CN220419378U

CN220419378U - Probe station for testing semiconductor device

Info

Publication number: CN220419378U
Application number: CN202321432510.7U
Authority: CN
Inventors: 杨凯翔; 陈朝杰; 张文清
Original assignee: Guangdong Wanwei Semiconductor Technology Co ltd
Current assignee: Guangdong Wanwei Semiconductor Technology Co ltd
Priority date: 2023-06-07
Filing date: 2023-06-07
Publication date: 2024-01-30
Anticipated expiration: 2033-06-07

Abstract

The utility model relates to the technical field of probe stations, in particular to a probe station for testing a semiconductor device, which comprises a probe station main body, wherein a workbench is arranged on the probe station main body, a fixed rod is arranged at the upper end of the workbench, a top plate is arranged at the upper end of the fixed rod, a connecting vertical plate is arranged between the workbench and the top plate, a chute is arranged in the connecting vertical plate, a lifting rod is arranged in the chute, a sliding block is connected to the lifting rod, and the upper end of the sliding block is connected with a clamping mechanism. According to the utility model, the groove, the first clamping plates, the threaded clamping rods and the fasteners in the clamping mechanism are arranged, the first clamping plates are arranged in the groove, the threaded clamping rods are arranged on the first clamping plates, and the fasteners are arranged on the threaded clamping rods so as to follow the displacement of the two first clamping plates, so that one ends of the two first clamping plates can be contacted with a semiconductor device, the semiconductor device is clamped, the semiconductor is not easy to displace, and the detection efficiency is improved.

Description

Probe station for testing semiconductor device

Technical Field

The utility model relates to the technical field of probe stations, in particular to a probe station for testing a semiconductor device.

Background

Semiconductor devices have been developed using different semiconductor materials and using different processes and geometries to produce a wide variety of crystalline diodes with diverse functional applications, and the frequency coverage of the crystalline diodes can range from low frequency, high frequency, microwave, millimeter wave, infrared to light wave. Three terminal devices are generally active devices, typically representing various transistors. Transistors can be further divided into bipolar transistors and field effect transistors.

The existing semiconductor device needs to be used for a probe station during testing, and the existing probe station is difficult to fix on the placing station due to different sizes of the semiconductor device after the semiconductor device is placed, so that the semiconductor device is easy to shift when the semiconductor device is detected by using a probe, and the problems of influencing the detection effect and reducing the detection efficiency are caused.

Accordingly, a probe station for testing semiconductor devices is provided by those skilled in the art to solve the above-mentioned problems.

Disclosure of Invention

In order to solve the technical problems, the utility model provides a probe station for testing a semiconductor device, which comprises a probe station main body, wherein a workbench is arranged on the probe station main body, a fixing rod is arranged at the upper end of the workbench, a top plate is arranged at the upper end of the fixing rod, and a connecting vertical plate is arranged between the workbench and the top plate;

be equipped with the spout in the connection riser, be equipped with the lifter in the spout, connect the slider on the lifter, clamping mechanism is connected to the upper end of slider, clamping mechanism includes recess, first clamping plate, screw thread clamping lever and fastener, and the inside of recess is equipped with first clamping plate, is equipped with screw thread clamping lever on the first clamping plate, is equipped with the fastener on the screw thread clamping lever.

Preferably: support rods are arranged at four corners of the lower end of the workbench, and the lower ends of the support rods are connected with bottom posts.

Preferably: the lower extreme of roof is connected with the linking board, is equipped with the controller on the connection riser.

Preferably: the lower extreme of roof is equipped with the telescopic link, and the probe is connected to the lower extreme of telescopic link.

Preferably: and a second clamping plate is arranged on one side of the clamping mechanism.

Preferably: the first clamping plate and the second clamping plate are symmetrically arranged on two sides of the lifting table.

The utility model has the technical effects and advantages that:

1. according to the utility model, the groove, the first clamping plates, the threaded clamping rods and the fasteners in the clamping mechanism are arranged, the first clamping plates are arranged in the groove, the threaded clamping rods are arranged on the first clamping plates, and the fasteners are arranged on the threaded clamping rods so as to follow the displacement of the two first clamping plates, so that one ends of the two first clamping plates can be contacted with a semiconductor device, the semiconductor device is clamped, the semiconductor is not easy to displace, and the detection efficiency is improved.

2. Through elevating platform and lifter that set up, can realize the high lift to first clamping plate, the practicality is good.

Drawings

Fig. 1 is a schematic structural diagram of a probe station for testing a semiconductor device according to an embodiment of the present application;

fig. 2 is a schematic structural diagram of a probe station for testing a semiconductor device according to an embodiment of the present disclosure;

fig. 3 is a schematic structural diagram of a top view of a probe station for testing a semiconductor device according to an embodiment of the present application;

fig. 4 is a schematic diagram of a right side view of a probe station for testing a semiconductor device according to an embodiment of the present application;

fig. 5 is a schematic structural view of a clamping mechanism and a second clamping plate in a probe station for testing semiconductor devices according to an embodiment of the present application;

fig. 6 is a schematic structural diagram of a lifting rod and a sliding block in a probe station for testing a semiconductor device according to an embodiment of the present application;

fig. 7 is a schematic structural diagram of a slider in a probe station for testing a semiconductor device according to an embodiment of the present application;

fig. 8 is a schematic structural diagram of a probe station for testing a semiconductor device in fig. 1 according to an embodiment of the present application.

