CN220473895U - Temperature control device of atomic furnace and atomic furnace - Google Patents
Temperature control device of atomic furnace and atomic furnace Download PDFInfo
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- CN220473895U CN220473895U CN202322090598.5U CN202322090598U CN220473895U CN 220473895 U CN220473895 U CN 220473895U CN 202322090598 U CN202322090598 U CN 202322090598U CN 220473895 U CN220473895 U CN 220473895U
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- 238000010438 heat treatment Methods 0.000 claims abstract description 89
- 230000004907 flux Effects 0.000 claims description 6
- 108010083687 Ion Pumps Proteins 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 8
- 238000004321 preservation Methods 0.000 description 8
- 238000005485 electric heating Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000002309 gasification Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910052744 lithium Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical group [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 150000002641 lithium Chemical group 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- GALOTNBSUVEISR-UHFFFAOYSA-N molybdenum;silicon Chemical compound [Mo]#[Si] GALOTNBSUVEISR-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
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Abstract
The utility model provides an atomic furnace temperature control device, including DC power and heating module, the DC power is used for supplying power to temperature control device, heating module is used for heating the atomic furnace, temperature control device still includes first temperature control module, second temperature control module, and the switching module is the relay, and this application utilizes the intermediate relay of taking two switching to go sectional type control to heat, will maintain low temperature operating mode at the lower electric power of standby mode output temperature controller, uses the timer to open high-power temperature controller in advance at the operating mode and heats the loading thing to the required temperature of work, effective energy saving, and the non-operating period adopts lower power temperature controller still can avoid instrument trouble, the unbalanced problem of heating.
Description
Technical Field
The utility model belongs to the field of temperature control equipment, and particularly relates to an atomic furnace temperature control device and an atomic furnace.
Background
The atomic furnace is a heating device for generating vacuum sputtering atomic molecular beams, and the vacuum sputtering atomic molecular beams have wide application in condensed state physical, atomic molecular physical and chemical instruments. The atomic furnace needs to be maintained at different temperatures in various working states such as use and standby. In the standby state, the atomic material consumption needs to be reduced under a proper low-temperature working condition, and when the atomic material consumption is switched to the working state, the atomic material consumption needs to be maintained at a higher temperature to ensure stable and enough atomic molecular beam output, and in the emergency or equipment failure state, the power supply needs to be alarmed and completely cut off so as to ensure the safety of equipment. Therefore, a heating controller capable of switching multiple working conditions with accurate temperature control capability is needed to meet the above functional requirements.
The atomic furnace temperature control device disclosed in the prior art basically needs to be manually switched under different working conditions, and according to a specific technical scheme, the problems of low electric heating efficiency or electromagnetic interference and the like can be caused by adopting a PWM (Pulse Width Modulation ) temperature control technology. As disclosed in chinese patent CN203276066U, an automatic temperature control device for an atomic furnace is disclosed, a single-chip microcomputer is used for calculating and controlling the temperature, when the temperature needs to be adjusted, the single-chip microcomputer needs to be operated and adjusted again, the heating efficiency is low, the technical scheme does not have over-temperature protection, the same set of equipment is used for heating and heat preservation, the maximum power is far higher than the power required for heat preservation, and if no person value is in time, serious consequences are caused if faults occur; CN206021107U discloses a temperature control low-power consumption atomic furnace, adjusts the temperature of atomic furnace through adjusting the output voltage of steady voltage chip, and control circuit is the single way, and the temperature control time is longer, and manual slide rheostat control is comparatively loaded down with trivial details, steady voltage chip output power heating power undersize, and the control by temperature change closed loop mode is comparatively simple, and single proportion circuit control temperature accuracy keeps relatively poor.
Disclosure of Invention
Based on prior art's problem, this application provides an atomic furnace temperature control device and atomic furnace, and its simple structure adopts DC control, realizes double-circuit automatic temperature control, and heating efficiency is high to can carry out the nimble adjustment of temperature according to actual conditions.
