CN220485828U - Spraying plate structure for battery coating reaction cavity - Google Patents
Spraying plate structure for battery coating reaction cavity Download PDFInfo
- Publication number
- CN220485828U CN220485828U CN202321217397.0U CN202321217397U CN220485828U CN 220485828 U CN220485828 U CN 220485828U CN 202321217397 U CN202321217397 U CN 202321217397U CN 220485828 U CN220485828 U CN 220485828U
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- China
- Prior art keywords
- spraying
- plate structure
- reaction cavity
- spray
- battery coating
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- 238000005507 spraying Methods 0.000 title claims abstract description 42
- 239000011248 coating agent Substances 0.000 title claims abstract description 24
- 238000000576 coating method Methods 0.000 title claims abstract description 24
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 22
- 239000007921 spray Substances 0.000 claims abstract description 39
- 238000009434 installation Methods 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 238000009826 distribution Methods 0.000 claims description 5
- 238000000227 grinding Methods 0.000 claims description 5
- 238000005498 polishing Methods 0.000 abstract description 21
- 238000005265 energy consumption Methods 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000000151 deposition Methods 0.000 description 3
- 239000003574 free electron Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Landscapes
- Battery Electrode And Active Subsutance (AREA)
Abstract
The utility model discloses a spraying plate structure for a battery coating reaction cavity, which relates to the technical field of battery sheet coating, and particularly relates to a spraying plate structure for a battery coating reaction cavity. This battery coating film reaction chamber is internal with spray plate structure through set up the aperture in the inside that sprays the hole, improves the velocity of flow through the aperture, increases the flow resistance in hole, and the energy consumption of electron when removing to the back can reduce the length that sprays the hole, reduces the thickness of spraying the board, through setting up the roller of polishing at the upper and lower two sides of spraying the board, utilizes driving motor to drive the roller of polishing and rotates, can make the roller of polishing polish the upper and lower surface of spraying the board.
Description
Technical Field
The utility model relates to the technical field of battery piece coating, in particular to a spray plate structure for a battery coating reaction cavity.
Background
The film deposition equipment is generally used for depositing a material film layer such as a conductor, an insulator or a semiconductor on a substrate, so that the film deposition equipment has certain special performance and is widely applied to production and manufacturing links in the fields of photovoltaics, semiconductors and the like. Thin film deposition apparatuses can be classified into Physical Vapor Deposition (PVD) apparatuses, chemical Vapor Deposition (CVD) apparatuses, and Atomic Layer Deposition (ALD) apparatuses according to the process principle.
Patent publication No. CN205077140U proposes a novel shower plate for a reaction chamber of a semiconductor coating apparatus, comprising a shower plate main body provided with a fixed screw hole, and small holes are formed in the shower plate main body. The small holes adopt an elongated structure, the ratio of the diameter to the length reaches more than 1:6, and the maximum is 1:15. The small Kong Caiyong regular triangle arrays are distributed, and the open area is slightly larger than the area of the wafer. Electrons can be effectively prevented from passing through the small holes, so that glow discharge on the back surface of the spray plate is avoided, and the process stability is improved. When the structure is in actual use, the ratio of the diameter to the length of the small holes is more than 1:6, the maximum ratio is 1:15, and the length of the small holes is required to be set longer, so that the thickness of the spray plate is thicker; during film coating, process powder is easy to deposit on the surface of the spray plate, the productivity is affected, and the end face is manually polished or the spray plate is removed for acidic passivation treatment. However, when the end face of the spray plate is manually polished, the polishing and maintenance effects are inconsistent due to different operation methods and proficiency of individuals, so that the spray plate structure for the battery coating reaction cavity is provided.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides a spraying plate structure for a battery coating reaction cavity, which solves the problems in the prior art.
