CN211712639U - Continuous online recovery unit of single crystal growing furnace tail gas - Google Patents
Continuous online recovery unit of single crystal growing furnace tail gas Download PDFInfo
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- CN211712639U CN211712639U CN202020159062.8U CN202020159062U CN211712639U CN 211712639 U CN211712639 U CN 211712639U CN 202020159062 U CN202020159062 U CN 202020159062U CN 211712639 U CN211712639 U CN 211712639U
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Abstract
The utility model relates to a continuous on-line recovery device for tail gas of a single crystal furnace, wherein the group C comprises a pre-heater, a pre-catalytic reactor and a pre-cooler which are connected in series; the group A equipment comprises a heater A, a catalytic reactor A and a cooler A1Connected in seriesThe equipment group also comprises a reactor A and a cooler A2A group of devices connected in series; the group B equipment comprises a heater B, a catalytic reactor B and a cooler B1The equipment group connected in series also comprises a reactor B and a cooler B2A group of devices connected in series; the tail gas of the single crystal furnace firstly enters the C group of equipment through a tail gas inlet for pre-deoxidation, and then alternately enters the A group of equipment and the B group of equipment according to the working and regeneration steps, the A group of equipment and the B group of equipment are respectively in a group of working processes and a group of regeneration processes, and the two processes are circularly and alternately carried out, so that the continuous recovery of the tail gas of the single crystal furnace is realized. The utility model discloses it is stable and reliable.
Description
Technical Field
The utility model belongs to the field of gas recovery equipment, a continuous online recovery unit of single crystal growing furnace tail gas is related to.
Background
When the monocrystalline silicon for the solar cell is produced by adopting the reduced-pressure argon filling method, the tail gas in the monocrystalline furnace is pumped out by using a vacuum pump. The main component of the tail gas is argon, and meanwhile, the tail gas contains a large amount of impurities such as hydrogen, alkane, carbon monoxide, carbon dioxide and the like, the content of the impurities is relatively high, and the direct emission of the tail gas can cause pollution to the environment. The continuous online argon recovery device for removing impurities contained in the tail gas has great significance for protecting the environment, and meanwhile, the recovered high-purity argon can be reused in the production process of monocrystalline silicon, so that great economic benefits are achieved for energy conservation and consumption reduction. In the prior art, a single crystal furnace tail gas recovery system is intermittent argon recovery, and during the argon recovery process, the purity of the recovered argon is reduced and the recovered argon cannot be recycled due to pipeline failure or extra leakage caused by manual operation; the system cannot work continuously due to too long regeneration time; the argon recovery system can be disabled due to the reduction and even loss of activity of the catalyst.
SUMMERY OF THE UTILITY MODEL
Purpose of the utility model
In order to avoid the risk that the purity of the recovered argon is reduced and the recovered argon cannot be recycled due to faults in the production process or extra leakage caused by manual operation in the argon recovery process; in order to avoid the risk of incapability of continuous work caused by overlong system regeneration time in the argon recovery process; in order to avoid the risk that the activity of the catalyst caused by the over-temperature of the catalyst in the regeneration stage of the system is reduced or even the activity is lost to cause the failure of an argon recovery system, the utility model provides a continuous online recovery device for the tail gas of a stable and reliable single crystal furnace.