In order to solve the technical problems, the technical proposal adopted by the application is that,
the atomic furnace temperature control device comprises a DC power supply and a heating module, wherein the DC power supply is used for supplying power to the temperature control device, the heating module is used for heating the atomic furnace,
the temperature control device also comprises a first temperature control module, a second temperature control module and a switching module,
the first temperature control module and the second temperature control module can independently control the temperature of the atomic furnace,
the first temperature control module can control the atomic furnace to heat according to a preset temperature curve and finally reach a first temperature, wherein the first temperature is a temperature at which an atomic furnace heating object is changed into an atomic beam, and the atomic beam enters the vacuum cavity according to a preset flux;
the second temperature control module can control the atomic furnace to keep a second temperature, wherein the second temperature is a temperature for keeping the atomic furnace in a low-load working state of the ion pump;
the heating module is connected with the switching component and is used for heating the atomic furnace to a first temperature or a second temperature;
the switching component is used for alternatively controlling the first temperature control module or the second temperature control module to independently work;
the switching component is controlled by DC voltage, and the maximum working current of the switching component is more than or equal to 10A.
The switching component comprises a normally open port and a normally closed port.
As a preferable scheme, the ordinate of the temperature curve is the atomic furnace temperature, the abscissa is the time, the initial temperature of the temperature curve is the second temperature, the end temperature is the first temperature, the temperature curve is derived to obtain the temperature rise rate of the temperature curve, and the temperature rise rate of the temperature curve is 1-4 ℃/min.
As a preferred embodiment, the switching element is an intermediate relay.
As a preferable scheme, the atomic furnace temperature control device further comprises a timer, wherein the timer is connected with the control end of the intermediate relay and used for controlling the switching of the intermediate relay.
As a preferred solution, the common end of the intermediate relay is connected to the heating module.
As a preferable scheme, the normally open end of the intermediate relay is connected with the first temperature control module and used for controlling the first temperature control module to operate.
As a preferred scheme, chang Biduan of the intermediate relay is connected with the second temperature control module and used for controlling the operation of the second temperature control module.
As a preferable scheme, the first temperature control module comprises a heating controller and a first temperature sensor, wherein one end of the heating controller is connected with the normally open end of the intermediate relay, and the other end of the heating controller is connected with the first temperature sensor.
As a preferable scheme, the second temperature control module comprises a constant temperature controller and a second temperature sensor, wherein one end of the constant temperature controller is connected with the normally closed end of the intermediate relay, and the other end of the constant temperature controller is connected with the second temperature sensor.
As a preferable scheme, the atomic furnace temperature control device further comprises a protection module, the module comprises a third temperature sensor, the third temperature sensor can detect the temperature of the atomic furnace, and when the temperature of the atomic furnace is higher than 430 ℃, the protection module automatically cuts off power supply of a power supply.
Preferably, when the atomic furnace comprises an ultrahigh vacuum tweezer ring, the protection module automatically cuts off the power supply when the temperature of the atomic furnace is higher than 450 ℃.
Preferably, the protection module further comprises a temperature alarm and a protection relay, one end of the temperature alarm is connected with the third temperature sensor, the other end of the temperature alarm is connected with the protection relay, the protection relay is connected with a power supply, and the power supply of the power supply and the temperature control device can be directly cut off.
The atomic furnace comprises an atomic furnace temperature control device and also comprises a furnace body, wherein the atomic furnace temperature control device is used for heating the furnace body so as to enable a heating object in the furnace body to be changed into a gaseous state.
As a preferable scheme, the heating object in the furnace body is liquid or solid-liquid mixture.
The application has the advantages that:
1. the utility model provides a multi-working condition temperature control device utilizes the intermediate relay that takes two to open two to close to go sectional type control to heat, will maintain low temperature operating mode at the lower electric power's of standby mode output temperature controller, uses the timer to open high-power temperature controller in advance at the operating mode and heats the loading thing to the required temperature of work, effective energy saving, and the non-operating period adopts lower power temperature controller still can avoid instrument trouble, the unbalanced problem of heating.
