CN220271588U - Total dielectric reflection film and laser radar rotating mirror comprising same - Google Patents
Total dielectric reflection film and laser radar rotating mirror comprising same Download PDFInfo
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- CN220271588U CN220271588U CN202322034339.0U CN202322034339U CN220271588U CN 220271588 U CN220271588 U CN 220271588U CN 202322034339 U CN202322034339 U CN 202322034339U CN 220271588 U CN220271588 U CN 220271588U
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- 238000002310 reflectometry Methods 0.000 claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 32
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 32
- 239000010936 titanium Substances 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 230000008033 biological extinction Effects 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052746 lanthanum Inorganic materials 0.000 claims description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 238000012360 testing method Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 description 14
- 239000000758 substrate Substances 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000007888 film coating Substances 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012459 cleaning agent Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model aims to provide a total-medium reflecting film and a laser radar rotating mirror comprising the same, wherein the film system structure of the total-medium reflecting film is (xH/yL) z The reflective film is obtained by repeatedly overlapping the high refractive index film layer H and the low refractive index film layer L, wherein the thickness of each layer is independently 100-350 nm, and repeatedly overlapping 10-20 layers, and the total dielectric reflective film can be used for reflecting light with the wave band of 1500-1600 nm when the incident angle is 15-75 DEGThe light keeps the reflectivity more than or equal to 97%, is very suitable for being used as the reflecting film on the 1550nm laser radar transfer mirror, and can meet the reliability test requirement of the laser radar. Compared with the metal reflecting film in the prior art, the all-dielectric film system structure provided by the utility model has better optical performance and better reliability result.
Description
Technical Field
The utility model belongs to the technical field of optics, and relates to a total medium reflection film and a laser radar rotating mirror containing the total medium reflection film.
Background
Laser radars (english name: laser Radar) are Radar systems for measuring distance, speed, etc. with Laser beams, and are increasingly used in the scientific fields of unmanned aerial vehicles, automatic driving, mobile robots, etc. Currently, there are two general operating wavelengths for laser radars in the market, namely, 905nm type laser radars in the band range of 1000nm or less and 1550nm type laser radars in the range of 1000 to 2000 nm.
Compared with 905nm type laser radar, 1550nm type laser radar has small divergence angle of light beam and longer detection distance. In this respect, 1550nm type has better detection advantage than 905nm type, and has higher safety threshold to human eyes and better safety.
In lidar, two technical routes, namely turning mirror type and MEMS, are commonly used.
The turning mirror scheme is to set laser emitting and receiving device on one side of radar and to separate the two devices physically. The laser emission direction is a polygon reflecting mirror (turning mirror) capable of rotating around the center, and the scanning of the laser is realized by rotating the reflecting mirror through a motor, so that the laser radar disclosed in CN218412906U has the advantages of being fixed in device, small in product size, low in cost, easy to pass a vehicle gauge and the like.
The MEMS solution replaces the traditional mechanical rotating device with a micro-vibrating mirror vibrating at high speed, so that the number of lasers and detectors can be reduced (only one group is required for the minimum number of laser transmitters and receivers), and the cost and the volume are greatly reduced, for example, the laser radar system disclosed in CN113640773 a.
However, the MEMS scanning mirror itself is fixed and controlled by a very small cantilever beam, and vibration and shock in a vehicle environment can affect the lifetime of the micro-mirror. Meanwhile, in order to increase the detection distance of the MEMS, the mirror surface size needs to be increased, and the cost of the MEMS galvanometer is also increased. Therefore, it can be seen that the turning mirror scheme has lower power consumption and better heat resistance and durability, which is a difficult advantage for the MEMS scanning scheme. Currently, the industry still uses a rotating mirror type scheme as a mainstream scheme with large capacity and large application volume.