In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a battery coating film reaction cavity is interior with spraying plate structure, includes the spraying plate, the inside of spraying plate has been seted up and has been sprayed the hole, the inside of spraying the hole is provided with the aperture, the spout has been seted up to the side of spraying plate, the pivot has been cup jointed to the inside activity of spout, the rocking arm has been pegged graft to the one end of pivot, the slider has been cup jointed to the external screw thread of pivot, peg graft at the top of slider has the installation piece, the inside activity of installation piece has been cup jointed the roller of polishing, the driving motor that is used for driving the roller of polishing is installed to the side-mounting of installation piece.
Optionally, the small holes are positioned in the spraying holes and are close to one third to one fourth of the top surface of the spraying plate, and the tops of the small holes are in a funnel-shaped structure.
Optionally, the mounting hole has been seted up to the one end of pivot, the spacing groove has been seted up to the side of mounting hole, spacing groove is about the mounting hole symmetric distribution.
Optionally, the front end of rocking arm is connected with the spliced pole, the side of spliced pole is connected with the stopper, the stopper is about spliced pole symmetric distribution, spliced pole, stopper respectively with mounting hole, spacing groove phase-match.
Optionally, the slider symmetric distribution is in the both sides of spray board, the slider is close to the inside joint in spout of one side card of spout.
Optionally, the side of slider is connected with the mount, the inboard of mount is connected with the spring spare, peg graft in the middle part of slider and installation piece has the spacer pin, the one end that the spring spare kept away from the mount is connected with the spacer pin.
Optionally, the spout is around the shower board front and back symmetric distribution, has fixedly cup jointed the guide bar in the spout of keeping away from pivot one side, the guide bar activity cup joints in the inside of slider.
The utility model provides a spray plate structure for a battery coating reaction cavity, which has the following beneficial effects:
1. this battery coating film reaction chamber is internal with spray plate structure, through set up the aperture in the inside that sprays the hole, improve the velocity of flow through the aperture, the flow resistance in increase hole increases the energy consumption when electron moves to the back, can reduce the length that sprays the hole, reduces the thickness of spraying the board, through setting up the roller of polishing at the upper and lower two sides of spraying the board, utilizes driving motor to drive the roller of polishing and rotates, can make the roller of polishing polish to the upper and lower surface of spraying the board, conveniently quick deposit of getting rid of spraying the board surface.
2. This battery coating film reaction chamber is internal with spraying plate structure, through will polishing roller and rocking arm all set up to detachable construction, can dismantle rocking arm and polishing roller after polishing, do not influence the normal work of spraying the board, avoid rocking arm and polishing roller to receive the influence of coating film work, through setting up the spacer pin, utilize the spring part to give the inwards elasticity of spacer pin, can make the spacer pin will spray board and installation piece and fix together, the quick connection slider and the installation piece of being convenient for.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view of the right side cross-section of the present utility model;
FIG. 3 is an enlarged view of FIG. 2A in accordance with the present utility model;
FIG. 4 is an enlarged view of B of FIG. 2 in accordance with the present utility model;
FIG. 5 is a schematic view of the structure of the mounting hole of the present utility model;
fig. 6 is a schematic structural view of the rocker arm of the present utility model.
In the figure: 1. a spray plate; 2. spraying holes; 3. a small hole; 4. a chute; 5. a rotating shaft; 6. a mounting hole; 7. a limit groove; 8. a rocker arm; 9. a connecting column; 10. a limiting block; 11. a slide block; 12. a mounting block; 13. a grinding roller; 14. a driving motor; 15. a fixing frame; 16. a spring member; 17. a limiting pin; 18. a guide rod.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
Referring to fig. 1 to 3, the present utility model provides a technical solution: the utility model provides a battery coating film reaction cavity is interior with spraying plate structure, including spraying board 1, spraying hole 2 has been seted up to the inside of spraying board 1, spraying hole 2's inside is provided with aperture 3, aperture 3 is arranged in spraying hole 2 and is close to the third to quarter department of spraying board 1 top surface, through set up aperture 3 in spraying hole 2's inside, improve the velocity of flow through aperture 3, the flow resistance in increase hole, the energy consumption when the increase electron removes to the back can reduce spraying hole 2's length, reduce spraying board's thickness, aperture 3's top is the funnel-shaped structure.
