CN220270030U - Rotary furnace device for silicon-based battery material CVD process - Google Patents
Rotary furnace device for silicon-based battery material CVD process Download PDFInfo
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- CN220270030U CN220270030U CN202321467770.8U CN202321467770U CN220270030U CN 220270030 U CN220270030 U CN 220270030U CN 202321467770 U CN202321467770 U CN 202321467770U CN 220270030 U CN220270030 U CN 220270030U
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- 239000000463 material Substances 0.000 title claims abstract description 64
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 35
- 239000010703 silicon Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 33
- 230000008569 process Effects 0.000 title claims abstract description 32
- 230000006698 induction Effects 0.000 claims abstract description 27
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- 238000005253 cladding Methods 0.000 claims abstract description 22
- 238000003756 stirring Methods 0.000 claims abstract description 15
- 238000001914 filtration Methods 0.000 claims abstract description 13
- 238000002156 mixing Methods 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 claims abstract description 6
- 239000012535 impurity Substances 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims description 49
- 239000011248 coating agent Substances 0.000 claims description 46
- 238000007789 sealing Methods 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 230000007246 mechanism Effects 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 3
- 238000012856 packing Methods 0.000 claims description 3
- 238000011045 prefiltration Methods 0.000 claims description 3
- 239000003921 oil Substances 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 25
- 229910052799 carbon Inorganic materials 0.000 abstract description 20
- 230000008021 deposition Effects 0.000 abstract description 10
- 239000000843 powder Substances 0.000 abstract description 6
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 239000000203 mixture Substances 0.000 abstract description 3
- 239000003292 glue Substances 0.000 abstract 1
- 239000011232 storage material Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 25
- 239000010410 layer Substances 0.000 description 6
- 239000007773 negative electrode material Substances 0.000 description 6
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 229910052744 lithium Inorganic materials 0.000 description 5
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 4
- 239000010405 anode material Substances 0.000 description 4
- 239000003575 carbonaceous material Substances 0.000 description 4
- 229910001416 lithium ion Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000007774 positive electrode material Substances 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000858 La alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 208000012868 Overgrowth Diseases 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
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- 239000002131 composite material Substances 0.000 description 1
- QHGJSLXSVXVKHZ-UHFFFAOYSA-N dilithium;dioxido(dioxo)manganese Chemical compound [Li+].[Li+].[O-][Mn]([O-])(=O)=O QHGJSLXSVXVKHZ-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
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- 238000005189 flocculation Methods 0.000 description 1
- 230000016615 flocculation Effects 0.000 description 1
- 238000005243 fluidization Methods 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
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- 238000009830 intercalation Methods 0.000 description 1
- 230000002687 intercalation Effects 0.000 description 1
- FAYUQEZUGGXARF-UHFFFAOYSA-N lanthanum tungsten Chemical compound [La].[W] FAYUQEZUGGXARF-UHFFFAOYSA-N 0.000 description 1
- GELKBWJHTRAYNV-UHFFFAOYSA-K lithium iron phosphate Chemical compound [Li+].[Fe+2].[O-]P([O-])([O-])=O GELKBWJHTRAYNV-UHFFFAOYSA-K 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 125000004430 oxygen atom Chemical group O* 0.000 description 1
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- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- Battery Electrode And Active Subsutance (AREA)
- Silicon Compounds (AREA)
Abstract
The utility model provides a silicon-based battery material CVD process rotary furnace device, which comprises: according to the feeding storehouse, cladding storehouse and the receipts feed bin that material advancing direction connects gradually to and heating element and gas filtration mixing element, the feeding storehouse is through the mode pay-off of screw propulsion, and heating element includes induction coil and metal stick, and the metal stick sets up in cladding storehouse as the heat source, and induction coil encircles and realizes induction heating in cladding storehouse periphery, is provided with the displacement of stirring piece in order to control the material in the cladding storehouse, and the receipts feed bin can collect the storage material, and gas filtration mixing element can carry out prefiltering to gas and mix the reduction impurity to the exit tube in cladding storehouse and the entry end gas-supply of feeding storehouse. The rotary furnace device can solve the problems of serious carbon deposition, furnace mouth glue formation, low discharge rate, powder loss and the like of the traditional CVD device.
Description
Technical Field
The utility model relates to the technical field of CVD process devices, in particular to a rotary furnace device for a silicon-based battery material CVD process.