In the turning mirror solution, the laser light is redirected by the turning mirror, so that the reflection capability of the turning mirror at different reflection angles will affect the implementation of the turning mirror method. At present, a film coating on a 1550nm laser radar rotating mirror does not have an effective mode, and because the radar rotating mirror is often made of a metal material unlike a substrate of a conventional reflecting film, a scheme for realizing a full-dielectric reflecting film with a large reflecting angle and high reflectivity on the substrate material is not available, so that the 1550nm laser radar can reliably operate.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model aims to provide a total dielectric reflection film and a laser radar rotating mirror comprising the same, wherein the film system structure of the total dielectric reflection film is (xH/yL) z The total medium reflection film is obtained by controlling the repeated overlapping of the high refractive index film layer H and the low refractive index film layer L, wherein the thickness of each layer is independently 100-350 nm, and 10-20 layers are repeatedly overlapped, and the total medium reflection film can keep the reflectivity of more than or equal to 97% for light in a wave band of 1500-1600 nm when the incident angle is 15-75 degrees, is very suitable for being used as the total medium reflection film on a rotating mirror of 1550nm laser radar, and can meet the reliability test requirement of the laser radar. Compared with the pure metal film layer in the prior art, the all-dielectric film system structure is simpler and more controllable in manufacture, lower in cost and beneficial to large-scale production and application.
To achieve the purpose, the utility model adopts the following technical scheme:
in a first aspect, the present utility model provides a total dielectric reflective film having a film system structure denoted (xH/yL) z Wherein H represents a high refractive index film layer, L represents a low refractive index film layer superimposed on H, x represents an optical thickness coefficient of H, y represents an optical thickness coefficient of L, z represents the number of times of repeated superimposition of (xH/yL) and z is between 5 and 10An integer; the thickness of each layer H and each layer L is independently 100-350 nm; when the incident angle is 15-75 degrees, the reflectivity of the total dielectric reflection film is more than or equal to 97% at 1500-1600 nm.
The utility model provides a total medium reflection film which can be used for 1550nm laser radar rotating mirrors, the total medium reflection film is formed by repeatedly overlapping a high refractive index film layer H and a low refractive index film layer L which are suitable for a specific refractive index range, and the total medium reflection film with the reflectivity of more than or equal to 97% at 1500-1600 nm can be obtained by controlling the thickness of each film layer to be 100-350 nm and the total layer number to be 10-20 layers when the incident angle is 15-75 degrees, and the total medium reflection film can be applied to effectively ensure the test reliability of the laser radar.
The following technical scheme is a preferred technical scheme of the utility model, but is not a limitation of the technical scheme provided by the utility model, and the technical purpose and beneficial effects of the utility model can be better achieved and realized through the following technical scheme.
The z represents the number of repeated superposition times (xH/yL) and is an integer between 5 and 10, for example, 5, 6, 7, 8, 9 and 10, and correspondingly, the total number of the film layers of the obtained total-medium reflection film is 10, 12, 14, 16, 18 or 20.
As a preferable technical scheme of the utility model, the film system structure is 1.31H/1.32L/1.31H/1.32L/1.31H/1.33L/1.38H/0.53L/0.56H/1.37L/1.32H/1.0L.
As a preferable technical scheme of the utility model, the refractive index of the high refractive index film layer at 550nm is 1.8-2.5, such as 1.8, 1.85, 1.9, 1.95, 2, 2.05, 2.1, 2.15, 2.2, 2.25, 2.3, 2.35, 2.4, 2.45 or 2.5, and the extinction coefficient is less than 5×10 -4 For example 4.5 x 10 -4 、4*10 -4 、3.5*10 -4 、3*10 -4 、2.5*10 -4 、2*10 -4 、1.5*10 -4 Or 1 x 10 -4 And the like, but are not limited to the recited values, and other non-recited values within the above-recited ranges are equally applicable.
As a preferred technical scheme of the utility model, the followingThe high refractive index film layer comprises Ti 3 O 5 Layer, ta 2 O 5 Layer of Nb 2 O 5 Layer, lanthanum titanate layer, hfO 2 Layer, zrO 2 Layer or titanium doped ZrO 2 Any one of the layers.
As a preferable technical scheme of the utility model, the refractive index of the low refractive index film layer at 550nm is 1.38-1.7, such as 1.38, 1.4, 1.45, 1.5, 1.55, 1.6, 1.65 or 1.7, and the extinction coefficient is less than 5 x 10 -4 For example 4.5 x 10 -4 、4*10 -4 、3.5*10 -4 、3*10 -4 、2.5*10 -4 、2*10 -4 、1.5*10 -4 Or 1 x 10 -4 And the like, but are not limited to the recited values, and other non-recited values within the above-recited ranges are equally applicable.
