CN220271451U - Micro device atmosphere analysis test tool - Google Patents
Micro device atmosphere analysis test tool Download PDFInfo
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- CN220271451U CN220271451U CN202321511020.6U CN202321511020U CN220271451U CN 220271451 U CN220271451 U CN 220271451U CN 202321511020 U CN202321511020 U CN 202321511020U CN 220271451 U CN220271451 U CN 220271451U
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- 238000012360 testing method Methods 0.000 title claims abstract description 82
- 238000004458 analytical method Methods 0.000 title claims abstract description 30
- 238000007789 sealing Methods 0.000 claims abstract description 199
- 230000000670 limiting effect Effects 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
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Abstract
The utility model provides a tiny device atmosphere analysis test tool, which belongs to the technical field of electronic component reliability tests, and comprises the following components: the device comprises a sealing seat, a primary sealing structure and a secondary sealing structure, wherein the upper surface of the sealing seat is provided with a secondary sealing groove, the bottom of the secondary sealing groove is provided with a primary sealing groove, the bottom of the primary sealing groove is provided with a placing groove for placing a test sample, and the bottom of the placing groove is provided with a vent hole communicated with a test vacuum cavity; the first-level sealing structure is packaged on the first-level sealing groove, a first-level sealing cavity is formed by the first-level sealing structure and the first-level sealing groove, and the placing groove is sealed in the first-level sealing cavity; the secondary sealing structure is packaged on the secondary sealing groove, and forms a secondary sealing cavity with the secondary sealing groove, and the primary sealing cavity is sealed in the secondary sealing cavity. According to the tooling provided by the utility model, the two-stage sealing cavity is constructed for the micro device through the two-stage sealing, so that the sealing reliability of the micro device is greatly improved, and the accuracy of the atmosphere analysis test result of the micro device is improved.
Description
Technical Field
The utility model belongs to the technical field of reliability tests of electronic components, and particularly relates to an atmosphere analysis test tool for a micro device.
Background
The residual atmosphere inside the airtight packaging device has great influence on the performance, service life and reliability of the airtight packaging device, and serious consequences such as reduced performance and early failure of the airtight packaging device are easily caused. By researching the internal atmosphere detection technology, not only can the quantitative judgment basis of failure analysis be obtained, but also the important information of the manufacturing process and the materials used for production of the product can be obtained, so that the corresponding relation of the materials, the process, the performance and the analysis result is established, the proposal of the process improvement direction is provided and the optimal process is selected on the premise of meeting the standard, and the technical support is provided for the research and development of components.
The internal atmosphere content test of the airtight packaged device belongs to destructive tests, and is mainly carried out by an internal atmosphere analyzer (for example IVA-210 s), wherein the analyzer consists of a sample puncture sampling system, a mass spectrometry system and data processing software, so that quantitative analysis of various atmospheres in the airtight packaged device is realized. The key point of the test and the core technology of the equipment are that the tested sample shell needs to be effectively punctured under a high vacuum state to collect the content of internal atmosphere, including the selection of a puncture surface, the collection of the atmosphere after puncture and the effective fixation of the sample.
The traditional method for testing the content of the internal atmosphere of the airtight packaged device comprises the following steps: placing the flat surface of the test sample on the objective table, arranging a sealing ring between the test sample and the objective table, pressing the test sample and the sealing ring on the objective table through a fixing structure of the atmosphere analyzer, communicating a cavity enclosed by the sealing ring with a vacuum cavity inside the objective table, and finally puncturing a puncture hole on the flat surface of the test sample by using a puncture needle, sucking gas in the test sample into the vacuum cavity, and sampling and testing by using the atmosphere analyzer connected with the vacuum cavity.
However, when the traditional testing method tests the small-cavity airtight packaged device with the cavity volume smaller than 0.1cc, the small-cavity airtight packaged device is too small in size, the appearance is too irregular and uneven, the sealing ring at the puncture hole cannot be completely plugged to realize sealing, the testing system is poor in sealing and even cannot seal, and the accuracy of the testing result of the content of the packaging atmosphere inside the airtight packaged device is poor, so that the test fails.