Background
With the continuous development of the lithium battery industry, society has a greater demand for lithium batteries having higher capacities. The actual specific capacity of the graphite anode material is 360-365mAh/g at present, and the actual specific capacity is close to the theoretical specific capacity of 372mAh/g, so that the improvement of the performance of the graphite material has little effect on improving the performance of the lithium ion battery. The four key raw materials of the lithium ion battery are respectively positive electrode material, negative electrode material, diaphragm and electrolyte. The positive electrode material breaks through earlier, the materials are upgraded from early lithium cobaltate and lithium manganate materials to lithium iron phosphate materials and ternary materials, the negative electrode material is slowly upgraded, graphite is always taken as a main material, and the output of the 2021-year graphite negative electrode material accounts for 98% of the market share of the negative electrode material. The silicon-based negative electrode has the advantages of high energy density, wide raw material distribution and the like, and is considered as a promising negative electrode material of the next-generation lithium ion battery. The silicon-based negative electrode is a main stream choice of lithium ion battery negative electrode materials, and mainly comprises an elemental silicon negative electrode (the theoretical specific capacity is up to 4200mAh/g and 10 times more than that of a graphite negative electrode) and a silicon oxide negative electrode (the theoretical specific capacity is up to 2600 mAh/g), and is also far higher than that of the graphite negative electrode.
Because the volume change rate of the silicon material is 320%, and the expansion of the carbon material is only 12%, the silicon anode material repeatedly expands and contracts in the lithium intercalation process, so that the anode material is easy to pulverize and fall off, and finally the anode material loses electrical contact, so that the battery is completely disabled. The silicon oxide has the advantages that the expansion rate is reduced to 120% due to the addition of oxygen atoms, and the cycle performance is better than that of nano silicon. In continuous charge and discharge, SEI film continuously grows on the surface of the silicon negative electrode. Limited electrolyte in the battery and lithium from the positive electrode have been irreversibly consumed, ultimately resulting in rapid decay of the battery capacity.
The carbon coating can protect the silicon, thereby avoiding direct contact between the electrode and the electrolyte and inhibiting overgrowth of the SEI film. Meanwhile, the carbon material has good conductivity, a continuous conductive network can be constructed on the surface of the silicon, and the internal resistance of the battery is reduced. In addition, the carbon material has stronger mechanical property, and can buffer the stress change generated by the volume expansion of the silicon, thereby maintaining the structural integrity of the electrode. And a layer of hydrophobic mechanism can be established on the surface of the silicon by the carbon material, so that beating flocculation and gas production phenomena caused by the strong alkalinity of the pre-lithiated silicon material can be effectively inhibited. At present, the silicon-based battery material has advantages in the aspects of operation difficulty and rationality by adopting a rotary furnace CVD process compared with wet coating and fluidization coating in the carbon coating process, but most of domestic prior CVD process equipment is immature, and problems in the aspects of temperature control, material purity and the like are always existed. Therefore, the provided rotary furnace device for the CVD process of the silicon-based battery material has important significance, and has stable temperature, is not easy to generate gel formation and carbon deposition and can improve the collection rate.
Disclosure of Invention
The present utility model is directed to solving one or more of the problems of the prior art, including the shortcomings of the prior art. For example, it is an object of the present utility model to provide a rotary kiln apparatus for a CVD process for a silicon-based battery material, which is stable in temperature, is less likely to cause gel formation and carbon deposition, and can improve the collection rate.
In order to achieve the above object, the present utility model provides a rotary kiln apparatus for CVD process of silicon-based battery material, the apparatus comprising: the device comprises a feeding bin, a coating bin, a receiving bin, a heating unit and a gas filtering mixing unit, wherein the feeding bin, the coating bin and the receiving bin are sequentially connected according to the advancing direction of materials, and the feeding bin feeds in a spiral pushing mode; the heating unit comprises an induction coil and a metal rod, the metal rod is arranged in the cladding bin and used as a heat source, and the induction coil surrounds the periphery of the cladding bin to realize induction heating; a stirring sheet is arranged in the coating bin to control the displacement of the materials; the material collecting bin can collect and store materials; the gas filtering and mixing unit can pre-filter and mix the gas to reduce impurities and convey gas to an outlet pipe of the coating bin and an inlet end of the feeding bin.
