CN220364370U - Mixed feed heating device in polysilicon reduction production - Google Patents
Mixed feed heating device in polysilicon reduction production Download PDFInfo
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- CN220364370U CN220364370U CN202321968004.XU CN202321968004U CN220364370U CN 220364370 U CN220364370 U CN 220364370U CN 202321968004 U CN202321968004 U CN 202321968004U CN 220364370 U CN220364370 U CN 220364370U
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 54
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 230000009467 reduction Effects 0.000 title claims abstract description 22
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 44
- 239000001257 hydrogen Substances 0.000 claims abstract description 31
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 31
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 30
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims abstract description 25
- 239000005052 trichlorosilane Substances 0.000 claims abstract description 25
- 238000000926 separation method Methods 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 13
- 239000007789 gas Substances 0.000 claims description 4
- 238000009827 uniform distribution Methods 0.000 claims description 3
- 238000005265 energy consumption Methods 0.000 abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The utility model relates to the technical field of polysilicon production equipment, in particular to a mixed feed heating device in polysilicon reduction production, wherein an upper separation cavity, a second cavity and a lower separation cavity are sequentially arranged on a main shell from top to bottom; the upper shell is arranged at the upper end of the upper compartment to form a first chamber; the upper shell is provided with a hydrogen input pipe, and the lower end of the upper shell is provided with a uniformly distributed lead pipe head; the upper shell is provided with a trichlorosilane inlet; the lower shell is arranged at the lower end of the lower separation cavity to form a cavity III; the lower shell is provided with a material outlet; the main body of the mixed heating pipeline is distributed in the second chamber; the input end of the mixed heating pipeline is connected to the top of the upper compartment and is communicated with the first chamber; the output end of the mixed heating pipeline is connected to the bottom of the lower separation cavity and is communicated with the third cavity; the joint pipe head is fixedly arranged at the input end of the mixed heating pipeline. The utility model can mix liquid trichlorosilane and hydrogen and heat them at the same time, to reduce investment and operation energy consumption.
Description
Technical Field
The utility model relates to the technical field of polysilicon production equipment, in particular to a mixed feed heating device in polysilicon reduction production.
Background
Currently, the production of polysilicon mostly adopts an improved siemens process. The improved Siemens method process for producing polysilicon mainly comprises the steps of completely mixing liquid trichlorosilane with heated hydrogen after vaporization in equipment, and then conveying the mixture into a reduction furnace; and carrying out vapor deposition reaction on the hot silicon core carrier, and continuously depositing materials on the silicon core carrier to ensure that the diameter of the silicon core carrier is continuously increased. And when the diameter of the silicon core carrier reaches the production requirement, the furnace can be stopped, and the growth of the polysilicon is completed.
The heating mode adopted in the prior art is to heat or vaporize two feed components of trichlorosilane and hydrogen respectively and then mix the feed components into a reduction furnace for reaction; the heating mode needs more equipment, the system is complex, the occupied space is large, the configuration area of a factory building is increased, and the energy consumption for operation is high.
Disclosure of Invention
In view of the above, the utility model provides a mixed feed heating device in the reduction production of polysilicon, which mainly aims to mix liquid trichlorosilane and hydrogen and then heat the liquid trichlorosilane at the same time, reduce system equipment configuration, reduce investment and operation energy consumption and reduce space occupation.