Disclosure of Invention
The embodiment of the utility model provides a micro-device atmosphere analysis test tool, which aims to solve the problem of poor precision of micro-device atmosphere test results.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a little device atmosphere analysis test frock, include:
the upper surface of the sealing seat is provided with a second-level sealing groove, the bottom of the second-level sealing groove is provided with a first-level sealing groove, the bottom of the first-level sealing groove is provided with a placing groove for placing a test sample, and the bottom of the placing groove is provided with a vent hole communicated with the test vacuum cavity;
the first-stage sealing structure is packaged on the first-stage sealing groove, a first-stage sealing cavity is formed by the first-stage sealing structure and the first-stage sealing groove, and the placing groove is sealed in the first-stage sealing cavity; and
the secondary sealing structure is packaged on the secondary sealing groove, and forms a secondary sealing cavity with the secondary sealing groove, and the primary sealing cavity is sealed in the secondary sealing cavity.
In an implementation manner, the primary sealing structure comprises a first sealing ring and a first sealing cover plate, the first sealing cover plate compresses the first sealing ring through bolts to form the primary sealing cavity, a limiting boss protruding downwards is arranged on the lower surface of the first sealing cover plate, and the limiting boss is stopped on the placing groove; the first sealing ring is arranged outside the placing groove in a surrounding mode.
In one implementation, the first seal ring is located in the primary seal groove, and the diameter of the first seal ring is greater than the depth of the primary seal groove, so that the first seal ring protrudes outside the primary seal groove.
In one implementation, the first seal groove is circular in shape, the first seal ring is tightly attached to the side wall of the first seal groove, and the diameter of the first seal cover plate is larger than that of the first seal groove.
In one possible way, the bolt does not penetrate the seal seat.
In an implementation manner, the secondary sealing structure comprises a second sealing ring and a second sealing cover plate, the second sealing cover plate compresses the second sealing ring through a fixing structure of the atmosphere analyzer to form the secondary sealing cavity, and the second sealing ring is surrounded outside the primary sealing structure.
In one implementation, the second seal ring is in the secondary seal groove, and the diameter of the second seal ring is smaller than the depth of the secondary seal groove, and the second seal cover plate has a baffle ring extending into the secondary seal groove, and the baffle ring compresses the second seal ring.
In one implementation, the shape of the secondary seal groove is circular, and the second seal ring is tightly attached to the side wall of the secondary seal groove.
In one implementation, the upper surface of the second sealing cover plate is provided with a positioning groove for pressing by matching with a fixing structure of the atmosphere analyzer.
In one implementation, the lower surface of the sealing seat is provided with a shallow groove, the shallow groove is surrounded outside the vent hole, and the shallow groove is concentric with the vent hole.
Compared with the prior art, the micro device atmosphere analysis test tool provided by the utility model has the beneficial effects that: through seal seat, one-level seal structure and secondary seal structure's cooperation, for test sample provides two-stage seal structure, test sample only need place in the standing groove on the seal seat can, one-level seal structure provides one-level seal chamber to test sample to compress tightly test sample in the standing groove, secondary seal structure provides secondary seal chamber for test sample. The small-size device comprises the special-shaped small-size device, the special-shaped small-size device is only required to be placed in the placing groove, the special-shaped small-size device is sealed and pressed through the primary sealing structure, and the primary sealing structure is sealed through the secondary sealing structure, so that a two-stage sealing cavity is constructed for the micro device through two-stage sealing, the sealing of the puncture hole of the micro device is not required, the sealing reliability of the micro device is greatly improved, the difficulty that the micro device is not easy to seal is solved, the accuracy of the atmosphere analysis test result of the micro device can be improved, and the test error is reduced.