According to one or more exemplary embodiments of the present utility model, the induction coil may be spaced from the cladding bin by an insulating layer.
According to one or more exemplary embodiments of the present utility model, the induction coil may be a copper induction coil, which is a hollow copper tube, and may be internally supplied with circulating cooling water.
According to one or more exemplary embodiments of the present utility model, the stirring blade may be a dual stirring blade structure, which may include a bevel blade structure and an arc blade structure.
According to one or more exemplary embodiments of the present utility model, an air pressure balancing mechanism may be disposed at an outlet of the air filtering mixing unit, a filter screen may be disposed at a bottom of the feeding bin, and a screw shaft may be disposed in the feeding bin.
According to one or more exemplary embodiments of the present utility model, a lifting unit may be provided below an end of the coating bin near the feeding bin to control lifting and/or lowering of one side of the coating bin.
According to one or more exemplary embodiments of the utility model, the apparatus may further comprise a tail gas treatment unit connected to the inlet pipe of the coating cartridge.
According to one or more exemplary embodiments of the present utility model, a dynamic seal structure may be provided at each rotating shaft of the apparatus, and the dynamic seal structure may employ a multi-stage dynamic seal, which may be one or more of a packing dynamic seal, a labyrinth dynamic seal, and an oil-sealing dynamic seal.
According to one or more exemplary embodiments of the utility model, an air damper may be disposed within the cladding bin.
According to one or more exemplary embodiments of the utility model, the apparatus may further comprise an electronic control unit located below the coating cartridge configured as a general control hub of the apparatus.
Compared with the prior art, the utility model has the beneficial effects that at least one of the following contents is included:
(1) The rotary furnace device provided by the utility model solves the problems of serious carbon deposition, furnace mouth gumming, low discharge rate and powder loss of the traditional CVD device to a great extent;
(2) The rotary furnace device provided by the utility model adopts a medium/high frequency induction heating mode, so that the temperature rise, the utilization of electric energy and the time control are improved greatly;
(3) The rotary furnace device provided by the utility model has advantages in the aspects of operability and rationality, and also has great advantages in the aspects of temperature control, purity assurance and the like.
Drawings
The foregoing and other objects and features of the utility model will become more apparent from the following description taken in conjunction with the accompanying drawings in which:
FIG. 1 shows a schematic structural view of a rotary kiln apparatus for a CVD process for silicon-based battery materials according to an exemplary embodiment of the present utility model;
FIG. 2 shows a schematic cross-sectional view of a coating cartridge;
FIG. 3 shows a schematic view of the bevel blade configuration of the stirring blade;
fig. 4 shows a schematic view of the structure of the arc-shaped blade of the stirring blade.
Reference numerals:
1-feeding bin, 2-cladding bin, 3-receiving bin, 4-heating unit, 41-induction coil, 42-metal rod, 5-gas filtration mixing unit, 6-heat preservation, 7-lifting unit, 8-tail gas treatment unit, 9-electronic control unit, 10-first dynamic seal structure, 11-second dynamic seal structure.
Detailed Description
Hereinafter, a rotary kiln apparatus for a CVD process for a silicon-based battery material according to the present utility model will be described in detail with reference to the accompanying drawings and exemplary embodiments.
It should be noted that the terms "first," "second," and the like are merely used for convenience of description and for convenience of distinction and are not to be construed as indicating or implying relative importance. "upper", "lower", "inner", "outer", "head", "tail", "middle", "bottom", etc. are for convenience of description and constitute relative orientations or positional relationships only, and do not indicate or imply that the components referred to must have that particular orientation or position.
FIG. 1 shows a schematic structural view of a rotary kiln apparatus for a CVD process for silicon-based battery materials according to an exemplary embodiment of the present utility model; FIG. 2 shows a schematic cross-sectional view of a coating cartridge; FIG. 3 shows a schematic view of the bevel blade configuration of the stirring blade; fig. 4 shows a schematic view of the structure of the arc-shaped blade of the stirring blade.
In a first exemplary embodiment of the present utility model, as shown in fig. 1, a silicon-based battery material CVD process rotary kiln apparatus mainly includes a feeding bin 1, a coating bin 2, a receiving bin 3, a heating unit 4, and a gas filtering mixing unit 5.
