CN220474564U - Cooling device for ion beam section grinding - Google Patents
Cooling device for ion beam section grinding Download PDFInfo
- Publication number
- CN220474564U CN220474564U CN202321904942.3U CN202321904942U CN220474564U CN 220474564 U CN220474564 U CN 220474564U CN 202321904942 U CN202321904942 U CN 202321904942U CN 220474564 U CN220474564 U CN 220474564U
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- ion beam
- baffle
- heating unit
- rod
- cooling apparatus
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- 238000010884 ion-beam technique Methods 0.000 title claims abstract description 45
- 238000001816 cooling Methods 0.000 title claims abstract description 37
- 238000000227 grinding Methods 0.000 title abstract description 18
- 238000010438 heat treatment Methods 0.000 claims abstract description 60
- 230000007246 mechanism Effects 0.000 claims abstract description 27
- 238000009413 insulation Methods 0.000 claims abstract description 6
- 239000002344 surface layer Substances 0.000 claims abstract description 4
- 238000003801 milling Methods 0.000 claims description 15
- 239000011229 interlayer Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 230000017525 heat dissipation Effects 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000005485 electric heating Methods 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 47
- 230000000694 effects Effects 0.000 abstract description 25
- 230000001105 regulatory effect Effects 0.000 abstract description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model belongs to the technical field of ion grinding treatment, in particular to a cooling device for ion beam section grinding, which comprises a base, a baffle, a sample holder and a temperature regulating mechanism; a bracket is fixedly arranged on the base; the baffle is arranged on the bracket through an adjusting mechanism; the sample holder is fixedly arranged on the base; the two temperature adjusting mechanisms are respectively and fixedly connected to the baffle plate and the sample holder, and each temperature adjusting mechanism comprises a heat radiating unit and a heating unit arranged on the surface layer of the heat radiating unit; the heating unit includes a plurality of heaters and a heat insulating frame separating the heaters from each other. According to the utility model, the temperature adjusting mechanism is arranged on the baffle and the sample support, so that both sides of the material can be heated by the heating unit, and the thermal effect of the material ion beam during section grinding is reduced more obviously and stably; each heating unit is further separated through the heat insulation frame, so that the heating effect on the materials is influenced, and the effect of reducing the heat effect of the materials is not good enough.
Description
Technical Field
The utility model relates to the technical field of ion grinding treatment, in particular to a cooling device for ion beam section grinding.
Background
Ion beam processing is one of the effective methods for obtaining a true, non-destructive and pollution-free planar surface. Ion milling is an instrument that can perform ion beam processing on a sample in a Scanning Electron Microscope (SEM), and functions that can be performed include ion beam cross-section milling and ion beam plane polishing.
Wherein the principle of section grinding is as follows: the sample is attached to the sample holder, the baffle plate with the very flat upper edge is just close to the sample, and the part of the sample, which is higher than the baffle plate, is blocked at the target height of the sample, can be bombarded by the argon ion beam, so that a flat area which is flush with the baffle plate is obtained. Because the sample is removed in the form of an atom, the removed atom is influenced by the argon ion beam to move to the area outside the sample, so that a nondestructive and pollution-free micro-area which is flush with the upper edge of the baffle can be finally obtained, and the micro-area can be observed and analyzed under the SEM.
While the ion beam bombards the workpiece surface, avoiding surface or subsurface damage caused by pre-compression in conventional processes, the thermal effects associated with physical sputtering effects are still quite significant. According to the research of quality control technology in the ultra-precise manufacturing process of « optical element surfaces, during the ion beam cross-section grinding process, thermal stress is generated on the element surfaces due to non-uniform heating of the element surfaces, and the thermal stress makes the surfaces easy to crack. Therefore, in order to ensure that the material will not crack during ion beam cross section milling to affect the final observation, a cooling device for ion beam cross section milling is proposed.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides a cooling device for ion beam section grinding, which solves the problem that the surface is easy to crack due to thermal stress generated by materials during ion beam section grinding.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a cooling apparatus for ion beam cross-section milling, comprising:
the base is fixedly provided with a bracket;
the baffle is arranged on the bracket through the adjusting mechanism;
the sample support is fixedly arranged on the base;
the two temperature adjusting mechanisms are respectively and fixedly connected to the baffle plate and the sample holder, and each temperature adjusting mechanism comprises a heat radiating unit and a heating unit arranged on the surface layer of the heat radiating unit;
the heating unit comprises a plurality of heaters and a heat insulation frame which separates the heaters from each other, the heat dissipation unit comprises a packaging plate and a water-cooling interlayer, a plurality of waterways distributed in an array are arranged in the water-cooling interlayer, and a water inlet and a water outlet are respectively arranged at two ends of the water-cooling interlayer.