Technical scheme
SheetThe continuous on-line crystal furnace tail gas recovering apparatus has pre-heater with tail gas inlet connected via pipeline to the gas inlet of the pre-heater, pre-catalytic reactor with gas inlet connected via pipeline to the gas outlet of the pre-catalytic reactor, pre-cooler with gas outlet connected via pipeline to the gas inlet of the pre-cooler, and switching valve A connected via pipeline to the gas outlet of the pre-cooler1And a switching valve B1One end of (A), switching valve (A)1The other end of the water heater is simultaneously connected with a heater A and a switching valve A through a pipeline7And a switching valve A8One end of (A), switching valve (A)8The other end of the valve is simultaneously connected with a switching valve V through a pipeline1Switching valve V2And a switching valve B8One end of (D), a switching valve V1The other end of the argon tube is connected with a high-purity argon inlet through a pipeline, and a switching valve V2The other end of the valve is connected with a compressed air inlet and a switching valve B through a pipeline8And the other end of the valve B1The other end of the valve body is simultaneously connected with a switching valve B through a pipeline7Is connected with one end of a heater B, and a switching valve B7And the other end of the switching valve A7The other end of the valve is simultaneously connected with a switching valve A through a pipeline6And a switching valve B6One end of the heater A is connected with the other end of the heater A through a pipeline to connect the switching valve A9And one end of a catalytic reactor A, the other end of the catalytic reactor A is connected with a cooler A through a pipeline1At one end of (1), cooler A1The other end of the valve is connected with a switching valve A through a pipeline2One end of (A), switching valve (A)2The other end of the valve and a switching valve A6The other end of the valve A is connected with a switching valve A through a pipeline at the same time3One end of (A), switching valve (A)3And the other end of the switching valve A9The other end of the valve is simultaneously connected with a switching valve A11One end of the reactor A is connected with one end of the reactor A through a pipeline, and the other end of the reactor A is connected with the cooler A through a pipeline2At one end of (1), cooler A2The other end of the valve is connected with a switching valve A through a pipeline10Switching valve A5And a switching valve A4One end of (A), switching valve (A)10The other end of the valve B is connected with a switching valve B through a pipeline11One end of (B), a switching valve (B)11The other end of the valve B is connected with a switching valve B through a pipeline3A reactor B and a switching valve B9One end of (B), a switching valve (B)9The other end of the catalytic reactor B and the other end of the heater B are connected with one end of the catalytic reactor B through a pipeline, and the other end of the catalytic reactor B is connected with the cooler B through a pipeline1One end of (1), cooler B1The other end of the valve B is connected with a switching valve B through a pipeline2One end of (B), a switching valve (B)2The other end of the valve and a switching valve B6And the other end of the valve B3The other end of the reactor B is connected with a cooler B through a pipeline2One end of (1), cooler B2The other end of the valve B is connected with a switching valve B through a pipeline10One end of, switching valve B5And a switching valve B4One end of (B), a switching valve (B)10The other end of the valve is connected with a switching valve A through a pipeline11The other end of (A), a switching valve (A)5And the other end of the valve B5The other end of the valve A is connected with a regeneration waste gas discharge port and a switching valve A through a pipeline at the same time4And the other end of the valve B4The other end of the argon tube is connected with a recycled argon outlet through a pipeline;
the pre-catalytic reactor is filled with a deoxidizer; argon purification catalysts are filled in the catalytic reactor A and the catalytic reactor B; the reactor A and the reactor B are filled with molecular sieve adsorbents.
The pre-heater, the heater A and the heater B are resistance type, steam type, heat conducting oil or heat conducting salt type heaters, and the pre-cooler and the cooler A1Cooler B1Cooler A2And a cooler B2Is a natural convection type air cooling or forced air cooling or shell and tube water cooling heat exchanger.
And cooling coils are arranged on the outer sides of the pre-catalytic reactor, the catalytic reactor A, the catalytic reactor B, the reactor A and the reactor B.
Advantages and effects
The air leaked into the system under an unconventional working condition is effectively treated through the pre-catalytic deoxidation device, and the risk that the oxygen content of the recovered argon exceeds the standard and cannot be recycled due to faults in the production process or extra leakage caused by manual operation in the argon recovery process is avoided;
the reactor is rapidly cooled by winding the cooling coil pipe around the reactor, so that the heat of the reactor can be rapidly taken away, the cold blowing time in the regeneration process is reduced, and the risk of incapability of continuous work caused by overlong system regeneration time in the argon recovery process is avoided.