In the figure: 1. a probe station main body; 2. a work table; 3. a support rod; 4. a bottom post; 5. a fixed rod; 6. a top plate; 7. a splice plate; 8. connecting a vertical plate; 9. a controller; 10. a telescopic rod;

11. a probe; 12. a chute; 13. a lifting rod; 14. a lifting table; 15. a slide block;

16. a clamping mechanism; 161. a groove; 162. a first clamping plate; 163. a threaded clamping rod; 164. a fastener;

17. and a second clamping plate.

Detailed Description

The utility model will be described in further detail with reference to the drawings and the detailed description. The embodiments of the utility model have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the utility model in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, and to enable others of ordinary skill in the art to understand the utility model for various embodiments with various modifications as are suited to the particular use contemplated.

Example 1

Referring to fig. 1 to 8, in this embodiment, a probe station for testing a semiconductor device is provided, which includes a probe station main body 1, a workbench 2 is provided on the probe station main body 1, support rods 3 are provided at four corners of the lower end of the workbench 2, the lower end of the support rods 3 is connected with a bottom post 4, a fixing rod 5 is provided at the upper end of the workbench 2, a top plate 6 is provided at the upper end of the fixing rod 5, a connection plate 7 is connected at the lower end of the top plate 6, a connection vertical plate 8 is provided between the workbench 2 and the top plate 6, a controller 9 is provided on the connection vertical plate 8, and a telescopic rod 10 is provided at the lower end of the top plate 6;

the lower end of the telescopic rod 10 is connected with a detection needle 11;

a chute 12 is arranged in the connecting vertical plate 8, a lifting rod 13 is arranged in the chute 12, a sliding block 15 is connected to the lifting rod 13, the upper end of the sliding block 15 is connected with a clamping mechanism 16, the clamping mechanism 16 comprises a groove 161, a first clamping plate 162, a threaded clamping rod 163 and a fastener 164, the first clamping plate 162 is arranged in the groove 161, the threaded clamping rod 163 is arranged on the first clamping plate 162, and the fastener 164 is arranged on the threaded clamping rod 163;

a second clamping plate 17 is arranged on one side of the clamping mechanism 16;

further, the first clamping plate 162 and the second clamping plate 17 are symmetrically disposed on both sides of the lifting platform 14.

The working principle of the utility model is as follows: when the clamping device is used, firstly, when the two first clamping plates 162 move, the two threaded clamping rods 163 are arranged on the first clamping plates 162 so as to follow the displacement of the two first clamping plates 162, and therefore one ends of the two first clamping plates 162 can be contacted with a semiconductor device, and the semiconductor device is clamped;

through elevating platform 14 and lifter 13 that set up, can realize the high lift to first clamping plate 162, the practicality is good.

It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art and which are included in the embodiments of the present utility model without the inventive step, are intended to be within the scope of the present utility model. Structures, devices and methods of operation not specifically described and illustrated herein, unless otherwise indicated and limited, are implemented according to conventional means in the art.

Claims

1. The probe station for testing the semiconductor device comprises a probe station main body (1), and is characterized in that a workbench (2) is arranged on the probe station main body (1), a fixed rod (5) is arranged at the upper end of the workbench (2), a top plate (6) is arranged at the upper end of the fixed rod (5), and a connecting vertical plate (8) is arranged between the workbench (2) and the top plate (6);

be equipped with spout (12) in connecting riser (8), be equipped with lifter (13) in spout (12), connect slider (15) on lifter (13), clamping mechanism (16) are connected to the upper end of slider (15), clamping mechanism (16) are including recess (161), first clamping plate (162), screw thread clamping lever (163) and fastener (164), the inside of recess (161) is equipped with first clamping plate (162), be equipped with screw thread clamping lever (163) on first clamping plate (162), be equipped with fastener (164) on screw thread clamping lever (163).

2. The probe station for testing semiconductor devices according to claim 1, wherein supporting rods (3) are arranged at four corners of the lower end of the workbench (2), and the lower ends of the supporting rods (3) are connected with bottom posts (4).

3. The probe station for testing semiconductor devices according to claim 1, wherein the lower end of the top plate (6) is connected with a connecting plate (7), and a controller (9) is arranged on the connecting vertical plate (8).

4. The probe station for testing semiconductor devices according to claim 1, wherein a telescopic rod (10) is arranged at the lower end of the top plate (6), and the lower end of the telescopic rod (10) is connected with a probe needle (11).

5. A probe station for testing semiconductor devices according to claim 1, characterized in that a second clamping plate (17) is provided on one side of the clamping mechanism (16).

6. A probe station for testing semiconductor devices according to claim 1, wherein the first clamping plate (162) and the second clamping plate (17) are symmetrically disposed on both sides of the lifting table (14).