2. The DC power supply is adopted for output, no power frequency interference is caused when the mains supply is adopted for supplying power, the power supply voltage is controllable, and the adaptive heating device is more.
3. The relay is adopted as a switching component, physical connection and non-semiconductor mode control are adopted, larger current can be passed, the heating efficiency is higher, the device does not generate heat, and the overall cost is lower.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered limiting the scope, and that other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a temperature control device according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram of overall control logic of a temperature control device according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram of overall control logic of a protection module according to an embodiment of the present disclosure;
fig. 4 is a preset heating curve according to an embodiment of the present application.
Description of the embodiments
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present application, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships that are conventionally put in use of the inventive product, are merely for convenience of description of the present application and simplification of description, and do not indicate or imply that the apparatus or element to be referred to must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal," "vertical," "overhang," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present application, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.
It should be noted that, in the case of no conflict, different features in the embodiments of the present application may be combined with each other.
The atomic furnace provided by the application is mainly used for generating an atomic vapor stream (atomic beam stream) and conveying gaseous atoms into a two-dimensional magneto-optical trap cavity (not shown in the application) communicated with the atomic furnace so as to study cold atom related problems, and has high requirements on temperature control.
Referring to fig. 1, an embodiment of the present application provides an atomic furnace temperature control device on the one hand, including DC power and heating module, the DC power is used for supplying power to temperature control device, heating module is used for heating the atomic furnace, and this application mainly adopts the DC power, utilizes the DC current as the heat source, has the power frequency interference when there is not the mains supply, and supply voltage is controllable, adapts to heating device more advantage.
Here, the heating module is mainly used for heating the atomic furnace, and the electric heating device in the prior art can be used as a core device of the heating module, for example, a device capable of converting electric energy into heat energy, such as an electric heating wire, a thermistor, an electric heating film and the like, can be selected according to actual working conditions, and the material selection of the electric heating device is also various, for example, silicon molybdenum, silicon carbon, molybdenum wires, molybdenum plugs, molybdenum electrodes, alloy materials and the like can be selected, and the electric heating device can be flexibly selected according to the actual working conditions of the atomic furnace and the material to be atomized.
The temperature control device provided by the application also comprises a first temperature control module, a second temperature control module and a switching module,
the first temperature control module and the second temperature control module can independently control the temperature of the atomic furnace, and the first temperature control module and the second temperature control module can independently work.
The first temperature control module can control the temperature of the atomic furnace to rise according to a preset temperature curve, and finally the first temperature is reached, wherein the first temperature is the temperature at which an object heated by the atomic furnace is changed into atomic beam current, and the atomic beam current enters the atomic furnace according to a preset flux, and can be considered as the first temperature is generally the gasification temperature of metal. For example, if the heating target is lithium, the flux is 10 12 And/s, according toThe thermal evaporation sputtering principle is combined with the final required lithium atom flux, so that the energy or momentum required by sputtering can be calculated, and then converted into temperature; for example, if the heating target is lithium, the flux is 10 12 And/s, the target temperature is 350 ℃. The first temperature is related to the beam current density when the atomic furnace works, and the higher the required beam current density is, the higher the first temperature is, but the first temperature is limited by the material performance of the vacuum sealing ring and is generally less than 450 degrees.
The second temperature control module can control the atomic furnace to maintain a second temperature, wherein the second temperature is a temperature at which the atomic furnace is kept in a state that the ion pump is not operated, and is generally kept in a liquid state. The lower temperature can effectively reduce the consumption of atomic materials, but still needs to keep a certain temperature difference with the room temperature, so that the degree of thermal expansion and cold contraction of the atomic furnace can be reduced, and the welded joint of the vacuum cavity is ensured not to generate cracks, thereby damaging the vacuum degree of the vacuum cavity.