As a preferable technical scheme of the utility model, the low refractive index film layer comprises Al 2 O 3 Layer of SiO 2 Layers, silicon-aluminum mixture layers or MgF 2 Any one of the layers.
It should be noted that, in the same total-medium reflective film, the high refractive index film layers may be the same material, or may be different materials, and the low refractive index film layers may be the same material, or may be different materials, and those skilled in the art should select and adjust the materials according to actual needs, so as to achieve the effect that when the incident angle is 15-75 ° on the basis of the (xH/yL) z film system structure, the reflectivity of the total-medium reflective film is more than or equal to 97% at 1500-1600 nm.
In a second aspect, the present utility model provides a lidar turning mirror, in which the total-dielectric reflective film according to the first aspect is provided.
According to the preferred technical scheme, the rotary mirror is an aluminum rotary mirror, and the total dielectric reflection film is arranged on the aluminum-based surface of the aluminum rotary mirror.
As a preferable technical scheme of the utility model, an extra low refractive index film layer material is arranged between the aluminum-based surface of the aluminum rotary mirror and the total dielectric reflection film to serve as a Buffer layer.
As a preferable technical scheme of the utility model, the film system structure of the total dielectric reflection film on the aluminum-based surface of the aluminum rotating mirror is 1.25L/1.31H/1.32L/1.31H/1.32L/1.31H/1.33L/1.38H/0.53L/0.56H/1.37L/1.32H/1.0L.
Because the laser radar rotating mirror usually adopts an aluminum rotating mirror, which is different from the common substrate material of the reflecting film in the prior art, a layer of low refractive index material is preferably arranged between the aluminum-based surface and the total dielectric reflecting film as a buffer layer, the buffer layer is incorporated into the complete film system structure of the total dielectric reflecting film, and the effect that the reflectivity of 1500-1600 nm is more than or equal to 97% can be still maintained when the incidence angle is 15-75 degrees by adding the buffer layer.
In addition, the present utility model also provides an exemplary manufacturing method for ensuring successful production of a high performance total dielectric reflection film on an aluminum substrate, the manufacturing method comprising the steps of:
(1) Pretreatment is carried out on the aluminum rotating mirror: soaking the aluminum rotary mirror in a volatile cleaning agent, and cleaning the aluminum-based surface (substrate surface) of the aluminum rotary mirror for 15-25 s by using a high-frequency ultrasonic cleaner to remove metal scraps in a processing stage and turning cleaning liquid attached in the processing; after cleaning, drying the substrate surface by hot air; after the appearance inspection is qualified under strong light, transferring the product into a film plating machine;
(2) When the vacuum degree in the film plating machine is less than or equal to 5.0E -3 Pre-melting raw materials of the high refractive index film layer in Pa; the Step current adding mode is used for pre-melting, so that the film coating material can be fully melted, and Step current reduction is carried out after the pre-melting is completed, so that the filament of the electron gun is protected from fusing due to current rapid change;
(3) When the vacuum degree of the film plating machine is less than or equal to 2.0E -3 And when Pa, starting a coating program, entering a pre-cleaning stage of an ion source, filling argon into the ion source, and not filling oxygen to avoid the reaction between oxygen and a substrate surface (aluminum-based surface), entering a coating stage after 50-70 s, and coating according to a set film system structure.
(4) And after the film coating is finished, keeping vacuum cooling for 800-1600 s, and taking out the product after the equipment is deflated.
In a third aspect, the present utility model provides a lidar system device, which comprises the lidar rotating mirror according to the second aspect.
Compared with the prior art, the utility model has the beneficial effects that:
the utility model controls the high refractive index film layer H and the low refractive index film layer L to overlap repeatedly, and the thickness of each layer is independently 100-350 nm, and 10-20 layers are overlapped repeatedly, thus obtaining the total medium reflection film. The total medium reflection film can keep the reflectivity of more than or equal to 97% for light in 1500-1600 nm wave band when the incident angle is 15-75 degrees, is very suitable for being used as the total medium reflection film on the rotating mirror of 1550nm laser radar, and can meet the reliability test requirement of the laser radar. And compared with the pure metal film layer in the prior art, the all-dielectric film structure has better optical performance and better reliability, and can be produced and applied in large scale.
