CN220370751U - Electronic grade hydrofluoric acid apparatus for producing - Google Patents
Electronic grade hydrofluoric acid apparatus for producing Download PDFInfo
- Publication number
- CN220370751U CN220370751U CN202321486465.3U CN202321486465U CN220370751U CN 220370751 U CN220370751 U CN 220370751U CN 202321486465 U CN202321486465 U CN 202321486465U CN 220370751 U CN220370751 U CN 220370751U
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- Prior art keywords
- hydrofluoric acid
- box body
- grade hydrofluoric
- electronic grade
- acid production
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 title claims abstract description 92
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 claims abstract description 27
- 238000001816 cooling Methods 0.000 claims abstract description 21
- 238000010521 absorption reaction Methods 0.000 claims abstract description 18
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000007789 gas Substances 0.000 claims abstract description 17
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims abstract description 17
- 238000003756 stirring Methods 0.000 claims abstract description 16
- 238000004821 distillation Methods 0.000 claims abstract description 15
- 239000002994 raw material Substances 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 11
- 238000001914 filtration Methods 0.000 claims abstract description 8
- 238000000889 atomisation Methods 0.000 claims abstract description 6
- 238000007599 discharging Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 229910021642 ultra pure water Inorganic materials 0.000 abstract description 14
- 239000012498 ultrapure water Substances 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 4
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 10
- 238000009833 condensation Methods 0.000 description 5
- 230000005494 condensation Effects 0.000 description 5
- 239000010985 leather Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
The utility model discloses an electronic-grade hydrofluoric acid production device, which comprises a distillation device for stirring raw materials and distilling, and further comprises a cooling device which is arranged below the distillation device and used for cooling cold water in a circulating way, wherein a gas absorption device which is used for absorbing gaseous hydrogen chloride and filtering is arranged below the cooling device, and a collecting device which is used for collecting liquid hydrogen chloride and filtering is arranged at one side of the gas absorption device. According to the electronic-grade hydrofluoric acid production device, the cooling of hydrogen chloride gas and the heating of ultrapure water are realized through the arrangement that the condenser pipe is placed into the ultrapure water for cooling; by setting the heating of the ultrapure water, a better atomization effect is realized, and gaseous hydrogen chloride is absorbed more effectively; the production of electronic grade hydrofluoric acid and industrial grade hydrofluoric acid is realized by the arrangement of respectively collecting gaseous hydrogen chloride and liquid hydrogen chloride.
Description
Technical Field
The utility model belongs to the field of hydrofluoric acid production, and particularly relates to an electronic grade hydrofluoric acid production device.
Background
Electronic grade hydrofluoric acid is a high quality hydrofluoric acid used in the manufacturing process of electronic materials. At present, the electronic-grade hydrofluoric acid production device is in a continuously developed and updated state. In general, the main components of the electronic grade hydrofluoric acid production device comprise a reaction kettle, a heating device, a cooling device, a feeding device, a storage device and the like. Different technological schemes and technological parameters are adopted, so that the electronic grade hydrofluoric acid with different qualities can be produced. Meanwhile, in order to ensure the purity of the electronic grade hydrofluoric acid, a detection device and a purification device are required to be arranged on the production line so as to ensure the quality and stability of the product. Currently, electronic-grade hydrofluoric acid production devices are mainly focused on petrochemical, chemical and electronic industries, and the technical level is at a higher level.
The chinese patent of contrast application number 201820263706.0 discloses an electronic grade hydrofluoric acid apparatus for producing, which comprises a tank body, the outside of jar body bottom evenly is provided with the support, one side at jar body top is provided with the inlet, and one side that the inlet was kept away from at jar body top is provided with the fan, the gas delivery pipe is installed to the output of fan, the intermediate position department that inlet one side was kept away from to the jar body is provided with the condensation storehouse, and the one side that the inlet was kept away from to the condensation storehouse is provided with the refrigerator, the inside in condensation storehouse is provided with spiral leather hose. Install agitator motor, drive stirring vane through agitator motor and rotate for the circulation speed of distillation storehouse inside solution uses with the heat conduction board cooperation, has improved the speed of raw materials distillation, and the setting of jar body top fan has accelerated the absorbing speed of steam, uses with spiral leather hose cooperation, has improved the speed of distillation gas condensation for the production speed of electronic grade hydrofluoric acid obtains great promotion.
