the connection protrusion 91 is clamped in the connection groove 10, so as to mount the protective cover 9 on the frame 1, and make the protective cover 9 cover at least part of the placement opening.

The material of the protective cover 9 can be rubber, the protective cover 9 can protect the wafer placed in the frame body 1, and pollution of dust to the wafer can be reduced. The protective cover 9 may be further provided with a connection groove 10, the frame 1 is provided with a connection protrusion 91, and the connection groove 10 and the connection protrusion 91 are clamped together, so that the protective cover 9 and the frame 1 can be more conveniently connected and detached.

Based on the same inventive concept, the present application also provides a wafer storage device including the wafer storage basket described in the present application. The wafer storage device has all the beneficial effects of the wafer storage basket, and is not described herein.

The foregoing is merely various embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and the changes and substitutions are intended to be covered in the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A wafer storage basket, comprising:

the frame body (1), it has the placing opening to open on the frame body (1), still be equipped with in the frame body (1) with place accommodation space (4) of opening intercommunication, be equipped with a plurality of standing grooves (2) in proper order from the bottom up on the inner wall of accommodation space (4), standing groove (2) are used for placing the wafer, and adjacent two distance between standing groove (2) is greater than the thickness of wafer, the wafer storage frame still includes baffle (5), baffle (5) are installed in standing groove (2), the wafer is placed on baffle (5).

2. Wafer storage basket according to claim 1, wherein the frame (1) comprises a first rim (11), a second rim (12) and a connection (3) connected between the first rim (11) and the second rim (12); the placing groove (2) comprises a first groove (21) and a second groove (22);

the first grooves (21) are sequentially formed in the inner wall of the first frame (11) from bottom to top, the second grooves (22) are sequentially formed in the inner wall of the second frame (12) from bottom to top, and the first grooves (21) and the second grooves (22) are in one-to-one correspondence.

3. Wafer storage basket according to claim 2, characterized in that the connection piece (3) comprises a connection plate which is mounted between the first rim (11) and the second rim (12) by means of a fixing piece (7).

4. A wafer storage basket according to claim 3, wherein the fixing member (7) comprises fixing screws, at least two groups of fixing holes (8) are formed in the connecting plate, the first frame (11) and the second frame (12) respectively correspond to at least one group of fixing holes (8), and the fixing screws penetrate through the fixing holes (8) and fix the connecting plate on the first frame (11) and the second frame (12).

5. Wafer storage basket according to claim 4, wherein each set of fixing holes (8) comprises at least two locking holes (81), at least two of the locking holes (81) being arranged in a direction from the first rim (11) to the second rim (12).

6. Wafer storage basket according to claim 1, characterized in that the top surface of the baffle plate (5) is provided with at least three supporting protrusions (51), the centers of the three supporting protrusions (51) not being located on the same straight line.

7. Wafer storage basket according to claim 1 or 2, characterized in that the wafer storage frame further comprises a handle (6), the handle (6) being provided on an outer surface of the frame body (1).

8. Wafer storage basket according to claim 1 or 2, characterized in that the wafer storage frame further comprises a protective cover (9), wherein a connecting protrusion (91) is arranged on the protective cover (9), a connecting groove (10) is arranged on the frame body (1), and the connecting protrusion (91) is clamped in the connecting groove (10) so as to mount the protective cover (9) on the frame body (1) and enable the protective cover (9) to cover at least part of the placing opening.

9. A wafer storage device comprising a wafer storage basket according to any one of claims 1 to 8.