CN220386229U - High-purity nitrogen preparing device - Google Patents
High-purity nitrogen preparing device Download PDFInfo
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- CN220386229U CN220386229U CN202321646910.8U CN202321646910U CN220386229U CN 220386229 U CN220386229 U CN 220386229U CN 202321646910 U CN202321646910 U CN 202321646910U CN 220386229 U CN220386229 U CN 220386229U
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- Prior art keywords
- purity nitrogen
- adsorption
- drum
- air
- reaction
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 96
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 46
- 238000006243 chemical reaction Methods 0.000 claims abstract description 66
- 238000001179 sorption measurement Methods 0.000 claims abstract description 39
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000001301 oxygen Substances 0.000 claims abstract description 24
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 claims abstract description 16
- 239000000126 substance Substances 0.000 claims description 10
- 238000000746 purification Methods 0.000 claims description 8
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 230000003584 silencer Effects 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims description 2
- 239000003054 catalyst Substances 0.000 abstract description 32
- 238000000034 method Methods 0.000 abstract description 10
- 238000002360 preparation method Methods 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
Abstract
The utility model discloses a high-purity nitrogen preparing device, belongs to the technical field of nitrogen production equipment, and solves the technical problem that a catalyst is inconvenient to replace when preparing high-purity nitrogen by a catalyst method in the prior art. The device comprises an air guiding and purifying assembly, an air buffer tank and an adsorption assembly which are connected in sequence; the adsorption component comprises a plurality of adsorption units, and pressure equalizing valves are arranged between adjacent adsorption units; the adsorption unit comprises a tank body, a reaction container arranged in the tank body and a plurality of drum-shaped reaction modules movably connected with the reaction container; the upper end and the lower end of the reaction vessel are respectively communicated with a nitrogen output end and an oxygen output end, and the side wall of the reaction vessel is also communicated with an air input end. The high-purity nitrogen preparing device can be better used for preparing high-purity nitrogen by a catalyst method, and is convenient to replace the catalyst, high in production efficiency and wide in application range.
Description
Technical Field
The utility model relates to the technical field of nitrogen production equipment, in particular to a high-purity nitrogen preparation device.
Background
The purity of the product nitrogen gas produced by the conventional nitrogen production system is about 99.5%, which is called "common nitrogen", and the common nitrogen contains about 0.5% of oxygen, but in the electronics industry sector, particularly in the manufacturing process of semiconductor devices and integrated circuits, a large amount of high-purity nitrogen gas (purity of about 99.999%) is required as a shielding gas, a dilution gas, a carrier gas, etc., and the purity of the nitrogen gas directly affects the yield and reliability of electronic products, so that the common nitrogen needs to be purified to high-purity nitrogen.
The existing common ammonia purification method generally comprises two methods, wherein the first method is a hydrogen preparation method, hydrogen is taken as a deoxidizer, impurity oxygen in the nitrogen is removed, a hydrogen source is required to be provided in the hydrogen preparation method, and certain safety problems exist; the second method is a catalyst method, namely, impurity oxygen in nitrogen reacts with carbon provided by a catalyst under the action of a carbon-supported catalyst, so that the impurity oxygen contained in the nitrogen is removed.
In the catalyst method, the catalyst itself needs to be replaced periodically because the catalyst itself needs to be consumed, so that the catalyst is inconvenient to use, and therefore, a high-purity nitrogen preparation device convenient for replacing the catalyst is needed.
Disclosure of Invention
The utility model aims to provide a high-purity nitrogen preparing device to solve the technical problem that a catalyst is inconvenient to replace when preparing high-purity nitrogen by a catalyst method in the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a high-purity nitrogen preparing device which comprises an air introducing and purifying assembly, an air buffer tank and an adsorption assembly which are connected in sequence; the adsorption component comprises a plurality of adsorption units, and pressure equalizing valves are arranged between adjacent adsorption units;
the adsorption unit comprises a tank body, a reaction container arranged in the tank body and a plurality of drum-shaped reaction modules movably connected with the reaction container; the upper end and the lower end of the reaction vessel are respectively communicated with a nitrogen output end and an oxygen output end, and the side wall of the reaction vessel is also communicated with an air input end.
