CN220352295U - Cooling equipment of single crystal furnace - Google Patents
Cooling equipment of single crystal furnace Download PDFInfo
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- CN220352295U CN220352295U CN202320848656.3U CN202320848656U CN220352295U CN 220352295 U CN220352295 U CN 220352295U CN 202320848656 U CN202320848656 U CN 202320848656U CN 220352295 U CN220352295 U CN 220352295U
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- sliding
- single crystal
- crystal furnace
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- wall
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- 238000001816 cooling Methods 0.000 title claims abstract description 64
- 239000013078 crystal Substances 0.000 title claims abstract description 34
- 238000009434 installation Methods 0.000 claims description 14
- 238000005192 partition Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides cooling equipment, and particularly relates to single crystal furnace cooling equipment. The single crystal furnace comprises a box body, be equipped with the division board between the upper and lower both sides of box inner wall, box inner wall bottom is provided with the single crystal furnace body, the box diapire is equipped with electric telescopic handle, electric telescopic handle top rigid coupling has cooling module, box diapire four corners department all has set firmly the supporting leg, the draw-in groove has been seted up to the supporting leg bottom, the joint has the wheel of stopping in the draw-in groove. The utility model realizes the purpose of large cooling range, is convenient to move and is convenient to replace a new brake wheel.
Description
Technical Field
The utility model provides cooling equipment, and particularly relates to single crystal furnace cooling equipment.
Background
In the production process of the single crystal furnace, inert gas is mainly led into the single crystal furnace, the graphite heater melts polycrystalline materials such as polycrystalline silicon, after melting of different types of materials is completed, the single crystal furnace is required to be opened for cooling the materials in the single crystal furnace, and the outside of the materials is conveniently pulled by a Czochralski method. When the traditional cooling device is used, the cooling module is of a fixed structure, only a specific place can be cooled, the cooling range is too small, the cooling efficiency is low, and the traditional cooling device is inconvenient to move. Therefore, the utility model provides cooling equipment for the single crystal furnace, which can effectively solve the problems.
Disclosure of Invention
The utility model provides cooling equipment for the single crystal furnace, which aims to solve the problems, achieves the aim of large cooling range, is convenient to move and is convenient to replace a new brake wheel.
The utility model adopts the technical scheme that: the utility model provides a single crystal furnace cooling arrangement, includes the box, be provided with the division board between the upper and lower both sides of box inner wall, box inner wall bottom is provided with the single crystal furnace body that is located division board one side, the box diapire front and back side of division board opposite side all has set firmly electric telescopic handle, electric telescopic handle top joint has the cooling module with box inner wall swing joint jointly, box diapire four corners department has all set firmly the supporting leg, the draw-in groove has been seted up to the bottom of supporting leg, draw-in groove joint has the wheel of stopping, sliding tray, first spout, second spout and spacing groove have been seted up on the supporting leg, spacing groove and first spout intercommunication each other, the same sliding plate of sliding connection has in spacing groove and the first spout, the top fixedly connected with bearing of sliding plate, the pivot is worn to be equipped with the pivot in the bearing, threaded hole has been seted up on the supporting leg, threaded hole and threaded connection, first spout and sliding tray communicate each other, sliding tray has sliding block, sliding block one side has sliding block and sliding connection's one side of sliding block, sliding block and sliding block one side of sliding block, sliding block and movable connection have one side of the fixed connection.
One side of the box body is provided with a box door, and the box door is provided with a handle.
The cooling assembly comprises an installation box fixedly connected to the top end of the electric telescopic rod, a motor is fixedly arranged on one side of the inner wall of the installation box, a movable plate is movably arranged between the top and the bottom of the inner wall of the installation box, a cooling fan extending to one side of the installation box is fixedly arranged on one side of the movable plate, a connecting shaft is fixedly arranged on one side of the movable plate, a rack plate movably connected with the bottom of the inner wall of the installation box is fixedly arranged on the other side of the connecting shaft, and a gear meshed with the rack plate is fixedly arranged at the output shaft of the motor.
The inside cavity design that is of installation case, rectangular through-hole with cooling fan removal orbit looks adaptation has been seted up to installation incasement wall one side.
The inside ventilation hole that has seted up of division board.
The first sliding chute is arranged on one side of the box body, and one side of the installation box extends into the first sliding chute and is in sliding connection with the first sliding chute.
