CN220288344U - Polysilicon hydrogen chloride tail gas stepped energy-saving recovery system - Google Patents
Polysilicon hydrogen chloride tail gas stepped energy-saving recovery system Download PDFInfo
- Publication number
- CN220288344U CN220288344U CN202321474616.3U CN202321474616U CN220288344U CN 220288344 U CN220288344 U CN 220288344U CN 202321474616 U CN202321474616 U CN 202321474616U CN 220288344 U CN220288344 U CN 220288344U
- Authority
- CN
- China
- Prior art keywords
- hydrogen chloride
- gas
- cooler
- recovery system
- tail gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910000041 hydrogen chloride Inorganic materials 0.000 title claims abstract description 63
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 title claims abstract description 63
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 title claims abstract description 62
- 239000007789 gas Substances 0.000 title claims abstract description 55
- 238000011084 recovery Methods 0.000 title claims abstract description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 19
- 229920005591 polysilicon Polymers 0.000 title claims description 12
- 238000000926 separation method Methods 0.000 claims abstract description 23
- XUGSDIOYQBRKGF-UHFFFAOYSA-N silicon;hydrochloride Chemical compound [Si].Cl XUGSDIOYQBRKGF-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000007788 liquid Substances 0.000 claims description 22
- 238000010992 reflux Methods 0.000 claims description 20
- 238000005265 energy consumption Methods 0.000 abstract description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 5
- 239000001257 hydrogen Substances 0.000 abstract description 4
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000009833 condensation Methods 0.000 abstract description 2
- 230000005494 condensation Effects 0.000 abstract description 2
- 239000005046 Chlorosilane Substances 0.000 description 9
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 9
- 238000001816 cooling Methods 0.000 description 8
- 239000003507 refrigerant Substances 0.000 description 7
- 239000012071 phase Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000007792 gaseous phase Substances 0.000 description 2
- 238000005984 hydrogenation reaction Methods 0.000 description 2
- AMXOYNBUYSYVKV-UHFFFAOYSA-M lithium bromide Chemical compound [Li+].[Br-] AMXOYNBUYSYVKV-UHFFFAOYSA-M 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 238000011143 downstream manufacturing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Separation By Low-Temperature Treatments (AREA)
- Silicon Compounds (AREA)
Abstract
The utility model discloses a stepped energy-saving recovery system for polycrystalline silicon hydrogen chloride tail gas, belongs to the field of polycrystalline silicon tail gas recovery, and provides a hydrogen chloride energy-saving recovery system capable of reducing energy consumption. The tower top gas of the chloridizing hydrogen analysis tower is subjected to four-stage condensation and separation through a first-stage heat exchanger, a second-stage cooler, a third-stage cooler and a fourth-stage cooler, so that the purity of the recovered chloridizing hydrogen gas is improved, and the energy consumption is reduced. The utility model has the advantages of high purity of hydrogen chloride gas, high recovery rate, low energy consumption, low production cost and the like.
Description
Technical Field
The utility model belongs to the technical field of tail gas recovery treatment, and relates to an energy-saving recovery system for polycrystalline silicon tail gas hydrogen chloride.
Background
The existing polysilicon reduction tail gas separation system is used for recovering hydrogen chloride, wherein the main components of the reduction tail gas of the chlorosilane are hydrogen and hydrogen chloride gas, the hydrogen chloride in the gas is absorbed by the chlorosilane liquid in an absorption tower, noncondensable gas (mainly hydrogen) is sent to a reduction and cold hydrogenation unit after being absorbed, and the chlorosilane liquid which absorbs the hydrogen chloride in the absorption tower is resolved into the hydrogen chloride gas in a resolution tower. In the prior art, the high-temperature resolved hydrogen chloride gas is subjected to three-stage cooling through a Freon heat exchanger, the temperature difference between the high-temperature hydrogen chloride and a refrigerant is large, the heat exchange efficiency is low, the heat of the high-temperature hydrogen chloride is difficult to effectively utilize, the Freon cooling capacity is large, the heat exchange area of the heat exchanger is required to be large, the occupied space of the heat exchanger is large, the service life of the heat exchanger is shortened due to the large temperature difference between the high-temperature hydrogen chloride gas and the refrigerant, and the defects of high energy consumption, low chlorosilane separation effect and high production cost are overcome.
Disclosure of Invention
The utility model aims to solve the problems in the prior art, provides a polysilicon hydrogen chloride tail gas stepped energy-saving recovery system, and solves the problems of low heat exchange efficiency, high refrigerant consumption, high energy consumption, short service life of a heat exchanger and the like of hydrogen chloride gas analyzed by an analysis tower in the prior art due to large temperature difference during cooling treatment.
