CN216590162U

CN216590162U - Gas flow valve

Info

Publication number: CN216590162U
Application number: CN202123199592.9U
Authority: CN
Inventors: 大吕伟
Original assignee: Xinghua Richeng Metal Products Co ltd
Current assignee: Xinghua Richeng Metal Products Co ltd
Priority date: 2021-12-20
Filing date: 2021-12-20
Publication date: 2022-05-24
Anticipated expiration: 2031-12-20

Abstract

The utility model provides a gas flow valve which comprises a valve body, wherein a main gas inlet and a main gas outlet are respectively arranged on two opposite side surfaces of the valve body, a first flow through groove and a second flow through groove are arranged in the valve body, one end of the first flow through groove is communicated with the main gas inlet, the other end of the first flow through groove is communicated with the second flow through groove, a connecting port is arranged on the upper surface of the valve body, the second flow through groove is communicated with the connecting port, a third flow through groove is arranged on one side, close to the main gas outlet, of the connecting port on the upper surface of the valve body, the third flow through groove is not communicated with the second flow through groove, and the third flow through groove is communicated with the main gas outlet.

Description

Gas flow valve

Technical Field

The utility model relates to the technical field of valves, in particular to a gas flow valve.

Background

Valves are control components in fluid delivery systems for opening and closing lines, controlling flow direction, etc. tubing attachments, different valves may control the delivery of different fluids.

In the semiconductor field, the flow of the used gas is required to be controlled in many processes to ensure the quality of the process production, and a gas flow valve is required. The gas flow valve used at present mostly adopts a hydraulic type, has larger volume and poorer control sensitivity, and generates adverse effect on the quality of semiconductor process production.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the defects in the prior art and provides a gas flow valve.

In order to realize the purpose, the utility model adopts the following technical scheme: the utility model provides a gas flow valve, which comprises a valve body, be equipped with total air inlet and total gas outlet on the relative both sides face of valve body respectively, it leads to groove and second circulation groove to be equipped with first flow in the valve body, the one end and the total air inlet intercommunication that first flow led to the groove, the other end and the second circulation groove intercommunication that first flow led to the groove, be equipped with the connector on the upper surface of valve body, second circulation groove and connector intercommunication, it is equipped with the third circulation groove to lie in the one side that the connector is close to total gas outlet on the upper surface of valve body, the third circulation groove is not led to the groove intercommunication with the second circulation, the third circulation groove communicates with total gas outlet.

Preferably, a first sensor mounting hole is formed in the upper surface of the valve body at a position corresponding to the first flow through groove, the first sensor mounting hole is communicated with the first flow through groove, a second sensor mounting hole is formed in the upper surface of the valve body at a position corresponding to the second flow through groove, and the second sensor mounting hole is communicated with the second flow through groove. Further, the connecting port and the third flow through groove are connected through an electromagnetic valve. Still further, the position that corresponds with the solenoid valve on the upper surface of valve body is equipped with the seal groove.

Preferably, the inner diameter of the total air inlet is greater than the inner diameter of the first flow channel.

Preferably, the inner diameter of the third circulation groove is smaller than the inner diameter of the total air outlet.

Compared with the prior art, the utility model has the beneficial effects that: the second flow through groove is arranged in the valve body, and the connecting port communicated with the second flow through groove and the third flow through groove not communicated with the second flow through groove are arranged on the upper surface of the valve body, so that the gas can be conveniently output and controlled through control components such as an electromagnetic valve and the like; through set up first sensor mounting hole and second sensor mounting hole on the upper surface at the valve body, be convenient for carry out real-time supervision through the sensor to the gas flow in this gas flow valve, simple structure, sensitivity is high.

Drawings

FIG. 1 is a schematic view of a valve body of a gas flow valve according to an embodiment of the present invention;

fig. 2 is a schematic top view of the structure of fig. 1.

Detailed Description

In order to further understand the objects, structures, features and functions of the present invention, the following embodiments are described in detail.

Referring to fig. 1 and fig. 2 in combination, the gas flow valve of the present invention includes a valve body 100, a total gas inlet 11 and a total gas outlet 12 are respectively disposed on two opposite side surfaces of the valve body 100, a first flow through groove 13 and a second flow through groove 14 are disposed in the valve body 100, one end of the first flow through groove 13 is communicated with the total gas inlet 11, the other end of the first flow through groove 13 is communicated with the second flow through groove 14, a connection port 15 is disposed on an upper surface of the valve body 100, the second flow through groove 14 is communicated with the connection port 15, a third flow through groove 16 is disposed on one side of the connection port 15, which is close to the total gas outlet 12, on the upper surface of the valve body 100, the third flow through groove 16 is not communicated with the second flow through groove 14, and the third flow through groove 16 is communicated with the total gas outlet 12.

