CN220468053U - Yoke finish machining vacuum annealing furnace capable of keeping constant temperature in bore - Google Patents
Yoke finish machining vacuum annealing furnace capable of keeping constant temperature in bore Download PDFInfo
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- CN220468053U CN220468053U CN202320791998.6U CN202320791998U CN220468053U CN 220468053 U CN220468053 U CN 220468053U CN 202320791998 U CN202320791998 U CN 202320791998U CN 220468053 U CN220468053 U CN 220468053U
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- 238000000137 annealing Methods 0.000 title claims abstract description 83
- 238000003754 machining Methods 0.000 title claims abstract description 12
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- 210000000038 chest Anatomy 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 38
- 238000012840 feeding operation Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000007599 discharging Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
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- 235000012431 wafers Nutrition 0.000 description 4
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- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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Abstract
The utility model discloses a yoke finish machining vacuum annealing furnace capable of keeping constant temperature in a bore, which comprises a first base, a bearing seat, a telescopic rod, a feeding hopper, a second electric valve and a hydraulic cylinder assembly, wherein the bearing seat is arranged on the first base, wire rails are symmetrically arranged on two sides of a lead screw, the second base is arranged on one side of the first base, and the hydraulic cylinder assembly is arranged in the second base. The yoke finish machining vacuum annealing furnace capable of keeping constant temperature in the chamber is provided with a set of automatic feeding device: after a part of materials are placed in the feeding hopper by a user, the materials can be piled up at the central position in the feeding hopper, after the user conveys the feeding hopper to the right side of the annealing furnace shell through the driving device, the materials can move rightwards due to inertia, and at the moment, the materials can fall into the annealing furnace shell through the opening which is inclined downwards on the right side, so that the whole set of feeding operation is completed.
Description
Technical Field
The utility model relates to the technical field of annealing furnaces, in particular to a yoke finish machining vacuum annealing furnace capable of keeping constant temperature in a furnace chamber.
Background
The yoke finish machining vacuum annealing furnace capable of keeping the constant temperature in the chamber is an annealing furnace component with an automatic feeding and discharging mechanism. An annealing furnace is a process used in the manufacture of semiconductor devices that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the film to a film or convert the film to a wafer substrate interface, cause a densely deposited film, change the state of the grown film, repair implanted damage, move dopants or transfer dopants from one film to another film or from a film into the wafer substrate. The lehr may be integrated into other furnace processing steps, such as oxidation, or may be self-processing. However, most annealing furnace structures in the market do not have an automatic feeding and discharging function, and a user needs to perform manual feeding and discharging operations when using the annealing furnace, so that the annealing furnace is very inconvenient, and most annealing furnaces in the market do not have a constant temperature maintaining function, so that the working efficiency of the annealing furnace is reduced.
For example, patent number CN201620475728.4 proposes an annealing furnace which does not have an automatic loading and unloading function, and a user needs to perform manual loading and unloading operations when using the annealing furnace, which is very inconvenient, and which does not have a constant temperature maintaining function, which reduces the working efficiency of the annealing furnace. We have therefore proposed a yoke finishing vacuum annealing furnace which can maintain the constant temperature in the bore in order to solve the problems set forth above.
Disclosure of Invention
The utility model aims to provide a yoke finish machining vacuum annealing furnace capable of keeping the constant temperature in a furnace chamber, which aims to solve the problems that most of annealing furnace structures in the market provided by the background technology do not have automatic feeding and discharging functions, a user needs to perform manual feeding and discharging operations when using the annealing furnace, the operation is very inconvenient, and most of annealing furnaces in the market do not have constant temperature keeping functions, so that the working efficiency of the annealing furnace is reduced.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a can keep constant temperature's yoke finish machining vacuum annealing stove in thorax, includes first base, bearing frame, telescopic link, charging hopper, second electric door and pneumatic cylinder subassembly, install the bearing frame on the first base, and link up the installation lead screw in the bearing frame, set up the nut seat on the lead screw, and install the middle supporting plate on the nut seat, the equal symmetrical installation rail in lead screw both sides, and set up the slider on the rail, install the material loading support on one side of the middle supporting plate, and install the telescopic link in last material loading support one side, set up the telescopic link in the telescopic link, and install the charging hopper in telescopic link one side, first base one side is installed the second base, and install the annealing stove shell on the second base, the aspiration pump is installed at annealing stove shell top, and install the PLC control unit in aspiration pump one side, install heating module in the annealing stove shell, and install first electric door under the heating module, second electric door is installed to one side of first electric door, set up the pneumatic cylinder subassembly in the second base.