In order to achieve the above purpose, the present utility model mainly provides the following technical solutions:
the embodiment of the utility model provides a mixed feed heating device in polysilicon reduction production, which comprises a main shell, an upper shell, a lower shell, a mixed heating pipeline and a lead connecting head, wherein the main shell is provided with a plurality of connecting pipes;
an upper separation cavity, a second chamber and a lower separation cavity are sequentially arranged on the main shell from top to bottom;
the top of the upper compartment is provided with a first exhaust port; the bottom of the upper compartment is provided with a first exhaust port;
a steam inlet is formed in the second chamber; a non-condensable gas outlet is arranged on the second chamber; the bottom of the second chamber is provided with a condensate outlet;
the top of the lower separation cavity is provided with a second exhaust port; the bottom of the upper compartment is provided with a second exhaust port;
the upper shell is fixedly arranged at the upper end of the upper separation cavity to form a first cavity; the upper shell is provided with a hydrogen input pipe; the hydrogen input pipe extends downwards to the bottom of the first chamber; the lower end of the hydrogen input pipe is provided with a uniformly distributed lead pipe head; the uniformly distributed connecting pipe heads are communicated with the hydrogen input pipe; the outlets of the uniformly distributed tube heads of the connecting and guiding device are downward; a plurality of air outlet grooves are uniformly distributed at the outlet of the connecting and guiding uniform distribution pipe head along the circumferential direction; the bottoms of the plurality of air outlet grooves are positioned on the horizontal plane I;
the upper shell is provided with a trichlorosilane inlet; the trichlorosilane inlet is communicated with the first chamber;
the lower shell is fixedly arranged at the lower end of the lower separation cavity to form a cavity III; the lower shell is provided with a material outlet; the material outlet is communicated with the chamber III;
the main body of the mixed heating pipeline is distributed in the second chamber; the input end of the mixed heating pipeline is connected to the top of the upper compartment and is communicated with the first cavity; the output end of the mixed heating pipeline is connected to the bottom of the lower compartment and is communicated with the third compartment;
the guide pipe head is fixedly arranged at the input end of the mixed heating pipeline and is communicated with the mixed heating pipeline; the inlet of the connecting pipe head is upward; a plurality of liquid inlet grooves are uniformly distributed at the inlet of the lead connecting head; the liquid inlet grooves are positioned on the second horizontal plane;
the height difference between the second horizontal plane and the first horizontal plane is in a preset range.
Further, the difference in height between the second horizontal plane and the first horizontal plane is smaller than 0.5cm.
Further, the connector head is connected with the mixed heating pipeline through threads.
Further, a support is fixedly arranged on the main shell.
Further, expansion joints are arranged on the upper compartment, the second compartment and the lower compartment.
Further, the air outlet groove is a semicircular groove.
Further, the liquid inlet groove is a tooth-shaped groove.
Further, a clean opening is formed in the bottom of the second chamber.
Further, a distance plate is fixedly arranged in the second chamber.
Further, a pull rod is arranged between the distance plates.
By means of the technical scheme, the mixed feed heating device in the polycrystalline silicon reduction production has at least the following advantages:
the liquid trichlorosilane and the hydrogen are heated simultaneously after being mixed, so that the configuration of system equipment is reduced, the investment and the operation energy consumption are reduced, and the space occupation is reduced.
The foregoing description is only an overview of the present utility model, and is intended to provide a better understanding of the present utility model, as it is embodied in the following description, with reference to the preferred embodiments of the present utility model and the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of a mixed feed heating apparatus in polysilicon reduction production according to an embodiment of the present utility model;
FIG. 2 is an enlarged schematic view of a portion of FIG. 1 at A;
fig. 3 is a partially enlarged schematic view at B in fig. 1.
The figure shows:
1 is a main shell, 2 is an upper shell, 2-1 is a hydrogen input pipe, 2-2 is a trichlorosilane inlet, 3 is a lower shell, 4 is a cavity I, 5 is an upper separation cavity, 5-1 is an exhaust port I, 5-2 is a purge port I, 6 is a cavity II, 6-1 is a steam inlet, 6-2 is a non-condensable gas exhaust port, 6-3 is a condensate outlet, 6-4 is a purge port, 7 is a lower separation cavity, 7-1 is an exhaust port II, 7-2 is a purge port II, 8 is a cavity III, 8-1 is a material outlet, 9 is a mixed heating pipeline, 10 is a lead-in pipe head, 10-1 is a liquid inlet groove, 11 is a lead-in uniform pipe head, 11-1 is an exhaust groove, 12 is a distance plate, 13 is a pull rod, 14 is an expansion joint, and 15 is a support.
