CN220468140U - Improve ALD aluminium oxide around plating and improve aluminium boat device - Google Patents
Improve ALD aluminium oxide around plating and improve aluminium boat device Download PDFInfo
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- CN220468140U CN220468140U CN202322321986.XU CN202322321986U CN220468140U CN 220468140 U CN220468140 U CN 220468140U CN 202322321986 U CN202322321986 U CN 202322321986U CN 220468140 U CN220468140 U CN 220468140U
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- groove
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- bar
- groove rod
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 27
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 27
- 238000007747 plating Methods 0.000 title claims abstract description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims description 15
- 239000004411 aluminium Substances 0.000 title description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 52
- 239000010703 silicon Substances 0.000 claims abstract description 52
- 235000012431 wafers Nutrition 0.000 claims abstract description 52
- 238000004804 winding Methods 0.000 abstract description 15
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000000231 atomic layer deposition Methods 0.000 abstract 2
- 238000005516 engineering process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to the technical field of solar cell manufacturing equipment, and discloses an improved aluminum boat device for improving ALD (atomic layer deposition) aluminum oxide winding plating, which comprises two side plates, wherein one end of a side grooved bar is connected with one of the side plates through a rebound piece, the side grooved bar moves along the axial direction of the side grooved bar through the rebound piece so as to enable the side grooved bar to be switched between a first working condition and a second working condition, and tooth grooves on the upper grooved bar, the side grooved bar and the lower grooved bar are respectively arranged in a one-to-one correspondence manner in the first working condition, and the side surface of a silicon wafer is a plane; and in the second working condition, the tooth grooves on the side groove bars translate relative to the tooth grooves on the upper groove bar and the lower groove bar, and the side surfaces of the silicon wafers are curved surfaces. The utility model can bend the silicon wafers so that two silicon wafers with the same groove are tightly attached, ensure the thickness and the area of the degree of winding and improve the rate of quality products.
Description
Technical Field
The utility model relates to the technical field of solar cell manufacturing equipment, in particular to an aluminum boat device for improving ALD aluminum oxide around plating.
Background
The tubular ALD alumina technology has become an important process in the pec/topcon technology path of photovoltaic cells. Because the silicon wafer is required to deposit a layer of alumina on the back and front surfaces by using an ALD technology in the manufacturing process of the battery piece to achieve the ideal passivation effect, in the tubular ALD technology, the silicon wafer is required to be vertically inserted into a groove in an aluminum boat for the process. However, in view of the ALD technology, two silicon wafers are inserted back to back in a groove, which inevitably results in another aluminum oxide (commonly called a degree of winding, hereinafter referred to as a degree of winding) with an indefinite thickness/indefinite area, and the degree of winding increases difficulty in matching the screen sintering temperature and slurry at the rear end, and also increases the risk of product failure. By using a specific design, the thickness and the area of the winding degree can be effectively relieved by enabling two back-to-back silicon wafers to be more closely attached, and the rebound setting device is designed in the aluminum boat and comprises a spring and a cylinder mode, so that the rebound purpose is achieved. Therefore, the design of the rebound position of the aluminum boat and the rebound stroke are critical, and the rebound position is lower/higher, so that the aluminum boat can be tightly attached and loose, namely the degree of winding is serious, and the degree of winding is slight, so that the risk of winding is increased; too short rebound stroke can lead to the fact that two silicon wafers cannot be tightly attached, too long stroke can lead to the risks of scratching, hidden cracking and fragmentation of the silicon wafers, and finally the high-quality product rate of the product can be affected.
Disclosure of Invention
The utility model aims to provide an improved aluminum boat device for improving ALD aluminum oxide winding plating, which solves the problems in the prior art, can realize the rapid adjustment of the position and angle of an osteotomy groove, is simple to operate and improves the convenience of operation.
In order to achieve the above object, the present utility model provides the following solutions: the utility model provides an improved aluminum boat device for improving ALD aluminum oxide coiling plating, which comprises:
the two sides of the top between the two side plates are respectively provided with an upper groove rod; a side groove bar is respectively arranged on two sides of the middle part between the two side plates; a lower groove rod is respectively arranged at two sides of the bottom between the two side plates; the upper groove rod, the side groove rod and the lower groove rod enclose a loading cavity for loading silicon wafers, a plurality of pairs of silicon wafers are arranged in the loading cavity at intervals, two silicon wafers arranged in pairs are clamped with tooth grooves on the upper groove rod, the side groove rod and the lower groove rod which are positioned on the same plane, and the side surfaces of the two silicon wafers in the same pair are propped against each other;
one end of the side grooved bar is connected with one side plate through a rebound piece, the side grooved bar moves along the axis direction of the side grooved bar through the rebound piece, so that the side grooved bar is switched between a first working condition and a second working condition, tooth grooves on the upper grooved bar, the side grooved bar and the lower grooved bar are respectively arranged in one-to-one correspondence in the first working condition, and the side surface of the silicon wafer is a plane; and in the second working condition, the tooth grooves on the side groove bars translate relative to the tooth grooves on the upper groove bar and the lower groove bar, and the side surfaces of the silicon wafers are curved surfaces.