Referring to fig. 1, 5 and 6, a sliding chute 4 is formed in the side surface of the spray plate 1, a rotating shaft 5 is movably sleeved in the sliding chute 4, a mounting hole 6 is formed in one end of the rotating shaft 5, a limit groove 7 is formed in the side surface of the mounting hole 6, the limit groove 7 is symmetrically distributed about the mounting hole 6, a rocker arm 8 is inserted into one end of the rotating shaft 5, the rocker arm 8 and the rotating shaft 5 can be detached through a detachable structure formed by arranging the rocker arm 8, the normal operation of the spray plate 1 is prevented from being influenced, a connecting column 9 is connected to the front end of the rocker arm 8, a limit block 10 is connected to the side surface of the connecting column 9, the limit block 10 is symmetrically distributed about the connecting column 9, and after the connecting column 9 is mounted in the mounting hole 6, the limit block 10 is just clamped into the limit groove 7, the connecting column 9 and the rotating shaft 5 rotate together, and the connecting column 9 and the limit block 10 are respectively matched with the mounting hole 6 and the limit groove 7.
Referring to fig. 1 to 2, the external thread of the rotating shaft 5 is sleeved with the sliding blocks 11, the sliding blocks 11 are symmetrically distributed on two sides of the spraying plate 1, one side, close to the sliding groove 4, of the sliding blocks 11 is clamped into the sliding groove 4, when the rotating shaft 5 rotates, the sliding blocks 11 can move along the rotating shaft 5 to enable the polishing roller 13 to move left and right to polish the spraying plate 1, the top of the sliding blocks 11 is inserted with the mounting blocks 12, the polishing roller 13 is movably sleeved in the mounting blocks 12, the driving motor 14 for driving the polishing roller 13 is arranged on the side face of the mounting blocks 12, the polishing roller 13 is driven to rotate through the driving motor 14, the polishing roller 13 can polish the sediment on the surface of the spraying plate 1, the polishing thickness is uniform, and the polishing effect is consistent.
Referring to fig. 1, 2 and 4, a fixing frame 15 is connected to a side surface of a sliding block 11, a spring piece 16 is connected to an inner side of the fixing frame 15, the spring piece 16 is in a compressed state, the spring piece 16 is used for giving inward thrust to a limiting pin 17, the limiting pin 17 can be prevented from loosening, the middle parts of the sliding block 11 and a mounting block 12 are inserted with the limiting pin 17, one end, far away from the fixing frame 15, of the spring piece 16 is connected with the limiting pin 17, sliding grooves 4 are symmetrically distributed around a spraying plate 1, the sliding block 11 and the mounting block 12 are connected by the limiting pin 17, the sliding block 11 and the mounting block 12 can be separated only by pulling the limiting pin 17 to move outwards, the mounting block 12 is convenient to disassemble and assemble, a guide rod 18 is fixedly sleeved in the sliding groove 4 at one side far away from a rotating shaft 5, and the guide rod 18 is movably sleeved in the sliding block 11.
In summary, when the battery film plating reaction cavity uses the spray plate structure, during the use, in the process, free electrons consume certain energy when passing through the spray hole 2, free electrons do not pass through the spray hole 2 yet, self energy is consumed, the free electrons cannot pass through the spray hole 2, the small holes 3 arranged in the spray hole 2 improve the flow velocity passing through the small holes 3, the flow resistance of the holes is increased, the energy consumption when the electrons move to the back is increased, the length of the spray hole 2 can be reduced, the thickness of the spray plate is reduced, when the surface of the spray plate is deposited, the sliding block 11 is abutted with the mounting block 12, the limiting pin 17 is pushed to move inwards by the spring piece 16, the sliding block 11 and the mounting block 12 are fixed by the limiting pin 17, then the connecting post 9 is inserted into the mounting hole 6, the grinding roller 13 is driven to rotate by the driving motor 14, the grinding roller 13 polishes the surface of the spray plate 1, the sliding block 11 is driven to rotate along the rotating shaft 5 by the rotating rocker arm 8, the sliding block 11 moves back and forth to polish the surface of the spray plate 1, the rocking arm 8 and the mounting block 12 is detached again after polishing is completed.