Detailed Description
In order to further describe the technical means and effects adopted for achieving the preset aim of the utility model, the following detailed description refers to the specific implementation, structure, characteristics and effects according to the application of the utility model with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
As shown in fig. 1 to 3, a mixed feed heating apparatus in the reduction production of polycrystalline silicon according to an embodiment of the present utility model includes a main housing 1, an upper housing 2, a lower housing 3, a mixed heating pipe 9, and a connecting pipe head 10; an upper compartment 5, a second compartment 6 and a lower compartment 7 are sequentially arranged on the main shell 1 from top to bottom; the upper compartment 5, the second compartment 6 and the lower compartment 7 are divided into separate spaces; in this embodiment, expansion joints 14 are preferably disposed on the upper compartment 5, the second compartment 6 and the lower compartment 7, so as to reduce the influence of thermal expansion and cold contraction deformation on the main casing 1. The top of the upper compartment 5 is provided with an exhaust port I5-1; the bottom of the upper compartment 5 is provided with a first draining port 5-2; the first exhaust port 5-1 and the first exhaust port 5-2 are normally open, and if hydrogen, trichlorosilane or steam leaks through the upper compartment 5, the overflow of the first exhaust port 5-1 and the first exhaust port 5-2 can be found, so that medium pollution can not be generated.
The second chamber 6 is provided with a steam inlet 6-1 for steam. The second chamber 6 is provided with a non-condensable gas outlet 6-2 for outflow of steam. The bottom of the second chamber 6 is provided with a condensate outlet 6-3 for discharging water after steam condensation. In this embodiment, preferably, the bottom of the second chamber 6 is provided with a purge port 6-4 for discharging the liquid in the second chamber 6.
The top of the lower separation chamber 7 is provided with a second exhaust port 7-1; the bottom of the upper compartment 5 is provided with a second cleaning outlet 7-2; the second exhaust port 7-1 and the second exhaust port 7-2 are normally open, and if hydrogen, trichlorosilane or steam leaks through the lower separation cavity 7, the overflow of the second exhaust port 7-1 and the second exhaust port 7-2 can be found, so that medium pollution can not be generated.
The upper shell 2 is fixedly arranged at the upper end of the upper compartment 5 to form a first chamber 4; the upper shell 2 is provided with a hydrogen input pipe 2-1; the hydrogen input pipe 2-1 extends downwards to the bottom of the first chamber 4; the lower end of the hydrogen input pipe 2-1 is provided with a uniformly distributed lead pipe head 11; the uniformly distributed tube heads 11 are communicated with the hydrogen input tube 2-1; the outlets of the uniformly distributed tube heads 11 are led downwards; a plurality of air outlet grooves 11-1 are uniformly distributed at the outlet of the connecting and guiding uniform distribution pipe head 11 along the circumferential direction; the bottoms of the plurality of air outlet grooves 11-1 are positioned on the first horizontal plane; gaseous hydrogen enters the first chamber 4 from the hydrogen input pipe 2-1; the hydrogen uniformly passes through the liquid surface through a plurality of air outlet grooves 11-1 at the positions of the uniformly distributed tube heads 11 for connection and introduction and flows into the first cavity 4.