The sliding groove II is formed in the front side and the rear side of the box body, moving blocks are fixedly connected to the front side and the rear side of the installation box, and the moving blocks extend into the sliding groove II and are in sliding connection with the sliding groove II.
The top of threaded rod fixedly connected with changes the piece.
The second sliding groove is communicated with the sliding groove, and the sliding groove is communicated with the clamping groove.
The second sliding groove is connected with the limiting block in a sliding mode, and the top of the limiting block is fixedly connected with one side of the sliding block.
The utility model has the beneficial effects that:
through controlling electric telescopic handle flexible, drive cooling module and reciprocate, improved the cooling range, the staff can remove equipment with the help of the wheel of stopping, when one of them wheel of stopping damages, the accessible rotates the commentaries on classics piece, make the threaded rod rotate, make the sliding plate upwards slide in first spout and spacing inslot, simultaneously under the spacing of second spout and limiting piece, make the angle of movable rod change, the sliding block moves to keeping away from the direction of fixed slot, thereby can make sliding block and fixed slot separation, thereby can make brake wheel and draw-in groove separation, replace new brake wheel later can, flexible through control electric telescopic handle, drive cooling module reciprocates, simultaneously starter motor drives the gear rotation and then makes the rack board move forward, the rack board drives connecting axle and movable plate synchronous motion, can make cooling fan move forward, cool off the inside different places of box, the big purpose of cooling range has been realized. The cooling module is of a fixed structure, and can only cool a specific place, so that the problem of low cooling efficiency caused by too small cooling range is solved.
Drawings
FIG. 1 is a schematic diagram of a cooling apparatus for a single crystal furnace according to the present utility model.
FIG. 2 is a side sectional view of the cooling apparatus for the single crystal furnace of the present utility model.
FIG. 3 is an enlarged schematic view of the brake wheel of the cooling device of the single crystal furnace of the utility model.
( 1. A case; 2. a partition plate; 3. a single crystal furnace body; 4. an electric telescopic rod; 5. a cooling assembly; 5.1, an installation box; 5.2, a motor; 5.3, moving the plate; 5.4, cooling fan; 5.5, connecting shaft; 5.6, a rack plate; 5.7, gears; 6. support legs; 7. a clamping groove; 8. a brake wheel; 9. a sliding groove; 10. a first chute; 11. a second chute; 12. a limit groove; 13. a sliding plate; 14. a threaded rod; 15. a threaded hole; 16. a sliding block; 17. a movable rod; 18. a fixing groove; 19. a door; 20. a first chute; 21. a second chute; 22. a moving block; 23. a rotating block; 24. limiting block )
Detailed Description
The utility model is further described below with reference to the accompanying drawings.
Example 1
As shown in fig. 1, fig. 2 and fig. 3, the cooling device for the single crystal furnace provided by the utility model comprises a box body 1, a division plate 2 is arranged between the upper side and the lower side of the inner wall of the box body 1, a single crystal furnace body 3 positioned at one side of the division plate 2 is arranged at the bottom of the inner wall of the box body 1, electric telescopic rods 4 are fixedly arranged at the front and the rear of the bottom wall of the box body 1 at the other side of the division plate 2, cooling components 5 movably connected with the inner wall of the box body 1 are fixedly connected at the top ends of the electric telescopic rods 4, supporting legs 6 are fixedly arranged at four corners of the bottom wall of the box body 1, clamping grooves 7 are formed at the bottom ends of the supporting legs 6, brake wheels 8 are clamped in the clamping grooves 7, sliding grooves 9, first sliding grooves 10, second sliding grooves 11 and limiting grooves 12 are mutually communicated with the first sliding grooves 10, the same sliding plate 13 is connected in the sliding manners of the limiting grooves 12 and the first sliding grooves 10, the top of the sliding plate 13 is fixedly connected with a bearing, a rotating shaft is movably penetrated in the bearing, the top end of the rotating shaft is fixedly connected with a threaded rod 14, a threaded hole 15 is formed in the supporting leg 6, the threaded hole 15 is in threaded connection with the threaded rod 14, the first sliding chute 10 and the sliding groove 9 are mutually communicated, a sliding block 16 is slidably connected in the sliding groove 9, one side of the sliding block 16 is movably connected with a movable rod 17, the other end of the movable rod 17 is movably connected with the bottom of the sliding plate 13, one side of the brake wheel 8 is provided with a fixed groove 18, the fixed groove 18 is clamped with the sliding block 16, one side of the box body 1 is provided with a box door 19, a handle is arranged on the box door 19, a vent hole is formed in the partition plate 2, the top end of the threaded rod 14 is fixedly connected with a rotating block 23, the second sliding groove 11 is communicated with the sliding groove 9, the sliding groove 9 is communicated with the clamping groove 7, the limiting block 24 is connected in a sliding manner in the second sliding groove 11, and the top of the limiting block 24 is fixedly connected with one side of the sliding block 16.