The second temperature is generally lower than the first temperature, and the second temperature control module with lower electric power maintains a low-temperature working condition, namely maintains the second temperature instead of the room temperature under the standby working condition of the atomic furnace; when working conditions are met, the temperature controller is switched to a high-power temperature controller, substances in the atomic furnace can be heated to a first temperature according to a heating curve, so that the required temperature is improved to be low, and the atomic furnace can be started quickly. In addition, the second temperature controller with lower power is adopted in the non-working period of standby, so that the problems of instrument failure and heating unbalance can be avoided.
The power of the first temperature control module is Q1, the power of the second temperature control module is required to reach Q2, Q1/V is required to reach the first temperature, Q2/V is required to reach the second temperature, and V is the working voltage of the whole temperature control device. The first temperature and the second temperature which are needed are not reached by the too low power, and the cost of the temperature control module with the too high power is too high, so that the temperature control module with the proper power needs to be selected.
The heating module is connected with the switching component and used for heating the atomic furnace to a first temperature or a second temperature, the first temperature control module is communicated with the heating module through the switching component, and the heating module is controlled by signals of the temperature control module to heat the atomic furnace to a required temperature.
The switching component is used for alternatively controlling the first temperature control module or the second temperature control module to independently work; the switching component plays a role in switching the working link, when the switching component is switched to the first temperature control module, the whole working circuit of the first temperature control module is communicated to start working, and at the moment, the second temperature control module is closed; when the switching component is switched to the second temperature control module, the whole working circuit of the second temperature control module is communicated and starts to work, at the moment, the first temperature control module is closed, and the whole working circuit of the second temperature control module is communicated and starts to work.
The switching component is controlled by DC voltage, and the maximum working current of the switching component is more than or equal to 10A.
The whole system is powered by a DC power supply, and in a general scene, the DC voltage is lower, generally, the voltage of a commercial direct current power supply is lower than 30V, and the heating power is higher, so that the system needs to be held by a large current.
Further, the switching component needs to include a normally open port and a normally closed port. The normally open port is used for being connected with the first temperature control module, and the normally closed port is used for being connected with the second temperature control module. When the switching component is in a normally closed state, namely in a standby state of the atomic furnace, the second temperature control module works at the moment, and the atomic furnace is maintained at the second temperature.
The switching component in the application can have various choices, and in the case of meeting the above working conditions, the switching component can be a Single Pole Double Throw (SPDT) switch, a high power semiconductor device (silicon controlled rectifier, IGBT) for example.
In one embodiment of the present application, the ordinate of the temperature curve is the atomic furnace temperature, the abscissa is the time, the initial temperature of the temperature curve is the second temperature, the end temperature is the first temperature, the temperature curve is derived to obtain the temperature change slope of the temperature curve, the temperature curve is derived to obtain the temperature rise rate of the temperature curve, and the temperature rise rate of the temperature curve is 1-4 ℃/min. The proper temperature rising rate can be maintained, so that the working health of the furnace body and the temperature rising rate can be considered.
In an embodiment of the present application, the temperature curve may also be divided into multiple sections, for example, including a heat preservation section, a buffer section, and a gasification heating section, where the temperature of the heat preservation section is between a second temperature and 30-60 ℃ higher than the second temperature, for example, 30, 40, 50, 60 ℃ higher, and the duration of the heat preservation section is 10-30 min, for example, 10, 15, 20, 25, 30min; the temperature of the buffer section is 30-60 ℃ higher than the end temperature of the heat preservation section, for example, 30, 40, 50 and 60 ℃ higher than the end temperature of the heat preservation section, and the duration of the buffer section is 10-30 min, for example, 10, 15, 20, 25 and 30min; the temperature of the gasification heating section is from the end temperature of the buffer section to the first temperature, and the duration of the gasification section is 20-30 min, for example, 20, 22, 24, 26, 28 and 30 min.
In the application, the temperature is required to be slowly increased according to a temperature curve, and if the temperature is directly increased to a first temperature, the defect that the atomic furnace expands with heat and contracts with cold too quickly exists. Referring to fig. 4, fig. 4 is a typical heating curve in an embodiment of the present application, where the substance to be heated in the atomic furnace is Li, it can be seen that the purpose of slowly heating and protecting the atomic furnace can be effectively achieved by controlling the heating rate to be 2.5 ℃/min as a whole.