Drawings
FIG. 1 is a schematic view of the apparatus of the present invention;
FIG. 2 is a schematic diagram of a reactor containing cooling coils;
description of reference numerals:
11-tail gas inlet, 12-high-purity argon inlet, 13-compressed air inlet, 14-recovered argon outlet, 15-regenerated waste gas discharge outlet, 21-precatalysis reactor, 22-catalysis reactor A, 23-catalysis reactor B, 24-reactor A, 25-reactor B, 31-preheater, 32-heater A, 33-heater B, 41-precooler and 42-cooler A143-cooler B144-cooler A 245 cooler B251-cooling coil, 61-switching valve V162-switching valve V2101-switching valve A1102-switching valve A2103-switching valve A3104-switching valve A4105-switching valve A5106-switching valve A6107-switching valve A7108-switching valve A8109-switching valve A9110-switching valve A10111-switching valve A11201-switching valve B1202-switching valve B2203-switching valve B3204-switching valve B4205-switching valve B5206-switching valve B6207-switching valve B7208-switching valve B8209-switching valve B9210-switching valve B10211-switching valve B11。
Detailed Description
The invention will be further explained with reference to the drawings:
as shown in figures 1 and 2, a continuous on-line recycling device for tail gas of a single crystal furnace is provided, wherein an inlet port of a preheater 31 is connected with a tail gas inlet 11 through a pipeline, an outlet port of the preheater 31 is connected with an inlet port of a pre-catalytic reactor 21 through a pipeline, an outlet port of the pre-catalytic reactor 21 is connected with an inlet port of a pre-cooler 41 through a pipeline, the preheater 31, the pre-cooler 41, the pre-catalytic reactor 21 and a deoxidizer filled in the pre-catalytic reactor 21 form a pre-catalytic deoxidation system, and an outlet port of the pre-cooler 41 is simultaneously connected with a switching valve A through a pipeline 1101 and a switching valve B 1201, switching valve A1The other end of the heater 101 is simultaneously connected with a heater A32 and a switching valve A through a pipeline 7107 and a switching valve A 8108, switching valve A 8108 is simultaneously connected with a switching valve V through a pipeline 161. Switching valve V 262 and a switching valve B 8208, switching valve V1The other end of 61 is connected with a high-purity argon inlet 12 and a switching valve V through a pipeline2The other end of 62 is connected with a compressed air inlet 13 and a switching valve B through a pipeline 8208 and a switching valve B 1201 the other end of which is simultaneously connected with a switching valve B through a pipeline 7207 one end is connected to one end of a heater B33, and a valve B is switched7207 on the other end and a switching valve a7107 and the other end of the pipeline is simultaneously connected with a switching valve A through a pipeline 6106 and a switching valve B 6206, and the other end of the heater A32 is connected with a switching valve A through a pipeline 9109 and one end of a catalytic reactor A22, and the other end of the catalytic reactor A22 is connected with a cooler A through a pipeline 142 one end of cooler A1The other end of 42 is connected with a switching valve A through a pipeline 2102, switch valve A 2102 and a switching valve A 6106 is connected with a switching valve A through a pipeline at the same time 3103, switching valve A 3103 and a switching valve A 9109 and the other end of the valve is simultaneously connected with a switching valve A11111 ofOne end of the reactor A24 is connected with one end of the reactor A24 through a pipeline, and the other end of the reactor A24 is connected with the cooler A through a pipeline 244 end of cooler A2The other end of 44 is connected with a switching valve A through a pipeline 10110. Switching valve A 5105 and a switching valve A 4104, switch valve A 10110 is connected with a switching valve B through a pipeline at the other end 11211, switching valve B 11211 is connected with a switching valve B at the other end through a pipeline 3203. Reactor B25 and switching valve B 9209 one end, switching valve B 9209 and the other end of the heater B33 are connected to one end of a catalytic reactor B23 through a pipe, and the other end of the catalytic reactor B23 is connected to a cooler B through a pipe 143 one end of cooler B 143 is connected with a switching valve B through a pipeline at the other end 2202, switch valve B 2202 and a switching valve B 6206 and a switching valve B 3203 are connected together by a pipeline, and the other end of the reactor B25 is connected with a cooler B by a pipeline 245 one end of cooler B 245 is connected with a switching valve B through a pipeline 10210 one end, switching valve B 5205 and a switching valve B 4204, switch valve B 10210 is connected with a switching valve A at the other end through a pipeline11111, the other end of which is a switching valve A 5105 and a switching valve B 5205 is connected with a regeneration waste gas discharge port 15 and a switching valve A through a pipeline at the same time 4104 and a switching valve B 4204 is connected with a recycled argon outlet 14 through a pipeline;
the pre-catalytic reactor 21 is filled with a deoxidizer; the deoxidizer can remove oxygen in the air leaked into the system due to unconventional working conditions in the tail gas by a catalytic method. Argon purification catalysts are filled in the catalytic reactor A22 and the catalytic reactor B23; the reactor a 24 and the reactor B25 are filled with molecular sieve adsorbents.