The upper shell 2 is provided with a trichlorosilane inlet 2-2; the trichlorosilane inlet 2-2 is communicated with the first chamber 4 and is used for flowing in liquid trichlorosilane. The lower shell 3 is fixedly arranged at the lower end of the lower compartment 7 to form a chamber III 8 for gathering the heated material; the lower shell 3 is provided with a material outlet 8-1; the material outlet 8-1 is communicated with the chamber III 8 and is used for outputting heated materials. The main body of the mixed heating pipeline 9 is distributed in the second chamber 6; the input end of the mixing heating pipeline 9 is connected to the top of the upper compartment 5 and is communicated with the first chamber 4; the output end of the mixed heating pipeline 9 is connected to the bottom of the lower compartment and is communicated with the third chamber 8; the lead connecting head 10 is fixedly arranged at the input end of the mixed heating pipeline 9 and is communicated with the mixed heating pipeline 9; in this embodiment, the connector 10 is preferably screwed with the mixing heating pipe 9 to facilitate replacement. The inlet of the connecting pipe head 10 is upward; a plurality of liquid inlet grooves 10-1 are uniformly distributed at the inlet of the guide tube head 10; the liquid inlet grooves 10-1 are positioned on the second horizontal plane; the liquid inlet channel 10-1 allows liquid to slowly enter along the liquid inlet channel 10-1, preventing the liquid from sealing the top of the connector head 10, so that hydrogen cannot enter. The height difference between the second level and the first level is within a preset range so as to control the entering amount of the liquid trichlorosilane and the hydrogen through the liquid level of the liquid trichlorosilane. In this embodiment, the difference between the level two and the level one is preferably less than 0.5cm, so as to facilitate control. Further preferably, the second level is at the same height as the first level.
The liquid trichlorosilane enters the first cavity 4 from the trichlorosilane inlet 2-2, the liquid level is higher than the second level and the first level, and the liquid level is higher than the bottom of the liquid inlet groove 10-1, so that the liquid can uniformly flow into the mixed heating pipeline 9 along the liquid inlet groove 10-1, and the phenomenon of liquid level sealing does not occur; too high a liquid level will seal the upper opening, resulting in no hydrogen gas ingress. The liquid level is also higher than the bottom of the air outlet groove 11-1, so that hydrogen can overflow the liquid level from the bottom of the air outlet groove 11-1 under a certain pressure and slowly and uniformly enter the first chamber 4; in operation, the ratio setting of the liquid trichlorosilane and the hydrogen can also be controlled and observed by adjusting the height of the liquid level.
The liquid trichlorosilane enters the mixed heating pipeline 9 along the liquid inlet groove 10-1 of the leading-in pipe head 10 at the bottom of the first chamber 4 and uniformly flows into the second hot chamber 6; meanwhile, hydrogen can also pass through the plurality of air outlet grooves 11-1 and penetrate out of the liquid level to uniformly enter the first chamber 4; then enters a mixing heating pipeline 9 together with liquid trichlorosilane through a connecting lead head 10; the mixed material enters the third chamber 8 after being heated into a gaseous state by steam in the second chamber 6, and flows out through the material outlet 8-1.
According to the mixed feed heating device in the polycrystalline silicon reduction production, liquid trichlorosilane and hydrogen are heated simultaneously after being mixed, so that system equipment configuration is reduced, investment and operation energy consumption are reduced, and space occupation is reduced.
As a preference to the above-described embodiment, the main casing 1 is fixedly provided with a stand 15 to facilitate fixing and connection of the main casing 1.
Preferably, the air outlet groove 11-1 is a semicircular groove, so as to facilitate processing and uniform outflow of hydrogen. Of course, other trench structures formed are not precluded.
Preferably, the liquid inlet groove 10-1 is a tooth-shaped groove, which is beneficial to controlling the liquid flow. Of course, the liquid inlet channel 10-1 may be a triangular channel.
As a preference to the above embodiment, the second chamber 6 is fixedly provided with a distance plate 12 for fixing the mixed heating pipes 9 distributed in the second chamber 6, so that the mixed heating pipes 9 distributed in the S-shape are uniformly distributed. It is further preferred that a tie rod 13 is arranged between the distance plates 12 to secure and fix the distribution structure of the hybrid heating tube 9.
Further, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, with these terms only being used to distinguish one element from another. Without departing from the scope of the exemplary embodiments. Similarly, neither element nor element two is a sequence of elements only intended to distinguish one element from another element. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "secured" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Standard parts used in the utility model can be purchased from the market, special-shaped parts can be customized according to the description of the specification and the drawings, the specific connection modes of all parts adopt conventional means such as mature bolts, rivets and welding in the prior art, the machinery, the parts and the equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection modes in the prior art, so that the details are not described.