Preferably, the bearing seat, the screw and the nut seat form a screw transmission structure mutually, when a user needs to use the automatic feeding function of the device, materials can be placed in the feeding hopper, and then the motor on one side of the screw is started, because the bearing seat, the screw and the nut seat form the screw transmission structure mutually, when the motor drives the screw to rotate, the nut seat arranged on the screw and the middle supporting plate arranged on the nut seat can move along the threads of the screw in the left-right direction on the horizontal plane, so that the subsequent feeding operation is facilitated.
Preferably, the sliding blocks form a sliding structure on the linear rails, when the middle supporting plate moves along the threads of the screw rod in the left-right direction on the horizontal plane, two sets of sliding blocks arranged on two sides of the bottom of the middle supporting plate move along the two sets of linear rails in the left-right direction on the horizontal plane, and the two sets of sliding blocks and the two sets of linear rails play a guiding role for the movement of the middle supporting plate and improve the structural strength of the set of screw rod transmission device on the first base.
Preferably, the telescopic link constitutes sliding structure in the telescopic cylinder, and when the middle supporting plate moved to the right-most end of first base, the user can start the telescopic cylinder, and the telescopic link begins tensile under the drive of telescopic cylinder to make the charging hopper of telescopic link right-hand member installation move to annealing stove shell, thereby be convenient for subsequent material loading operation.
Preferably, the right opening of the feeding hopper is of an inclined structure, the inclined opening is slightly downward, after a part of materials are put into the feeding hopper by a user, the materials can be piled up at the central position inside the feeding hopper, after the user conveys the feeding hopper to the right annealing furnace shell of the feeding hopper through the driving device, the materials can move rightwards due to inertia, at the moment, the materials can fall into the annealing furnace shell through the right inclined downward opening, so that the whole feeding operation is completed, the whole operation is completely automatic, and the rotating speed of a motor at one side of a screw rod, the starting time of a telescopic cylinder and an automatic assembly line production line are mutually adapted, so that the automation degree of the whole production device is improved.
Preferably, the air pump, the heating module, the first electric door and the second electric door are all subjected to integrated control of the PLC control unit, after a user pushes materials into the annealing furnace shell, the first electric door and the second electric door can be closed through the PLC control unit, then the air pump is started to vacuumize the inside of the annealing furnace shell, and finally the heating module is started to ensure the temperature in the annealing furnace shell, so that the user can preset a temperature value in the PLC control unit, at the moment, a sensor in the heating module can feed back the temperature in the furnace into the PLC control unit, the PLC control unit can compare the temperature value with the preset temperature value according to the fed back information, and accordingly the power of the heating module is adjusted at any time, so that the temperature in the furnace is always ensured to float at the preset temperature value, the whole set of operation is completely automatically controlled without human intervention, and the operation is quite efficient.
Preferably, the second base, the annealing furnace shell and the hydraulic cylinder assembly form a hinge structure mutually, after the annealing operation is completed by a user, the user can start the hydraulic cylinder assembly, because the second base, the annealing furnace shell and the hydraulic cylinder assembly form the hinge structure mutually, the whole annealing furnace shell can incline slowly to the right under the stretching state of the hydraulic cylinder assembly, at the moment, the user can open the second electric door, and materials piled in the furnace can slide out of the furnace from the second electric door, so that the discharging operation is completed, and the whole process does not need to manually enter the furnace to carry out manual discharging operation, so that the annealing furnace is quite efficient.
Compared with the prior art, the utility model has the beneficial effects that: the yoke finish machining vacuum annealing furnace capable of keeping constant temperature in the chamber is provided with an automatic feeding device and a constant temperature keeping device:
1. when a user puts a part of materials into the feeding hopper, the materials are piled up at the central position in the feeding hopper, when the user conveys the feeding hopper into the annealing furnace shell on the right side of the feeding hopper through the driving device, the materials move rightwards due to inertia, and at the moment, the materials fall into the annealing furnace shell through the opening with the right side inclined downwards, so that the whole set of feeding operation is completed, the whole set of operation is completely automatic, and the automation degree of the whole set of production device is improved by adjusting the rotating speed of the motor on one side of the screw rod, the starting time of the telescopic cylinder and the automatic assembly line production line;
2. after the user pushes materials into the annealing furnace shell, the first electric door and the second electric door can be closed through the PLC control unit, then the air pump is started to vacuumize the inside of the annealing furnace shell, and finally the heating module is started to ensure the temperature in the annealing furnace shell, so that the user can preset a temperature value in the PLC control unit, a sensor in the heating module can feed back the temperature in the furnace to the PLC control unit, the PLC control unit can compare the temperature value with the preset temperature value according to the fed back information, and accordingly the power of the heating module is adjusted at any time, the temperature in the furnace is always ensured to float around the preset temperature value, the whole set of operation is completely automatically controlled without human intervention, and the annealing furnace is quite efficient.