Drawings
FIG. 1 is a schematic diagram of an explosion structure of a micro device atmosphere analysis test tool provided by an embodiment of the utility model;
fig. 2 is a schematic perspective view of an atmosphere analysis test tool for a micro device according to an embodiment of the present utility model;
fig. 3 is a schematic diagram of a front view structure of a micro device atmosphere analysis test tool according to an embodiment of the present utility model;
FIG. 4 is a cross-sectional view taken along line A-A of FIG. 3;
FIG. 5 is a schematic perspective view of a seal seat according to an embodiment of the present utility model;
FIG. 6 is a schematic diagram showing a second perspective structure of a seal seat according to an embodiment of the present utility model;
FIG. 7 is a schematic perspective view of a first seal cover plate according to an embodiment of the present utility model;
FIG. 8 is a schematic perspective view of a second seal cover plate according to an embodiment of the present utility model;
FIG. 9 is a schematic diagram showing a second perspective structure of a second sealing cover plate according to an embodiment of the present utility model;
reference numerals illustrate:
1. a second sealing cover plate; 11. a positioning groove; 12. a secondary seal chamber; 13. a baffle ring; 2. a second seal ring; 3. a first sealing cover plate; 31. a limit boss; 32. a primary seal cavity; 4. a first seal ring; 5. a sealing seat; 51. a second-stage seal groove; 52. a first-stage seal groove; 53. a placement groove; 54. a vent hole; 55. an arc-shaped groove; 56. shallow grooves; 6. a bolt; 7. and testing the sample.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
Referring to fig. 1 to 9, an explanation will be made on the micro device atmosphere analysis test tool provided by the present utility model. The micro device atmosphere analysis test tool comprises: the device comprises a sealing seat 5, a primary sealing structure and a secondary sealing structure, wherein the upper surface of the sealing seat 5 is provided with a secondary sealing groove 51, the bottom of the secondary sealing groove 51 is provided with a primary sealing groove 52, the bottom of the primary sealing groove 52 is provided with a placing groove 53 for placing a test sample 7, and the bottom of the placing groove 53 is provided with a vent hole 54 communicated with a test vacuum cavity; the primary sealing structure is packaged on the primary sealing groove 52, and forms a primary sealing cavity 32 together with the primary sealing groove 52, and the placing groove 53 is sealed in the primary sealing cavity 32; the secondary seal structure is encapsulated on the secondary seal groove 51, and forms a secondary seal cavity 12 with the secondary seal groove 51, and the primary seal cavity 32 is enclosed in the secondary seal cavity 12.
The key point of the atmosphere analysis test tool is sealing, and in order to improve the sealing performance of the test tool, the utility model provides a double-sealing design idea, and the design is described by a micro device with the size of 3mm multiplied by 1 mm. The specific implementation and effect are as follows: according to the micro device atmosphere analysis test tool provided by the utility model, the two-stage sealing structure is provided for the test sample 7 through the matching of the sealing seat 5, the primary sealing structure and the secondary sealing structure, the test sample 7 is only required to be placed in the placing groove 53 on the sealing seat 5, the primary sealing structure provides the primary sealing cavity 32 for the test sample 7 and compresses the test sample 7 in the placing groove 53, and the secondary sealing structure provides the secondary sealing cavity 12 for the test sample 7. The small-size device comprises the special-shaped small-size device, the special-shaped small-size device is only required to be placed in the placing groove 53, the special-shaped small-size device is sealed and pressed through the primary sealing structure, and the primary sealing structure is sealed through the secondary sealing structure, so that a two-stage sealing cavity is constructed for the micro device through two-stage sealing, the micro device is not required to be sealed at the puncture hole, the sealing reliability of the micro device is greatly improved, the difficulty that the micro device is not easy to seal is solved, the accuracy of the micro device atmosphere analysis test result can be improved, and the test error is reduced.
During an atmosphere analysis test, a test sample 7 is placed in a placing groove 53 of a sealing seat 5, a primary sealing structure and a secondary sealing structure are assembled in place, the whole tool is placed on a stage of an atmosphere analyzer, the whole tool is pressed on the stage by using a fixing structure of the atmosphere analyzer from the upper side, then the periphery of a corresponding vent hole 54 is vacuumized, and then a puncture steel needle is utilized to pierce a puncture hole in the surface of the test sample 7 upwards through the vent hole 54 for the test.
Preferably, the four corners of the placement groove 53 are respectively provided with an arc groove 55 protruding outwards so as to facilitate the taking out of the test sample 7.
In some embodiments, as shown in fig. 4, the primary sealing structure comprises a first sealing ring 4 and a first sealing cover plate 3, the first sealing cover plate 3 compresses the first sealing ring 4 through a bolt 6 to form a primary sealing cavity 32, a limiting boss 31 protruding downwards is arranged on the lower surface of the first sealing cover plate 3, and the limiting boss 31 is stopped on a placing groove 53; the first seal ring 4 is enclosed outside the placement groove 53. Fig. 4 is a schematic view showing an uncompacted state, in which the first seal ring 4 and the second seal ring 2 are flattened after being compressed by the fixing structure and the bolt 6, and the limit boss 31 is supported on the placement groove 53.