Preferably, the heating unit adopts ptc ceramic electric heating plates.
Preferably, the length of each heating unit corresponds to the length of the baffle plate and the length of the sample holder, and the width of each heating unit is 10mm-30mm.
Preferably, the thickness of each of the heating units is equal.
Preferably, the support comprises a stand column and a cross rod connected with the two stand columns, and the two stand columns are respectively connected to the two bases in a threaded mode.
Preferably, the adjusting mechanism and the baffle are connected together through a buffer component.
Preferably, the adjusting mechanism comprises a connecting plate, a limiting rod and an adjusting rod, wherein the connecting plate and the baffle are fixedly connected with one side of the baffle, which is far away from the sample holder, and the two limiting rods are fixedly connected with the connecting plate and are slidably mounted on the cross rod.
Preferably, the adjusting rod is a screw rod, one end of the adjusting rod, which is close to the baffle plate, is rotationally connected with the connecting plate through a bearing, and the adjusting rod is in threaded connection with the cross rod.
Preferably, the adjusting rod is an electric push rod, the adjusting rod is fixedly arranged on the transverse plate, and one end of the adjusting rod, which is close to the baffle, is fixedly connected with the connecting plate.
Preferably, the cooling device further comprises a controller, and an output end of the controller is in control connection with an input end of each heat radiating unit.
Compared with the prior art, the utility model provides a cooling device for ion beam section grinding, which has the following beneficial effects:
according to the cooling device for ion beam section grinding, the temperature adjusting mechanisms are arranged on the baffle plate and the sample support, so that both sides of a material can be heated by the heating unit, and the thermal effect of the material during ion beam section grinding is reduced more obviously and stably; each heating unit is further separated through the heat insulation frame, so that the heating effect on the materials is influenced, and the effect of reducing the heat effect of the materials is not good enough.
Drawings
FIG. 1 is a schematic perspective view of a cooling apparatus for ion beam cross-section milling;
fig. 2 is a schematic perspective view of a baffle plate in the cooling device for ion beam section grinding.
In the figure: 1. a base; 2. a baffle; 3. a sample holder; 4. a temperature adjusting mechanism; 5. a bracket; 6. an adjusting mechanism; 7. a heat radiation unit; 8. a heating unit; 9. a heater; 10. a thermal insulation frame; 11. a column; 12. a cross bar; 13. a buffer member; 14. a connecting plate; 15. a limit rod; 16. and (5) adjusting the rod.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-2, the present utility model provides the following technical solutions: a cooling device for ion beam section grinding comprises a base 1, a baffle 2, a sample holder 3 and a temperature regulating mechanism 4; wherein: the baffle plate 2 is a plate with a flat end surface in the prior art, and is used for shielding a part of areas of materials to make the bombarded part of surfaces flat when the ion beam section is ground; the sample holder 3 supports a sample; the temperature adjusting mechanism 4 is used for adjusting the temperature of each area of the material, so that the thermal effect of the material is reduced, the situation that the material breaks and cannot obtain a high-quality flat surface is avoided, the ion beam section grinding effect of the material is improved, and the subsequent acquisition of microscopic information of the material by researchers is facilitated;
a bracket 5 is fixedly arranged on the base 1; the baffle plate 2 is arranged on the bracket 5 through an adjusting mechanism 6; the sample holder 3 is fixedly arranged on the base 1; the two temperature adjusting mechanisms 4 are respectively and fixedly connected to the baffle plate 2 and the sample holder 3, and the temperature adjusting mechanisms 4 comprise a heat radiating unit 7 and a heating unit 8 arranged on the surface layer of the heat radiating unit 7; the heating unit 8 comprises a plurality of heaters 9 and a heat insulation frame 10 for separating the heaters 9 from each other, the heat dissipation unit 7 comprises a packaging plate and a water cooling interlayer, a plurality of waterways distributed in an array are arranged in the water cooling interlayer, and a water inlet and a water outlet are respectively arranged at two ends of the water cooling interlayer.