Drawings
FIG. 1 is a schematic diagram of the front structure of the present utility model;
FIG. 2 is a schematic diagram of a pallet structure according to the present utility model;
FIG. 3 is a schematic view of the structure of the screw rod of the present utility model;
FIG. 4 is a schematic view of the structure of the feeding hopper of the present utility model;
fig. 5 is a schematic view of a first base structure of the present utility model.
In the figure: 1. a first base; 2. a bearing seat; 3. a screw rod; 4. a nut seat; 5. a middle supporting plate; 6. a wire rail; 7. a slide block; 8. a feeding bracket; 9. a telescopic cylinder; 10. a telescopic rod; 11. feeding a hopper; 12. a second base; 13. an annealing furnace shell; 14. an air extracting pump; 15. a heating module; 16. a PLC control unit; 17. a first electric gate; 18. a second electric gate; 19. and a hydraulic cylinder assembly.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, the present utility model provides a technical solution: the utility model provides a yoke finish machining vacuum annealing stove that can keep constant temperature in the thorax, including first base 1, bearing frame 2, lead screw 3, nut seat 4, well layer board 5, the linear rail 6, slider 7, material loading support 8, telescopic cylinder 9, telescopic link 10, go up hopper 11, second base 12, annealing stove shell 13, aspiration pump 14, heating module 15, PLC control unit 16, first electric door 17, second electric door 18 and pneumatic cylinder subassembly 19, install bearing frame 2 on first base 1, and link up in bearing frame 2 and install lead screw 3, set up nut seat 4 on the lead screw 3, and install in the layer board 5 on nut seat 4, bearing frame 2, lead screw 3 and nut seat 4 constitute screw transmission structure each other, when the automatic feeding function of this set of device is used to the user, can put the material into in last hopper 11, then start lead screw 3 one side motor, because bearing frame 2, lead screw 3 and nut seat 4 constitute screw transmission structure each other, so when the motor drives lead screw 3 rotation, in the nut seat 4 that sets up on 3 and nut seat 4 can follow the follow-up in the direction on the lead screw 3 and follow-up screw that moves on the horizontal plane on the layer board, thereby the follow-up screw is convenient for the follow-up screw to the operation.
The wire rail 6 is symmetrically arranged on two sides of the lead screw 3, the slide blocks 7 are arranged on the wire rail 6, the slide blocks 7 form a sliding structure on the wire rail 6, when the middle supporting plate 5 moves along the threads of the lead screw 3 in the left-right direction on the horizontal plane, two sets of slide blocks 7 arranged on two sides of the bottom of the middle supporting plate 5 move along the two sets of wire rails 6 in the left-right direction on the horizontal plane, and the design of the two sets of slide blocks 7 and the two sets of wire rails 6 not only plays a guiding role for the movement of the middle supporting plate 5, but also improves the structural strength of the wire rod transmission device on the first base 1.
The material loading support 8 is installed to one side on the well layer board 5, and installs flexible jar 9 at material loading support 8 one side, and telescopic link 10 constitutes sliding construction in flexible jar 9, and when well layer board 5 moved to the right-most end of first base 1, the user can start flexible jar 9, and telescopic link 10 begins tensile under the drive of flexible jar 9 to the material loading hopper 11 that makes telescopic link 10 right-hand member installation moves to annealing stove shell 13, thereby the follow-up material loading operation of being convenient for.
The telescopic cylinder 9 is internally provided with the telescopic rod 10, the feeding hopper 11 is arranged on one side of the telescopic rod 10, the right opening of the feeding hopper 11 is of an inclined structure, the inclined opening of the feeding hopper is slightly downward, after a part of materials are put into the feeding hopper 11 by a user, the materials can be piled up at the central position inside the feeding hopper 11, after the user conveys the feeding hopper 11 to the right annealing furnace shell 13 of the user through a driving device, the materials can move rightwards due to inertia, at the moment, the materials can fall into the annealing furnace shell 13 through the opening which is inclined downwards on the right side, so that the whole set of feeding operation is completed, the whole set of operation is completely automatic, and the rotating speed of a motor on one side of a screw rod 3, the starting time of the telescopic cylinder 9 and an automatic assembly line production line are mutually matched, so that the degree of automation of the whole set of production device is improved.