The above patent does not collect gaseous and liquid hydrogen chloride separately, it is difficult to ensure the quality of the produced electronic grade hydrofluoric acid, and the heat released from the condenser tube cannot be utilized, so a new apparatus is designed.
Disclosure of Invention
The present utility model is directed to an electronic grade hydrofluoric acid production device, which solves the above-mentioned problems.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the electronic-grade hydrofluoric acid production device comprises a distillation device for stirring raw materials and distilling, and further comprises a cooling device which is arranged below the distillation device and used for cooling cold water in a circulating way, wherein a gas absorption device which is used for absorbing gaseous hydrogen chloride and filtering is arranged below the cooling device, and a collecting device which is used for collecting liquid hydrogen chloride and filtering is arranged at one side of the gas absorption device;
the cooling device comprises a second box body, a condensing pipe is arranged in the second box body, and a water inlet pipe is arranged at one side of the second box body;
the gas absorption device comprises a third box body, an absorption chamber is arranged in the third box body, a water supply pipe is arranged on one side of the absorption chamber, a water pump is arranged on the water supply pipe, an atomization nozzle is arranged on one end of the water supply pipe away from the water pump, a first super-filter screen is arranged below the atomization nozzle, and a first discharging pipe is arranged at the lower end of the absorption chamber.
Further: the distillation device comprises a first box body, a motor is arranged at the top end of the first box body, stirring blades are arranged at the output end of the motor, a feed inlet is arranged on one side of the motor, an air outlet is arranged on one side of the motor, which is far away from the feed inlet, an exhaust fan is arranged in the air outlet, and a heating plate is arranged at the bottom end of the first box body.
Further: the stirring blade is connected with the motor through a flat key, and the motor is connected with the first box through a bolt.
Further: one end of the condensing pipe is communicated with the air outlet, and one end of the condensing pipe, which is far away from the air outlet, is respectively communicated with the absorption chamber and the collecting box.
Further: the atomizing nozzle and the water pump are respectively connected with the third box body through bolts.
Further: the condenser pipe is in a spiral shape, and the condenser pipe is made of glass materials.
Further: the water supply pipe is communicated with the second box body.
Compared with the prior art, the utility model has the beneficial effects that:
1. the condenser tube is placed into the ultrapure water for cooling, so that the ultrapure water is heated while the hydrogen chloride gas is cooled;
2. by setting the heating of the ultrapure water, a better atomization effect is realized, and gaseous hydrogen chloride is absorbed more effectively;
3. the production of electronic grade hydrofluoric acid and industrial grade hydrofluoric acid is realized by the arrangement of respectively collecting gaseous hydrogen chloride and liquid hydrogen chloride.
Drawings
FIG. 1 is a sectional view of an electronic grade hydrofluoric acid production device of the present utility model;
FIG. 2 is a sectional view of a distillation apparatus of an electronic grade hydrofluoric acid production apparatus of the present utility model;
FIG. 3 is a sectional view of a cooling apparatus of an electronic grade hydrofluoric acid production apparatus according to the present utility model;
FIG. 4 is a cross-sectional view of a gas absorbing device of an electronic grade hydrofluoric acid production device of the present utility model;
fig. 5 is a cross-sectional view of a collecting device of an electronic grade hydrofluoric acid production device according to the present utility model.
In the reference numerals: 1. a distillation device; 101. a first case; 102. a motor; 103. stirring the leaves; 104. a feed inlet; 105. an air outlet; 106. an exhaust fan; 107. a heating plate; 2. a cooling device; 201. a second case; 202. a condensing tube; 203. a water inlet pipe; 3. a gas absorbing device; 301. a third case; 302. an absorption chamber; 303. a water supply pipe; 304. a water pump; 305. an atomizing nozzle; 306. a first super-screen; 307. a first discharge pipe; 4. a collecting device; 401. a collection box; 402. a second super-screen; 403. and the second discharging pipe.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, an electronic grade hydrofluoric acid production device comprises a distillation device 1 for stirring raw materials and distilling, and further comprises a cooling device 2 for cooling cold water in a circulating way, wherein a gas absorbing device 3 for absorbing gaseous hydrogen chloride and filtering is arranged below the cooling device 2, and a collecting device 4 for collecting liquid hydrogen chloride and filtering is arranged at one side of the gas absorbing device 3.
