CN220481517U

CN220481517U - Vacuum adsorption jig

Info

Publication number: CN220481517U
Application number: CN202322220994.5U
Authority: CN
Inventors: 张晓东; 谢国梁
Original assignee: China Wafer Level CSP Co Ltd
Current assignee: China Wafer Level CSP Co Ltd
Priority date: 2023-08-17
Filing date: 2023-08-17
Publication date: 2024-02-13
Anticipated expiration: 2033-08-17

Abstract

The utility model discloses a vacuum adsorption jig, which comprises an adsorption device and a handheld device connected with the adsorption device; the adsorption device is provided with a hollow area at the middle position, a first cavity is arranged in the adsorption device, the adsorption device is provided with a flat side surface, a plurality of through holes are formed in the side surface, and part of the area of the first cavity is exposed out of the through holes; the handheld device is internally provided with a second cavity, the second cavity is communicated with the first cavity, one end of the handheld device, which is far away from the adsorption device, is connected with vacuum equipment, and the vacuum equipment can enable the first cavity and the second cavity to form a negative pressure state. The vacuum device is externally connected, so that the space in the adsorption device forms negative pressure until the vacuum state, the hollowed-out thin sheet (bearing piece) can be firmly adsorbed, and the risk of damage or breakage to the hollowed-out thin sheet when the hollowed-out thin sheet is taken and transported is prevented.

Description

Vacuum adsorption jig

Technical Field

The utility model relates to the technical field of semiconductor processes, in particular to a vacuum adsorption jig.

Background

Along with the development of technology, the existing products are lighter, thinner and smaller, such as the bearing piece used in batch processing of wafers or chips, the bearing piece is provided with a plurality of hollow structures for the middle area, each hollow structure correspondingly bears a chip, and the interval distance between each hollow structure is very small. The material of which the carrier is made is typically glass or silicon.

In actual process operation, a technician is generally required to manually take the carrier to clean and perform subsequent process steps, and the existing carrier is often thin, and because more hollow structures are arranged in the middle area, the carrier is difficult to manually take and carry, and the carrier is easy to damage or break.

Disclosure of Invention

The utility model aims to provide a vacuum adsorption jig for preventing the problem that a bearing piece is easy to damage or crack when being manually taken and carried.

The utility model provides a vacuum adsorption jig, which comprises an adsorption device and a handheld device connected with the adsorption device;

the adsorption device is provided with a hollow area at the middle position, a first cavity is arranged in the adsorption device, the adsorption device is provided with a flat side surface, a plurality of through holes are formed in the side surface, and part of the area of the first cavity is exposed out of the through holes;

the handheld device is internally provided with a second cavity, the second cavity is communicated with the first cavity, one end of the handheld device, which is far away from the adsorption device, is connected with vacuum equipment, and the vacuum equipment can enable the first cavity and the second cavity to form a negative pressure state.

As a further improvement of an embodiment of the present utility model, the adsorption device has a circular ring structure.

As a further improvement of one embodiment of the present utility model, the plurality of through holes are uniformly distributed on the side surface of the adsorption device.

As a further improvement of one embodiment of the present utility model, the side surface provided with the through hole is a smooth surface.

As a further improvement of an embodiment of the present utility model, a teflon plating layer is provided on a side surface provided with a through hole communicating with an outer surface of the teflon plating layer.

As a further improvement of an embodiment of the present utility model, the through hole is a circular through hole.

As a further improvement of an embodiment of the present utility model, the portable device further comprises a connecting part connected with the portable device, wherein a third cavity is arranged in the connecting part, and the third cavity is communicated with the second cavity;

an opening is formed in a part area of the connecting part, far away from the end part of the handheld device, and the vacuum equipment is used for forming negative pressure in the vacuum adsorption jig through the opening.