The utility model provides a polycrystalline silicon hydrogen chloride tail gas step energy-saving recovery system, this system includes hydrogen chloride analysis tower and reflux drum, the top of hydrogen chloride analysis tower link to each other with the reflux drum through a cooler at least, the output of reflux drum link to each other with the upper portion of hydrogen chloride analysis tower.
The technical scheme of the utility model is as follows: the system comprises a hydrogen chloride analysis tower, a gas-liquid separation tank and a reflux tank, wherein the top of the hydrogen chloride analysis tower is connected with the reflux tank through a primary cooler, a secondary cooler, a tertiary cooler and a quaternary cooler in sequence.
The technical scheme of the utility model is as follows: the four-stage cooler is also provided with an output end connected with the gas-liquid separation tank.
The technical scheme of the utility model is as follows: the output end of the top of the gas-liquid separation tank is connected with the primary cooler.
The technical scheme of the utility model is as follows: the output end of the bottom of the gas-liquid separation tank is connected with the reflux tank.
In some embodiments: the utility model provides a polycrystalline silicon hydrogen chloride tail gas cascade energy-saving recovery system includes the hydrogen chloride analytic tower, after the chlorosilane solution that has absorbed the hydrogen chloride is analyzed through the hydrogen chloride analytic tower, high temperature hydrogen chloride gas separates out from the top of the tower, pass through first order heat exchanger and four-stage cooler back hydrogen chloride gas and exchange heat, then get into second grade heat exchanger and chilled water and exchange heat, the processing temperature after the hydrogen chloride gas that analyzes has reduced through the chilled water cooling, thereby effectively reduced the temperature difference with the refrigerant in tertiary, four-stage heat exchanger, can effectively improve the efficiency of heat exchange, reduce the consumption of freon, reduce the load of freon heat exchanger, the life of freon heat exchanger is prolonged, the hydrogen chloride gas that simultaneously analyzes is cooled to four-stage through first order heat exchanger, the hydrogen chloride gas after the preheating is sent to cold hydrogenation unit recycle, the consumption of cold volume reduces the production energy consumption, the cost is saved.
The utility model provides a polysilicon hydrogen chloride tail gas stepped energy-saving recovery system, wherein a primary cooler is cooled by hydrogen chloride gas discharged from a gas-liquid separation tank of a four-stage heat exchanger, a secondary heat exchanger is cooled by chilled water, a tertiary heat exchanger is cooled by freon at-25 ℃, and a four-stage heat exchanger is cooled by freon at-45 ℃.
Drawings
FIG. 1 is a schematic diagram of a polysilicon hydrogen chloride tail gas cascade energy-saving recovery system;
the drawings are noted as follows:
the device comprises a 1-hydrogen chloride analysis tower, a 2-primary cooler, a 3-secondary cooler, a 4-tertiary cooler, a 5-quaternary cooler, a 6-gas-liquid separation tank, a 7-reflux tank and an 8-reflux pump.
Detailed Description
The utility model is further illustrated by the following examples, but the scope of the utility model is not limited thereto:
as shown in figure 1, the polysilicon hydrogen chloride tail gas stepped energy-saving recovery system comprises a hydrogen chloride analysis tower 1, a gas-liquid separation tank 6 and a reflux tank 7, wherein the top of the hydrogen chloride analysis tower 1 is connected with the reflux tank 7 through a primary cooler 2, a secondary cooler 3, a tertiary cooler 4 and a quaternary cooler 5 in sequence, and the output end of the reflux tank 7 is connected with the upper part of the hydrogen chloride analysis tower 1. The four-stage cooler 5 is also connected with an output end to a gas-liquid separation tank 6. The output end of the top of the gas-liquid separation tank 6 is connected with the primary cooler 2.
The more specific working process is as follows:
the utility model provides a polycrystalline silicon hydrogen chloride tail gas cascade energy-saving recovery system schematic diagram, includes hydrogen chloride analytic tower 1, hydrogen chloride gas that hydrogen chloride analytic tower 1 was analyzed separates out from the top of the tower, links to each other with first level heat exchanger 2 heat medium entry, first level cooler 2 heat medium export links to each other with second level cooler 3 heat medium entry, second level cooler 3 heat medium export links to each other with tertiary cooler 4 heat medium entry, tertiary cooler 4 heat medium export links to each other with quaternary cooler 5 heat medium entry, quaternary cooler 5 gaseous phase export links to each other with gas-liquid separation jar 6, and gas-liquid separation jar 6 gaseous phase export links to each other with first level heat exchanger 2 cold medium entry, tertiary cooler 4, quaternary cooler 5, gas-liquid separation jar 6 liquid phase export links to each other with reflux drum 7 entry. The chlorosilane condensate after the hydrogen chloride gas is separated from the top gas of the hydrogen chloride analysis tower 1 is collected in a reflux tank 7 and is sent to the hydrogen chloride analysis tower 1 for secondary absorption and analysis through a reflux pump 8.