The working principle of the cooling device of the single crystal furnace based on the embodiment 1 is as follows: through controlling electric telescopic rod 4 to stretch out and draw back, drive cooling module 5 and reciprocate, improved the cooling range, the staff can remove equipment with the help of brake wheel 8, when one of them brake wheel 8 damages, the accessible rotates the commentaries on classics piece 23, make threaded rod 14 rotate, make sliding plate 13 upwards slide in first spout 10 and spacing groove 12, simultaneously under the spacing of second spout 11 and limiting block 24, make the angle of movable rod 17 change, sliding block 16 moves towards the direction of keeping away from fixed slot 18, thereby can make sliding block 16 and fixed slot 18 separate, thereby can make brake wheel 8 and draw-in groove 7 separate, the later replacement is new brake wheel 8 can.
Example two
As shown in fig. 1 and fig. 2, compared with the first embodiment, the cooling apparatus for a single crystal furnace according to the present utility model further includes: the cooling assembly 5 comprises a mounting box 5.1 fixedly connected to the top end of the electric telescopic rod 4, a motor 5.2 is fixedly mounted on one side of the inner wall of the mounting box 5.1, a moving plate 5.3 is movably mounted between the top and the bottom of the inner wall of the mounting box 5.1, a cooling fan 5.4 extending to one side of the mounting box 5.1 is fixedly mounted on one side of the moving plate 5.3, a connecting shaft 5.5 is fixedly mounted on one side of the moving plate 5.3, a rack plate 5.6 movably connected with the bottom of the inner wall of the mounting box 5.1 is fixedly mounted on the other side of the connecting shaft 5.5, a gear 5.7 meshed with the rack plate 5.6 is fixedly mounted at the output shaft of the motor 5.2, the inside of the mounting box 5.1 is of hollow design, a rectangular through hole matched with the moving track of the cooling fan 5.4 is formed in one side of the inner wall of the mounting box 5.1, a first sliding groove 20 is formed in one side of the mounting box 5.1, one side of the mounting box 5.1 is extended into the first sliding groove 20 and is slidably connected with the first sliding groove 20, a second sliding block 21 is formed in the front of the box 1 and the second sliding block 21 is fixedly connected with the second sliding block 21.
In this embodiment, as shown in fig. 1 and 2, the electric telescopic rod 4 is controlled to stretch and retract to drive the cooling assembly 5 to move up and down, and meanwhile, the motor 5.2 is started to drive the gear 5.7 to rotate so as to enable the rack plate 5.6 to move forward, and the rack plate 5.6 drives the connecting shaft 5.5 to move synchronously with the moving plate 5.3, so that the cooling fan 5.4 can move forward to cool different places inside the box body 1, thereby realizing the purpose of large cooling range. The cooling module is of a fixed structure, and can only cool a specific place, so that the problem of low cooling efficiency caused by too small cooling range is solved.
The utility model and its embodiments have been described above with no limitation, and the actual construction is not limited to the embodiments of the utility model as shown in the drawings. In summary, if one of ordinary skill in the art is informed by this disclosure, a structural manner and an embodiment similar to the technical solution should not be creatively devised without departing from the gist of the present utility model.