As a further improvement of an embodiment of the present utility model, an elastic sealing structure is disposed in the connecting portion, and the elastic sealing structure can move along the extending direction of the connecting portion under the action of an external force, so that the opening of the connecting portion is opened or closed.

As a further improvement of an embodiment of the present utility model, the elastic closing structure includes a closing surface closing the opening of the connecting portion and an elastic means connecting the closing surface, and when the elastic closing structure opens the opening of the connecting portion, the gas in the first cavity and the second cavity is communicated with the outside air.

As a further improvement of one embodiment of the present utility model, the other end of the elastic device is connected to the inner wall surface of the vacuum adsorption jig.

The utility model has the beneficial effects that: the utility model provides a vacuum adsorption jig, including interconnect's adsorption equipment and hand-held device, and adsorption equipment and hand-held device's interior space intercommunication, adsorption equipment's one side surface sets up a plurality of through-holes, makes adsorption equipment interior space form the negative pressure through external vacuum equipment until the vacuum state, can firmly adsorb fretwork thin slice (carrier), causes damage or cracked risk to it when preventing to take and transport the fretwork thin slice.

Drawings

FIG. 1 is a schematic diagram of a vacuum adsorption tool according to an embodiment of the present utility model;

fig. 2 is a schematic cross-sectional view of a connection portion according to an embodiment of the present utility model.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be clearly and completely described below with reference to the specific embodiments of the present application and the corresponding drawings. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.

For purposes of illustration, terms such as "upper," "lower," "rear," "front," and the like, are used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. The term spatially relative position may include different orientations of the device in use or operation than that illustrated in the figures. For example, if the device in the figures is turned over, elements described as "below" or "over" other elements or features would then be oriented "below" or "over" the other elements or features. Thus, the exemplary term "below" can encompass both a spatial orientation of below and above.

The utility model provides a vacuum adsorption device, which comprises an adsorption device and a handheld device connected with the adsorption device;

the middle position of the adsorption device is provided with a hollowed-out area, the inside of the adsorption device is provided with a first cavity, the adsorption device is provided with a flat side surface, the side surface is provided with a plurality of through holes, and the through holes expose part of the area of the first cavity;

As shown in fig. 1, in order to provide a vacuum adsorption fixture according to this embodiment, a hollow area 110 is disposed at a middle position of an adsorption device 100, and the hollow area 110 has a cylindrical structure.

The adsorption device 100 has a first cavity therein, and the adsorption device 100 has a flat side surface on which a plurality of through holes 120 are formed, each through hole 120 exposing a partial area of the first cavity.

Specifically, the adsorption device 100 has a circular ring structure. That is, the upper surface and the lower surface of the adsorption device 100 in the extending direction of the hollow area 110 are flat side surfaces, the through hole 120 is disposed on one of the flat side surfaces, and a smooth arc surface connects the upper surface and the lower surface. The side surface provided with the through holes 120 is defined as an adsorption surface hereinafter.

The size of the hollowed-out area 110 and the size of the adsorption surface of the adsorption device 100 provided with the through holes 120 can be adjusted according to the type and size of the articles to be adsorbed.

Specifically, the plurality of through holes 120 are uniformly distributed on the side surface of the adsorption apparatus 100.

For example, the plurality of through holes 120 are disposed around the hollow area 110 on the adsorption surface of the adsorption device 100, and every two adjacent through holes 120 are spaced by the same distance, and the distance between each through hole 120 and the center point of the hollow area 110 is the same.

In one embodiment of the present utility model, the through-hole 120 is a circular through-hole.

Of course, in other embodiments of the present utility model, the through hole 120 may be a square hole or other holes.

The size of the through hole 120 is not limited in the present utility model, and the design can be adjusted according to actual requirements.

Specifically, the material of the adsorption device 100 forming the ring structure is metal, and may be aluminum, iron or other metal materials, which is not limited in the present utility model.

In the embodiment of the present utility model, the side surface provided with the through hole 120 is a smooth surface. That is, the upper surface of the adsorption device 100 is a smooth surface in the drawing.

