CN220418803U - Semiconductor throttle valve flow control precision detection equipment - Google Patents

Abstract

The utility model discloses a semiconductor throttle valve flow control precision detection device, which relates to the technical field of throttle valve detection devices and comprises a bottom plate, wherein a connecting pipe and a control valve are arranged at the top of the bottom plate through a quantitative exhaust fan, a flowmeter is further arranged at the top of the bottom plate, a throttle valve is arranged at the air outlet end of an air outlet pipe, a telescopic rod, a clamping plate, an L-shaped support plate, an electric push rod and a shell are arranged on the right side of the top of the bottom plate through a test seat, and a rotating shaft, a worm wheel, a worm and a rotating handle are arranged on the shell. According to the utility model, under the action of the worm wheel, the worm and the rotating handle, the valve angle of the throttle valve can be adjusted, the angle can be rotated after rotation, the throttle valve can be clamped and fixed under the action of the clamping plate, the connection quality of the throttle valve and the air outlet pipe is ensured, the fixing requirements of throttle valves with different sizes are met, the applicability of the device is improved, and the accuracy of the detection result is ensured.

Description

Semiconductor throttle valve flow control precision detection equipment

Technical Field

The utility model relates to the technical field of throttle valve detection equipment, in particular to semiconductor throttle valve flow control precision detection equipment.

Background

In semiconductor device manufacturing processes, it is often desirable to place a wafer to be processed within a process chamber provided with semiconductor processing equipment. And delivering the process gas into the evacuated processing chamber through a throttle valve. The semiconductor throttle valve is used in semiconductor equipment to control the pressure of the chamber through the opening and closing angle of the throttle valve, and when the semiconductor throttle valve is maintained, accurate data are needed to determine that the throttle valve after maintenance can meet the requirement of semiconductor process.

In the prior art, for the throttle valve applied to manufacturing a high-stability semiconductor, because the manufacturing requirement is high, the precision detection of the throttle valve is more indispensable, and the existing throttle valve precision detection device cannot accurately control the angle of the throttle valve, so that the detection quality of the throttle valve is reduced, and therefore, the semiconductor throttle valve flow control precision detection device is provided.

Disclosure of Invention

The utility model aims to provide a semiconductor throttle valve flow control precision detection device which is used for solving the problems in the background technology.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

the utility model provides a semiconductor throttle valve flow control precision detection equipment, includes the bottom plate, bottom plate top left side is provided with the ration air exhauster through the fixed plate, and the end of giving vent to anger of ration air exhauster is provided with the connecting pipe, and the end of giving vent to anger of connecting pipe is provided with the control valve, the bottom plate top is located the ration air exhauster right side and is provided with the flowmeter, the end of giving vent to anger of control valve is connected with the inlet end of flowmeter, the end of giving vent to anger of flowmeter is provided with the outlet duct, the end of giving vent to anger of outlet duct is provided with the throttle valve, bottom plate top right side still is provided with the test seat through the spout slip, sets up the grip block through the telescopic link on the test seat, still set up electric putter through L type extension board on the test seat, electric putter bottom telescopic arm end sets up the casing, and the inside rotation of casing is provided with the pivot, be provided with the worm wheel through key-type connection in the pivot, the inside rotation of casing is provided with worm, worm and worm intermeshing with the worm wheel.

As a further scheme of the utility model: the worm shell is rotatably connected with the shell.

As still further aspects of the utility model: the control valve is provided with a handle.

As still further aspects of the utility model: the outer wall of the shell is also provided with a self-locking motor, and a power output shaft of the self-locking motor is connected with the worm through a coupler.

As still further aspects of the utility model: and a reset spring is sleeved outside the telescopic rod.

As still further aspects of the utility model: one end of the return spring is connected with the clamping plate, and the other end of the return spring is connected with the test seat.