Preferably, a side hole is formed in one side plate, an elastic piece is arranged in the side hole and abuts against one end of the side groove rod, a limiting groove is formed in the other side plate, an extending hole is formed in the bottom of the limiting groove, the other end of the side groove rod is inserted into the limiting groove, an extending block is fixedly connected to the end face of the side groove rod and penetrates through the extending hole, and the outer wall of the side groove rod is in sliding contact with the inner wall of the limiting groove;
during the first working condition, the extending block is retracted into the extending hole, and a gap exists between the end face of the side grooved bar and the bottom of the limiting groove; and in the second working condition, the extending block extends out of the extending hole, and the side groove rod is propped against the bottom of the limiting groove.
Preferably, the resilient member includes:
the cover plate is fixedly connected to the side plate through bolts, and the end face of the side groove rod abuts against the cover plate through springs.
Preferably, the side grooved bars are arranged to be rectangular in section, and the side holes and the limiting grooves are all arranged to be rectangular structures matched with the side grooved bars.
Preferably, the top both sides edge of curb plate with the mounting groove has been seted up respectively to the bottom both sides edge of curb plate, go up the stick with the stick both ends of side groove respectively with the mounting groove grafting, just go up the stick with the stick both ends of side groove respectively with two the curb plate passes through bolted connection.
Preferably, the upper groove bar and the side groove bar are provided with rectangular cross sections, and the mounting groove is provided with a rectangular structure matched with the upper groove bar and the side groove bar.
The utility model discloses the following technical effects: according to the utility model, the existing aluminum boat structure is modified, in order to overcome the defect that the existing aluminum boat has unstable aluminum oxide winding degree, the positions of the side grooved bars and the rebound stroke of the rebound piece are adjusted, so that more stable and closer adhesion of silicon wafers can be realized, the winding degree of ALD aluminum oxide is reduced and relieved, the process is more stable, and the production line high-quality product rate is higher and more stable.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an improved ALD alumina-wrap-around aluminum boat apparatus in accordance with the present utility model;
FIG. 2 is an enlarged view of a portion of A1 of FIG. 1;
FIG. 3 is an enlarged view of a portion of A2 of FIG. 1;
FIG. 4 is a top view of the present utility model;
FIG. 5 is a schematic view of a cover plate according to the present utility model;
wherein, 1, a side plate; 2. a groove bar is arranged; 3. a side grooved bar; 4. a lower groove bar; 5. a protruding block; 6. a cover plate; 7. and (3) a spring.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.
Referring to fig. 1-5, the present utility model provides an improved ALD alumina wrap-around aluminum boat assembly comprising:
two upper groove bars 2 are respectively arranged on two sides of the top between the two side plates 1; two sides of the middle part between the two side plates 1 are respectively provided with a side grooved bar 3; a lower groove rod 4 is respectively arranged at two sides of the bottom between the two side plates 1; the upper groove rod 2, the side groove rod 3 and the lower groove rod 4 enclose a loading cavity for loading silicon wafers, a plurality of pairs of silicon wafers are arranged in the loading cavity at intervals, and two silicon wafers arranged in pairs are clamped with tooth grooves on the upper groove rod 2, the side groove rod 3 and the lower groove rod 4 which are positioned on the same plane, and the side surfaces of the two silicon wafers in the same pair are propped against each other;
one end of a side grooved bar 3 is connected with one side plate 1 through a rebound piece, the side grooved bar 3 moves along the axial direction of the side grooved bar 3 through the rebound piece, so that the side grooved bar 3 is switched between a first working condition and a second working condition, and tooth grooves on an upper grooved bar 2, the side grooved bar 3 and a lower grooved bar 4 are respectively arranged in a one-to-one correspondence mode in the first working condition, and the side face of a silicon wafer is a plane; and in the second working condition, the tooth grooves on the side groove bars 3 translate relative to the tooth grooves on the upper groove bar 2 and the lower groove bar 4, and the side surfaces of the silicon wafers are curved surfaces.
According to the utility model, the existing aluminum boat structure is modified, in order to overcome the defect that the existing aluminum boat has unstable aluminum oxide winding degree, the positions of the side grooved bars 3 and the rebound stroke of the rebound piece are adjusted, so that more stable and closer adhesion of silicon wafers can be realized, the winding degree of ALD aluminum oxide is reduced and relieved, the process is more stable, and the production line quality product rate is higher and more stable.
