CN220367198U

CN220367198U - Automatic coupling stable light source system

Info

Publication number: CN220367198U
Application number: CN202321420090.0U
Authority: CN
Inventors: 葛斌
Original assignee: Ketai Optical Core Changzhou Testing Technology Co ltd
Current assignee: Ketai Optical Core Changzhou Testing Technology Co ltd
Priority date: 2023-06-06
Filing date: 2023-06-06
Publication date: 2024-01-19
Anticipated expiration: 2033-06-06

Abstract

The utility model discloses an automatic coupling stable light source system which comprises a stable light source host, an optical fiber, an XY screw rod module, an optical fiber clamping device, a feedback reading device and a control computer, wherein one end of the optical fiber is connected with the stable light source host, the other end of the optical fiber is clamped by the optical fiber clamping device, the optical fiber clamping device is arranged on the XY screw rod module, a wafer bearing disc is arranged right below the optical fiber, the feedback reading device is connected with the wafer bearing disc through a wire and is used for reading feedback current of the wafer bearing disc, and the stable light source host, the XY screw rod module and the feedback reading device are all electrically connected with the control computer. The present utility model automatically re-couples to the correct position during testing if the fiber is shifted.

Description

Automatic coupling stable light source system

Technical Field

The utility model belongs to the technical field of wafer testing, and particularly relates to an automatic coupling stable light source system.

Background

In the field of wafer testing, automatic probe stations are generally used to perform batch testing on chips on a wafer. While wafer testing of photosensors such as PD, APD requires providing controllable, stable and specific wavelength bands of light for testing its response rate in addition to power supplied through the probe station.

Because the application fields of the photoelectric sensors are different, the sizes of the photoelectric sensors are also greatly different, and the size of the light receiving surface of the smallest photoelectric sensor chip is only 10 mu m, so that in wafer level test, the irradiation precision of a light source for test is required to be very high.

The chinese patent application No. 2020103916918 discloses a light source adjustment system and a light source adjustment method for a wafer test system. The wafer test system comprises a pin test machine and a test machine. The light source adjusting system comprises a light source machine arranged in the wafer testing system and a main execution device electrically connected with the needle testing machine, the testing machine and the light source machine respectively. The illuminant machine provides illuminant for testing a wafer. The main execution device controls the needle testing machine to adjust a testing height of the wafer, and then controls the testing machine to obtain image testing data of the wafer at the testing height from the testing machine. The main execution device also analyzes the image test data to determine the light source setting parameters of the light source machine, and adjusts the light source machine according to the light source setting parameters.

The above-mentioned patent has the effect of improving the speed of adjustment, but the above-mentioned patent mainly realizes the optical coupling when looking at by controlling this needle test machine when carrying out the adjustment, but this kind of mode needs to use the needle test machine that the moving accuracy is higher, and this kind of needle test machine is expensive, and the equipment cost of enterprise's test is higher.

Disclosure of Invention

In order to solve the problems, the utility model provides an automatic coupling stable light source system, which comprises a stable light source host, an optical fiber, an XY screw rod module, an optical fiber clamping device, a feedback reading device and a control computer, wherein one end of the optical fiber is connected with the stable light source host, the other end of the optical fiber is clamped by the optical fiber clamping device, the optical fiber clamping device is arranged on the XY screw rod module, a wafer bearing disc is arranged right below the optical fiber, the feedback reading device is connected with the wafer bearing disc through a wire and reads feedback current of the wafer bearing disc, and the stable light source host, the XY screw rod module and the feedback reading device are all connected with the control computer.

Preferably, the XY lead screw module comprises a first lead screw seat and a second lead screw seat which are vertically arranged, a first lead screw is rotationally arranged on the first lead screw seat, a first sliding carrying platform is connected on the first lead screw, the first sliding carrying platform is connected with the second lead screw seat, a second lead screw is rotationally arranged on the second lead screw seat, a second sliding carrying platform is connected on the second lead screw, the second sliding carrying platform is connected with the optical fiber clamping device, and one sides of the first lead screw and the second lead screw are both connected with a servo motor.

Preferably, the optical fiber clamping device comprises a driving cylinder, the bottom output end of the driving cylinder is connected with a piston rod, the bottom of the piston rod is connected with a connecting block, two sides of the driving cylinder are respectively provided with a hinge block, two hinge blocks are hinged with clamping arms, two sides of the connecting block are respectively hinged with a driving arm, and two driving arms are respectively hinged with the middle positions of the two clamping arms.