The technical effect of adopting the technical scheme is as follows: high-temperature air is introduced into the air introducing and purifying assembly, so that the air sequentially enters the air buffer tank and the adsorption assembly to prepare high-purity nitrogen under the action of the air introducing and purifying assembly; wherein be provided with a plurality of adsorption units and be provided with a plurality of drum reaction module on the reaction vessel and make oxygen adsorption efficiency improve for production beat, through a plurality of drum reaction module and reaction vessel swing joint, be convenient for the change of catalyst.
Alternatively or preferably, the drum-shaped reaction module comprises a drum-shaped surface and sliding strips respectively connected to two sides of the drum-shaped surface; a plurality of groups of limiting grooves are formed in one side of the drum-shaped surface, close to the reaction container, and chemical medium inserting sheets are clamped in the plurality of groups of limiting grooves.
The technical effect of adopting the technical scheme is as follows: the chemical medium inserting piece loaded with the catalyst is adopted, and the chemical medium inserting piece is connected with the drum-shaped surface through the clamping of the limiting groove, so that the catalyst is further convenient to replace.
Alternatively or preferably, the reaction vessel has a cavity formed therein, and the reaction vessel has a plurality of sliding grooves formed in a length direction thereof for sliding connection with the slide bar.
Alternatively or preferably, the air intake purification assembly includes an air compressor, a filter purification device, and a heating device.
Optionally or preferably, the oxygen output end is communicated with a vacuum pump, and the vacuum pump is used for discharging oxygen in the adsorption unit;
the connection part of the oxygen output end pipe body and the vacuum pump is provided with a silencer, and the silencer is used for reducing noise generated by exhaust.
Optionally or preferably, the air guiding purification assembly, the adsorption assembly and the vacuum pump are all electrically connected with a PLC control unit.
Based on the technical scheme, the utility model at least has the following technical effects:
according to the high-purity nitrogen preparation device provided by the utility model, high-temperature air is introduced into the air introduction purification assembly, and under the action of the air introduction purification assembly, the air sequentially enters the air buffer tank and the adsorption assembly to prepare high-purity nitrogen; the plurality of adsorption units are arranged, and the plurality of drum-shaped reaction modules are arranged on the reaction container, so that the oxygen adsorption efficiency is improved, the production takt is accelerated, and meanwhile, the drum-shaped reaction modules can improve the contact area of air and the catalyst-loaded chemical medium inserting sheet, and the reaction efficiency is improved; the efficiency and convenience of catalyst replacement can be improved through sliding connection of the drum-shaped reaction module and the reaction container and clamping connection of the chemical medium inserting sheet and the drum-shaped reaction module, and further the preparation efficiency of high-purity nitrogen prepared by a catalyst method is improved.
Drawings
FIG. 1 is a schematic diagram showing the overall structure of a high purity nitrogen producing apparatus according to the present utility model;
FIG. 2 is a schematic diagram showing the structure of an adsorption unit of the high-purity nitrogen production apparatus according to the present utility model;
FIG. 3 is a schematic diagram showing the structure of an adsorption unit (hidden tank) of the high-purity nitrogen production apparatus according to the present utility model;
FIG. 4 is a schematic structural view of a reaction vessel in an adsorption unit of the high purity nitrogen production apparatus of the present utility model;
FIG. 5 is a schematic structural view of a drum-shaped reaction module in an adsorption unit of the high purity nitrogen production apparatus of the present utility model;
FIG. 6 is an enlarged schematic view of the reaction vessel and drum reactor module assembly of the high purity nitrogen production apparatus of the present utility model.