According to a further optimization scheme, a side hole is formed in one side plate 1, an elastic piece is arranged in the side hole and abuts against one end of a side groove rod 3, a limiting groove is formed in the other side plate 1, an extending hole is formed in the bottom of the limiting groove, the other end of the side groove rod 3 is inserted into the limiting groove, an extending block 5 is fixedly connected to the end face of the side groove rod 3, the extending block 5 penetrates through the extending hole, and the outer wall of the side groove rod 3 is in sliding contact with the inner wall of the limiting groove;
in the first working condition, the extension block 5 is retracted into the extension hole, and a gap exists between the end face of the side groove bar 3 and the bottom of the limit groove; in the second working condition, the extending block 5 extends from the extending hole, and the side groove rod 3 abuts against the bottom of the limiting groove.
When the silicon wafer is installed and loaded, the side grooved bars 3 are in a first working condition, and the external equipment (such as a cylinder) presses the extension blocks 5 into the extension holes, so that the extension blocks 5 are positioned in the extension holes, tooth grooves on the upper grooved bars 2, the side grooved bars 3 and the lower grooved bars 4 are respectively arranged in a one-to-one correspondence manner, and the silicon wafer is loaded; in the second working condition, the external equipment is in release contact with the extending block 5, the extending block 5 extends from the extending hole, and tooth grooves on the side groove bars 3 are staggered relative to the tooth grooves on the upper groove bar 2 and the lower groove bar 4, so that the silicon wafers are bent to a certain extent, and the two silicon wafers with the same groove are attached more tightly.
Further preferably, the rebound member includes:
the cover plate 6 is fixedly connected to the side plate 1 through bolts, and the end face of the side groove rod 3 abuts against the cover plate 6 through springs 7.
The spring 7 is mainly used for compressing the silicon wafer after rebound, reducing gaps between the silicon wafer and the silicon wafer, further reducing the winding degree effect, after the silicon wafer is inserted into the groove, the side groove rod 3 rebounds for a certain distance under the action of the spring 7, and the upper groove rod 2 and the lower groove rod 4 remain unchanged, so that the silicon wafer can be stressed under the rebound of the side groove rod 3, and the silicon wafer is bent to a certain extent, so that two silicon wafers with the same groove are attached more tightly.
Further optimizing scheme, side tank stick 3 sets up to the rectangle cross-section, and side opening and spacing groove all set up to the rectangle structure with the looks adaptation of side tank stick 3.
Further optimizing scheme, the mounting groove has been seted up respectively to the top both sides edge of curb plate 1 and the bottom both sides edge of curb plate 1, goes up groove stick 2 and the 3 both ends of side groove stick and peg graft with the mounting groove respectively, and go up groove stick 2 and the 3 both ends of side groove stick and pass through bolted connection with both sides board 1 respectively.
Further optimizing scheme, go up groove stick 2 and side groove stick 3 and set up to the rectangle cross-section, and the mounting groove sets up to the rectangle structure with last groove stick 2 and side groove stick 3 looks adaptation.
The existing aluminum boat rebound design is arranged at the lower part of a silicon wafer, rebound stroke control is not further optimized, and along with industry technology upgrading, the silicon wafer size is changed from 158mm to 166mm to 210mm, and the like, the aluminum boat design needs to be synchronously updated, and corresponding change design is carried out according to the size change of the silicon wafer. For example, the aluminum boat apparatus of the present utility model is set to 274mm×189mm in size, and is applicable to 182mm×182mm silicon wafers as an example, and the aluminum boat of different sizes can be appropriately adjusted according to the silicon wafers of different sizes. Fixing an upper groove rod 2, a side groove rod 3 and a lower groove rod 4 on a side plate 1, designing corresponding positions according to the size of a silicon wafer, taking 182 x 182 silicon wafers as an example, taking a flat table of an aluminum boat as a datum line, designing the position of the lower groove rod 4 at a height position of 6.5mm, designing the position of the side groove rod 3 at 97mm, and designing the position of the upper groove rod 2 at 164.2 mm; the rebound distance of the side grooved bars 3 is 2.4mm.
The position of the grooved bars is adjusted according to the size of the silicon wafer, and the key point is to ensure that the stress point of the silicon wafer is positioned in the middle position by the side grooved bars 3; meanwhile, the rebound distance of the spring 7 gradually changes along with the size change of the silicon wafer, the silicon wafer is larger in size and is tighter, the rebound distance is larger, but cannot be infinitely larger, hidden cracks and fragments can be caused by infinite enlargement, the rebound distance is changed, and the length of the corresponding spring 7 is synchronously changed.