As the deoxidizer in this example, an HTO-20 type deoxidizer available from Liaoning Haitai was used. In the pre-catalytic reactor 21, the reaction temperature is controlled at 100-600 ℃, preferably 120 ℃, and the oxygen content can be reduced to below 0.5 ppm. In this example, a COR type argon purification catalyst from Liaoning Haitai was used. This example used 13X type molecular sieve adsorbent from UOP corporation (or 13X type molecular sieve adsorbent from a large adsorbent plant). In the reactor A24 and the reactor B25, water and carbon dioxide are adsorbed and removed by a molecular sieve adsorbent, the content of the carbon dioxide is reduced to be below 0.5ppm, and the dew point of water is reduced to be below-70 ℃.
The pre-heater 31, the heater A32 and the heater B33 are resistance type, steam type, heat conducting oil or heat conducting salt type heaters, and the pre-cooler 41 and the cooler A 142. Cooler B 143. Cooler A244 and cooler B 245 is a natural convection type air cooling or forced air cooling or shell and tube water cooling heat exchanger.
And cooling coils 51 are arranged outside the pre-catalytic reactor 21, the catalytic reactor A22, the catalytic reactor B23, the reactor A24 and the reactor B25.
A recovery method using the continuous on-line recovery device for the tail gas of the single crystal furnace comprises the following steps:
the group C equipment comprises an equipment group formed by serially connecting a preheater 31, a precatalysis reactor 21 and a precooler 41;
the group A device comprises a heater A32, a catalytic reactor A22 and a cooler A 142, a reactor A24 and a cooler A 244 groups of devices connected together in series;
the group B device comprises a heater B33, a catalytic reactor B23 and a cooler B 143 series connected together, a reactor B25 and a cooler B 245 groups of devices connected in series; the tail gas of the single crystal furnace firstly enters the equipment in the group C through a tail gas inlet 11 for pre-deoxidation, and then alternately enters the equipment in the group A and the equipment in the group B according to the working and regeneration steps, the equipment in the group A and the equipment in the group B are respectively in the working process and the regeneration process, and the two states are circularly and alternately carried out so as to realize the continuous recovery of the tail gas of the single crystal furnace;
inside the pre-catalytic reactor 21Filling with a deoxidizer; the deoxidizer can remove oxygen in the tail gas of the single crystal furnace in a catalytic mode in a chemical adsorption mode in the air leaked into the system due to unconventional working conditions, and the removal principle is CAT + O2CATO. When the deoxidizer is saturated by adsorption, the deoxidizer which is oxidized by reducing carbon monoxide and hydrogen contained in the process gas is regenerated in a heating mode, and the deoxidizer has the capability of removing oxygen again, wherein the removing principle is CATO + H2+CO＝CAT+H2O+CO2The removing and heating temperature is set to be 100-280 ℃, preferably 260 ℃, and the heating time is 12-48 hours, preferably 36 hours.
