CN220324413U - A patting mechanism for graphite boat - Google Patents

Abstract

The utility model discloses a beating mechanism for a graphite boat, which comprises a fixed frame, wherein a graphite boat main body is arranged in the fixed frame, a conveyor belt is arranged below the graphite boat main body, the beating mechanism further comprises a first rotating rod and a pair of beating sheets corresponding to the graphite boat main body, the pair of beating sheets are fixedly connected to the first rotating rod, a moving mechanism is arranged on the fixed frame, the first rotating rod is arranged on the moving mechanism, one end of the first rotating rod, which is far away from the beating sheets, is fixedly connected with a rotating handle, the beating sheets comprise an inner lining plate and a buffer layer, the buffer layer is wrapped on the outer side of the inner lining plate, and the moving mechanism comprises a sliding plate. Compared with the prior art, the beating mechanism for the graphite boat can comprehensively beat the graphite boat, so that silicon chips fall into the clamping grooves, the labor intensity of operators is reduced, and the structure is simple and the operation is convenient.

Description

A patting mechanism for graphite boat

Technical Field

The utility model belongs to the technical field of graphite boats, and particularly relates to a beating mechanism for a graphite boat.

Background

The graphite boat is generally used for coating the silicon wafer, a clamping groove is formed in the graphite boat, the silicon wafer is positioned in the clamping groove, one surface of the silicon wafer is in contact with the graphite boat, the other surface of the silicon wafer is exposed in the graphite boat, and the exposed surface of the silicon wafer is coated. In the prior art, a manipulator is generally used for loading and unloading a silicon wafer, then a conveyor belt is used for conveying a graphite boat to a processing place, and the manipulator cannot accurately place the silicon wafer in a clamping groove in the graphite boat in the loading and unloading process, so that in the subsequent coating process, both sides of the graphite boat are coated with films, and the silicon wafer is scrapped.

The existing treatment mode is that an operator holds a beating tool such as a rubber hammer to beat the graphite boat, so that the graphite boat vibrates, and further silicon chips fall into the clamping groove, but the operator holds the beating tool with a small amount of labor, and the operator cannot beat the graphite boat in an omnibearing manner.

Disclosure of Invention

The utility model aims to provide a beating mechanism for a graphite boat, which can comprehensively beat the graphite boat, so that silicon chips fall into a clamping groove, the labor intensity of operators is reduced, and the structure is simple and the operation is convenient.

In order to achieve the above purpose, the utility model provides a flapping mechanism for a graphite boat, which comprises a fixed frame, wherein a graphite boat main body is arranged in the fixed frame, a conveyor belt is arranged below the graphite boat main body, the flapping mechanism further comprises a first rotating rod and a pair of flapping sheets corresponding to the graphite boat main body, the pair of flapping sheets are fixedly connected to the first rotating rod, a moving mechanism is arranged on the fixed frame, the first rotating rod is arranged on the moving mechanism, and one end of the first rotating rod far away from the flapping sheets is fixedly connected with a rotating handle.

In one or more embodiments, the flap includes a lining plate and a cushioning layer wrapped around an outside of the lining plate.

In one or more embodiments, the moving mechanism includes a sliding plate, the sliding plate is fixedly connected to the fixed frame, a sliding groove is formed in the sliding plate, a sliding block is connected in the sliding groove in a sliding manner, and a limit sleeve matched with the first rotating rod is fixedly connected to the sliding block.

In one or more embodiments, the limit sleeve has a length greater than 10 cm and a maximum clearance between the limit sleeve and the first rotatable lever of less than 1 mm.

In one or more embodiments, the turning handle includes a second turning lever and a third turning lever.

In one or more embodiments, the second rotating lever is perpendicular to the third rotating lever.

In one or more embodiments, a sheath is fixedly connected to the third rotating rod.

In one or more embodiments, the fixed frame is provided with a movable portion.

Compared with the prior art, the beating mechanism for the graphite boat can comprehensively beat the graphite boat, so that silicon chips fall into the clamping grooves, the labor intensity of operators is reduced, and the structure is simple and the operation is convenient.

