CN220452843U - Gas flow valve - Google Patents
Gas flow valve Download PDFInfo
- Publication number
- CN220452843U CN220452843U CN202322086699.5U CN202322086699U CN220452843U CN 220452843 U CN220452843 U CN 220452843U CN 202322086699 U CN202322086699 U CN 202322086699U CN 220452843 U CN220452843 U CN 220452843U
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- Prior art keywords
- groove
- flow
- circulation groove
- valve body
- gas
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- 230000007423 decrease Effects 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
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- Valve Housings (AREA)
Abstract
The utility model provides a gas flow valve, which comprises a valve body, wherein a total gas inlet and a total gas outlet are respectively arranged on two opposite side surfaces of the valve body, a first flow channel, a second flow channel, a third flow channel and a fourth flow channel are arranged in the valve body, a connecting groove is arranged on the upper surface of the valve body, a gas inlet connecting port and a gas outlet connecting port are arranged on the bottom surface of the connecting groove, the first flow channel, the second flow channel and the third flow channel are coaxially arranged, one end of the first flow channel is communicated with the total gas inlet, the other end of the first flow channel is communicated with the second flow channel, the other end of the second flow channel is communicated with the third flow channel, the other end of the third flow channel is communicated with the gas inlet connecting port, one end of the fourth flow channel is communicated with the total gas outlet, and the other end of the fourth flow channel is communicated with the gas outlet connecting port.
Description
Technical Field
The utility model relates to the technical field of valves, in particular to a gas flow valve.
Background
The valve is a control component in the fluid delivery system and is used for opening and closing pipelines, controlling pipeline accessories such as flow direction and the like, and different valves can control the delivery of different fluids.
In the semiconductor field, the flow rate of the gas used in many processes needs to be controlled to ensure the quality of the process, and thus a gas flow valve needs to be used. Currently used gas flow valves have poor control sensitivity and adversely affect the quality of semiconductor process production.
Disclosure of Invention
The utility model aims to solve the defects in the prior art and provides a gas flow valve.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a gas flow valve, including the valve body, be equipped with total air inlet and total gas outlet on the relative both sides face of valve body respectively, be equipped with first circulation groove in the valve body, the second circulation groove, third circulation groove and fourth circulation groove, be equipped with the spread groove on the upper surface of valve body, be equipped with inlet connection mouth and outlet connection mouth on the groove bottom surface of spread groove, first circulation groove, second circulation groove and the coaxial setting of third circulation groove, the one end and the total air inlet intercommunication of first circulation groove, the other end and the second circulation groove intercommunication of first circulation groove, the other end and the third circulation groove intercommunication of third circulation groove, the other end and inlet connection mouth intercommunication of third circulation groove, the one end and the total gas outlet intercommunication of fourth circulation groove.
Preferably, the second flow channel comprises a first portion and a second portion, one end of the first portion is communicated with the first flow channel, the other end of the first portion is communicated with the second portion, the other end of the second portion is communicated with the third flow channel, the inner diameter of the second portion gradually decreases from one end close to the first portion to one end far away from the first portion, the inner diameter of the first portion is smaller than the inner diameter of the first flow channel, the inner diameter of the first portion is not smaller than the maximum inner diameter of the second portion, and the minimum inner diameter of the second portion is not smaller than the maximum inner diameter of the third flow channel.
Further, a first sensor mounting hole is formed in a position, corresponding to the first flow channel, on the upper surface of the valve body, the first sensor mounting hole is communicated with the first flow channel, a second sensor mounting hole is formed in a position, corresponding to the first portion, on the upper surface of the valve body, and the second sensor mounting hole is communicated with the first portion. Still further, the second sensor mounting hole is gradually reduced in distance from one end far from the first portion to one end near to the first portion to the connection groove; the air inlet connector is connected with the air outlet connector through an electromagnetic valve.
Further, the third flow groove comprises a third part and a fourth part, the third part is of a cylindrical structure, the fourth part is of a hemispherical structure, the radius of the third part is equal to that of the fourth part, one end of the third part is communicated with the second part, the other end of the third part is communicated with the fourth part, the sectional area of the fourth part gradually decreases from one end close to the third part to one end far away from the third part, and a plane where one end of the fourth part close to the third part is located is a symmetrical plane of the air inlet connection port.
Preferably, the total inlet has an inner diameter greater than the inner diameter of the first flow channel.
Compared with the prior art, the utility model has the beneficial effects that: the first flow groove, the second flow groove and the third flow groove which are communicated in sequence and coaxially arranged are arranged in the valve body, so that gas can flow in the valve body conveniently, and the control of the gas flow is facilitated; the upper surface of the valve body is provided with a connecting groove, and the bottom surface of the connecting groove is provided with an air inlet connecting port communicated with the third flow groove and an air outlet connecting port communicated with the fourth flow groove, so that output control of gas is facilitated through electric elements such as an electromagnetic valve; through set up first sensor mounting hole and second sensor mounting hole on the upper surface of valve body, be convenient for carry out real-time supervision through the sensor to the gas flow in this gas flow valve, simple structure, the sensitivity is high.