The working and regeneration processes of the group A equipment and the group B equipment are realized according to the following steps:
group A work:
the process gas enters a heater A32; the outlet temperature of the heater A32 is set to be 100-600 ℃, the outlet temperature is preferably set to be 450 ℃, the heated process gas enters the catalytic reactor A22, and the working temperature of the catalytic reactor A22 is 100-580 ℃, and is preferably 430 ℃; the catalytic reactor A22 is filled with an argon purification catalyst; the impurities of carbon monoxide, hydrogen and alkane in the process gas are converted into water and carbon dioxide by the argon purification catalyst to be removed, and the removal principle is that CATO + H2+CO+CnHm＝CAT+H2O+CO2At the moment, the process gas comprises argon, water and carbon dioxide; the process gas out of the catalytic reactor A22 enters a cooler A 142 is cooled to 30-60 ℃, preferably 40 ℃, the cooled process gas enters a reactor A24, and a molecular sieve adsorbent is filled in the reactor A24; the impurity water and carbon dioxide in the process gas are adsorbed by molecular sieve adsorbent, the process gas is composed of high-purity argon, and the high-purity argon out of the reactor A24 passes through the cooler A 244, the tail gas is discharged out of the system through a recycled argon outlet 14 to realize the recycling of the tail gas of the single crystal furnace;
the regeneration of the group B is carried out by five working procedures of a), B), c), d), e) and f):
a) group a work, group B regeneration: cold blowing of the catalytic reactor B23, and waiting of the reactor B25;
switching valve B 1201. Switching valve B 2202. Cutting machineChange valve B 6206. Switching valve A 7107. Switching valve A 2102. Switching valve A 3103 and a switching valve A 4104 is in an open state, and other switching valves are in a closed state; heater A32 is in an on state, heater B33 is in an off state, and cooler A 142 and cooler B 143 in operation, cooler A 244 and cooler B 245 is in a closed state, and in this process, the cooling coil 51 of the catalytic reactor B23 is in an air intake state;
the process gas path through the C group of equipment is a heater B33, a catalytic reactor B23 and a cooler B143-heater A32-catalytic reactor A22-cooler A142-reactor A24-cooler A244-recycled argon outlet 14;
the work period is finished just before the regeneration of the group B, the heater B33 and the catalytic reactor 23 are at the working temperature, the process gas of the group C equipment and the cooling coil 51 of the catalytic reactor B23 are used for cooling the heater B33 and the catalytic reactor 23 together, and the process gas heated in the cold blowing process is cooled by the cooler B 143 cooling, and sequentially entering a heater A32, a catalytic reactor A22 and a cooler A 142. Reactor A24 and cooler A 244, the tail gas is discharged out of the system through a recycled argon outlet 14 to realize the recycling of the tail gas of the single crystal furnace;
the duration of the step is 1 to 2 hours or the temperature in the catalytic reactor B23 is decreased to 40 to 120 ℃, preferably 40 ℃ as a sign of the completion of the step.
b) Group a work, group B regeneration: catalytic reactor B23 has no thermal regeneration, reactor B25 waits; switching valve A 1101. Switching valve A 2102. Switching valve A 3103. Switching valve A 4104. Switching valve V 161. Switching valve V 262. Switching valve B 8208. Switching valve B 2202. Switching valve B 3203 and a switching valve B 5205 are opened, and other switching valves are in a closed state; heater A32 is in an on state, heater B33 is in an off state, and cooler A 142. Cooling deviceB 143 in operation, cooler A 244. Cooler B 245 is in a closed state, and in this process, the cooling coil 51 of the catalytic reactor B23 is in an air-intake state, and the switching valve V is controlled161 and a switching valve V 262, introducing a mixed gas consisting of air and high-purity argon into the catalytic reactor B23;
the process gas path through the group C equipment is: heater A32-catalytic reactor A22-cooler A142-reactor A24-cooler A244-recycled argon outlet 14;
the path of the mixed gas is as follows: high-purity argon inlet 12+ compressed air inlet 13-heater B33-catalytic reactor B23-cooler B143-reactor B25-cooler B245-regeneration exhaust gas discharge port 15;