The first sealing cover plate 3 presses the first sealing ring 4 to deform by fastening the bolts 6 to provide tightness. The test sample 7 is preliminarily fixed and preliminarily sealed by the primary sealing structure.
It should be noted that, in order to avoid the limit boss 31 from crushing and crushing the test sample 7, in this embodiment, the external dimension of the limit boss 31 is greater than the external dimension of the placing groove 53 (as shown in fig. 4, the arrow is in the direction of pressing down the sealing ring and the direction of pressing the limit boss 31 onto the placing groove 53), meanwhile, the depth of the placing groove 53 is flush with the thickness of the tiny test sample 7, or after the test sample 7 is placed in the placing groove 53, the upper surface of the test sample 7 does not protrude out of the placing groove 53, the limit boss 31 is supported on the placing groove 53 after being pressed, the limit boss 31 plays an upper limit role on the test sample 7, when the puncture steel needle applies the puncture force from the bottom to the top, the test sample 7 can be prevented from being ejected from the placing groove 53 or the test sample 7 from shaking during the puncture, so that the test sample 7 is limited in the placing groove 53, and the puncture is convenient.
On the basis of the installation of the primary sealing structure by the bolts 6, the sealing performance of the primary sealing structure reaches 10 by testing the sealing performance of the primary sealing structure by an internal atmosphere content tester (for example IVA-210 s) -7 Vacuum degree of Pa magnitude.
In some embodiments, as shown in fig. 4, the first seal ring 4 is positioned within the primary seal groove 52, and the diameter of the first seal ring 4 is greater than the depth of the primary seal groove 52 such that the first seal ring 4 protrudes outside of the primary seal groove 52. The primary seal groove 52 provides positioning for the first seal ring 4, facilitating installation of the first seal ring 4.
In some embodiments, as shown in fig. 4, the primary seal groove 52 is circular in shape, the first seal ring 4 is abutted against the side wall of the primary seal groove 52, and the diameter of the first seal cover plate 3 is larger than the diameter of the primary seal groove 52. The first sealing ring 4 protrudes outside the first-stage sealing groove 52, so that the first sealing cover plate 3 and the first sealing ring 4 are tightly pressed, and the sealing reliability is improved.
In some embodiments, as shown in fig. 4, the bolts 6 do not penetrate the seal seat 5, so that the problem that the primary seal cavity 32 is not tightly sealed due to the through holes of the bolts 6 can be avoided.
In some embodiments, as shown in fig. 4, the secondary sealing structure includes a second sealing ring 2 and a second sealing cover plate 1, the second sealing cover plate 1 compresses the second sealing ring 2 through a fixing structure of the atmosphere analyzer to form a secondary sealing cavity 12, and the second sealing ring 2 is enclosed outside the primary sealing structure.
On the basis of the primary sealing structure, a secondary sealing structure is arranged, so that the sealing reliability of the micro device is improved.
In some embodiments, as shown in fig. 4, the second seal ring 2 is in the secondary seal groove 51, and the diameter of the second seal ring 2 is smaller than the depth of the secondary seal groove 51, and the second seal cover plate 1 has a baffle ring 13 extending into the secondary seal groove 51, and the baffle ring 13 compresses the second seal ring 2. In this embodiment, the secondary seal groove 51 provides positioning for the second seal ring 2, while also positioning the second seal cover plate 1.
In some embodiments, as shown in fig. 4, the secondary seal groove 51 is circular in shape, and the second seal ring 2 is tightly attached to the side wall of the secondary seal groove 51, so as to reliably position the second seal ring 2.
In some embodiments, the upper surface of the second sealing cover plate 1 is provided with a positioning groove 11 pressed by a fixing structure of the atmosphere analyzer as shown in fig. 4. The second sealing cover plate 1 is provided with a positioning groove 11, a fixing structure of the atmosphere analyzer is pressed on the positioning groove 11, and the positioning groove 11 has a limiting effect on the fixing structure.