The first base 1 is provided with the second base 12 on one side, the second base 12 is provided with the annealing furnace shell 13, the top of the annealing furnace shell 13 is provided with the air pump 14, one side of the air pump 14 is provided with the PLC control unit 16, the annealing furnace shell 13 is internally provided with the heating module 15, the first electric door 17 is arranged right below the heating module 15, one side of the first electric door 17 is provided with the second electric door 18, the air pump 14, the heating module 15, the first electric door 17 and the second electric door 18 are all subjected to integrated control of the PLC control unit 16, after a user pushes materials into the annealing furnace shell 13, the first electric door 17 and the second electric door 18 can be closed through the PLC control unit 16, then the air pump 14 is started to vacuumize the inside of the annealing furnace shell 13, and finally the heating module 15 is started to ensure the temperature in the annealing furnace shell 13, a temperature value can be preset in the PLC control unit 16, at the moment, a sensor in the heating module 15 can feed back the temperature in the furnace into the PLC control unit 16, the PLC control unit 16 can be compared with preset temperature value according to the information fed back and preset temperature value, and the full-automatic power control is not needed, and full-automatic power control is completely performed all the time, and the whole automatic control is completely, and full-automatic control is ensured.
The hydraulic cylinder assembly 19 is arranged in the second base 12, the annealing furnace shell 13 and the hydraulic cylinder assembly 19 mutually form a hinged structure, after a user finishes annealing operation, the user can start the hydraulic cylinder assembly 19, because the second base 12, the annealing furnace shell 13 and the hydraulic cylinder assembly 19 mutually form the hinged structure, the whole annealing furnace shell 13 can incline slowly to the right under the stretching state of the hydraulic cylinder assembly 19, at the moment, the user can open the second electric door 18, and materials stacked in the furnace can slide out of the furnace from the second electric door 18, so that the blanking operation is finished, the whole process does not need to manually enter the furnace to perform manual blanking operation, and the whole process is quite efficient.
Working principle: when the yoke finish machining vacuum annealing furnace capable of keeping the constant temperature in the chamber is used, when a user needs to use the automatic feeding function of the device, materials can be placed in the feeding hopper 11, and then a motor on one side of the screw rod 3 is started, because the bearing seat 2, the screw rod 3 and the nut seat 4 mutually form a screw rod transmission structure, when the motor drives the screw rod 3 to rotate, the nut seat 4 arranged on the screw rod 3 and the middle supporting plate 5 arranged on the nut seat 4 can move in the left-right direction on the horizontal plane along the threads of the screw rod 3, so that the subsequent feeding operation is facilitated. When the middle supporting plate 5 moves along the threads of the screw rod 3 in the left-right direction on the horizontal plane, the two sets of sliding blocks 7 arranged on the two sides of the bottom of the middle supporting plate 5 move along the two sets of linear rails 6 in the left-right direction on the horizontal plane, and the design of the two sets of sliding blocks 7 and the two sets of linear rails 6 not only plays a guiding role for the movement of the middle supporting plate 5, but also improves the structural strength of the set of screw rod transmission device on the first base 1. When the middle supporting plate 5 moves to the rightmost end of the first base 1, a user can start the telescopic cylinder 9, and the telescopic rod 10 starts to stretch under the driving of the telescopic cylinder 9, so that the feeding hopper 11 arranged at the right end of the telescopic rod 10 moves into the annealing furnace shell 13, and subsequent feeding operation is facilitated. After a part of materials are put into the feeding hopper 11 by a user, the materials can be piled up at the central position inside the feeding hopper 11, after the user conveys the feeding hopper 11 to the right annealing furnace shell 13 of the user through a driving device, the materials can move rightwards due to inertia, and at the moment, the materials can fall into the annealing furnace shell 13 through the opening with the right inclined downward direction, so that the whole set of feeding operation is completed, the whole set of operation is completely automatic, and the rotation speed of a motor at one side of a screw rod 3, the starting time of a telescopic cylinder 9 and the automatic assembly line production line are mutually adapted, so that the automation degree of the whole set of production device is improved. After the user pushes the material into the annealing furnace shell 13, the first electric door 17 and the second electric door 18 can be closed through the PLC control unit 16, then the air pump 14 is started to vacuumize the inside of the annealing furnace shell 13, and finally the heating module 15 is started to ensure the temperature in the annealing furnace shell 13, the user can preset a temperature value in the PLC control unit 16, at the moment, a sensor in the heating module 15 can feed back the temperature in the furnace to the PLC control unit 16, the PLC control unit 16 can compare according to the fed back information and the preset temperature value, so that the power of the heating module 15 is adjusted at any time, the temperature in the furnace is always ensured to float at the preset temperature value, the whole set of operation is fully automatically controlled without human intervention, and the whole set of operation is quite efficient. After the user has accomplished the annealing operation, the user can start pneumatic cylinder subassembly 19, because second base 12, annealing stove shell 13 and pneumatic cylinder subassembly 19 mutually constitute hinge structure, so whole annealing stove shell 13 can slowly incline to the right under the tensile state of pneumatic cylinder subassembly 19, the user can open second electric door 18 this moment, the material of piling up in the stove can slide out of the stove from second electric door 18 to the unloading operation has been accomplished, and whole process need not the manual work entering stove and carries out manual unloading operation, and is very high-efficient. What is not described in detail in this specification is prior art known to those skilled in the art.