the argon purification catalyst in the catalytic reactor B23 is in a reduction state after the last working period, oxygen in the introduced mixed gas reacts with the argon purification catalyst in the reduction state, and the reaction principle is CAT + O2CATO + heat; the process is a violent exothermic reaction, a) the initial temperature and the initial activity of the argon purification catalyst are reduced by cold blowing of the catalytic reactor B23, and the cooling coil 51 can continuously remove the heat on the outer wall of the catalytic reactor B23, so that the control of the highest temperature in the regeneration process of the argon purification catalyst can be realized, the active component sintering of the argon purification catalyst caused by temperature runaway of the argon purification catalyst filled in the catalytic reactor in the regeneration stage can be prevented, and the risk of final failure of an argon recovery system caused by the activity reduction and even activity loss of the argon purification catalyst caused by the active component sintering is avoided; the mixed gas after reacting with the argon purifying catalyst passes through a cooler B 143 cooling, then passing through a reactor B25 and a cooler B 245. The regeneration waste gas discharge port 15 is used as a regeneration waste gas outlet system;
the duration time of the working procedure is 1-4 h, and preferably 2 h; the mixture gas composed of air and high-purity argon is air: high-purity argon gas is 1: 100-5: 100, and the preferable ratio is 1: 100;
c) the group A is operated, and the group A is operated,b, regeneration of the group: waiting for the catalytic reactor B23, and heating and regenerating the reactor B25; switching valve A 1101. Switching valve A 2102. Switching valve A 3103. Switching valve A 4104. Switching valve V 262. Switching valve B 8208. Switching valve B 9209 and a switching valve B 5205 are opened, and other switching valves are in a closed state; the heater B33 is in an open state, the outlet temperature of the heater B33 is set to be 100-320 ℃, the preferred outlet temperature is set to be 240 ℃, and the cooler A 142 and cooler B 245 in operation, cooler B 143 and cooler A244 are in a closed state, in which process the valve V is switched by control 262, continuously introducing air heated by the heater B33 into the reactor B25 to realize heating regeneration of the adsorbent in the heater B33;
the process gas path through the group C equipment is: heater A32-catalytic reactor A22-cooler A142-reactor A24-cooler A244-recycled argon outlet 14;
the path of the air is: compressed air inlet 13-heater B33-catalytic reactor B23-reactor B25-cooler B245-regeneration exhaust gas discharge port 15;
by controlling the switching valve V 262, the compressed air introduced into the heater B33 from the compressed air inlet 13 is heated to 100-320 ℃, preferably 240 ℃, and then directly enters the reactor B25 through the catalytic reactor B23, the molecular sieve adsorbent in the reactor B25 is heated by hot air, and water and oxygen adsorbed in the molecular sieve adsorbent are desorbed, so that the regeneration of the molecular sieve adsorbent is realized;
the duration of the step is 2 to 4 hours or the temperature in the reactor B25 is increased to 220 ℃ as an indication of the completion of the step, preferably the temperature at the air outlet of the reactor B25 is increased to 220 ℃ as an indication of the completion of the step;
d) group a work, group B regeneration: replacement by catalytic reactor B23, replacement by reactor B25;
switching valve A 1101. Switching valve A 2102. Switching valve A 3103. Switching valve A 4104. Switching valve V 161. Switching valve B 8208. Switching valve B 9209. Switching valve B 2202. Switching valve B 3203 and a switching valve B 5205 are opened, and other switching valves are in a closed state; heater B33 is in the off state, cooler A 142 and cooler B 245 in operation, cooler B 143 and cooler A244 are in a closed state, by controlling the switching valve V 161 open, switch valve B 5205 closing the system, introducing high-purity argon gas into the system for pressurizing, and controlling a switching valve V 161 close, switch valve B 5205 is opened for pressure relief;
the process gas path through the group C equipment is: heater A32-catalytic reactor A22-cooler A142-reactor A24-cooler A244-recycled argon outlet 14;