Claims (10)
1. A single crystal furnace cooling device is characterized in that: the single crystal furnace comprises a box body (1), a partition plate (2) is arranged between the upper side and the lower side of the inner wall of the box body (1), a single crystal furnace body (3) positioned on one side of the partition plate (2) is arranged at the bottom of the inner wall of the box body (1), an electric telescopic rod (4) is fixedly arranged at the front and rear sides of the bottom wall of the box body (1) on the other side of the partition plate (2), a cooling assembly (5) movably connected with the inner wall of the box body (1) is fixedly connected to the top end of the electric telescopic rod (4), supporting legs (6) are fixedly arranged at four corners of the bottom wall of the box body (1), clamping grooves (7) are formed in the bottom ends of the supporting legs (6), brake wheels (8) are clamped in the clamping grooves (7), sliding grooves (9), first sliding grooves (10), second sliding grooves (11) and limiting grooves (12) are mutually communicated with the first sliding grooves (10), the same sliding plates (13) are connected to the first sliding grooves (12), bearings (14) are fixedly connected to the tops of the supporting legs (6), threaded shafts (14) are fixedly connected to the threaded shafts (14), the brake device is characterized in that the first sliding groove (10) and the sliding groove (9) are mutually communicated, a sliding block (16) is connected in the sliding groove (9) in a sliding mode, a movable rod (17) is movably connected to one side of the sliding block (16), the other end of the movable rod (17) is movably connected with the bottom of the sliding plate (13), a fixed groove (18) is formed in one side of the brake wheel (8), and the fixed groove (18) is connected with the sliding block (16) in a clamping mode.
2. The single crystal furnace cooling apparatus of claim 1, wherein: one side of the box body (1) is provided with a box door (19), and the box door (19) is provided with a handle.
3. The single crystal furnace cooling apparatus of claim 1, wherein: the cooling assembly (5) comprises a mounting box (5.1) fixedly connected to the top end of an electric telescopic rod (4), a motor (5.2) is fixedly arranged on one side of the inner wall of the mounting box (5.1), a movable plate (5.3) is movably arranged between the top and the bottom of the inner wall of the mounting box (5.1), a cooling fan (5.4) extending to one side of the mounting box (5.1) is fixedly arranged on one side of the movable plate (5.3), a connecting shaft (5.5) is fixedly arranged on one side of the movable plate (5.3), a rack plate (5.6) movably connected with the bottom of the inner wall of the mounting box (5.1) is fixedly arranged on the other side of the connecting shaft (5.5), and a gear (5.7) meshed with the rack plate (5.6) is fixedly arranged at the output shaft of the motor (5.2).
4. A single crystal furnace cooling apparatus according to claim 3, wherein: the inside of the installation box (5.1) is of a hollow design, and one side of the inner wall of the installation box (5.1) is provided with a rectangular through hole which is matched with the moving track of the cooling fan (5.4).
5. The single crystal furnace cooling apparatus of claim 1, wherein: the inside of the partition plate (2) is provided with a vent hole.
6. A single crystal furnace cooling apparatus according to claim 3, wherein: a first sliding groove (20) is formed in one side of the box body (1), and one side of the installation box (5.1) extends into the first sliding groove (20) and is in sliding connection with the first sliding groove (20).
7. A single crystal furnace cooling apparatus according to claim 3, wherein: the sliding chute two (21) are formed in the front side and the rear side of the box body (1), the moving blocks (22) are fixedly connected to the front side and the rear side of the installation box (5.1), and the moving blocks (22) extend into the sliding chute two (21) and are in sliding connection with the sliding chute two (21).
8. The single crystal furnace cooling apparatus of claim 1, wherein: the top end of the threaded rod (14) is fixedly connected with a rotating block (23).
9. The single crystal furnace cooling apparatus of claim 1, wherein: the second sliding groove (11) is communicated with the sliding groove (9), and the sliding groove (9) is communicated with the clamping groove (7).
10. The single crystal furnace cooling apparatus of claim 1, wherein: the second sliding groove (11) is connected with a limiting block (24) in a sliding mode, and the top of the limiting block (24) is fixedly connected with one side of the sliding block (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320848656.3U CN220352295U (en) | 2023-04-17 | 2023-04-17 | Cooling equipment of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320848656.3U CN220352295U (en) | 2023-04-17 | 2023-04-17 | Cooling equipment of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220352295U true CN220352295U (en) | 2024-01-16 |
Family
ID=89484680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320848656.3U Active CN220352295U (en) | 2023-04-17 | 2023-04-17 | Cooling equipment of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220352295U (en) |
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2023
- 2023-04-17 CN CN202320848656.3U patent/CN220352295U/en active Active
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