In a specific embodiment of the present application, the switching component is an intermediate relay. The relay has the advantages of overlarge current, low cost, reliable performance, no loss of physical connection power and the like, so the relay is used as a switching component.
In a specific embodiment of the present application, the atomic furnace temperature control device further includes a timer, where the timer is connected to the control end of the intermediate relay, and is used to control the switching of the intermediate relay. The control logic is as shown in fig. 2, and the timer can be used for controlling the atomic furnace to enter the working state in advance in the non-working period, namely reaching the first temperature, without waiting for the slow heating time of the atomic furnace. Here, the timer can also be replaced by other modules with similar functions, such as a PLC control module.
The switching of the intermediate relay refers to the switching of the intermediate relay between different working ports, for example, a timer can control the intermediate relay to switch to a normally open port, switch to a normally closed port and the like, so that the function of independently controlling the temperature control module is realized. The different ports are switched from normally closed to normally open and normally closed to default. The normally closed state is used for controlling the second temperature control module and controlling the atomic furnace to reach a second temperature; the normally open state is to control the first temperature control module, and the atomic furnace can be controlled to reach the first temperature. The normally closed end is in a default state, when the control device (timer) fails (for example, power is cut off, power failure is restarted), the default is low power output, the normally closed end is consistent with a non-working state, and the unattended operation is safer.
In a specific embodiment of the present application, the common end of the intermediate relay is connected to the heating module. The common end of the intermediate relay is connected with the controlled equipment or device, and the control state of the device can be switched.
In a specific embodiment of the present application, a normally open end of the intermediate relay is connected to the first temperature control module, and is used for controlling the first temperature control module to operate.
In one embodiment of the present application, when the operating current through the intermediate relay is large, the normally open end of the intermediate relay is connected to the first temperature control module. The magnitude of the working current can be flexibly adjusted by adjusting the magnitude of the output voltage of the DC power supply, and the intermediate relay is automatically switched without manual intervention. When the current is larger, the intermediate relay controls the first temperature control module, has stronger heating power and can reach higher first temperature.
In a specific embodiment of the present application, the intermediate relay Chang Biduan is connected to the second temperature control module and is used for controlling the operation of the second temperature control module.
In a specific embodiment of the present application, it is characterized in that: when the working current passing through the intermediate relay is smaller, the normally-closed end of the intermediate relay is connected with the second temperature control module. In the same way as in the above embodiment, the magnitude of the working current can be flexibly adjusted by adjusting the magnitude of the output voltage of the DC power supply, and the intermediate relay is automatically switched without manual intervention. When the current is smaller, the intermediate relay controls the second temperature control module to have lower heating power and can be heated to or maintained at the second temperature.
The connection state of the relay is related to the working state, and the passing current is larger when the relay works, namely the first temperature control module is controlled, and the current in the non-working state is smaller, namely the second temperature control module is controlled.
In a specific embodiment of the present application, the first temperature control module includes a heating controller and a first temperature sensor, where one end of the heating controller is connected to a normally open end of the intermediate relay, and the other end is connected to the first temperature sensor. The first temperature sensor can detect the temperature of the atomic furnace, and the temperature can be fed back to the first temperature sensor to perform heating control, and can be heated to or maintained at the first temperature.
In a specific embodiment of the present application, the second temperature control module includes a constant temperature controller and a second temperature sensor, where one end of the constant temperature controller is connected to the normally closed end of the intermediate relay, and the other end is connected to the second temperature sensor. The second temperature sensor can detect the temperature of the atomic furnace, and the temperature can be fed back to the second temperature sensor for heating control, and can be heated to or maintained at the second temperature.
Here, the first temperature control module and the second temperature control module are connected in parallel, the first temperature control module and the second temperature control module can work on the heating devices which are different independently, the temperature control module belongs to mature equipment, and the temperature control module with perfect power supply can work independently by being directly connected to the heating devices.