Wherein, feeding storehouse 1, cladding storehouse 2 and receiving storehouse 3 are connected gradually according to the material direction of travel. The feeding bin 1 is positioned at the head of the device and is connected with an inlet pipe of the coating bin 2. The feeding bin 1 is internally provided with a screw shaft for transporting materials to the coating bin 2 in a spiral propelling mode. Here, the cladding bin is located in the furnace tube. The material collecting bin 3 is positioned at the tail part of the device and connected with an outlet pipe of the coating bin 2, and can collect and store materials after the CVD process flow. The stirring sheet is arranged in the coating bin, and can effectively control the displacement of the material, so that the material is stably coated in the advection area, and the carbon deposition phenomenon is eliminated. The gas filtering and mixing unit 5 is positioned at the left side of the coating bin 2 and connected with an outlet pipe of the coating bin 2 and an inlet end of the feeding bin 1, and can provide inert atmosphere and carbon source gas in the furnace tube to carry out CVD process flow. The gas filtering and mixing unit can also pre-filter and mix the gas, so that impurities such as acetone in common carbon source gas such as acetylene can be effectively reduced, and the phenomenon of gel formation of the coating bin in the heating process is prevented. Meanwhile, the probability of carbon deposition in the coating process can be reduced by adopting the obtained premixed gas. The heating unit 4 includes an induction coil 41 and a metal rod 42. The metal rod 42 is fixed in the cladding bin 2 as a heat source. As shown in fig. 2, the metal rod 42 may be disposed in the center of the cladding bin 2, secured by a securing assembly. The induction coil 41 surrounds the outer wall of the cladding bin 2, and is matched with the metal rod 42 to realize induction heating of the furnace tube, and the cladding bin is heated in a medium/high-frequency heating mode. Here, the medium-high frequency refers to a frequency of 150Hz or more. Compared with the traditional heating mode, the heating rate is slow due to radiation heat conduction, and part of heat can be taken away by the carbon source gas, so that the phenomenon of gel formation is generated in a low-temperature region of part of the carbon source gas, and meanwhile, the silicon material is seriously subjected to the phenomenon of carbon deposition due to unstable or overhigh temperature. The magnetic induction heating mode is used, the furnace tube is not heated in a heating wire heat radiation mode, but directly acted on the furnace tube, the temperature rising rate is guaranteed, the temperature control is guaranteed, and the extremely high electric heating conversion rate of the magnetic induction heating mode also greatly saves time and electric quantity cost for production.
In the present exemplary embodiment, as shown in fig. 1, an insulation layer 6 may be interposed between the induction coil 41 and the coating bin 2. The heating unit 4, the cladding bin 2 and the heat preservation layer 6 are all positioned in the hearth.
Further, the heat-insulating layer can be made of a high-temperature-resistant carbon fiber composite material.
In the present exemplary embodiment, the induction coil may be a copper induction coil, which is a hollow copper tube, and may be internally supplied with circulating cooling water.
In the present exemplary embodiment, the metal rod may be one or more of 310S stainless steel, a molybdenum rod, a tungsten lanthanum alloy, and the like.
In the present exemplary embodiment, the stirring sheet may be a double stirring sheet structure, and the double stirring sheet structure may be: the center is an arc-shaped blade structure, and the two ends are inclined blade structures. The inclined blade structure is shown in fig. 3, and the inclined blade structure can continuously push materials to the center of the coating bin. The arc blade structure is as shown in fig. 4, and the arc blade structure can raise the material fully, and the existence of the arc groove on the arc blade can reduce the displacement of the material.
Further, the blade height may be 1/10 of the diameter width.
In the present exemplary embodiment, an air pressure balancing mechanism may be provided at the outlet of the air filtering and mixing unit, and the air pressure balancing mechanism may adjust the air pressure. The bottom of the feeding bin can be provided with a filter screen. The problem that ultrafine powder runs off along with tail gas can be solved through setting up atmospheric pressure balancing unit and filter screen, the quick washing of oxygen in being favorable to cladding storehouse simultaneously.
Further, the filter screen may be a high mesh filter screen.
In the present exemplary embodiment, as shown in fig. 1, a lifting unit 7 may be provided below one end of the coating bin 2 near the feeding bin 1 to control the lifting and/or lowering of one side of the furnace tube, i.e., to control the lifting and/or lowering of one side of the coating bin 2. One side of the cladding bin is lifted integrally, so that the collection rate of materials is improved. For example, after coating is completed, the lifting unit can be started to collect materials rapidly, and meanwhile, the coating layer can be cleaned conveniently.