In this embodiment: the distillation device 1 comprises a first box body 101, a motor 102 is arranged at the top end of the first box body 101, a stirring blade 103 is arranged at the output end of the motor 102, a feed inlet 104 is arranged at one side of the motor 102, an air outlet 105 is arranged at one side of the motor 102, which is far away from the feed inlet 104, an exhaust fan 106 is arranged in the air outlet 105, a heating plate 107 is arranged at the bottom end of the first box body 101, the stirring blade 103 is connected with the motor 102 in a parallel key manner, the motor 102 is connected with the first box body 101 through bolts, one end of a condensing pipe 202 is communicated with the air outlet 105, an operator adds various raw materials into the first box body 101 through the feed inlet 104, the motor 102 drives the stirring blade 103 to stir the raw materials, the raw materials are fully mixed and reacted, the heating plate 107 is electrified to heat the raw materials, and the exhaust fan 106 on the air outlet 105 pumps out gaseous hydrogen fluoride to the condensing pipe 202;
in this embodiment: the cooling device 2 comprises a second box 201, a condensing pipe 202 is arranged in the second box 201, and a water inlet pipe 203 is arranged at one side of the second box 201 ， The condenser tube 202 is in a spiral shape, the condenser tube 202 is made of glass material, the ultrapure water enters the second box 201 through the water inlet tube 203 to cool the gaseous hydrogen fluoride in the condenser tube 202 into a liquid state, and meanwhile, the heat released by the condenser tube 202 is used for heating the ultrapure water;
in this embodiment: the gas absorbing device 3 comprises a third box 301, an absorbing chamber 302 is arranged in the third box 301, a water supply pipe 303 is arranged on one side of the absorbing chamber 302, a water pump 304 is arranged on the water supply pipe 303, an atomizing nozzle 305 is arranged at one end, far away from the water pump 304, of the water supply pipe 303, a first super-filter screen 306 is arranged below the atomizing nozzle 305, a first discharging pipe 307 is arranged at the lower end of the absorbing chamber 302, a condensing pipe 202 is communicated with the absorbing chamber 302, the atomizing nozzle 305 and the water pump 304 are respectively connected with the third box 301 through bolts, the water supply pipe 303 is communicated with the second box 201, the non-liquefied gaseous hydrogen fluoride in the condensing pipe 202 enters the absorbing chamber 302, the water pump 304 conveys the heated ultrapure water in the second box 201 to the atomizing nozzle 305 through the water supply pipe 303 for spraying, the heated ultrapure water has better atomizing effect, the gaseous hydrogen fluoride is absorbed into hydrofluoric acid solution more effectively, and is discharged through the first discharging pipe 307 after being filtered by the first super-filter screen 306, and can be used as industrial hydrofluoric acid;
in this embodiment: the collecting device 4 comprises a collecting box 401, a second super filter screen 402 is arranged in the middle of the collecting box 401, a second discharging pipe 403 is arranged at the bottom end of the collecting box 401, the condensing pipe 202 is communicated with the collecting box 401, liquid hydrogen fluoride in the condensing pipe 202 enters the collecting box 401, is filtered by the second super filter screen 402 and is discharged by the second discharging pipe 403, and is used for generating electronic-grade hydrofluoric acid solution.