The heating controller and the constant temperature controller can be conventional temperature controllers, such as a kick temperature controller, a liquid expansion temperature controller, a pressure temperature controller, an electronic temperature controller and the like, and the requirements for parameters of the temperature controllers are as follows: the direct current voltage supplies power to the temperature controller, and the power meets the requirement of heating to the set temperature. The first temperature sensor and the second temperature sensor may be thermal resistance type sensors or thermocouple type sensors, and in a specific embodiment, the temperature resistance of the first temperature sensor is higher than 400 ℃. The heating module in this application should correspond with heating, constant temperature controller, and other heating structures can be used to the heating module to replace, but need match corresponding temperature controller.
The common heating device is heated by thermal resistance, the resistance value is a constant value (the temperature drift is not very far away from the spectrum) at a specific temperature, the temperature controller is basically a constant voltage source, the constant voltage source supplies too large voltage to the thermal resistance, the instantaneous power of heating is very high, the regulation and control are very troublesome, pulse heating (the high level section of PWM regulation and control is too narrow), the heating power is too small, and the heating is not enough to reach the set temperature.
In a specific embodiment of the present application, in order to avoid the problem that the temperature exceeds the limit due to component failure, the present technical solution further includes a protection module, where the module includes a third temperature sensor, the third temperature sensor may detect the temperature of the atomic furnace, and when the temperature of the atomic furnace exceeds 430 ℃, the protection module automatically cuts off the power supply of the power supply, and the protection module is connected with the DC power supply, so as to mainly play a role in automatic shutdown due to the over-temperature, and its working logic is shown in fig. 3. In one embodiment, when the material in the atomic furnace is lithium metal, the first working temperature should be 350 ℃, and when the temperature exceeds 390 ℃, the working state is switched to the heat-preserving state, and the power supply can be turned off at 430 ℃.
In one specific embodiment of the application, the atomic furnace comprises an ultra-high vacuum forceps ring, and the protection module automatically cuts off power supply when the temperature of the atomic furnace is higher than 450 ℃.
In another embodiment of the present application, under certain conditions, when the temperature of the atomic furnace exceeds the first temperature by 10 ℃, the over-temperature automatic shutoff function is also automatically turned on.
In a specific embodiment of the present application, the protection module further includes a temperature alarm and a protection relay, one end of the temperature alarm is connected with the third temperature sensor, the other end is connected with the protection relay, and the protection relay is connected with the power supply.
In one embodiment of the present application, a block diagram of an atomic furnace temperature control device is provided as shown in fig. 1.
The utility model also provides an atomic furnace, including foretell atomic furnace temperature control device, still include the furnace body, atomic furnace temperature control device is used for heating the furnace body so that the heating object in the furnace body becomes the gaseous state.
In a specific embodiment of the application, when the temperature control device is used in an actual working condition, the constant temperature controller in the second heating module is set to a required temperature, and the atomic furnace to be heated is heated to a preset second temperature and kept constant, so that the whole device operates under the condition of reduced energy consumption, and the basic temperature is maintained; when the atomic furnace needs to be heated during operation, a timer is used, the intermediate relay is switched from a normally closed end to a normally open end, a heating temperature controller in the first heating module is set to a required temperature, the temperature of the atomic furnace is raised to a working state and maintained through a heating device, and the temperature is controlled by switching back to the second heating module during a non-working period.
When the device does not work, the heating device that this application used only unidirectional temperature control's ability, and constant temperature controller begins and can not work, and the temperature can be from the comparatively slow reduction of first temperature to the second temperature, owing to have the heat preservation outside the atomic stove, therefore the slower of temperature reduction does not have the problem of temperature abrupt drop. When the temperature of the atomic furnace is reduced to the second temperature, the constant temperature controller can intervene to maintain the constant temperature of the atomic furnace. In the face of possible overrun of temperature, the device is provided with a protection module, and after the protection module detects overtemperature alarm, the whole device is turned off until the device is manually restarted after inspection.