Compared with the prior art, the utility model has the following beneficial effects:

1. under the action of the worm wheel, the worm and the rotating handle, the function of rotating the valve angle of the throttle valve can be realized, and meanwhile, as the worm wheel and the worm have a self-locking function, the valve angle of the throttle valve can be limited after the valve rotates for a certain angle, thereby being beneficial to improving the quality of the device for detecting the throttle valve;

2. under the effect of grip block, can carry out the centre gripping fixed to the choke valve that is detected to guaranteed the quality of being connected of choke valve and outlet duct, help improving the quality of detection to a certain extent, because of the interval of grip block can be adjusted, and then make the device can satisfy the fixed demand of centre gripping to not equidimension choke valve better, and then improved the suitability of device.

Drawings

Fig. 1 is a schematic structural diagram of an embodiment of the present utility model.

Fig. 2 is a schematic structural diagram of a left side view of an embodiment of the present utility model.

FIG. 3 is a schematic diagram of a test seat according to an embodiment of the utility model.

Fig. 4 is a schematic structural view of the inside of the housing according to an embodiment of the present utility model.

Reference numerals annotate: 1. a bottom plate; 2. quantitative exhaust fan; 3. a connecting pipe; 4. a control valve; 5. a handle; 6. a flow meter; 7. an air outlet pipe; 8. a test seat; 9. a telescopic rod; 10. a return spring; 11. a clamping plate; 12. an L-shaped support plate; 13. an electric push rod; 14. a housing; 15. a rotating shaft; 16. a worm wheel; 17. a worm; 18. a rotating handle; 19. self-locking motor.

Detailed Description

The present utility model will be described in detail below with reference to the drawings, in which like or identical parts are given the same reference numerals, and in which the shape, thickness or height of each component may be enlarged or reduced in practical use. The examples set forth herein are intended to be illustrative of the utility model and are not intended to limit the scope of the utility model. Any obvious modifications or alterations to the utility model, as would be apparent, are made without departing from the spirit and scope of the present utility model.

Examples

Referring to fig. 1 to 4, in the embodiment of the utility model, a device for detecting flow control accuracy of a semiconductor throttle valve comprises a bottom plate 1, wherein a quantitative exhaust fan 2 is arranged on the left side of the top of the bottom plate 1 through a fixing plate, a connecting pipe 3 is arranged at the air outlet end of the quantitative exhaust fan 2, a control valve 4 is arranged at the air outlet end of the connecting pipe 3, a flow meter 6 is arranged on the right side of the bottom plate 1, the air outlet end of the control valve 4 is connected with the air inlet end of the flow meter 6, an air outlet pipe 7 is arranged at the air outlet end of the flow meter 6, the air volume can be set by using the quantitative exhaust fan 2, the flow of air in the whole device can be controlled under the action of the control valve 4, the air flow can be recorded under the action of the flow meter 6, a handle 5 is arranged on the control valve 4, and the control valve 4 can be controlled under the action of the handle 5, so that a worker can operate the throttle valve conveniently.

The bottom plate 1 top right side still is provided with test seat 8 through the spout slip, be provided with the cavity on the test seat 8, be provided with telescopic link 9 on the cavity both sides cavity wall, telescopic link 9 telescopic arm end is provided with grip block 11, the telescopic link 9 outside still overlaps and is equipped with reset spring 10, reset spring 10 one end is connected with grip block 11, the reset spring 10 other end is connected with test seat 8, when needs are detected the choke valve, the staff is connected the inlet end of choke valve and the outlet end of outlet duct 7, afterwards utilize slip test seat 8, make the bottom of choke valve contact with test seat 8, afterwards utilize grip block 11 to carry out the centre gripping fixed to the choke valve, because of reset spring 10 has the power with grip block 11 inwards extrusion, grip block 11 can carry out the centre gripping fixed to the choke valve this moment, help improving the device to the centre gripping fixed quality of choke valve, moreover because of the interval of grip block 11 can adjust according to actual conditions, and then make the device can satisfy the centre gripping fixed demand to the choke valve of equidimension, and then make the suitability of device obtain promoting to a certain extent.