In one embodiment of the present utility model, a teflon plating layer is provided on the side surface where the through-holes 120 are provided to form a hard, smooth, corrosion-resistant protective layer on a flat side surface of the adsorption apparatus 100. Of course, the through-holes 120 communicate with the outer surface of the teflon coating, that is, when the adsorption device having the through-holes is manufactured, the adsorption device having the circular ring structure is manufactured, and then a teflon coating layer is coated on the side surface of the adsorption device, and then a plurality of through-holes are uniformly formed on the teflon coating layer.

The handheld device 200 is internally provided with a second cavity, the second cavity is communicated with the first cavity of the adsorption device 100, and the handheld device 200 is connected with a vacuum device at one end far away from the adsorption device 100, and the vacuum device can enable the first cavity and the second cavity to form a negative pressure state. When a fragile sheet (such as a glass sheet provided with a plurality of hollow structures) needs to be taken or transported to form a next process, vacuum equipment can be started to enable the first cavity and the second cavity to form a negative pressure state, an operator can hold the handheld device 200 by hand to press close the sheet by using the adsorption surface of the adsorption device 100, when the sheet completely covers the through holes 120 on the adsorption surface of the adsorption device 100, the first cavity and the second cavity form a vacuum state at the moment, the sheet can be firmly adsorbed by the adsorption device, and the taking or transportation of the sheet can be completed, so that the risk of damage or breakage to the sheet caused by manually taking the sheet is reduced.

In the embodiment of the utility model, the handheld device 200 is a cylindrical handle provided with a cavity, so that the handheld operation of an operator is facilitated.

Further, referring to fig. 2, the vacuum adsorption fixture in this embodiment further includes a connection portion 300 connected to the handheld device 200, and a third cavity 310 is disposed in the connection portion 300, where the third cavity 310 is communicated with the second cavity.

Specifically, an opening 320 is disposed at a portion of the connecting portion 300 away from the end portion of the handheld device 200, and the vacuum apparatus forms a negative pressure to the vacuum suction jig through the opening 320. That is, the vacuum apparatus may form a negative pressure to the first, second, and third cavities that communicate with each other through the opening 320 of the connection part.

In one embodiment of the present utility model, the third cavity 310 has a cylindrical structure, the surface of the opening 320 has a circular structure, and the diameter of the circular cross section of the opening 320 is smaller than the diameter of the circular cross section of the third cavity 310.

More specifically, an elastic sealing structure 330 is disposed in the connecting portion 300, and the elastic sealing structure 330 can move along the extending direction of the connecting portion 300 under the action of an external force, so that the opening 320 of the connecting portion 300 is opened or closed.

The elastic closing structure 330 includes a closing surface 331 closing the connecting portion opening 320 and an elastic means 332 connecting the closing surface 331, and when the elastic closing structure 330 opens the connecting portion opening 320, the gas in the first cavity and the second cavity communicates with the outside air. That is, the suction pipe of the vacuum apparatus may compress the elastic means 332 toward the inside of the third cavity 310 through the closing surface 331 at the connection opening 320 to open the connection opening 320, and at this time, the vacuum apparatus may be opened to perform the suction process. When the vacuum equipment forms the vacuum state in the space inside the jig, the air suction pipe of the vacuum equipment can be directly removed, and at the moment, the elastic device 332 rebounds to completely cover the opening 320 of the connecting part by the sealing surface 331, so that the opening 320 of the connecting part is sealed, and the space inside the jig still keeps the vacuum state. The vacuum adsorption jig provided by the utility model only needs to carry out once vacuumizing treatment, and when the articles to be adsorbed are transported, no vacuum equipment is required to be attached all the time, and the inner space can be always kept in a vacuum state.