Drawings
FIG. 1 is a schematic diagram of a valve body of a gas flow valve according to an embodiment of the present utility model;
fig. 2 is a schematic top view of fig. 1.
Description of the embodiments
For a further understanding of the objects, construction, features, and functions of the utility model, reference should be made to the following detailed description of the preferred embodiments.
Referring to fig. 1 and 2 in combination, a gas flow valve of the present utility model includes a valve body 100, wherein a total gas inlet 11 and a total gas outlet 12 are respectively provided on two opposite sides of the valve body 100, a first flow channel 13, a second flow channel 14, a third flow channel 15 and a fourth flow channel 16 are provided in the valve body 100, a connection groove 17 is provided on an upper surface of the valve body 100, an air inlet connection port 171 and a gas outlet connection port 172 are provided on a bottom surface of the connection groove 17, the first flow channel 13, the second flow channel 14 and the third flow channel 15 are coaxially provided, one end of the first flow channel 13 is communicated with the total gas inlet 11, the other end of the first flow channel 13 is communicated with the second flow channel 14, the other end of the second flow channel 14 is communicated with the third flow channel 15 so as to facilitate gas flow in the valve body 100, the other end of the third flow channel 15 is communicated with the air inlet connection port 171, one end of the fourth flow channel 16 is communicated with the total gas outlet 12, and the other end of the fourth flow channel 16 is communicated with the gas outlet connection port 172.
Preferably, the second flow-through groove 14 includes a first portion 141 and a second portion 142, one end of the first portion 141 is communicated with the first flow-through groove 13, the other end of the first portion 141 is communicated with the second portion 142, the other end of the second portion 142 is communicated with the third flow-through groove 15, the inner diameter of the second portion 142 gradually decreases from one end close to the first portion 141 to one end far from the first portion 141, the inner diameter of the first portion 141 is smaller than the inner diameter of the first flow-through groove 13, the inner diameter of the first portion 141 is not smaller than the maximum inner diameter of the second portion 142, and the minimum inner diameter of the second portion 142 is not smaller than the maximum inner diameter of the third flow-through groove 14, so that the control of the gas flow rate is achieved by the restriction of the inner diameter of the second flow-through groove 14.
In order to make the gas smoothly flow into the air inlet connection port 171, the third flow channel 15 includes a third portion 151 and a fourth portion 152, the third portion 151 has a cylindrical structure, the fourth portion 152 has a hemispherical structure, the radius of the third portion 151 is equal to the radius of the fourth portion 152, one end of the third portion 151 communicates with the second portion 142, the other end of the third portion 151 communicates with the fourth portion 152, the cross-sectional area of the fourth portion 152 gradually decreases from one end near the third portion 151 to one end far from the third portion 151, and the plane where one end of the fourth portion 152 near the third portion 151 is a symmetry plane of the air inlet connection port 171.
In order to facilitate monitoring of the gas flow rate in the valve body 100, a first sensor mounting hole 18 is provided on the upper surface of the valve body 100 at a position corresponding to the first flow channel 13, the first sensor mounting hole 18 is communicated with the first flow channel 13 so as to facilitate mounting of a sensor to monitor the gas flow rate in the first flow channel 13, a second sensor mounting hole 19 is provided on the upper surface of the valve body 100 at a position corresponding to the first portion 141, and the second sensor mounting hole 19 is communicated with the first portion 141 so as to facilitate mounting of a sensor to monitor the gas flow rate in the first portion 141.
To facilitate the mounting of the sensor at the second sensor mounting hole 19, avoiding interference with the components at the connection groove 17, the distance from the second sensor mounting hole 19 to the connection groove 17 gradually decreases from the end far from the first portion 141 to the end near the first portion 141.
In order to be able to control the output of gas by means of electrical components, the inlet connection port 171 and the outlet connection port 172 are connected by means of solenoid valves (not shown in the figures) so that when the gas flow rates in the first flow channel 13 and the first portion 141 are equal to the desired gas flow rate, the gas is delivered via the connection channel 17 by means of the actuation of the solenoid valves.
Preferably, the total gas inlet 11 has an inner diameter larger than the inner diameter of the first flow channel 13 to facilitate gas entry into the gas flow valve.
In actual use, the gas flow valve further comprises a valve core arranged in the connecting groove 17, the structure of the valve core can be selected according to actual use requirements, and gas flow control is realized through actions of electrical elements such as an electromagnetic valve and the like; the main gas inlet 11 is connected to a gas generating or gas delivery assembly and the main gas outlet 12 is connected to a nozzle or other assembly requiring gas. The present utility model will not be described in detail.