In the figure: 1. air is led into the purifying component; 2. an air buffer tank; 3. an adsorption assembly; 31. an adsorption unit; 311. an air input; 312. a nitrogen output; 313. an oxygen output; 314. a reaction vessel; 315. a chute; 316. a drum reaction module; 317. a slide bar; 318. a chemical medium insert; 319. a tank body; 320. a drum surface; 321. a limit groove; 32. a pressure equalizing valve; 4. a muffler; 5. and a vacuum pump.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model; it is apparent that the described embodiments are only some embodiments of the present utility model, not all of them, and all other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present utility model without making any inventive effort are within the scope of the present utility model.
Referring to fig. 1, a high-purity nitrogen preparing apparatus includes an air introducing purifying assembly 1, an air buffer tank 2 and an adsorbing assembly 3 connected in sequence, wherein the arrow direction is the air flow direction; the air guiding and purifying assembly 1 comprises an air compressor, a filtering and purifying device and an air heating device, wherein the air guiding and purifying assembly 1 is used for introducing high-pressure air which is heated to 300 ℃ and subjected to impurity removal, oil removal and drying into the air buffer tank 2 and temporarily storing the air buffer tank 2.
Referring to fig. 2 to 4, the adsorption unit 31 includes a tank 319, and a reaction vessel 314 and a plurality of drum-shaped reaction modules 316 movably connected to the reaction vessel 314 are disposed in the tank 319; the upper end and the lower end of the reaction vessel 314 are respectively communicated with a nitrogen output end 312 and an oxygen output end 313, the side wall of the reaction vessel 314 is also communicated with an air input end 311, and high-pressure air from the air buffer tank 2 enters the tank body 319 and the reaction vessel 314 through the air input end 311; the tank 319 has holes for the nitrogen output port 312, the oxygen output port 313, and the air input port 311, and the tank 319 has a stopper for fixing the reaction vessel 314, and a rib and a beam for reinforcing its structure. In addition, the structure of the tank 319 is hidden in FIG. 2 for ease of illustration of the reaction vessel 314 within the tank 319.
Referring to fig. 1, in the present embodiment, the number of the adsorption units 31 is two, and a pressure equalizing valve 32 is communicated between the two adsorption units 31, and the pressure equalizing valve 32 is used for equalizing the pressures in the adsorption units 31. Air from the air buffer tank 2 enters the tank body 319 and the reaction vessel 314 through the air input end 311 and reacts with the catalyst arranged in the reaction vessel 314, wherein the catalyst can be a carbon-supported catalyst; at this time, the valve at the nitrogen output end 312 is closed, the pressure in the reaction vessel 314 is continuously increased, and the reaction speed is slowed down when the pressure in the reaction vessel 314 reaches a limit value. At this time, oxygen in the reaction vessel 314 is discharged through the lower oxygen outlet 313, and high purity nitrogen is discharged through the upper nitrogen outlet 312. In other embodiments of the present utility model, the number of the adsorption units 31 may be set to 3, 4, etc., specifically according to the use situation, and the equalizing valves 32 are connected between two adjacent adsorption units 31.
In this embodiment, the oxygen output end 313 is connected with the vacuum pump 5, and the connection between the pipe body of the oxygen output end 313 and the vacuum pump 5 is provided with the muffler 4, and the muffler 4 is used for reducing noise generated by exhaust.
In this embodiment, one adsorption unit 31 includes a tank 319, a reaction vessel 314 is disposed in the tank 319, and four drum-shaped reaction modules 316 are movably connected to one reaction vessel 314, where the drum-shaped reaction modules 316 can increase the contact area between oxygen and catalyst while being convenient for disassembly to replace the catalyst, so as to improve the reaction efficiency.
Referring to fig. 4, the reaction vessel 314 has a rectangular parallelepiped structure, a cavity for reacting oxygen with a catalyst is formed in the reaction vessel, a plurality of sliding grooves 315 are formed along the length direction of the sidewall, and the drum-shaped reaction module 316 can be detached through the sliding grooves 315.
