CN220409269U

CN220409269U - Crystal support, silicon rod fixing system and slicing machine

Info

Publication number: CN220409269U
Application number: CN202320970004.7U
Authority: CN
Inventors: 冯少辉; 任新刚; 杨浩; 冯亚波; 管辉; 迪大明; 成路; 刘晓东; 张珊
Original assignee: Longi Green Energy Technology Co Ltd
Current assignee: Longi Green Energy Technology Co Ltd
Priority date: 2023-04-25
Filing date: 2023-04-25
Publication date: 2024-01-30
Anticipated expiration: 2033-04-25

Abstract

The present disclosure relates to a crystal support, silicon rod fixing system and slicer, the crystal support includes: the main body is provided with a bonding side for bonding with the silicon rod through the lining plate and a positioning side for being positioned by the tool, wherein the positioning side is opposite to the bonding side; the locating structure is formed on the locating side and comprises a fixing groove extending along the extending direction of the crystal support, the fixing groove is used for being matched with the fixing convex part of the tool, and the fixing groove and the fixing convex part are configured to form point contact or line contact in the fixing groove. The fixing groove is arranged on the main body of the crystal support, so that the fixing convex part can be matched with the main body in a point contact or line contact mode. When the tooling is used for tightly supporting the crystal, the tooling can be contacted with the surface of the crystal support to be fixed, and the lateral displacement of the fixing convex part in the groove of the fixing groove can be avoided through the point contact or the line contact of the fixing convex part and the fixing groove, so that the lateral displacement between the tooling and the crystal support is avoided, and the firmness in fixing the silicon rod is further ensured.

Description

Crystal support, silicon rod fixing system and slicing machine

Technical Field

The disclosure relates to the technical field of microtomes, in particular to a crystal holder, a silicon rod fixing system and a microtome.

Background

In the process of cutting a silicon rod by using a slicing machine, a crystal support is generally used for pasting the silicon rod to position the silicon rod, and the crystal support is positioned by a tool on the slicing machine, so that the position stability of the silicon rod in the slicing process is ensured. In the related art, a tool is usually used to directly contact with the surface of the wafer carrier to clamp the wafer carrier, but the wafer carrier in the clamping manner is inevitably displaced left and right in the cutting process, and the clamping state is loose, so that the cutting position cannot be accurately positioned.

Disclosure of Invention

It is an object of the present disclosure to provide a crystal holder, a silicon rod fixation system, and a microtome that at least partially address the problems of the related art.

To achieve the above object, the present disclosure provides a seed holder, comprising: the main body is provided with a bonding side for bonding with the silicon rod through the lining plate and a positioning side for being positioned by the fixture, and the positioning side is opposite to the bonding side; the locating structure is formed on the locating side and comprises a fixing groove extending along the extending direction of the crystal support, and the fixing groove is used for being matched with the fixing convex part of the tool, wherein the fixing groove and the fixing convex part are configured to form point contact or line contact in the fixing groove.

Alternatively, the fixing groove is configured as a V-groove.

Optionally, the positioning structure includes a positioning groove extending along the extending direction of the crystal support, and the positioning groove is used for being matched with a positioning convex part of the tooling, wherein the positioning groove and the positioning convex part are configured to form surface contact at least at the bottom of the positioning groove.

Optionally, the positioning groove is configured as a square groove or an inverted trapezoidal groove.

Optionally, the positioning groove and the positioning convex part are configured to form surface contact at the bottom and the side wall of the positioning groove, and/or the fixing groove and the fixing convex part are configured to form point contact or line contact at the bottom of the fixing groove.

Optionally, the positioning structure includes two spaced bosses protruding from the main body at the positioning side, one of the two bosses is formed with the positioning groove, the other is formed with the fixed slot, and a cavity formed as an inverted T-shape is formed between the two bosses for the T-shaped stand of the tool to insert.

Optionally, the main body is penetrated with a through hole along a lateral direction perpendicular to the extending direction of the crystal support.

Optionally, the number of the through holes is multiple, and the multiple through holes are arranged at equal intervals in the extending direction of the crystal support, wherein the through holes are configured as trapezoid holes, and two adjacent trapezoid holes are configured to be upside down.

According to a second aspect of embodiments of the present disclosure, there is provided a silicon rod fixing system, including a crystal support for bonding a silicon rod through a liner plate and a tool for positioning the crystal support, the crystal support being provided by the present disclosure, the tool having a positioning convex portion for contacting with the positioning groove and a fixing convex portion for contacting with the fixing groove, wherein a shape of the positioning convex portion is adapted to a shape of the positioning groove, and a shape of the fixing convex portion is adapted to a shape of the fixing groove.