The top of the test seat 8 is also provided with an L-shaped support plate 12, an electric push rod 13 is arranged on a partition wall of the L-shaped support plate 12, the tail end of a telescopic arm at the bottom of the electric push rod 13 is provided with a shell 14, a rotating shaft 15 is arranged in the shell 14 in a rotating way, a worm wheel 16 is arranged on the rotating shaft 15 through key connection, a worm 17 is further arranged in the shell 14 in a rotating way, the worm 17 and the worm wheel 16 are meshed with each other, the worm wheel 16 is driven to rotate through the rotating worm 17, so that the rotating shaft 15 is driven to rotate, because the worm 17 and the worm wheel 16 have a self-locking function, the rotating angle of the rotating shaft 15 can be limited, the tail end of the bottom of the rotating shaft 15 is provided with a rotating handle 18, after a throttle valve is fixed on the test seat 8, the rotating handle 18 is driven to move downwards by the electric push rod 13, so that the rotating handle 18 is clamped with an adjusting switch of the throttle valve, and then the adjusting switch of the throttle valve can be driven to rotate by the worm 17 and the worm wheel 16, the rotating angle of the throttle valve can be limited, the detecting work of the throttle valve is further completed, the outer wall of the shell 14 is further provided with a self-locking motor 19, and a power output shaft of the self-locking motor 19 is connected with the self-locking motor 17 through a coupler, and the self-locking motor 19.

In the practical use process, when the throttle valve needs to be detected, a worker sets the throttle valve at the air outlet end of the air outlet pipe 7, then moves the test seat 8, moves the test seat 8 to the lower side of the throttle valve, clamps and fixes the throttle valve by utilizing the clamping plate 11, ensures the connection quality of the throttle valve and the air outlet pipe 7, drives the rotary handle 18 to move downwards by utilizing the electric push rod 13, enables the rotary handle 18 to be clamped with an adjusting switch of the throttle valve, then drives the worm 17 and the worm wheel 16 to rotate by utilizing the self-locking motor 19, so that the rotary handle 18 adjusts the valve angle of the throttle valve, introduces gas into the throttle valve by utilizing the quantitative exhaust fan 2, and opens the control valve 4, so that the gas enters the throttle valve through the flowmeter 6, the measured value on the flowmeter 6 is the flow through the control valve 4, and the worker can conduct comparison analysis according to the valve and the flow value of the throttle valve, and whether the throttle valve meets the use requirement or not is judged.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims (6)

1. The utility model provides a semiconductor throttle valve flow control precision detection equipment, includes bottom plate (1), its characterized in that, bottom plate (1) top left side is provided with ration air exhauster (2) through the fixed plate, and the end of giving vent to anger of ration air exhauster (2) is provided with connecting pipe (3), and the end of giving vent to anger of connecting pipe (3) is provided with control valve (4), bottom plate (1) top is located ration air exhauster (2) right side and is provided with flowmeter (6), the end of giving vent to anger of control valve (4) is connected with the inlet end of flowmeter (6), the end of giving vent to anger of flowmeter (6) is provided with outlet duct (7), the end of giving vent to anger of outlet duct (7) is provided with the choke valve, bottom plate (1) top right side is still provided with test seat (8) through the spout slip, and is provided with grip block (11) through telescopic link (9) on test seat (8), still be provided with electric putter (13) through L type extension link (12) on test seat (8), electric putter (13) bottom telescopic link end sets up casing (14), casing (14) inside rotation is provided with worm wheel (15), worm wheel (16) are provided with worm (16) through connecting with each other through pivot (16) in the inside (16), the bottom of the rotating shaft (15) is provided with a rotating handle (18).

2. The apparatus according to claim 1, characterized in that the worm (17) is provided in the housing (14) and is rotatably connected to the housing (14).

3. The apparatus according to claim 1, characterized in that a handle (5) is provided on the control valve (4).

4. The device for detecting the flow control precision of the semiconductor throttle valve according to claim 2, wherein a self-locking motor (19) is further arranged on the outer wall of the shell (14), and a power output shaft of the self-locking motor (19) is connected with the worm (17) through a coupler.

5. The device for detecting the flow control precision of the semiconductor throttle valve according to claim 1, wherein a return spring (10) is sleeved outside the telescopic rod (9).

6. The device for detecting the flow control precision of the semiconductor throttle valve according to claim 5, wherein one end of the return spring (10) is connected with the clamping plate (11), and the other end of the return spring (10) is connected with the test seat (8).