Of course, the other end of the elastic device 332 is connected to the inner wall surface of the vacuum suction jig, the inner wall surface of the connection portion 300, the inner wall surface of the hand-held device 200, or the inner wall surface of the suction device 100, which is not limited in this regard, and the design can be adjusted according to actual needs.

Specifically, the sealing surface 331 is a circular surface, the diameter of the sealing surface 331 is larger than the circular cross-section diameter of the connecting portion opening 320, and the sealing surface 331 is disposed inside the third cavity 310 and completely covers the connecting portion opening 320.

In an embodiment of the present utility model, the diameter of the sealing surface 331 is smaller than the diameter of the circular cross section of the third cavity 310, that is, a certain gap exists between the circumferential side of the sealing surface 331 and the inner wall surface of the connecting portion 300, when the sealing surface 331 is pressed by the elastic device 332 under the action of an external force so that the opening 320 of the connecting portion is opened, the gas in the first cavity and the second cavity is communicated with the outside air.

In other embodiments of the present utility model, through holes may be formed at the peripheral area of the surface of the sealing surface 331, and when the sealing surface 331 is pressed against the elastic device 332 by an external force to open the connecting portion opening 320, the air in the first cavity and the second cavity may be communicated with the outside air through the through holes on the sealing surface 331. Of course, when the sealing surface 331 covers the connecting portion opening 320, the through hole on the sealing surface 331 is not in the corresponding area of the connecting portion opening 320.

Specifically, the material of the sealing surface 331 may be rubber or metal, and the elastic device 332 may be a spring.

In summary, the utility model provides a handheld vacuum adsorption fixture, wherein a plurality of through holes are formed in one side surface of an adsorption device, and a vacuum device is externally connected to enable a space in the adsorption device to form negative pressure until the vacuum state, so that a hollowed-out sheet (bearing piece) can be firmly adsorbed, and the risk of damage or breakage of the hollowed-out sheet during taking and transporting is prevented. And after only one vacuumizing treatment, when the articles to be adsorbed are transported, no vacuum equipment is required to be attached all the time, and the inner space can be always kept in a vacuum state.

It should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is for clarity only, and that the skilled artisan should recognize that the embodiments may be combined as appropriate to form other embodiments that will be understood by those skilled in the art.

The above list of detailed descriptions is only specific to practical embodiments of the present utility model, and they are not intended to limit the scope of the present utility model, and all equivalent embodiments or modifications that do not depart from the spirit of the present utility model should be included in the scope of the present utility model.

Claims

1. The vacuum adsorption jig is characterized by comprising an adsorption device and a handheld device connected with the adsorption device;

2. The vacuum adsorption jig of claim 1, wherein the adsorption device is of a circular ring structure.

3. The vacuum adsorption jig of claim 1, wherein a plurality of through holes are uniformly distributed on the side surface of the adsorption device.

4. The vacuum suction jig according to claim 1, wherein the side surface provided with the through hole is a smooth surface.

5. The vacuum adsorption jig according to claim 1, wherein a teflon plating layer is provided on a side surface provided with a through hole communicating with an outer surface of the teflon plating layer.

6. The vacuum adsorption jig of claim 1, wherein the through holes are circular through holes.

7. The vacuum adsorption jig of claim 1, further comprising a connection portion connected to the hand-held device, wherein a third cavity is provided in the connection portion, the third cavity being in communication with the second cavity;

8. The vacuum suction jig according to claim 7, wherein an elastic sealing structure is disposed in the connecting portion, and the elastic sealing structure can move along the extending direction of the connecting portion under the action of an external force, so that the opening of the connecting portion is opened or closed.

9. The vacuum suction jig of claim 8, wherein the elastic closing structure includes a closing surface closing the connection opening and an elastic means connecting the closing surface, and when the elastic closing structure opens the connection opening, the gas in the first and second cavities communicates with the outside air.

10. The vacuum adsorption jig of claim 9, wherein the other end of the elastic means is connected to an inner wall surface of the vacuum adsorption jig.