According to a third aspect of embodiments of the present disclosure, there is provided a microtome including the silicon rod fixation system provided by the present disclosure.

Through the technical scheme, the fixing groove is formed in the main body of the crystal support, so that the fixing convex part can be in point contact or line contact with the fixing convex part. When the tooling is used for tightly supporting the crystal, the tooling can be contacted with the surface of the crystal support to be fixed, and the lateral displacement of the fixing convex part in the groove of the fixing groove can be avoided through the point contact or the line contact of the fixing convex part and the fixing groove, so that the lateral displacement between the tooling and the crystal support is avoided, and the firmness in fixing the silicon rod is further ensured.

Additional features and advantages of the present disclosure will be set forth in the detailed description which follows.

Drawings

The accompanying drawings are included to provide a further understanding of the disclosure, and are incorporated in and constitute a part of this specification, illustrate the disclosure and together with the description serve to explain, but do not limit the disclosure. In the drawings:

FIG. 1 is a schematic illustration of the engagement of a silicon rod securing system with a silicon rod provided in an exemplary embodiment of the present disclosure;

FIG. 2 is a schematic illustration of the engagement of a silicon rod securing system with a silicon rod provided in an exemplary embodiment of the present disclosure;

fig. 3 is a schematic structural view of a silicon rod fixing system according to an exemplary embodiment of the present disclosure.

Description of the reference numerals

The crystal support comprises a crystal support body 1, a crystal support body 11, a main body 111, a through hole 12, a boss 121, a fixing groove 122, a locating groove 123, a cavity 124, a stand, a silicon rod 2, a fixture 3, a fixing convex part 31, a locating convex part 32 and a lining plate 4.

Detailed Description

Specific embodiments of the present disclosure are described in detail below with reference to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the disclosure, are not intended to limit the disclosure.

In the present disclosure, unless otherwise indicated, the term "direction of extension of the susceptor" is defined according to the cutting direction of the microtome, and specifically may refer to the direction perpendicular to the plane of the drawing in fig. 1, "lateral" refers to both sides of the extension direction, and specifically may refer to the left-right direction in fig. 1, and the term "inner and outer" refers to the inner and outer of the contour of the corresponding component. The terms such as "first, second," and the like, as used in this disclosure, are used for distinguishing one element from another and not necessarily for order or importance.

According to the embodiment of the disclosure, the crystal support is used for fixing the silicon rod to be sliced, and after the silicon rod is fixed, the crystal support is further fixed through the tool, so that the stability of fixing the silicon rod is guaranteed. Referring to fig. 1 to 3, the susceptor 1 includes a main body 11 and a positioning structure formed on the main body 11, wherein the main body 11 has a bonding side (i.e., a lower side of the main body 11 shown in fig. 1) for bonding with the silicon rod 2 through the backing plate 4 and a positioning side (i.e., an upper side of the main body 11 shown in fig. 1) for positioning by the tool 3, the positioning side being opposite to the bonding side, i.e., one under the next, and the silicon rod 2 may be bonded to the lower side of the main body 11 as shown in fig. 1. The positioning structure is formed on the positioning side, i.e. the upper side facing away from the silicon rod 2 in fig. 1, and comprises a fixing groove 121 extending along the extending direction of the susceptor 1 (i.e. the direction perpendicular to the drawing plane of fig. 1), wherein the fixing groove 121 is used for being matched with the fixing protrusion 31 of the tool 3, and the fixing groove 121 and the fixing protrusion 31 are configured to form point contact or line contact in the fixing groove 121. In short, the fixing protrusion 31 of the tool 3 can be inserted into the fixing groove 121 and make a point contact or a line contact with the fixing groove 121, and the contact form is determined according to the shape of the fixing protrusion 32. In fig. 1, the tool 3 can be moved up and down to move the fixing protrusion 31 into or out of the fixing groove 121.

By the above technical solution, the fixing groove 121 is provided on the main body 11 of the crystal support 1, so that the fixing protrusion 31 can be in point contact or line contact with the fixing protrusion. When the tool 3 is used for clamping the crystal support 1, the tool 3 can be contacted with the surface of the crystal support 1 to be fixed, and the fixing convex part 31 can be prevented from being laterally shifted in the groove of the fixing groove 121 through point contact or line contact between the fixing convex part 31 and the fixing groove 121, so that the tool 3 and the crystal support 1 are prevented from being laterally shifted, and further the fixation of the silicon rod 2 is ensured to be firm.