the path of the high-purity argon gas is as follows: high-purity argon inlet 12-heater B33-catalytic reactor B23-cooler B143-reactor B25-cooler B245-regeneration exhaust gas discharge port 15;
in this step, the catalytic reactor B23, the reactor B25, the heater B33 and the cooler B are charged and discharged after 5 to 10 times of repeated charging and discharging, preferably 10 times of repeated charging and discharging143 and cooler B 245 and air in the connecting pipeline is completely replaced by high-purity argon;
e) group a work, group B regeneration: waiting for the catalytic reactor B23, and cold blowing the reactor B25;
switching valve A 1101. Switching valve A 2102. Switching valve A 6106. Switching valve B 6206. Switching valve B 3203. Switching valve B 10210. Switching valve A11111 and switching valve a4104 is opened, and other switching valves are in a closed state; heater A32 is in an on state, heater B33 is in an off state, and cooler A 142 and cooler B 245 in operation, cooler B 143 and cooler A244 are in a closed state, and the processThe cooling coil 51 of the lower reactor B25 is in an air-intake state;
the process gas path through the group C equipment is: heater A32-catalytic reactor A22-cooler A142-reactor B25-cooler B245-reactor A24-cooler A244-recycled argon outlet 14; the process gas passes through the path to cool and blow the heated and regenerated molecular sieve adsorbent in the reactor B25, and meanwhile, the cooling coil 51 takes away the heat on the surface of the reactor B25, so that the time of cold blowing is reduced;
the duration of the step is 2 to 6 hours or the temperature in the reactor B25 is reduced to 40 ℃, preferably the temperature in the reactor B25 is reduced to 40 ℃ as a sign of the completion of the step;
f) group a work, group B regeneration: catalytic reactor B23 waits, reactor B25 waits;
switching valve A 1101. Switching valve A 2102. Switching valve A 3103 and a switching valve A 4104 is opened, and other switching valves are in a closed state; heater B33 is in the off state, cooler A142 in operation, cooler B 143. Cooler A 244 and cooler B 245 is in the closed state;
the process gas path through the group C equipment is: heater A32-catalytic reactor A22-cooler A142-reactor A24-cooler A244-recycled argon outlet 14;
in the working procedure, only the group A is used for recovering the tail gas of the single crystal furnace, the group B is completely in a waiting state until the switching period comes, and the switching period is 8-24 h, preferably 12h according to the actual process.
It is right above the utility model relates to a continuous online recovery unit of single crystal growing furnace tail gas A group work, the description of B group regeneration process, B group work, A group regeneration are the mirror image process of above-mentioned description, and it is no longer repeated here.
The process gas refers to the process gas of which the oxygen removal gas does not reach the recovery standard after the tail gas passes through the pre-catalytic oxidation system; the waiting means a state that the reactor and the catalyst adsorbent filled in the reactor are suspended because the switching period is not reached; the switching cycle refers to a time period in which the two operation processes of operation and regeneration of the catalytic reactor a 22, the catalytic reactor B23, the reactor a 24 and the reactor B25 are alternated.
The water and carbon dioxide of the process gas are removed by the adsorbent, the content of the carbon dioxide is reduced to be below 0.5ppm, the dew point of the water is reduced to be below 70 ℃ below zero, the purified process gas achieves the standards that the contents of the hydrogen, alkane and carbon monoxide of the high-purity argon are less than 0.5ppm, the content of the carbon dioxide is less than 0.5ppm, and the content of the water is less than 2ppm, and the argon recovery is realized.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention, and those skilled in the art can make various modifications and variations. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention. The utility model relates to a switching valve's switching in the device, the start-up accessible of heater accuse temperature and cooler is manual or PLC carries out program control, and no matter which kind of control method is as long as used this device all in the protection scope of patent right.