The using method comprises the following steps: a first sensor is installed in the first sensor installation hole 18 of the valve body 100, a second sensor is installed in the second sensor installation hole 19 of the valve body 100, the air inlet connection port 171 and the air outlet connection port 172 are connected through an electromagnetic valve, and when the real-time gas flow measured by the first sensor and the second sensor is equal to the expected flow, the electromagnetic valve acts to enable the air inlet connection port 171 and the air outlet connection port 172 to be communicated, and the gas is output outwards through the fourth circulation groove 16 and the total gas outlet 12.
According to the gas flow valve, the first flow groove, the second flow groove and the third flow groove which are communicated in sequence and coaxially arranged are arranged in the valve body, so that gas can flow in the valve body conveniently, and the control of the gas flow is facilitated; the upper surface of the valve body is provided with a connecting groove, and the bottom surface of the connecting groove is provided with an air inlet connecting port communicated with the third flow groove and an air outlet connecting port communicated with the fourth flow groove, so that output control of gas is facilitated through electric elements such as an electromagnetic valve; through set up first sensor mounting hole and second sensor mounting hole on the upper surface of valve body, be convenient for carry out real-time supervision through the sensor to the gas flow in this gas flow valve, simple structure, the sensitivity is high.
The utility model has been described with respect to the above-described embodiments, however, the above-described embodiments are merely examples of practicing the utility model. It should be noted that the disclosed embodiments do not limit the scope of the utility model. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the utility model.
Claims (7)
1. The utility model provides a gas flow valve, its characterized in that includes the valve body, be equipped with total air inlet and total gas outlet on the opposite both sides face of valve body respectively, be equipped with first circulation groove, second circulation groove, third circulation groove and fourth circulation groove in the valve body, be equipped with the spread groove on the upper surface of valve body, be equipped with inlet connection mouth and outlet connection mouth on the groove bottom surface of spread groove, first circulation groove second circulation groove with the coaxial setting of third circulation groove, the one end of first circulation groove with total air inlet intercommunication, the other end of first circulation groove with the second circulation groove intercommunication, the other end of second circulation groove with third circulation groove intercommunication, the other end of third circulation groove with inlet connection mouth intercommunication, the one end of fourth circulation groove with total gas outlet connection mouth intercommunication, the other end of fourth circulation groove with outlet connection mouth intercommunication.
2. A gas flow valve according to claim 1, wherein said second flow-through groove comprises a first portion and a second portion, one end of said first portion being in communication with said first flow-through groove, the other end of said first portion being in communication with said second portion, the other end of said second portion being in communication with said third flow-through groove, said second portion decreasing in diameter from an end near said first portion to an end remote from said first portion, said first portion having an inner diameter smaller than an inner diameter of said first flow-through groove, said first portion having an inner diameter not smaller than a maximum inner diameter of said second portion, and said second portion having a minimum inner diameter not smaller than a maximum inner diameter of said third flow-through groove.
3. The gas flow valve according to claim 2, wherein the third flow channel comprises a third portion and a fourth portion, the third portion is in a cylindrical structure, the fourth portion is in a hemispherical structure, the radius of the third portion is equal to that of the fourth portion, one end of the third portion is communicated with the second portion, the other end of the third portion is communicated with the fourth portion, the cross-sectional area of the fourth portion gradually decreases from one end close to the third portion to one end far from the third portion, and a plane where one end of the fourth portion close to the third portion is a symmetrical plane of the gas inlet connection port.
4. A gas flow valve according to claim 2, wherein a first sensor mounting hole is provided in a position on the upper surface of the valve body corresponding to the first flow-through groove, the first sensor mounting hole communicates with the first flow-through groove, and a second sensor mounting hole is provided in a position on the upper surface of the valve body corresponding to the first portion, the second sensor mounting hole communicating with the first portion.
5. A gas flow valve according to claim 4, wherein said second sensor mounting hole is tapered from an end distal to said first portion to an end proximal to said first portion to said attachment slot.
6. A gas flow valve according to claim 4, wherein said inlet connection port and said outlet connection port are connected by a solenoid valve.
7. A gas flow valve according to claim 1, wherein the internal diameter of said total gas inlet is greater than the internal diameter of said first flow-through groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322086699.5U CN220452843U (en) | 2023-08-04 | 2023-08-04 | Gas flow valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322086699.5U CN220452843U (en) | 2023-08-04 | 2023-08-04 | Gas flow valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220452843U true CN220452843U (en) | 2024-02-06 |
Family
ID=89725837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322086699.5U Active CN220452843U (en) | 2023-08-04 | 2023-08-04 | Gas flow valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220452843U (en) |
-
2023
- 2023-08-04 CN CN202322086699.5U patent/CN220452843U/en active Active
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