Preferably, a first sensor mounting hole 17 is formed in a position, corresponding to the first circulation groove 13, on the upper surface of the valve body 100, the first sensor mounting hole 17 is communicated with the first circulation groove 13 so that a mounting sensor can monitor the gas flow in the first circulation groove 13, a second sensor mounting hole 18 is formed in a position, corresponding to the second circulation groove 14, on the upper surface of the valve body 100, the second sensor mounting hole 18 is communicated with the second circulation groove 14 so that the mounting sensor can monitor the gas flow in the second circulation groove 14.

Further, the connection port 15 and the third circulation groove 16 are connected by a solenoid valve (not shown) so that when the gas flow rates in the first circulation groove 13 and the second circulation groove 14 become equal to a required gas flow rate, the solenoid valve operates to allow the gas to be sent out through the third circulation groove 16.

In order to ensure the sealing performance of the gas flow valve, a sealing groove 19 is formed in the upper surface of the valve body 100 at a position corresponding to the electromagnetic valve, and the sealing performance of the electromagnetic valve and the valve body 100 can be ensured by arranging a sealing ring in the sealing groove 19.

Preferably, the inner diameter of the total gas inlet 11 is larger than the inner diameter of the first flow through slot 13 to facilitate gas entry into the gas flow valve.

Preferably, the third flow channel 16 has an inner diameter smaller than the inner diameter of the total gas outlet 12 to facilitate gas output from the gas flow valve.

In actual use, the gas flow valve further comprises a valve core arranged in the first flow through groove 13, and the structure of the valve core can be selected according to actual use requirements; the total gas inlet 11 is connected to a gas generation or gas delivery assembly and the total gas outlet 12 is connected to a nozzle or other assembly requiring gas. The present invention will not be described in detail.

The using method comprises the following steps: a first sensor is installed in a first sensor installation hole 17 of the valve body 100, a second sensor is installed in a second sensor installation hole 18 of the valve body 100, a sealing ring is arranged in a sealing groove 19, a connecting port 15 and a third circulating groove 16 are connected through an electromagnetic valve, when the real-time gas flow measured by the first sensor and the second sensor is equal to the expected flow, the electromagnetic valve acts to enable the connecting port 15 to be communicated with the third circulating groove 16, and gas is output outwards through the third circulating groove 16 and a main gas outlet 12.

According to the gas flow valve, the second flow through groove is formed in the valve body, the connecting port communicated with the second flow through groove and the third flow through groove not communicated with the second flow through groove are formed in the upper surface of the valve body, and therefore gas can be conveniently output and controlled through control components such as the electromagnetic valve; through set up first sensor mounting hole and second sensor mounting hole on the upper surface at the valve body, be convenient for carry out real-time supervision through the sensor to the gas flow in this gas flow valve, simple structure, sensitivity is high.

The present invention has been described in relation to the above embodiments, which are only exemplary of the implementation of the present invention. It should be noted that the disclosed embodiments do not limit the scope of the utility model. Rather, it is intended that all such modifications and variations be included within the spirit and scope of this invention.

Claims

1. The utility model provides a gas flow valve, includes the valve body, its characterized in that, be equipped with total air inlet and total gas outlet on the relative both sides face of valve body respectively, it leads to groove and second circulation groove to be equipped with first flow in the valve body, first flow lead to the groove one end with total air inlet intercommunication, first flow lead to the groove the other end with the second circulation leads to the groove intercommunication, be equipped with the connector on the upper surface of valve body, second circulation groove with the connector intercommunication, lie in on the upper surface of valve body the connector is close to one side of total gas outlet is equipped with third circulation groove, third circulation groove not with the second circulation groove intercommunication, third circulation groove with total gas outlet intercommunication.

2. A gas flow valve as claimed in claim 1 wherein a first sensor mounting hole is provided in the upper surface of the valve body at a location corresponding to said first flow channel, said first sensor mounting hole communicating with said first flow channel, and a second sensor mounting hole is provided in the upper surface of the valve body at a location corresponding to said second flow channel, said second sensor mounting hole communicating with said second flow channel.

3. A gas flow valve according to claim 2, characterised in that the connection port and the third flow channel are connected by a solenoid valve.

4. A gas flow valve as claimed in claim 3 wherein the upper surface of the valve body is provided with a seal groove at a location corresponding to the solenoid valve.

5. A gas flow valve as claimed in any one of claims 1 to 4 wherein the internal diameter of the total gas inlet is greater than the internal diameter of the first flow through slot.

6. A gas flow valve according to any of claims 1 to 4, characterised in that the third flow channel has an internal diameter which is smaller than the internal diameter of the total outlet port.