The above description is only of the preferred embodiments of the present utility model, and is not intended to limit the present utility model in any way, but any simple modification, equivalent variation and modification made to the above embodiments according to the technical substance of the present utility model still fall within the scope of the technical solution of the present utility model.
Claims (10)
1. The mixed feed heating device in the reduction production of the polysilicon is characterized by comprising a main shell, an upper shell, a lower shell, a mixed heating pipeline and a lead connecting head;
an upper separation cavity, a second chamber and a lower separation cavity are sequentially arranged on the main shell from top to bottom;
the top of the upper compartment is provided with a first exhaust port; the bottom of the upper compartment is provided with a first exhaust port;
a steam inlet is formed in the second chamber; a non-condensable gas outlet is arranged on the second chamber; the bottom of the second chamber is provided with a condensate outlet;
the top of the lower separation cavity is provided with a second exhaust port; the bottom of the upper compartment is provided with a second exhaust port;
the upper shell is fixedly arranged at the upper end of the upper separation cavity to form a first cavity; the upper shell is provided with a hydrogen input pipe; the hydrogen input pipe extends downwards to the bottom of the first chamber; the lower end of the hydrogen input pipe is provided with a uniformly distributed lead pipe head; the uniformly distributed connecting pipe heads are communicated with the hydrogen input pipe; the outlets of the uniformly distributed tube heads of the connecting and guiding device are downward; a plurality of air outlet grooves are uniformly distributed at the outlet of the connecting and guiding uniform distribution pipe head along the circumferential direction; the bottoms of the plurality of air outlet grooves are positioned on the horizontal plane I;
the upper shell is provided with a trichlorosilane inlet; the trichlorosilane inlet is communicated with the first chamber;
the lower shell is fixedly arranged at the lower end of the lower separation cavity to form a cavity III; the lower shell is provided with a material outlet; the material outlet is communicated with the chamber III;
the main body of the mixed heating pipeline is distributed in the second chamber; the input end of the mixed heating pipeline is connected to the top of the upper compartment and is communicated with the first cavity; the output end of the mixed heating pipeline is connected to the bottom of the lower compartment and is communicated with the third compartment;
the guide pipe head is fixedly arranged at the input end of the mixed heating pipeline and is communicated with the mixed heating pipeline; the inlet of the connecting pipe head is upward; a plurality of liquid inlet grooves are uniformly distributed at the inlet of the lead connecting head; the liquid inlet grooves are positioned on the second horizontal plane;
the height difference between the second horizontal plane and the first horizontal plane is in a preset range.
2. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 1, wherein,
the height difference between the second horizontal plane and the first horizontal plane is smaller than 0.5cm.
3. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 1, wherein,
the connecting pipe head is connected with the mixed heating pipeline through threads.
4. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 1, wherein,
the main shell is fixedly provided with a support.
5. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 1, wherein,
expansion joints are arranged on the upper compartment, the second compartment and the lower compartment.
6. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 1, wherein,
the air outlet groove is a semicircular groove.
7. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 1, wherein,
the liquid inlet groove is a tooth-shaped groove.
8. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 1, wherein,
and a clean opening is formed in the bottom of the second chamber.
9. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 1, wherein,
and a distance plate is fixedly arranged in the second chamber.
10. A mixed feed heating apparatus in the production of polycrystalline silicon reduction according to claim 9,
a pull rod is arranged between the distance plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321968004.XU CN220364370U (en) | 2023-07-25 | 2023-07-25 | Mixed feed heating device in polysilicon reduction production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321968004.XU CN220364370U (en) | 2023-07-25 | 2023-07-25 | Mixed feed heating device in polysilicon reduction production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220364370U true CN220364370U (en) | 2024-01-19 |
Family
ID=89515504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321968004.XU Active CN220364370U (en) | 2023-07-25 | 2023-07-25 | Mixed feed heating device in polysilicon reduction production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220364370U (en) |
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2023
- 2023-07-25 CN CN202321968004.XU patent/CN220364370U/en active Active
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