CN220514608U

CN220514608U - Nozzle tool

Info

Publication number: CN220514608U
Application number: CN202322054777.3U
Authority: CN
Inventors: 温殿金
Original assignee: Shanghai Zhonghong Semiconductor Equipment Co ltd
Current assignee: Shanghai Zhonghong Semiconductor Equipment Co ltd
Priority date: 2023-08-01
Filing date: 2023-08-01
Publication date: 2024-02-23
Anticipated expiration: 2033-08-01

Abstract

The application provides a nozzle frock relates to semiconductor device technical field. The nozzle tool comprises a nozzle channel, one end of the nozzle channel is provided with a circumferential sealing part, the circumferential sealing part is provided with a circumferential protrusion which can be in press fit with a rubber tube, the other end of the nozzle channel is provided with a nozzle, the periphery of the nozzle is also provided with a circumferential cylinder part for protecting the nozzle, and the nozzle tool has the advantages of being convenient to install and high in structural stability while guaranteeing good sealing performance.

Description

Nozzle tool

Technical Field

The application relates to the technical field of semiconductor equipment, in particular to a nozzle tool.

Background

In the photoresist development process in the semiconductor process, photoresist plays an important role, and good sealing performance of the photoresist process is required due to the fact that the photoresist has strong corrosiveness and other factors. At present, a plurality of parts or a plurality of sections of parts are generally adopted for extrusion assembly or sealing is carried out by using a sealing ring, and in the actual use process, liquid leakage and flowing channel are caused by loose sealing along with time and process flow, so that the gluing and developing process is influenced.

Disclosure of Invention

In view of this, this description embodiment provides a nozzle frock, has realized good leakproofness, has overcome sealed not tight problem such as liquid leakage, flow channel that cause.

The embodiment of the specification provides the following technical scheme:

the utility model provides a nozzle frock, including the nozzle passageway, the one end of nozzle passageway is equipped with circumference sealing portion, circumference sealing portion has can with rubber tube compression fit's circumference arch, the other end of nozzle passageway is equipped with the spout, in the spout periphery still is equipped with and is used for the protection the circumference drum portion of spout.

In some embodiments, the spout, the nozzle channel, and the circumferential seal are integrally formed.

In some embodiments, the circumferential protrusion is the same material as the hose.

In some embodiments, the circumferential projection of the circumferential seal has a cross-sectional shape with a V-shaped pointed structure and/or the included angle of the V-shaped pointed structure is 38 ° to 42 °.

In some embodiments, the height of the circumferential cylindrical portion is greater than or equal to the height of the spout.

In some embodiments, the circumferential seal is pressed into the hose in a press fit with an inner wall of the hose, the hose extending upwardly through a through hole of the adapter.

In some embodiments, the through hole of the adapter is provided with an internal thread that is screwed with an external thread provided on the outer wall of the nozzle channel.

In some embodiments, a fixing member is mounted to an upper portion of the adapter member, and an upper portion of the hose is fixed by the fixing member.

Compared with the prior art, the beneficial effects that above-mentioned at least one technical scheme that this description embodiment adopted can reach include at least:

the arrangement of the nozzle tool can ensure that after the circumferential sealing part is pressed into the rubber tube, the circumferential bulge of the circumferential sealing part is tightly pressed against the inner wall of the rubber tube, so that the tightness can be ensured, photoresist can more efficiently flow from the rubber tube to the nozzle in the gluing and developing process, leakage and channeling of liquid caused by the untight sealing are avoided, and the advantages of convenience in installation and high structural stability of the tool are also realized while the tightness is ensured.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic cross-sectional structure of a nozzle tool according to an embodiment of the present disclosure;

fig. 2 is a schematic diagram of a nozzle tooling installation structure provided in an embodiment of the present application.

Detailed Description

Embodiments of the present application are described in detail below with reference to the accompanying drawings.

Other advantages and effects of the present application will become apparent to those skilled in the art from the present disclosure, when the following description of the embodiments is taken in conjunction with the accompanying drawings. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present application. The present application may be embodied or carried out in other specific embodiments, and the details of the present application may be modified or changed from various points of view and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.

It is noted that various aspects of the embodiments are described below within the scope of the following claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present application, one skilled in the art will appreciate that one aspect described herein may be implemented independently of any other aspect, and that two or more of these aspects may be combined in various ways. For example, apparatus may be implemented and/or methods practiced using any number and aspects set forth herein. In addition, such apparatus may be implemented and/or such methods practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.

It should also be noted that the illustrations provided in the following embodiments merely illustrate the basic concepts of the application by way of illustration, and only the components related to the application are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.

In addition, in the following description, specific details are provided in order to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that the present utility model may be practiced without these specific details.

As shown in fig. 1 and fig. 2, the nozzle tool provided in this embodiment of the present application includes a nozzle channel 1, one end of the nozzle channel 1 is provided with a circumferential sealing portion 12, the circumferential sealing portion 12 has a circumferential protrusion 12a that can be press-fitted with the rubber tube 2, the other end of the nozzle channel 1 is provided with a nozzle 11, and a circumferential cylinder portion 13 for avoiding contacting or colliding with the nozzle 11 to protect the nozzle 11 is further provided at the periphery of the nozzle 11. In some embodiments, to ensure such protection, the height of the circumferential cylindrical portion 12 may be set to be greater than or equal to the height of the spout 11.