Claims (12)
1. The atomic furnace temperature control device comprises a DC power supply and a heating module, wherein the DC power supply is used for supplying power to the temperature control device, the heating module is used for heating the atomic furnace,
the temperature control device also comprises a first temperature control module, a second temperature control module and a switching module,
the first temperature control module and the second temperature control module can independently control the temperature of the atomic furnace,
the first temperature control module can control the atomic furnace to heat according to a preset temperature curve and finally reach a first temperature, wherein the first temperature is a temperature at which an atomic furnace heating object is changed into an atomic beam, and the atomic beam enters the vacuum cavity according to a preset flux;
the second temperature control module can control the atomic furnace to keep a second temperature, wherein the second temperature is a temperature at which the atomic furnace is kept in standby and the ion pump is in low-load operation;
the heating module is connected with the switching component and is used for heating the atomic furnace to a first temperature or a second temperature;
the switching component is used for alternatively controlling the first temperature control module or the second temperature control module to independently work;
the switching component is controlled by DC voltage, and the maximum working current of the switching component is more than or equal to 10A.
2. The atomic furnace temperature control device according to claim 1, wherein: the ordinate of the temperature curve is the atomic furnace temperature, the abscissa is the time, the initial temperature of the temperature curve is the second temperature, the end temperature is the first temperature, the temperature curve is derived to obtain the temperature rise rate of the temperature curve, and the temperature rise rate is 1-4 ℃/min.
3. The atomic furnace temperature control device according to claim 1, wherein: the switching component is an intermediate relay.
4. The atomic furnace temperature control device according to claim 3, wherein: the atomic furnace temperature control device further comprises a timer, wherein the timer is connected with the control end of the intermediate relay and used for controlling the switching of the intermediate relay.
5. The atomic furnace temperature control device according to claim 3, wherein: and the common end of the intermediate relay is connected with the heating module.
6. The atomic furnace temperature control device according to claim 3, wherein: and the normally open end of the intermediate relay is connected with the first temperature control module and is used for controlling the first temperature control module to operate.
7. The atomic furnace temperature control device according to claim 3, wherein: the intermediate relay Chang Biduan is connected with the second temperature control module and used for controlling the operation of the second temperature control module.
8. The atomic furnace temperature control device according to claim 3, wherein: the first temperature control module comprises a heating controller and a first temperature sensor, wherein one end of the heating controller is connected with the normally open end of the intermediate relay, and the other end of the heating controller is connected with the first temperature sensor.
9. The atomic furnace temperature control device according to claim 3, wherein: the second temperature control module comprises a constant temperature controller and a second temperature sensor, wherein one end of the constant temperature controller is connected with the normally closed end of the intermediate relay, and the other end of the constant temperature controller is connected with the second temperature sensor.
10. The atomic furnace temperature control device according to claim 1, wherein: the atomic furnace temperature control device further comprises a protection module, the module comprises a third temperature sensor, the third temperature sensor can detect the temperature of the atomic furnace, and when the temperature of the atomic furnace is higher than 430 ℃, the protection module automatically cuts off power supply of a power supply.
11. The atomic furnace temperature control device according to claim 10, wherein: the protection module further comprises a temperature alarm and a protection relay, one end of the temperature alarm is connected with the third temperature sensor, the other end of the temperature alarm is connected with the protection relay, and the protection relay is connected with a power supply.
12. An atomic furnace comprising the atomic furnace temperature control device according to any one of claims 1 to 11, further comprising a furnace body, wherein the atomic furnace temperature control device is used for heating the furnace body so as to change a heating object in the furnace body into a gaseous state.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322090598.5U CN220473895U (en) | 2023-08-04 | 2023-08-04 | Temperature control device of atomic furnace and atomic furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322090598.5U CN220473895U (en) | 2023-08-04 | 2023-08-04 | Temperature control device of atomic furnace and atomic furnace |
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| CN220473895U true CN220473895U (en) | 2024-02-09 |
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| CN202322090598.5U Active CN220473895U (en) | 2023-08-04 | 2023-08-04 | Temperature control device of atomic furnace and atomic furnace |
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| CN (1) | CN220473895U (en) |
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