In the embodiment of the present disclosure, referring to fig. 1, the fixing groove 121 may be configured as a V-groove, in which case the fixing protrusion 31 engaged with the fixing groove 121 may also be configured as a V-shape in cross section to form a line contact with the V-groove at the bottom, or the fixing protrusion 31 may be configured as a taper to form a point contact with the V-groove at the bottom. In some embodiments, the fixing groove 121 may be configured as a V-groove, the fixing protrusion 31 may be configured as a semicircle in cross section to be in line contact with a sidewall of the V-groove, or the fixing protrusion 31 may be configured as a hemisphere or square to be in point contact with a sidewall of the V-groove. In some embodiments, the fixing groove 121 may be configured in a semicircular shape in cross section, and the fixing protrusion 31 may be configured in a square shape to make line contact with an inner wall of the semicircular shape. The line contact fingers are all line contacts along the extending direction of the crystal support. Due to these point contacts or line contacts described above, a limitation may be imposed on the lateral displacement of the tray 1 (i.e., the left-right direction of fig. 1).

According to an embodiment of the present disclosure, referring to fig. 1 in combination with fig. 2, the positioning structure may further include a positioning groove 122 extending along the extending direction of the susceptor 1, where the positioning groove 122 is configured to cooperate with the positioning protrusion 32 of the tool 3, and the positioning groove 122 and the positioning protrusion 32 are configured to form a surface contact at least at the bottom of the positioning groove 122. The fixture 3 can clamp the crystal support 1 at a preset position by virtue of the surface contact between the positioning groove 122 and the positioning convex part 32 at the bottom of the groove, but the surface contact between the positioning groove 122 and the positioning convex part 32 is realized, and the large contact area is realized, so that the left and right fit clearance between the positioning groove 122 and the positioning convex part due to manufacturing tolerance or assembly convenience is difficult to avoid, and the left and right displacement between the positioning groove 122 and the positioning convex part is caused, and therefore, the restriction of the left and right displacement can be realized by combining the structures of the fixing groove 121 and the fixing convex part 31, and the position stability of the crystal support 1 is ensured.

In embodiments of the present disclosure, the detent 122 may be configured as a bottom planar slot, such as a square slot. The detent projections 32 may be configured to be oriented to contact the bottom surface of the detent 122. In some embodiments, the positioning slot 122 may be an inverted trapezoid slot, and the positioning protrusion 32 may be an inverted trapezoid, with a fit gap left therebetween in a lateral direction, so as to facilitate insertion of the positioning protrusion 32.

As shown in fig. 1, the positioning groove 122 and the positioning convex portion 32 may be configured to form surface contact at the bottom and the side wall of the positioning groove 122, for example, the square groove and the square convex portion or the trapezoid groove and the trapezoid convex portion are adopted to form surface contact on three sides (bottom surface and two side surfaces), and by means of such multi-sided surface contact, more accurate positioning of the wafer support 1 by the tool 3 can be realized.

In some embodiments, referring to fig. 1, the fixing groove 121 and the fixing protrusion 31 may be configured to form a point contact or a line contact at the bottom of the fixing groove 121, for example, by making a line contact between the V-shaped groove and the V-shaped protrusion at the bottom, so that the wafer support 1 may be better fixed, and lateral displacement between the wafer support 1 and the tool 3 may be avoided.

As shown in fig. 1, the positioning structure may include two bosses 12 protruding from the main body 11 at the positioning side and disposed at intervals, one of the two bosses 12 is formed with a positioning groove 122, the other is formed with a fixing groove 121, and the two bosses 12 may be symmetrically disposed on the crystal support 1, so that the fixing protrusion 31 and the positioning protrusion 32 of the tool 3 apply an equal force to the crystal support 1, so as to avoid the unstable inclination of the crystal support 1. The two bosses 12 can form an inverted T-shaped cavity 123 for inserting a T-shaped stand 124 of the tool 3, and the preliminary positioning and clamping of the crystal support 1 can be realized through the T-shaped stand 124, wherein when the crystal support is installed, the T-shaped stand 124 can slide into the cavity 123 from one end, and after the T-shaped stand 124 slides into place, the positioning convex part 32 and the fixing convex part 31 of the tool 3 are moved into corresponding grooves for further positioning and stabilization.

According to an embodiment of the present disclosure, referring to fig. 2 and 3, the body 11 may be penetrated with a through hole 111 in a lateral direction perpendicular to the extension direction of the tray 1. In the cutting process, the cutting fluid that splashes can pass through this through-hole 111 from one side to the opposite side, and the cutting fluid striking lateral wall when avoiding the lateral wall to be pore-free and rebound leads to the cutting fluid to splash the loss, has increased the utilization ratio of cutting fluid to the cutting fluid also can further promote the cooling effect in through-hole 111.

In some embodiments, the whole crystal support 1 may be hollowed, in other embodiments, in order to ensure that the crystal support 1 has a strong supporting force on the silicon rod 2 to be cut, the number of the through holes 111 may be multiple, and the multiple through holes 111 are arranged at equal intervals in the extending direction of the crystal support 1, so that the strength of the crystal support 1 is not affected, and the cutting fluid can be ensured to smoothly pass through the through holes 111.