As an alternative implementation scheme of the utility model, by arranging the temperature regulating mechanism 4 on the baffle plate 2 and the sample holder 3, both sides of the material can be heated by the heating unit 8, so that the thermal effect is more obvious and stable when the ion beam section of the material is ground; further, each heating unit 8 is separated by the heat insulating frame 10, so that the mutual influence of heating among the heating units 8 is avoided, the heating effect on the material is influenced, and the effect of reducing the heating effect of the material is not good enough.
As shown in FIG. 1, the heating units 8 are ptc ceramic electric heating plates, the length of each heating unit 8 corresponds to the length of the baffle plate 2 and the length of the sample holder 3, the width of each heating unit 8 is 10mm-30mm, and the thickness of each heating unit 8 is equal. Wherein: the length and the thickness of the heating units 8 are uniform, so that the heating units 8 on the two sides of the material in the same area have the same heating or cooling effect on the material, and the thermal effect of the material is better reduced; the width of the heating unit 8 closer to the ion beam bombardment area is smaller, and the temperature change gradient is denser closer to the ion beam bombardment area, so that the heated area of the material can be better dealt with, and the effect of reducing the thermal effect of the material is more accurate.
As an alternative implementation scheme of the utility model, as the ion beam section is ground under the condition that the baffle plate 2 is used for shielding, the material forms a flush processing surface after being bombarded by the ion beam, so that the heat at the edge shielded by the baffle plate 2 is relatively uniform, and the heating and cooling effects at the edge of the material are the same by adopting the heating unit 8, compared with the current technical scheme, the manufacturing and assembling difficulties of the heating unit 8 are saved, and the processing method is more suitable for processing the flat surface to be obtained.
As shown in fig. 1, the bracket 5 comprises a vertical column 11 and a cross rod 12 connected with the two vertical columns 11, the two vertical columns 11 are respectively connected to the two bases 1 in a threaded manner, the adjusting mechanism 6 and the baffle 2 are connected together through a buffer component 13, the adjusting mechanism 6 comprises a connecting plate 14, a limiting rod 15 and an adjusting rod 16, the connecting plate 14 and the baffle 2 are fixedly connected with one side of the baffle 2 far away from the sample holder 3, and the two limiting rods 15 are fixedly connected with the connecting plate 14 and slidably mounted on the cross rod 12. Wherein: the buffer part 13 has an elastic structure, such as a spring, a soft cushion and the like, and when part of the material expands after being heated, the buffer part 13 can correspondingly move so as to reduce the pressure applied to the material and avoid the material from being broken; the adjusting mechanism 6 is used for adjusting the interval between the baffle plate 2 and the sample holder 3 so as to adapt to materials with different thicknesses.
As shown in fig. 1, the adjusting rod 16 is a screw, one end of the adjusting rod 16 near the baffle plate 2 is rotationally connected with the connecting plate 14 through a bearing, the adjusting rod 16 is in threaded connection with the cross rod 12, and the distance between the baffle plate 2 and the sample holder 3 is adjusted by rotating the screw more stably, so that the device is suitable for materials with low hardness or high brittleness.
As shown in fig. 2, the adjusting rod 16 is an electric push rod, the adjusting rod 16 is fixedly mounted on the transverse plate, one end of the adjusting rod 16, which is close to the baffle plate 2, is fixedly connected with the connecting plate 14, and the electric push rod is used for adjusting the distance between the baffle plate 2 and the sample holder 3 more rapidly, so that the electric push rod is suitable for materials with high hardness and low brittleness.
Specifically, the cooling device further comprises a controller, the output end of the controller is in control connection with the input end of each heat dissipation unit 7, and the heating efficiency of each heating unit 8 can be controlled through the controller, so that the heating efficiency adaptation of the corresponding heating unit 8 on each area of the material is realized.