Preferably, the first screw rod seat and the second screw rod seat are respectively provided with a first sliding rail and a second sliding rail, and the first sliding carrier and the second sliding carrier are respectively in sliding connection with the first sliding rail and the second sliding rail.

Preferably, USB wires are connected between the control computer and the stable light source host, between the control computer and the XY screw module and between the control computer and the stable light source host, and between the control computer and the XY screw module and between the control computer and the stable light source host are connected with the control computer and the stable light source host are connected with the stable light source host.

The utility model has the advantages that:

1. by the aid of the device, optical coupling during PD test can be achieved without depending on the accuracy and functions of the probe station, and input cost of PD, namely photoelectric sensors, especially miniature PD detection equipment is greatly reduced. And the mass production test of the PD can be performed by adopting a probe station with common precision.

2. With this arrangement, if the fiber is shifted during testing, it can be automatically re-coupled to the correct position.

Drawings

FIG. 1 is a block diagram of the present utility model;

FIG. 2 is a diagram of the XY lead screw module of the present utility model;

FIG. 3 is a block diagram of a fiber holding apparatus according to the present utility model.

Fig. 4 is a flow chart of the present utility model.

In the figure: the device comprises a stable light source host, 2 optical fibers, a 3 XY screw rod module, a 4 optical fiber clamping device, a 5 feedback reading device, a 6 control computer, a 7 wafer bearing disc, a 8 first screw rod seat, a 9 second screw rod seat, a 10 first screw rod, a 11 first sliding carrier, a 12 second screw rod, a 13 second sliding carrier, a 14 servo motor, a 15 driving cylinder, a 16 piston rod, a 17 connecting block, a 18 hinging block 19 clamping arm, a 20 driving arm, a 21 first sliding rail and a 22 second sliding rail.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or element to be referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the present utility model.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "connected," and the like are to be construed broadly, and may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. Meanwhile, when an element is referred to as being "fixed" or "disposed" on another element, it may be directly on the other element or intervening elements may be present. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. When an element is referred to as being "fixedly connected to" another element, it can be conventionally connected by welding or bolting or gluing. In summary, it will be understood by those of ordinary skill in the art that the specific meaning of the terms described above in this disclosure is to be understood in a specific sense.

Example 1

As shown in fig. 1, an automatic coupling stable light source system comprises a stable light source host 1 and an optical fiber 2, an XY screw rod module 3, an optical fiber clamping device 4, a feedback reading device 5 and a control computer 6, wherein one end of the optical fiber 2 is connected with the stable light source host 1 to form a stable light source, the stable light source controls the output energy of the light source through the control computer 6, the other end of the optical fiber 2 is clamped by the optical fiber clamping device 4, the optical fiber clamping device 4 is arranged on the XY screw rod module 3, the XY screw rod module 3 takes a precise screw rod as a carrier, and a servo motor 14 takes a driving force to drive the optical fiber clamping device 4 and the optical fiber 2 to accurately move.

The wafer carrying disc 7 is arranged right below the optical fiber 2, the feedback reading device 5 is connected with the wafer carrying disc 7 through a lead, and reads feedback current, the feedback reading device 5 is a source meter capable of adding bias voltage and reading response current, and can read response value in real time to serve as data feedback of the system.

The stable light source host 1, the XY screw module 3 and the feedback reading device 5 are all electrically connected with the control computer 6. The control computer 6 can precisely control the servo motor 14 to adjust the position of the optical fiber clamping device 4 on the XY screw module 3, and can also receive PD response data fed back by the feedback reading device 5. By setting the corresponding parameters and ranges of motion in the control computer 6, the control computer 6 will fine tune the XY lead screw module, controlling the light source output fiber 2 to move, and thus couple to a higher level of response.

Referring to fig. 4, when a test is performed, firstly, starting conditions and coupling ranges are set, then, a feedback value is read by the control computer 6, then, the response rate is calculated by the feedback value, if the response rate is too low, automatic coupling is started, and when the response rate reaches a normal value, coupling is stopped; if the normal value cannot be reached, the chip NG is judged, that is, the chip NG cannot pass.

Referring to fig. 2, the XY screw module 3 in this embodiment includes a first screw seat 8 and a second screw seat 9 that are vertically disposed, a first screw 10 is rotationally disposed on the first screw seat 8, a first sliding carrier 11 is connected to the first screw 10, a first sliding rail 21 is further disposed on the first screw seat 8, the first sliding carrier 11 is slidably disposed on the first sliding rail 21, and the first screw 10 can be driven to rotate by a servo motor 14, so as to drive the first sliding carrier 11 to move, and since the second screw seat 9 is connected to the first sliding carrier 11, the second screw seat 9 can be driven to move in the X direction.