The hydrogen chloride gas analyzed by the hydrogen chloride analysis tower 1 is recycled in the first-stage heat exchanger 2 for the cooling capacity of the gas-phase materials after four-stage cooling, and the separated hydrogen chloride gas is heated to 25 ℃ so that the hydrogen chloride gas can be directly used after being sent to a subsequent working section.
The secondary cooler 3 cools the tower top gas through 7 ℃ chilled water, so that chlorosilane gas in the tower top gas is liquefied into chlorosilane liquid, and the gas which is not liquefied is introduced into the secondary cooler 3 for continuous cooling; preferably, in the production of polysilicon, the chilled water can be prepared by using waste heat in a large amount of waste water generated by the lithium bromide consumption reduction unit, so that the aim of heat energy recycling is fulfilled, and the consumption of a refrigerant is reduced.
Wherein, the three-stage cooler 4 adopts freon at the temperature of minus 25 ℃, and the four-stage cooler 5 adopts freon at the temperature of minus 45 ℃ to condense the uncondensed gas phase; the four-stage condensation is used for condensing and separating silicon tetrachloride, trichlorosilane, dichlorosilane, hydrogen chloride and hydrogen in the top gas of the hydrogen chloride analysis tower 1 into a liquid phase and a gas phase, the gas phase is sent to a downstream process, and the liquid phase is sent to the hydrogen chloride analysis tower 1 for continuous absorption and separation.
The technical scheme is characterized in that the gas-liquid separation tank 6 is added behind the four-stage cooler 5, and liquid phase cooled by the four-stage cooler 5 is collected for secondary gas-liquid separation, so that the technical effect of improving heat exchange efficiency is achieved, and the energy consumption of a refrigerant can be reduced, so that the technical effect of reducing consumption is achieved.
Working principle: the tower top gas of the hydrogen chloride analysis tower 1 sequentially passes through a first-stage heat exchanger, a second-stage cooler, a third-stage cooler and a fourth-stage cooler, the uncondensed gas phase after cooling is used as a cooling medium of the first-stage heat exchanger 2, the gas phase is directly discharged after heat exchange, and the condensate is sent to the hydrogen chloride analysis tower 1 after being collected for continuous absorption and analysis. According to the utility model, a secondary cooler is added, the tower top gas is cooled by 7 ℃ chilled water, so that the consumption of refrigerant is reduced, and the energy consumption is reduced; meanwhile, a gas-liquid separation tank is newly added, so that chlorosilane in hydrogen chloride gas is separated, the hydrogen chloride gas is recycled more thoroughly, the heat exchange efficiency is improved, the energy consumption is reduced, and the effects of energy reduction and consumption reduction are achieved.
Claims (5)
1. The utility model provides a polycrystalline silicon hydrogen chloride tail gas cascade energy-saving recovery system which characterized in that: the system comprises a hydrogen chloride analysis tower (1) and a reflux tank (7), wherein the top of the hydrogen chloride analysis tower (1) is connected with the reflux tank (7) at least through a cooler, and the output end of the reflux tank (7) is connected with the upper part of the hydrogen chloride analysis tower (1).
2. The polysilicon hydrogen chloride tail gas stepped energy-saving recovery system according to claim 1, wherein: the system comprises a hydrogen chloride analysis tower (1), a gas-liquid separation tank (6) and a reflux tank (7), wherein the top of the hydrogen chloride analysis tower (1) is sequentially connected with the reflux tank (7) through a primary cooler (2), a secondary cooler (3), a tertiary cooler (4) and a quaternary cooler (5).
3. The polysilicon hydrogen chloride tail gas stepped energy-saving recovery system according to claim 2, wherein: the four-stage cooler (5) is also provided with an output end connected with the gas-liquid separation tank (6).
4. The polysilicon hydrogen chloride tail gas stepped energy-saving recovery system according to claim 2, wherein: the output end of the top of the gas-liquid separation tank (6) is connected with the primary cooler (2).
5. The polysilicon hydrogen chloride tail gas stepped energy-saving recovery system according to claim 2, wherein: the output end of the bottom of the gas-liquid separation tank (6) is connected with the reflux tank (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321474616.3U CN220288344U (en) | 2023-06-09 | 2023-06-09 | Polysilicon hydrogen chloride tail gas stepped energy-saving recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321474616.3U CN220288344U (en) | 2023-06-09 | 2023-06-09 | Polysilicon hydrogen chloride tail gas stepped energy-saving recovery system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220288344U true CN220288344U (en) | 2024-01-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321474616.3U Active CN220288344U (en) | 2023-06-09 | 2023-06-09 | Polysilicon hydrogen chloride tail gas stepped energy-saving recovery system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220288344U (en) |
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2023
- 2023-06-09 CN CN202321474616.3U patent/CN220288344U/en active Active
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