Drawings
FIG. 1 is a schematic view of a total dielectric reflection film provided on an aluminum turning mirror in example 1;
in the figure, 1-substrate, 2-buffer layer, 3-high refractive index film layer, 4-low refractive index film layer;
FIG. 2 is a reflectance design diagram of a total dielectric reflection film provided on an aluminum turning mirror in example 1 at an incident angle of 15 DEG to 75 DEG;
fig. 3 to 7 are graphs showing actual reflectivities of the total dielectric reflection film provided on the aluminum turning mirror in example 1 at incidence angles of 15 °, 30 °, 45 °,60 ° and 75 °, respectively.
Detailed Description
In order to make the technical solution, objects and advantages of the present utility model more apparent, the present utility model will be described in further detail by means of specific examples of embodiments with reference to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the utility model, are not intended to limit the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. For the electrical and communication fields, either a wired connection or a wireless connection is possible. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The technical scheme of the utility model is further described by the following specific embodiments.
Example 1
The embodiment provides a total dielectric reflection film of a rotating mirror of a laser radar and a manufacturing method thereof, as shown in fig. 1, the total dielectric reflection film is arranged on an aluminum-based surface 1 of the rotating mirror of the radar of 1550nm type laser radar, the total dielectric reflection film comprises a buffer layer 2 arranged in direct contact with the aluminum-based surface 1, and further comprises (xH/yL) arranged on the buffer layer 2 z The film system, H represents the high refractive index film layer 3, L represents the low refractive index film layer 4 superimposed over H, x represents the optical thickness coefficient of H, y represents the optical thickness coefficient of L, z represents the number of repeated superimposed times (xH/yL) and z=6; the material of the buffer layer 2 is the same as that of the low refractive index film layer 3; the values of x and y, the film thickness and the film material are shown in Table 1;
TABLE 1
| Number of film layers | Optical thickness | Physical thickness (nm) | Film material |
| 1 | 1.25L | 288.91 | Al 2 O 3 |
| 2 | 1.31H | 194.15 | Ti 3 O 5 |
| 3 | 1.32L | 306.55 | SiO 2 |
| 4 | 1.31H | 193.51 | Ti 3 O 5 |
| 5 | 1.32L | 306.55 | SiO 2 |
| 6 | 1.31H | 194.04 | Ti 3 O 5 |
| 7 | 1.33L | 308.21 | SiO 2 |
| 8 | 1.38H | 203.70 | Ti 3 O 5 |
| 9 | 0.53L | 123.59 | SiO 2 |
| 10 | 0.56H | 83.27 | Ti 3 O 5 |
| 11 | 1.37L | 319.38 | SiO 2 |
| 12 | 1.32H | 194.86 | Ti 3 O 5 |
| 13 | 1.0L | 233.35 | SiO 2 |
The total dielectric reflection film according to the present embodiment is obtained by a manufacturing method including the steps of:
(1) Pretreatment is carried out on the aluminum rotating mirror: soaking in volatile cleaning agent, cleaning aluminum surface (substrate surface) of aluminum rotary mirror with high-frequency ultrasonic cleaner for 20s, and removing metal scraps in processing stage and turning cleaning liquid adhered during processing; after cleaning, drying the substrate surface by hot air; after the appearance inspection is qualified under strong light, transferring the product into a film plating machine;
(2) Vacuum degree in coating machine 5.0E -3 Pre-melting raw materials of the high refractive index film layer in Pa; the Step current adding mode is used for pre-melting, so that the film coating material can be fully melted, and Step current reduction is carried out after the pre-melting is completed, so that the filament of the electron gun is protected from fusing due to current rapid change;
(3) When the vacuum degree of the film plating machine is 2.0E -3 And when Pa, starting a coating program, entering a pre-cleaning stage of an ion source, filling argon into the ion source, and not filling oxygen to avoid the reaction between oxygen and a substrate surface (aluminum-based surface), entering a coating stage after 60s, and coating according to a set film system structure.