The working principle and the using flow of the utility model are as follows: placing the materials on a sample holder 3, placing the part to be removed outside the edge of a heating unit 8, adjusting the position of a baffle plate 2 through an adjusting rod 16 to clamp the materials by the baffle plate 2, starting the heating units 8 on two sides of the materials through a controller before grinding the cross section of an ion beam to slowly heat the materials, heating the heating units 8 close to the exposed part of the materials, and sequentially heating other areas; when the section of the ion beam is ground, the heating unit 8 stops heating, the part of the material which is not shielded by the baffle plate 2 is bombarded, and meanwhile, the temperature of the edge part of the material is increased, and as the length and the thickness of the heating unit 8 are uniform, the heating units 8 on the two sides of the material at the same area have the same heating or cooling effect on the material, and the heating effect of the material is better reduced; the width of the heating unit 8 closer to the ion beam bombardment area is smaller, and the temperature change gradient is denser as the heating unit is closer to the ion beam bombardment area, so that the heated material area can be better processed, the effect of reducing the thermal effect of the material is more accurate, and compared with the current technical scheme, the manufacturing and assembly difficulties of the heating unit 8 can be saved, and the heating unit is more suitable for processing of a plane to be obtained. After finishing polishing, the material can be taken away after being slowly cooled.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (10)
1. A cooling apparatus for ion beam cross-section milling, comprising:
the base is fixedly provided with a bracket;
the baffle is arranged on the bracket through the adjusting mechanism;
the sample support is fixedly arranged on the base;
the two temperature adjusting mechanisms are respectively and fixedly connected to the baffle plate and the sample holder, and each temperature adjusting mechanism comprises a heat radiating unit and a heating unit arranged on the surface layer of the heat radiating unit;
the heating unit comprises a plurality of heaters and a heat insulation frame which separates the heaters from each other, the heat dissipation unit comprises a packaging plate and a water-cooling interlayer, a plurality of waterways distributed in an array are arranged in the water-cooling interlayer, and a water inlet and a water outlet are respectively arranged at two ends of the water-cooling interlayer.
2. A cooling apparatus for ion beam cross-section milling as claimed in claim 1, wherein: the heating unit adopts ptc ceramic electric heating plates.
3. A cooling apparatus for ion beam cross-section milling as claimed in claim 1, wherein: the length of each heating unit corresponds to the length of the baffle plate and the length of the sample holder respectively, and the width of each heating unit is 10mm-30mm.
4. A cooling apparatus for ion beam cross-section milling as claimed in claim 1, wherein: the thickness of each heating unit is equal.
5. A cooling apparatus for ion beam cross-section milling as claimed in claim 1, wherein: the support comprises upright posts and a cross rod connected with the two upright posts, and the two upright posts are respectively connected to the two bases in a threaded mode.
6. A cooling apparatus for ion beam cross-section milling as claimed in claim 1, wherein: the adjusting mechanism is connected with the baffle through the buffer component.
7. A cooling apparatus for ion beam cross-section milling as claimed in claim 1, wherein: the adjusting mechanism comprises a connecting plate, a limiting rod and an adjusting rod, wherein the connecting plate and the baffle are fixedly connected with one side, far away from the sample holder, of the baffle, and the two limiting rods are fixedly connected with the connecting plate and slidably mounted on the cross rod.
8. A cooling apparatus for ion beam cross-section milling as claimed in claim 7, wherein: the adjusting rod is a screw rod, one end of the adjusting rod, which is close to the baffle plate, is rotationally connected with the connecting plate through a bearing, and the adjusting rod is in threaded connection with the cross rod.
9. A cooling apparatus for ion beam cross-section milling as claimed in claim 7, wherein: the adjusting rod is an electric push rod and is fixedly arranged on the transverse plate, and one end of the adjusting rod, which is close to the baffle, is fixedly connected with the connecting plate.
10. A cooling apparatus for ion beam cross-section milling according to any one of claims 1-9, wherein: the cooling device further comprises a controller, and the output end of the controller is in control connection with the input end of each heat radiating unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321904942.3U CN220474564U (en) | 2023-07-19 | 2023-07-19 | Cooling device for ion beam section grinding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321904942.3U CN220474564U (en) | 2023-07-19 | 2023-07-19 | Cooling device for ion beam section grinding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220474564U true CN220474564U (en) | 2024-02-09 |
Family
ID=89776901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321904942.3U Active CN220474564U (en) | 2023-07-19 | 2023-07-19 | Cooling device for ion beam section grinding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220474564U (en) |
-
2023
- 2023-07-19 CN CN202321904942.3U patent/CN220474564U/en active Active
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