The second screw rod seat 9 is rotatably provided with a second screw rod 12, the second screw rod 12 is connected with a second sliding carrying platform 13, the second sliding carrying platform 13 is connected with the optical fiber clamping device 4, and the first screw rod 10 can be driven to rotate through a servo motor 14, so that the first sliding carrying platform 11 and the optical fiber clamping device 4 are driven to move in the Y direction. Since the first screw rod 10 can drive the second screw rod seat 9 to move in the X direction, the optical fiber clamping device 4 can move in the X direction and also move in the Y direction.

Referring to fig. 3, the optical fiber clamping device 4 includes a driving cylinder 15, a piston rod 16 is connected to an output end at the bottom of the driving cylinder 15, a connecting block 17 is connected to the bottom of the piston rod 16, two sides of the driving cylinder 15 are respectively provided with a hinge block 18, two hinge blocks 18 are hinged with clamping arms 19, two sides of the connecting block 17 are respectively hinged with a driving arm 20, the two driving arms 20 are respectively hinged with a middle position of the two clamping arms 19, the driving cylinder 15 drives the piston rod 16 to shrink, the connecting block 17 moves towards the driving cylinder 15, and the connecting block 17 drives the two driving arms 20 to clamp, so that the clamping of the optical fiber 2 is realized. Conversely, the two driving arms 20 are driven to be released, and in order to ensure that the optical fiber 2 is not damaged, a rubber pad is arranged on the opposite clamping surface of the two driving arms 20.

The real device can be installed on a probe station and integrated into a high-precision PD response test system. The automatic optical fiber coupling function of the 1um level is realized, the optical coupling during PD test can be realized by utilizing the XY screw rod module 3 without depending on the precision and the function of the probe station, and the input cost of PD, especially the equipment for miniature PD detection, is greatly reduced. And the mass production test of the PD can be performed by adopting a probe station with common precision. At the same time, by the device, the optical fiber 2 can be automatically re-coupled to the correct position if an offset is generated during the test.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An automatic coupling stabilized light source system, characterized in that: including stable light source host computer (1), optic fibre (2), XY lead screw module (3), optic fibre clamping device (4), feedback reading device (5) and control computer (6), optic fibre (2) one end is connected with stable light source host computer (1), and the other end is held by optic fibre clamping device (4), on optic fibre clamping device (4) are located XY lead screw module (3), just have wafer loading tray (7) below optic fibre (2), feedback reading device (5) are connected with wafer loading tray (7) through the wire, read the feedback current of wafer loading tray (7), stable light source host computer (1), XY lead screw module (3) and feedback reading device (5) all are connected with control computer (6) electricity.

2. The automatic coupling stabilized light source system of claim 1, wherein: XY lead screw module (3) are including perpendicular first lead screw seat (8) and second lead screw seat (9) that set up, rotate on first lead screw seat (8) and be equipped with first lead screw (10), be connected with first slip carrier (11) on first lead screw (10), first slip carrier (11) are connected with second lead screw seat (9), rotate on second lead screw seat (9) and be equipped with second lead screw (12), be connected with second slip carrier (13) on second lead screw (12), second slip carrier (13) are connected with optical fiber clamping device (4), one side of first lead screw (10) and second lead screw (12) all is connected with servo motor (14).

3. The automatic coupling stabilized light source system of claim 2, wherein: the optical fiber clamping device (4) comprises a driving air cylinder (15), a piston rod (16) is connected to the bottom output end of the driving air cylinder (15), a connecting block (17) is connected to the bottom of the piston rod (16), hinging blocks (18) are respectively arranged on two sides of the driving air cylinder (15), two hinging blocks (18) are hinged with clamping arms (19), two driving arms (20) are respectively hinged to two sides of the connecting block (17), and two driving arms (20) are respectively hinged to the middle positions of the two clamping arms (19).

4. The automatic coupling stabilized light source system of claim 3, wherein: the first screw rod seat (8) and the second screw rod seat (9) are respectively provided with a first sliding rail (21) and a second sliding rail (22), and the first sliding carrier (11) and the second sliding carrier (13) are respectively connected with the first sliding rail (21) and the second sliding rail (22) in a sliding way.

5. The automatic coupling stabilized light source system of claim 4, wherein: USB wires are connected between the control computer (6) and the stable light source host (1), between the XY screw rod module (3) and between the control computer and the feedback reading device (5).