Drawings

Fig. 1 is a schematic structural view according to an embodiment of the present utility model.

Fig. 2 is a schematic view of a use state according to an embodiment of the present utility model.

Fig. 3 is a schematic diagram of a front view structure according to an embodiment of the present utility model.

Fig. 4 is a cross-sectional view according to an embodiment of the present utility model.

Fig. 5 is a schematic diagram of the structure at a in fig. 4.

The main reference numerals illustrate:

the device comprises a fixed frame, a 2-conveyor belt, a 3-graphite boat body, a 4-flap, a 5-sliding plate, a 6-sliding groove, a 7-sliding block, an 8-limiting sleeve, a 9-first rotating rod, a 10-second rotating rod, a 11-sheath, a 12-movable part and a 13-third rotating rod.

Detailed Description

The following detailed description of embodiments of the utility model is, therefore, to be taken in conjunction with the accompanying drawings, and it is to be understood that the scope of the utility model is not limited to the specific embodiments.

Throughout the specification and claims, unless explicitly stated otherwise, the term "comprise" or variations thereof such as "comprises" or "comprising", etc. will be understood to include the stated element or component without excluding other elements or components.

As shown in fig. 1 to 5, a beating mechanism for a graphite boat according to an embodiment of the present utility model includes a fixed frame 1, a graphite boat body 3 provided in the fixed frame 1, and a conveyor belt 2 provided below the graphite boat body 3.

The conveyer belt 2 is the conveying structure commonly used in the prior art, can drive graphite boat main part 3 through conveyer belt 2 and remove, and then carries graphite boat main part 3 to next process department of processing.

The flapping mechanism further comprises a pair of flappers 4 and a first rotating rod 9, wherein the flappers 4 correspond to the graphite boat main body 3, the pair of flappers 4 are located above the graphite boat main body 3, and the pair of flappers 4 are fixedly connected to the first rotating rod 9. The flapping sheet 4 can be rotated through the first rotating rod 9, so that the flapping sheet 4 flaps the graphite boat main body 3, and further, silicon wafers in the graphite boat main body 3 fall into the clamping groove.

Further, the flap 4 includes an inner liner and a buffer layer, which is wrapped around the outside of the inner liner. The lining plate can be a soft plastic plate, the buffer layer is made of sponge materials and used for damping and protecting the graphite boat main body 3, the beating sheets 4 are wrapped by microfiber leather, and the surface is polished, so that the durability is strong.

The number of the flapping sheets 4 can be multiple, and the number of the flapping sheets 4 is two, so that repeated flapping of the graphite boat main body 3 can be realized through the multiple flapping sheets 4, and the flapping effect is enhanced.

The fixed frame 1 is provided with a moving mechanism, a first rotating rod 9 is arranged on the moving mechanism, and one end of the first rotating rod 9 far away from the flapping sheet 4 is fixedly connected with a rotating handle

The position of the first rotating rod 9 can be adjusted through the moving mechanism so as to adjust the position of the flapping sheet 4, so that the flapping sheet 4 can flap the graphite boat main body 3 in all directions.

Specifically, the moving mechanism comprises a sliding plate 5 fixedly connected to the fixed frame 1, a sliding groove 6 is formed in the sliding plate 5, a sliding block 7 is connected in the sliding groove 6 in a sliding mode, and a limit sleeve 8 matched with the first rotating rod 9 is fixedly connected to the sliding block 7.

Further, the length of the limit sleeve 8 is greater than 10 cm, and the maximum gap between the limit sleeve 8 and the first rotating rod 9 is less than 1 mm. It is ensured that the first rotation lever 9 does not shift, i.e., the first rotation lever 9 does not shake up and down.

The limiting sleeve 8 can limit the first rotating rod 9, and the first rotating rod 9 can move back and forth in the limiting sleeve 8. The slide block 7 can move left and right in the slide groove 6, and then the limit sleeve 8 is driven to move left and right along the slide plate 5, namely, the shooting sheet 4 can be made to realize multidirectional shooting of the graphite boat main body 3.