(4) And after the film coating is finished, keeping vacuum cooling for 1200s, and taking out the product after the equipment is deflated.
FIG. 2 is a reflectance design diagram of the total dielectric reflection film of the present embodiment on an aluminum turning mirror at an incident angle of 15 DEG to 75 DEG; from the above figures, it can be seen that the turning mirror can maintain a reflectance of 97% or more for light in the 1500-1600 nm wavelength band at an incidence angle of 15-75 ° for light at 1550nm, wherein the reflectance of 98.5% for light at 1550nm, respectively, and the actual reflectance is plotted for light at incidence angles of 15 °, 30 °, 45 °,60 °, and 75 °, respectively, and the position of 1550nm is marked with a short bar in fig. 3-7.
The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and it should be apparent to those skilled in the art that any changes or substitutions that fall within the technical scope of the present utility model disclosed herein are within the scope of the present utility model.
Claims (10)
1. A total dielectric reflection film characterized in that the film system structure of the total dielectric reflection film is expressed as (xH/yL) z Wherein H represents a high refractive index film layer, L represents a low refractive index film layer superimposed on H, x represents an optical thickness coefficient of H, y represents an optical thickness coefficient of L, z represents the number of times of repeated superimposition of (xH/yL) and z is an integer of 5 to 10; the thickness of each layer H and each layer L is independently 100-350 nm; when the incident angle is 15-75 degrees, the reflectivity of the total dielectric reflection film is more than or equal to 97% at 1500-1600 nm.
2. The total dielectric reflection film of claim 1, wherein said film system structure is 1.31H/1.32L/1.31H/1.33L/1.38H/0.53L/0.56H/1.37L/1.32H/1.0L.
3. The total dielectric reflection film of claim 1 or 2, wherein the high refractive index film layer has a refractive index of 1.8-2.5 at 550nm and an extinction coefficient < 5 x 10 -4 。
4. The lidar turning mirror total dielectric reflection film according to claim 3, wherein the high refractive index film layer comprises Ti 3 O 5 Layer, ta 2 O 5 Layer of Nb 2 O 5 Layer, lanthanum titanate layer, hfO 2 Layer, zrO 2 Layer or titanium doped ZrO 2 Any one of the layers.
5. According to claimThe total dielectric reflection film of claim 1 or 2, wherein the refractive index of the low refractive index film layer at 550nm is 1.38-1.7, and the extinction coefficient is less than 5 x 10 -4 。
6. The lidar turning mirror total dielectric reflection film according to claim 5, wherein the low refractive index film layer comprises Al 2 O 3 Layer of SiO 2 Layers, silicon-aluminum mixture layers or MgF 2 Any one of the layers.
7. A lidar turning mirror, characterized in that a total medium reflection film according to any one of claims 1 to 6 is provided in the lidar turning mirror.
8. The lidar turning mirror according to claim 7, wherein the turning mirror is an aluminum turning mirror, and the total dielectric reflection film is provided on an aluminum-based surface of the aluminum turning mirror.
9. The lidar turning mirror according to claim 8, wherein an additional low refractive index film layer is provided as a buffer layer between the aluminum-based surface of the aluminum turning mirror and the total dielectric reflection film.
10. The lidar turning mirror according to claim 9, wherein the film system structure of the total dielectric reflection film on the aluminum-based surface of the aluminum turning mirror is 1.25L/1.31H/1.32L/1.31H/1.33L/1.38H/0.53L/0.56H/1.37L/1.32H/1.0L.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322034339.0U CN220271588U (en) | 2023-07-31 | 2023-07-31 | Total dielectric reflection film and laser radar rotating mirror comprising same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322034339.0U CN220271588U (en) | 2023-07-31 | 2023-07-31 | Total dielectric reflection film and laser radar rotating mirror comprising same |
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| Publication Number | Publication Date |
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| CN220271588U true CN220271588U (en) | 2023-12-29 |
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| CN202322034339.0U Active CN220271588U (en) | 2023-07-31 | 2023-07-31 | Total dielectric reflection film and laser radar rotating mirror comprising same |
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| Country | Link |
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