In some embodiments, as shown in fig. 4, the lower surface of the seal seat 5 is provided with a shallow groove 56, the shallow groove 56 is surrounded outside the vent hole 54, and the shallow groove 56 is concentric with the vent hole 54. The shallow slot 56 communicates with the vacuum chamber of the atmosphere analyzer to create a vacuum around the vent 54. Wherein, when the sealing vacuumizes, a third sealing ring with the diameter larger than the depth of the shallow groove 56 is placed in the shallow groove 56 to form a seal around the vent hole.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and in part, not described or illustrated in any particular embodiment, reference is made to the related descriptions of other embodiments.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (10)
1. An atmosphere analysis test fixture for a micro device, comprising:
the device comprises a sealing seat (5), wherein a second-level sealing groove (51) is formed in the upper surface of the sealing seat (5), a first-level sealing groove (52) is formed in the bottom of the second-level sealing groove (51), a placing groove (53) for placing a test sample (7) is formed in the bottom of the first-level sealing groove (52), and a vent hole (54) communicated with a test vacuum cavity is formed in the bottom of the placing groove (53);
the primary sealing structure is packaged on the primary sealing groove (52) and forms a primary sealing cavity (32) with the primary sealing groove (52), and the placing groove (53) is sealed in the primary sealing cavity (32); and
the secondary sealing structure is packaged on the secondary sealing groove (51), and forms a secondary sealing cavity (12) with the secondary sealing groove (51), and the primary sealing cavity (32) is sealed in the secondary sealing cavity (12).
2. The micro device atmosphere analysis test tool according to claim 1, wherein the primary sealing structure comprises a first sealing ring (4) and a first sealing cover plate (3), the first sealing cover plate (3) compresses the first sealing ring (4) through bolts (6) to form the primary sealing cavity (32), a limiting boss (31) protruding downwards is arranged on the lower surface of the first sealing cover plate (3), and the limiting boss (31) is stopped on the placing groove (53); the first sealing ring (4) is arranged outside the placing groove (53) in a surrounding mode.
3. The micro device atmosphere analysis test fixture according to claim 2, wherein the first sealing ring (4) is located in the primary sealing groove (52), and the diameter of the first sealing ring (4) is larger than the depth of the primary sealing groove (52), so that the first sealing ring (4) protrudes outside the primary sealing groove (52).
4. The micro device atmosphere analysis test tool according to claim 3, wherein the first-stage sealing groove (52) is circular in shape, the first sealing ring (4) is tightly attached to the side wall of the first-stage sealing groove (52), and the diameter of the first sealing cover plate (3) is larger than that of the first-stage sealing groove (52).
5. The micro device atmosphere analysis test fixture according to claim 2, wherein the bolts (6) do not penetrate the sealing seat (5).
6. The micro device atmosphere analysis test tool according to claim 1, wherein the secondary sealing structure comprises a second sealing ring (2) and a second sealing cover plate (1), the second sealing cover plate (1) compresses the second sealing ring (2) through a fixing structure of an atmosphere analyzer to form the secondary sealing cavity (12), and the second sealing ring (2) is enclosed outside the primary sealing structure.
7. The micro device atmosphere analysis test fixture according to claim 6, wherein the second sealing ring (2) is arranged in the secondary sealing groove (51), the diameter of the second sealing ring (2) is smaller than the depth of the secondary sealing groove (51), the second sealing cover plate (1) is provided with a baffle ring (13) extending into the secondary sealing groove (51), and the baffle ring (13) presses the second sealing ring (2).
8. The micro device atmosphere analysis test tool according to claim 7, wherein the shape of the secondary seal groove (51) is circular, and the second seal ring (2) is tightly attached to the side wall of the secondary seal groove (51).
9. The micro device atmosphere analysis test tool according to claim 6, wherein a positioning groove (11) pressed by a fixing structure of an atmosphere analyzer is formed in the upper surface of the second sealing cover plate (1).
10. The micro device atmosphere analysis test tool according to claim 1, wherein a shallow groove (56) is formed in the lower surface of the sealing seat (5), the shallow groove (56) is surrounded outside the vent hole (54), and the shallow groove (56) is concentric with the vent hole (54).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321511020.6U CN220271451U (en) | 2023-06-14 | 2023-06-14 | Micro device atmosphere analysis test tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321511020.6U CN220271451U (en) | 2023-06-14 | 2023-06-14 | Micro device atmosphere analysis test tool |
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| Publication Number | Publication Date |
|---|---|
| CN220271451U true CN220271451U (en) | 2023-12-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321511020.6U Active CN220271451U (en) | 2023-06-14 | 2023-06-14 | Micro device atmosphere analysis test tool |
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| Country | Link |
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| CN (1) | CN220271451U (en) |
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2023
- 2023-06-14 CN CN202321511020.6U patent/CN220271451U/en active Active
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