Referring to fig. 5 to 6, the drum-shaped reaction module 316 includes a drum-shaped surface 320 and sliding strips 317 respectively connected to two sides of the drum-shaped surface 320, wherein a plurality of groups of limiting grooves 321 are disposed on one side of the drum-shaped surface 320 near the reaction vessel 314, the plurality of groups of limiting grooves 321 are used for clamping the chemical medium inserting sheet 318, and the chemical medium inserting sheet 318 carries a carbon-supported catalyst.
In actual operation, after the catalyst in the reaction vessel 314 is used, the catalyst can be replaced by replacing the drum-shaped reaction module 316; the replaced drum-shaped reaction module 316 can replace the catalyst by replacing the chemical medium inserting sheet 318, and after the catalyst is replaced, the catalyst in the next round of reaction container 314 can be replaced by replacing, so that the cost is saved, and the replacement efficiency is improved.
In this embodiment, the air-introducing purification assembly 1, the adsorption assembly 3 and the vacuum pump 5 are all electrically connected with a PLC control unit, so that a person can control the preparation apparatus through the PLC, wherein the PLC control unit can be a siemens S7-200SMART mini PLC.
It should be noted that, in this embodiment, the joints between each device and the pipeline are all provided with valve bodies and sensors with corresponding types and functions, which are conventional settings of technicians, and are not described herein.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The high-purity nitrogen preparing device is characterized by comprising an air guiding and purifying assembly (1), an air buffer tank (2) and an adsorption assembly (3) which are connected in sequence; the adsorption assembly (3) comprises a plurality of adsorption units (31), and pressure equalizing valves (32) are arranged between adjacent adsorption units (31);
the adsorption unit (31) comprises a tank body (319), a reaction container (314) arranged in the tank body (319) and a plurality of drum-shaped reaction modules (316) movably connected with the reaction container (314); the upper end and the lower end of the reaction vessel (314) are respectively communicated with a nitrogen output end (312) and an oxygen output end (313), and the side wall of the reaction vessel (314) is also communicated with an air input end (311).
2. The high purity nitrogen production apparatus according to claim 1, wherein the drum-shaped reaction module (316) comprises a drum-shaped surface (320) and slide bars (317) respectively connected to both sides of the drum-shaped surface (320); a plurality of groups of limiting grooves (321) are formed in one side, close to the reaction container (314), of the drum-shaped surface (320), and chemical medium inserting sheets (318) are clamped in the plurality of groups of limiting grooves (321).
3. The apparatus for producing high purity nitrogen gas according to claim 2, wherein a cavity is formed in said reaction vessel (314), and a plurality of sliding grooves (315) are formed in a longitudinal direction of said reaction vessel (314), and a plurality of said sliding grooves (315) are slidably connected to said slide bar (317).
4. The high purity nitrogen production apparatus according to claim 1, wherein said air introducing and purifying unit (1) comprises an air compressor, a filtering and purifying apparatus, and a heating apparatus.
5. The high purity nitrogen production apparatus according to claim 1, wherein the oxygen output end (313) is communicated with a vacuum pump (5), and the vacuum pump (5) is used for discharging oxygen in the adsorption unit (31);
the connection part of the oxygen output end (313) pipe body and the vacuum pump (5) is provided with a silencer (4), and the silencer (4) is used for reducing noise generated by exhaust.
6. The high purity nitrogen production apparatus according to claim 5, wherein the air introducing purification assembly (1), the adsorption assembly (3) and the vacuum pump (5) are electrically connected with a PLC control unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321646910.8U CN220386229U (en) | 2023-06-26 | 2023-06-26 | High-purity nitrogen preparing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321646910.8U CN220386229U (en) | 2023-06-26 | 2023-06-26 | High-purity nitrogen preparing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220386229U true CN220386229U (en) | 2024-01-26 |
Family
ID=89609686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321646910.8U Active CN220386229U (en) | 2023-06-26 | 2023-06-26 | High-purity nitrogen preparing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220386229U (en) |
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2023
- 2023-06-26 CN CN202321646910.8U patent/CN220386229U/en active Active
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