Working principle: firstly, operators add various raw materials into a first box body 101 through a feed inlet 104, a motor 102 drives a stirring blade 103 to rotate so as to stir the raw materials, the raw materials are fully mixed and react, then a heating plate 107 is electrified to heat the raw materials, an exhaust fan 106 on an air outlet 105 pumps out gaseous hydrogen fluoride to a condensing pipe 202, ultrapure water enters the second box body 201 through a water inlet pipe 203 to cool the gaseous hydrogen fluoride in the condensing pipe 202 into a liquid state, meanwhile, the heat released by the condensing pipe 202 is utilized to heat the ultrapure water, finally, the unliquified gaseous hydrogen fluoride in the condensing pipe 202 enters an absorption chamber 302, a water pump 304 conveys the heated ultrapure water in the second box body 201 to an atomizing nozzle 305 through a water supply pipe 303 to be sprayed out, the heated ultrapure water has better atomizing effect, the gaseous hydrogen fluoride is absorbed into hydrofluoric acid solution more effectively, and is filtered through a first super filter screen 306 and then discharged through a first discharge pipe 307 to be used as industrial hydrofluoric acid; the liquid hydrogen fluoride in the condensation pipe 202 enters a collection tank 401, is filtered by a second super filter screen 402 and is discharged by a second discharge pipe 403, so as to generate an electronic-grade hydrofluoric acid solution.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. An electronic grade hydrofluoric acid production device comprising a distillation device (1) for stirring raw materials and distilling, characterized in that: the cooling device (2) is arranged below the distillation device (1) and used for cooling cold water in a circulating way, the gas absorption device (3) is arranged below the cooling device (2) and used for absorbing gaseous hydrogen chloride and filtering, and a collecting device (4) is arranged at one side of the gas absorption device (3) and used for collecting liquid hydrogen chloride and filtering;
the cooling device (2) comprises a second box body (201), a condensing pipe (202) is arranged in the second box body (201), and a water inlet pipe (203) is arranged at one side of the second box body (201);
the gas absorption device (3) comprises a third box body (301), an absorption chamber (302) is arranged in the third box body (301), a water supply pipe (303) is arranged on one side of the absorption chamber (302), a water pump (304) is arranged on the water supply pipe (303), an atomization nozzle (305) is arranged at one end, far away from the water pump (304), of the water supply pipe (303), a first super-filter screen (306) is arranged below the atomization nozzle (305), and a first discharge pipe (307) is arranged at the lower end of the absorption chamber (302);
the collecting device (4) comprises a collecting box (401), a second super filter screen (402) is arranged in the middle of the collecting box (401), and a second discharging pipe (403) is arranged at the bottom end of the collecting box (401).
2. An electronic grade hydrofluoric acid production device as claimed in claim 1, wherein: the distillation device (1) comprises a first box body (101), a motor (102) is installed at the top end of the first box body (101), a stirring blade (103) is installed at the output end of the motor (102), a feeding hole (104) is installed on one side of the motor (102), an air outlet (105) is installed on one side of the motor (102) away from the feeding hole (104), an exhaust fan (106) is installed in the air outlet (105), and a heating plate (107) is installed at the bottom end of the first box body (101).
3. An electronic grade hydrofluoric acid production device as claimed in claim 2, wherein: the stirring blade (103) is connected with the motor (102) in a flat key way, and the motor (102) is connected with the first box body (101) through bolts.
4. An electronic grade hydrofluoric acid production device as claimed in claim 2, wherein: one end of the condensing pipe (202) is communicated with the air outlet (105), and one end of the condensing pipe (202) far away from the air outlet (105) is respectively communicated with the absorption chamber (302) and the collecting box (401).
5. An electronic grade hydrofluoric acid production device as claimed in claim 1, wherein: the atomizing nozzle (305) and the water pump (304) are respectively connected with the third box body (301) through bolts.
6. An electronic grade hydrofluoric acid production device as claimed in claim 1, wherein: the condensing tube (202) is spiral in shape, and the condensing tube (202) is made of glass materials.
7. An electronic grade hydrofluoric acid production device as claimed in claim 1, wherein: the water supply pipe (303) is communicated with the second box body (201).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321486465.3U CN220370751U (en) | 2023-06-12 | 2023-06-12 | Electronic grade hydrofluoric acid apparatus for producing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321486465.3U CN220370751U (en) | 2023-06-12 | 2023-06-12 | Electronic grade hydrofluoric acid apparatus for producing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220370751U true CN220370751U (en) | 2024-01-23 |
Family
ID=89559191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321486465.3U Active CN220370751U (en) | 2023-06-12 | 2023-06-12 | Electronic grade hydrofluoric acid apparatus for producing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220370751U (en) |
-
2023
- 2023-06-12 CN CN202321486465.3U patent/CN220370751U/en active Active
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| GR01 | Patent grant |