In some embodiments, the spout 11, the nozzle channel 1 and the circumferential sealing portion 12 are integrally formed, i.e. are integrally formed, so that after the circumferential sealing portion 12 is pressed into the rubber tube 2, a more tight sealing performance can be ensured, and the installation is also more convenient.

Preferably, in order to further optimize the sealing tightness between the circumferential sealing portion 12 and the hose 2, the circumferential protrusion 12a of the circumferential sealing portion 12 may be made of the same material as that of the hose 2, for example, PFA material or the like.

In some embodiments, the circumferential projection 12a of the circumferential seal 12 may be configured in a bead-like configuration, i.e., a bead-like configuration that enables a snug fit with the hose 2. Preferably, the cross-sectional shape of the circumferential protrusion 12a of the circumferential sealing portion 12 has a V-shaped pointed structure, and an included angle of the V-shaped pointed structure may be, for example, set to an angle ranging from 38 ° to 42 ° to ensure that a tight press fit is generated between the material of the circumferential protrusion 12a and the inner wall of the hose 2 at this angle.

As shown in fig. 2, in some embodiments, the circumferential seal 12 may be pressed into the hose 2 in a press fit with the inner wall of the hose 2, the hose 2 extending upwardly through the through hole of the adapter 3. Preferably, the through hole of the adapter 3 is provided with an internal thread 31, the internal thread 31 being screwed with an external thread 14 provided on the outer wall of the nozzle channel 1.

Further preferably, the upper part of the adapter 3 is mounted with a fixing member 4, and the upper part of the hose 2 is fixed by the fixing member 4. The adaptor 3 can play a role in supporting and fixing the matched rubber tube 2 and the circumferential sealing part 12, and play a role in fixing and transferring the upper fixing part 4, and the fixing part 4 can further fix and support the rubber tube 2 well, so that the structural stability of the system is improved while the good sealing performance is ensured.

In this specification, identical and similar parts of the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. Meanwhile, the specification uses specific words to describe the embodiments of the specification. Reference to "one embodiment," "an embodiment," and/or "some embodiments" means that a particular feature, structure, or characteristic is associated with at least one embodiment of the present description. Thus, it should be emphasized and should be appreciated that two or more references to "an embodiment" or "one embodiment" or "an alternative embodiment" in various positions in this specification are not necessarily referring to the same embodiment. Furthermore, certain features, structures, or characteristics of one or more embodiments of the present description may be combined as suitable.

Furthermore, the order in which the elements and sequences are processed, the use of numerical letters, or other designations in the description are not intended to limit the order in which the processes and methods of the description are performed unless explicitly recited in the claims. While certain presently useful inventive embodiments have been discussed in the foregoing disclosure, by way of various examples, it is to be understood that such details are merely illustrative and that the appended claims are not limited to the disclosed embodiments, but, on the contrary, are intended to cover all modifications and equivalent arrangements included within the spirit and scope of the embodiments of the present disclosure. For example, while the system components described above may be implemented by hardware devices, they may also be implemented solely by software solutions, such as installing the described system on an existing processing device or mobile device.

While the basic concepts have been described above, it will be apparent to those skilled in the art that the foregoing detailed disclosure is by way of example only and is not intended to be limiting. Although not explicitly described herein, various modifications, improvements, and adaptations to the present disclosure may occur to one skilled in the art. Such modifications, improvements, and modifications are intended to be suggested within this specification, and therefore, such modifications, improvements, and modifications are intended to be included within the spirit and scope of the exemplary embodiments of the present utility model.

Claims

1. The utility model provides a nozzle frock, its characterized in that includes the nozzle passageway, the one end of nozzle passageway is equipped with circumference sealing portion, circumference sealing portion has can with rubber tube compression fit's circumference arch, the other end of nozzle passageway is equipped with the spout, in the spout periphery still is equipped with and is used for protecting the circumference drum portion of spout.

2. The nozzle tooling of claim 1, wherein the spout, the nozzle channel, and the circumferential seal are integrally formed.

3. The nozzle tooling of claim 1, wherein the circumferential protrusion is the same material as the hose.

4. Nozzle tooling according to claim 1, wherein the circumferential bulge of the circumferential seal has a cross-sectional shape with a V-shaped pointed structure and/or the included angle of the V-shaped pointed structure is 38 ° to 42 °.

5. The nozzle tooling of claim 1, wherein the height of the circumferential cylindrical portion is greater than or equal to the height of the spout.

6. The nozzle tooling of any one of claims 1 to 4, wherein the circumferential seal is pressed into the hose in a press fit with an inner wall of the hose, the hose extending upwardly through a through hole of the adapter.

7. The nozzle tooling of claim 6, wherein the through hole of the adapter is provided with internal threads that are threaded with external threads provided on the outer wall of the nozzle channel.

8. The nozzle tooling of claim 7, wherein a fixing member is mounted on an upper portion of the adapter member, and an upper portion of the hose is fixed by the fixing member.