Referring to fig. 2 and 3, the through hole 111 may be configured as a trapezoid hole, and two adjacent trapezoid holes may be configured upside down. By the arrangement mode, on the premise that the strength of the crystal support 1 is guaranteed by ensuring that the interval is reserved between two adjacent through holes 111, the through holes 111 can be arranged as large as possible, and the utilization rate of cutting fluid is provided.

According to a second aspect of the embodiments of the present disclosure, there is provided a silicon rod fixing system for stably fixing a silicon rod 2, referring to fig. 1 to 2, the fixing system including a susceptor 1 for bonding the silicon rod 2 through a backing plate 4 and a fixture 3 for positioning the susceptor 1, the susceptor 1 being the above-described susceptor, the fixture 3 having a positioning protrusion 32 for contacting with a positioning groove 122 and a fixing protrusion 31 for contacting with a fixing groove 121. The fixing system has all the beneficial effects of the crystal support, and is not repeated here.

In one embodiment, the shape of the positioning protrusion 32 may be adapted to the shape of the positioning groove 122, for example, both the shape of the positioning protrusion 31 and the shape of the fixing groove 121 are square, for example, both the shape of the fixing protrusion and the shape of the fixing groove are V-shaped. The adaptive structure is more convenient for installation and identification, and false installation is avoided.

According to a third aspect of embodiments of the present disclosure, a microtome is provided, which includes the above-mentioned silicon rod fixing system and has all the advantages of the above-mentioned fixing system, and is not described herein.

The preferred embodiments of the present disclosure have been described in detail above with reference to the accompanying drawings, but the present disclosure is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solutions of the present disclosure within the scope of the technical concept of the present disclosure, and all the simple modifications belong to the protection scope of the present disclosure.

In addition, the specific features described in the foregoing embodiments may be combined in any suitable manner, and in order to avoid unnecessary repetition, the present disclosure does not further describe various possible combinations.

Moreover, any combination between the various embodiments of the present disclosure is possible as long as it does not depart from the spirit of the present disclosure, which should also be construed as the disclosure of the present disclosure.

Claims

1. A crystalline support, comprising:

the main body is provided with a bonding side for bonding with the silicon rod through the lining plate and a positioning side for being positioned by the fixture, and the positioning side is opposite to the bonding side;

the locating structure is formed on the locating side and comprises a fixing groove extending along the extending direction of the crystal support, and the fixing groove is used for being matched with the fixing convex part of the tool, wherein the fixing groove and the fixing convex part are configured to form point contact or line contact in the fixing groove.

2. The wafer carrier of claim 1, wherein the securing slots are configured as V-shaped slots.

3. The tray of claim 1, wherein the positioning structure comprises a positioning groove extending along the extending direction of the tray, the positioning groove being configured to mate with a positioning protrusion of the fixture, wherein the positioning groove and the positioning protrusion are configured to form a surface contact at least at a bottom of the positioning groove.

4. The tray of claim 3, wherein the detent is configured as a square groove or an inverted trapezoidal groove.

5. A susceptor according to claim 3, wherein the locating groove and the locating protrusion are configured to form a surface contact at both a bottom and a sidewall of the locating groove and/or the fixing groove and the fixing protrusion are configured to form a point contact or a line contact at a bottom of the fixing groove.

6. A crystal support according to claim 3, wherein the positioning structure comprises two bosses protruding from the main body at intervals on the positioning side, one of the two bosses is provided with the positioning groove, the other boss is provided with the fixing groove, and an inverted-T-shaped cavity is formed between the two bosses for inserting a T-shaped stand of the tool.

7. The tray of any one of claims 1-6, wherein the body has a through hole therethrough in a lateral direction perpendicular to an extension direction of the tray.

8. The tray according to claim 7, wherein the number of the through holes is plural, and the plural through holes are arranged at equal intervals in the extending direction of the tray, wherein the through holes are configured as trapezoidal holes, and two adjacent trapezoidal holes are configured upside down.

9. A silicon rod fixing system, characterized by comprising a crystal support for bonding a silicon rod through a lining plate and a tool for positioning the crystal support, wherein the crystal support is a crystal support according to any one of claims 1-8, the positioning structure comprises a positioning groove extending along the extending direction of the crystal support, the tool is provided with a positioning convex part for contacting with the positioning groove and a fixing convex part for contacting with the fixing groove, the shape of the positioning convex part is matched with the shape of the positioning groove, and the shape of the fixing convex part is matched with the shape of the fixing groove.

10. A microtome comprising the silicon rod fixation system of claim 9.