In the description of the present utility model, it should be understood that the terms "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present utility model, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.
The above embodiments are only illustrative of the preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model, and various modifications and improvements made by those skilled in the art to the technical solutions of the present utility model should fall within the protection scope defined by the claims of the present utility model without departing from the design spirit of the present utility model.
Claims (6)
1. An improved ALD alumina wrap-around aluminum boat apparatus, comprising:
two side plates (1), wherein an upper groove rod (2) is respectively arranged at two sides of the top between the two side plates (1); two sides of the middle part between the two side plates (1) are respectively provided with a side grooved bar (3); a lower groove rod (4) is respectively arranged at two sides of the bottom between the two side plates (1); the upper groove rod (2), the side groove rod (3) and the lower groove rod (4) enclose a loading cavity for loading silicon wafers, a plurality of pairs of silicon wafers are arranged in the loading cavity at intervals, two silicon wafers arranged in pairs are clamped with tooth grooves on the upper groove rod (2), the side groove rod (3) and the lower groove rod (4) on the same plane, and the side surfaces of the two silicon wafers in the same pair are propped against each other;
one end of the side grooved bars (3) is connected with one side plate (1) through a rebound piece, the side grooved bars (3) move along the axial direction of the side grooved bars (3) through the rebound piece, so that the side grooved bars (3) are switched between a first working condition and a second working condition, and tooth grooves on the upper grooved bars (2), the side grooved bars (3) and the lower grooved bars (4) are respectively arranged in a one-to-one correspondence mode under the first working condition, and the side surfaces of the silicon wafers are planes; and in the second working condition, the tooth grooves on the side groove bars (3) translate relative to the tooth grooves on the upper groove bars (2) and the lower groove bars (4), and the side surfaces of the silicon wafers are curved surfaces.
2. An improved ALD alumina wrap around plating aluminum boat assembly in accordance with claim 1, wherein: one side plate (1) is provided with a side hole, an elastic piece is arranged in the side hole and props against one end of the side groove rod (3), the other side plate (1) is provided with a limit groove, the bottom of the limit groove is provided with an extension hole, the other end of the side groove rod (3) is inserted into the limit groove, the end face of the side groove rod (3) is fixedly connected with an extension block (5), the extension block (5) penetrates through the extension hole, and the outer wall of the side groove rod (3) is in sliding contact with the inner wall of the limit groove;
during the first working condition, the extending block (5) is retracted into the extending hole, and a gap exists between the end face of the side groove bar (3) and the bottom of the limiting groove; and in the second working condition, the extending block (5) extends out of the extending hole, and the side groove rod (3) is propped against the bottom of the limiting groove.
3. An improved ALD alumina coiling and plating aluminum boat assembly as recited in claim 2, wherein said rebound member includes:
the cover plate (6), the cover plate (6) is fixedly connected on the side plate (1) through bolts, and the end face of the side grooved bar (3) is propped against the cover plate (6) through a spring (7).
4. An improved ALD alumina wrap around plating aluminum boat assembly in accordance with claim 2, wherein: the side groove bars (3) are arranged to be rectangular in section, and the side holes and the limiting grooves are all arranged to be rectangular structures matched with the side groove bars (3).
5. An improved ALD alumina wrap around plating aluminum boat assembly in accordance with claim 1, wherein: the top both sides edge of curb plate (1) with the mounting groove has been seted up respectively to the bottom both sides edge of curb plate (1), go up grooved bar (2) with side grooved bar (3) both ends respectively with the mounting groove grafting, just go up grooved bar (2) with side grooved bar (3) both ends respectively with two curb plate (1) pass through bolted connection.
6. An improved ALD alumina coiling and plating aluminum boat assembly as recited in claim 5, wherein: the upper groove rod (2) and the side groove rod (3) are arranged to be rectangular in section, and the mounting groove is arranged to be rectangular in structure matched with the upper groove rod (2) and the side groove rod (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322321986.XU CN220468140U (en) | 2023-08-29 | 2023-08-29 | Improve ALD aluminium oxide around plating and improve aluminium boat device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322321986.XU CN220468140U (en) | 2023-08-29 | 2023-08-29 | Improve ALD aluminium oxide around plating and improve aluminium boat device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220468140U true CN220468140U (en) | 2024-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322321986.XU Active CN220468140U (en) | 2023-08-29 | 2023-08-29 | Improve ALD aluminium oxide around plating and improve aluminium boat device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220468140U (en) |
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- 2023-08-29 CN CN202322321986.XU patent/CN220468140U/en active Active
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