Further, the turning handle includes a second turning lever 10 and a third turning lever 13. The second rotating rod 10 is vertical to the first rotating rod 9 downwards, and a third rotating rod 13 is fixedly connected to the second rotating rod 10. The third rotating lever 13 is horizontally perpendicular to the second rotating lever 10. I.e. by means of the second turning lever 10 and the third turning lever 13, turning of the first turning lever 9 and adjustment of the position of the first turning lever 9 is facilitated.

The third rotating rod 13 is fixedly connected with a sheath 11. The third rotating lever 13 can be rotated by a worker through the sheath 11. Meanwhile, when the flapping sheet 4 is not used, the flapping sheet 4 can be positioned in a horizontal position relative to the graphite boat body 3 through the third rotating rod 13 and the sheath 11, namely, when the flapping sheet 4 is not used, the normal movement of the graphite boat body 3 is not hindered.

Further, the fixed frame 1 is provided with a movable portion 12. The movable part 12 can enable the flapping sheet 4 to have enough movable space, so that the flapping sheet 4 can normally flap the graphite boat main body 3.

When in use, referring to fig. 1-5, when the conveyor belt 2 drives the graphite boat main body 3 to move, the first rotating rod 9 rotates, and the first rotating rod 9 drives the flapping sheet 4 to rotate, so that the flapping sheet 4 contacts with the upper end of the graphite boat main body 3 when rotating, and further the flapping of the graphite boat main body 3 is realized. The position of the first rotating rod 9 can be adjusted through the moving mechanism, and then the position of the flapping sheet 4 is adjusted, so that the flapping sheet 4 can flap the graphite boat main body 3 in all directions. When not in use, under the action of the gravity of the sheath 11, the second rotating rod 10 and the third rotating rod 13, the first rotating rod 9 can be supported, so that the first rotating rod 9 can not rotate in the limit sleeve 8, and further the flapping sheet 4 is positioned at a position which does not interfere with the movement of the graphite boat main body 3.

Compared with the prior art, the beating mechanism for the graphite boat can comprehensively beat the graphite boat, so that silicon chips fall into the clamping grooves, the labor intensity of operators is reduced, and the structure is simple and the operation is convenient.

The foregoing descriptions of specific exemplary embodiments of the present utility model are presented for purposes of illustration and description. It is not intended to limit the utility model to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain the specific principles of the utility model and its practical application to thereby enable one skilled in the art to make and utilize the utility model in various exemplary embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the utility model be defined by the claims and their equivalents.

Claims (8)

1. A beat mechanism for graphite boat, graphite boat includes the graphite boat main part, including fixed frame, the graphite boat main part sets up in fixed frame, the below of graphite boat main part is provided with the conveyer belt, its characterized in that, beat mechanism still includes first dwang and a pair of piece of beating that corresponds with the graphite boat main part, a pair of piece fixed connection is on first dwang, be provided with moving mechanism on the fixed frame, first dwang is installed on moving mechanism, the one end fixedly connected with rotation handle of piece is kept away from to first dwang.

2. A flapping mechanism for a graphite boat according to claim 1, wherein the flapping sheet includes an inner liner and a buffer layer wrapped around the outside of the inner liner.

3. The patting mechanism for a graphite boat of claim 2, wherein the moving mechanism comprises a sliding plate fixedly connected to the fixed frame, a sliding groove is formed in the sliding plate, a sliding block is slidably connected in the sliding groove, and a limit sleeve matched with the first rotating rod is fixedly connected to the sliding block.

4. A flapping mechanism for a graphite boat according to claim 3 wherein the length of the limit sleeve is greater than 10 cm and the maximum clearance between the limit sleeve and the first rotatable shaft is less than 1 mm.

5. The patting mechanism for a graphite boat of claim 1, wherein the turning handle includes a second turning bar and a third turning bar.

6. The patting mechanism for a graphite boat of claim 5, wherein the second rotatable lever is perpendicular to the third rotatable lever.

7. The patting mechanism for a graphite boat of claim 5, wherein a sheath is fixedly attached to the third rotatable shaft.

8. The patting mechanism for a graphite boat of claim 1, wherein the stationary frame is provided with a movable portion.