Claims (3)
1. The continuous online recovery device for the tail gas of the single crystal furnace is characterized in that: the inlet port of the preheater (31) is connected with a tail gas inlet (11) through a pipeline, the outlet port of the preheater (31) is connected with the inlet port of the precatalysis reactor (21) through a pipeline, the outlet port of the precatalysis reactor (21) is connected with the inlet port of the precooler (41) through a pipeline, and the outlet port of the precooler (41) is simultaneously connected with a switching valve A through a pipeline1(101) And a switching valve B1(201) One end of (A), switching valve (A)1(101) The other end of the water heater is simultaneously connected with a heater A (32) and a switching valve A through a pipeline7(107) And a switching valve A8(108) One end of (A), switching valve (A)8(108) The other end of the valve is simultaneously connected with a switching valve V through a pipeline1(61) Switching valve V2(62) And a switching valve B8(208) One end of (D), a switching valve V1(61) Is at the other end passed throughThe pipeline is connected with a high-purity argon inlet (12) and a switching valve V2(62) The other end of the valve is connected with a compressed air inlet (13) and a switching valve B through a pipeline8(208) And the other end of the valve B1(201) The other end of the valve body is simultaneously connected with a switching valve B through a pipeline7(207) Is connected to one end of a heater B (33), and a valve B is switched7(207) And the other end of the switching valve A7(107) The other end of the valve is simultaneously connected with a switching valve A through a pipeline6(106) And a switching valve B6(206) One end of the heater A (32) is connected with the switching valve A through a pipeline9(109) And one end of a catalytic reactor A (22), the other end of the catalytic reactor A (22) is connected with a cooler A through a pipeline1(42) At one end of (1), cooler A1(42) The other end of the valve is connected with a switching valve A through a pipeline2(102) One end of (A), switching valve (A)2(102) The other end of the valve and a switching valve A6(106) The other end of the valve A is connected with a switching valve A through a pipeline at the same time3(103) One end of (A), switching valve (A)3(103) And the other end of the switching valve A9(109) The other end of the valve is simultaneously connected with a switching valve A11(111) Is connected with one end of the reactor A (24) through a pipeline, and the other end of the reactor A (24) is connected with the cooler A through a pipeline2(44) At one end of (1), cooler A2(44) The other end of the valve is connected with a switching valve A through a pipeline10(110) Switching valve A5(105) And a switching valve A4(104) One end of (A), switching valve (A)10(110) The other end of the valve B is connected with a switching valve B through a pipeline11(211) One end of (B), a switching valve (B)11(211) The other end of the valve B is connected with a switching valve B through a pipeline3(203) A reactor B (25) and a switching valve B9(209) One end of (B), a switching valve (B)9(209) The other end of the heater B (33) and the other end of the catalytic reactor B (23) are connected with one end of the catalytic reactor B (23) through a pipeline, and the other end of the catalytic reactor B (23) is connected with the cooler B through a pipeline1(43) One end of (1), cooler B1(43) The other end of the valve B is connected with a switching valve B through a pipeline2(202) One end of (B), a switching valve (B)2(202) The other end of the valve and a switching valve B6(206) And the other end of the switching valveDoor B3(203) The other end of the reactor B (25) is connected with a cooler B through a pipeline2(45) One end of (1), cooler B2(45) The other end of the valve B is connected with a switching valve B through a pipeline10(210) One end of, switching valve B5(205) And a switching valve B4(204) One end of (B), a switching valve (B)10(210) The other end of the valve is connected with a switching valve A through a pipeline11(111) The other end of (A), a switching valve (A)5(105) And the other end of the valve B5(205) The other end of the valve A is simultaneously connected with a regeneration waste gas discharge port (15) through a pipeline, and a valve A is switched4(104) And the other end of the valve B4(204) The other end of the argon tube is connected with a recycled argon outlet (14) through a pipeline;
the pre-catalytic reactor (21) is filled with a deoxidizer; argon purification catalysts are filled in the catalytic reactor A (22) and the catalytic reactor B (23); the reactor A (24) and the reactor B (25) are filled with molecular sieve adsorbents.
2. The continuous on-line recovery device of the tail gas of the single crystal furnace according to claim 1, characterized in that: the pre-heater (31), the heater A (32) and the heater B (33) are resistance type, steam type, heat conducting oil or heat conducting salt type heaters, and the pre-cooler (41) and the cooler A1(42) Cooler B1(43) Cooler A2(44) And a cooler B2(45) Is a natural convection type air cooling or forced air cooling or shell and tube water cooling heat exchanger.
3. The continuous on-line recovery device of the tail gas of the single crystal furnace according to claim 1, characterized in that: and cooling coils (51) are arranged on the outer sides of the pre-catalytic reactor (21), the catalytic reactor A (22), the catalytic reactor B (23), the reactor A (24) and the reactor B (25).
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111115593A (en) * | 2020-01-31 | 2020-05-08 | 朱刚 | Continuous online recovery device and method for tail gas of single crystal furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111115593A (en) * | 2020-01-31 | 2020-05-08 | 朱刚 | Continuous online recovery device and method for tail gas of single crystal furnace |
| CN111115593B (en) * | 2020-01-31 | 2024-03-26 | 朱刚 | Continuous online recovery device and method for tail gas of single crystal furnace |
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