In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element to be referred to must have a specific direction, be constructed and operated in the specific direction, and thus should not be construed as limiting the present utility model; the terms "first," "second," "third," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "coupled," and the like are to be construed broadly, and may be fixedly coupled, detachably coupled, or integrally coupled, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a battery coating film reaction cavity is interior with spraying plate structure, includes spraying plate (1), its characterized in that: spray hole (2) have been seted up to the inside of spray board (1), the inside of spray hole (2) is provided with aperture (3), spout (4) have been seted up to the side of spray board (1), pivot (5) have been cup jointed in the inside activity of spout (4), peg graft in the one end of pivot (5) have rocking arm (8), slider (11) have been cup jointed to the external screw thread of pivot (5), peg graft at the top of slider (11) have installation piece (12), the inside activity of installation piece (12) has cup jointed grinding roller (13), driving motor (14) that are used for driving grinding roller (13) are installed to the side-mounting of installation piece (12).
2. The spray plate structure for a battery coating reaction cavity according to claim 1, wherein: the small holes (3) are positioned in the spraying holes (2) and close to one third to one fourth of the top surface of the spraying plate (1), and the tops of the small holes (3) are of a funnel-shaped structure.
3. The spray plate structure for a battery coating reaction cavity according to claim 1, wherein: one end of the rotating shaft (5) is provided with a mounting hole (6), the side surface of the mounting hole (6) is provided with a limiting groove (7), and the limiting grooves (7) are symmetrically distributed about the mounting hole (6).
4. The spray plate structure for a battery coating reaction cavity according to claim 1, wherein: the front end of rocking arm (8) is connected with spliced pole (9), the side of spliced pole (9) is connected with stopper (10), stopper (10) are about spliced pole (9) symmetric distribution, spliced pole (9), stopper (10) respectively with mounting hole (6), spacing groove (7) assorted.
5. The spray plate structure for a battery coating reaction cavity according to claim 1, wherein: the sliding blocks (11) are symmetrically distributed on two sides of the spraying plate (1), and one side, close to the sliding groove (4), of the sliding blocks (11) is clamped into the sliding groove (4).
6. The spray plate structure for a battery coating reaction cavity according to claim 1, wherein: the side of slider (11) is connected with mount (15), the inboard of mount (15) is connected with spring (16), the middle part of slider (11) and installation piece (12) is pegged graft and is had spacer pin (17), the one end that mount (15) was kept away from to spring (16) is connected with spacer pin (17).
7. The spray plate structure for a battery coating reaction cavity according to claim 1, wherein: the sliding grooves (4) are symmetrically distributed around the spraying plate (1), guide rods (18) are fixedly sleeved in the sliding grooves (4) at one side far away from the rotating shaft (5), and the guide rods (18) are movably sleeved in the sliding blocks (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321217397.0U CN220485828U (en) | 2023-05-19 | 2023-05-19 | Spraying plate structure for battery coating reaction cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321217397.0U CN220485828U (en) | 2023-05-19 | 2023-05-19 | Spraying plate structure for battery coating reaction cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220485828U true CN220485828U (en) | 2024-02-13 |
Family
ID=89829419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321217397.0U Active CN220485828U (en) | 2023-05-19 | 2023-05-19 | Spraying plate structure for battery coating reaction cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220485828U (en) |
-
2023
- 2023-05-19 CN CN202321217397.0U patent/CN220485828U/en active Active
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