Although the present utility model has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present utility model.
Claims (7)
1. The utility model provides a can keep constant temperature's yoke finish machining vacuum annealing stove in thorax, includes first base (1), bearing frame (2), telescopic link (10), goes up hopper (11), second electric door (18) and pneumatic cylinder subassembly (19), its characterized in that: the device is characterized in that a bearing seat (2) is arranged on the first base (1), a screw rod (3) is arranged in the bearing seat (2) in a penetrating manner, a nut seat (4) is arranged on the screw rod (3), a middle supporting plate (5) is arranged on the nut seat (4), a wire rail (6) is symmetrically arranged on two sides of the screw rod (3), a sliding block (7) is arranged on the wire rail (6), a feeding support (8) is arranged on one side of the middle supporting plate (5), a telescopic cylinder (9) is arranged on one side of the feeding support (8), a telescopic rod (10) is arranged in the telescopic cylinder (9), a hopper (11) is arranged on one side of the telescopic rod (10), a second base (12) is arranged on one side of the first base (1), a second base (13) is arranged on the second base (12), a pump (14) is arranged at the top of the annealing furnace, a PLC (16) is arranged on one side of the annealing furnace, a heating module (15) is arranged in the housing (13), a first electric door (17) is arranged under the heating module (15), and a first electric door (17) is arranged on one side of the first electric door (17), and a hydraulic assembly is arranged on the second base (19).
2. A yoke finishing vacuum annealing furnace capable of keeping constant temperature in a chamber according to claim 1, wherein: the bearing seat (2), the screw rod (3) and the nut seat (4) mutually form a screw rod transmission structure.
3. A yoke finishing vacuum annealing furnace capable of keeping constant temperature in a chamber according to claim 1, wherein: the sliding block (7) forms a sliding structure on the linear rail (6).
4. A yoke finishing vacuum annealing furnace capable of keeping constant temperature in a chamber according to claim 1, wherein: the telescopic rod (10) forms a sliding structure in the telescopic cylinder (9).
5. A yoke finishing vacuum annealing furnace capable of keeping constant temperature in a chamber according to claim 1, wherein: the right opening of the feeding hopper (11) is of an inclined structure, and the inclined opening of the feeding hopper is slightly downward.
6. A yoke finishing vacuum annealing furnace capable of keeping constant temperature in a chamber according to claim 1, wherein: the air pump (14), the heating module (15), the first electric valve (17) and the second electric valve (18) are all subjected to integrated control of the PLC control unit (16).
7. A yoke finishing vacuum annealing furnace capable of keeping constant temperature in a chamber according to claim 1, wherein: the second base (12), the annealing furnace shell (13) and the hydraulic cylinder assembly (19) mutually form a hinged structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320791998.6U CN220468053U (en) | 2023-04-12 | 2023-04-12 | Yoke finish machining vacuum annealing furnace capable of keeping constant temperature in bore |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320791998.6U CN220468053U (en) | 2023-04-12 | 2023-04-12 | Yoke finish machining vacuum annealing furnace capable of keeping constant temperature in bore |
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| CN220468053U true CN220468053U (en) | 2024-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202320791998.6U Active CN220468053U (en) | 2023-04-12 | 2023-04-12 | Yoke finish machining vacuum annealing furnace capable of keeping constant temperature in bore |
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| CN (1) | CN220468053U (en) |
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