Further, the lifting unit may adopt a hydraulic lifting manner.
In the present exemplary embodiment, as shown in fig. 1, the silicon-based battery material CVD process rotary kiln apparatus may further include a tail gas treatment unit 8, and the tail gas treatment unit 8 is connected to an inlet pipe of the coating bin 2. The tail gas treatment unit can collect escaped powder raw materials and cracked carbon, and treat hydrogen and carbon source gas in the tail gas. Here, the exhaust gas treatment unit includes a burner or the like.
In this exemplary embodiment, a dynamic seal structure may be disposed at each rotation shaft of the rotary furnace apparatus for CVD process of silicon-based battery material, and the dynamic seal structure may employ a multi-stage dynamic seal, which may be one or more of a packing dynamic seal, a labyrinth dynamic seal, and an oil-sealing dynamic seal. As shown in fig. 1, a first dynamic seal structure 10 may be provided at the outlet pipe of the coating cartridge, and a second dynamic seal structure 11 may be provided at the inlet pipe of the coating cartridge 2.
Further, the dynamic sealing structure can adopt water cooling for cooling.
In the present exemplary embodiment, an air damper may be disposed within the covering bin. The powder material comprises a stacked layer which is easily adhered and grown on the inner wall of the reaction furnace by cracking carbon, and the air shock hammer can prevent the powder material from being adhered and stacked on the inner wall of the furnace tube, so that the phenomenon of carbon deposition is improved, and the coating is more uniform and sufficient.
Further, the coating bin can be made of 310S materials, and the length-diameter ratio of the coating bin is lower than 20:1.
in the present exemplary embodiment, as shown in fig. 1, the silicon-based battery material CVD process rotary kiln apparatus may further include an electronic control unit 9, the electronic control unit 9 being located below the coating bin 2 and configured as a general control center of the apparatus. Specifically, the electric control unit can be used for temperature control of the heating unit, rotation control of the coating bin, flow and on-off control of the air source, lifting control of the furnace body and the like.
The application method/working process of the utility model is as follows:
one or more materials are placed in a feeding bin, the materials are transported to a coating bin by pushing through a screw shaft, an inert gas source is started, the coating bin is cleaned by using inert gas, and the water and oxygen content is reduced. And (3) starting high-frequency heating, keeping introducing an inert gas source, starting the furnace body to rotate reversely, ensuring that the materials are stirred in a middle advection area, and waiting for heating. And (3) when the temperature reaches a certain temperature within the range of 750-1000 ℃, starting the carbon source gas, keeping the inversion, and carrying out cracking cladding. After the coating is finished, automatically starting water cooling to cool the furnace body, and starting a lifting unit to lift the feeding area when the temperature is lowered to below 150 ℃. And (3) starting the furnace body to rotate forward, controlling the material to move to the collecting area, and rapidly collecting the material.
In summary, the advantages of the present utility model include at least one of the following:
(1) The rotary furnace device provided by the utility model adopts a magnetic induction heating mode, and directly acts on the furnace tube, so that the temperature rising rate and the temperature control are ensured, and the extremely high electrothermal conversion rate can also greatly save the time and the electricity cost for production;
(2) The rotary furnace device provided by the utility model can effectively reduce the probability of carbon deposition phenomenon generated in the coating process;
(3) The rotary furnace device provided by the utility model can effectively control the displacement of the material, so that the material is stably coated in a advection area, and the carbon deposition phenomenon is eliminated.
Although a silicon-based battery material CVD process rotary kiln apparatus of the present utility model has been described above by way of example embodiments, it will be apparent to those skilled in the art that various modifications and changes may be made to the example embodiments of the present utility model without departing from the spirit and scope of the utility model as defined in the appended claims.
Claims (10)
1. A rotary kiln apparatus for a CVD process for silicon-based battery materials, the apparatus comprising: the feeding bin, the coating bin and the receiving bin are sequentially connected according to the advancing direction of materials, the heating unit and the gas filtering and mixing unit are arranged,
the feeding bin feeds materials in a spiral pushing mode;
the heating unit comprises an induction coil and a metal rod, the metal rod is arranged in the cladding bin and used as a heat source, and the induction coil surrounds the periphery of the cladding bin to realize induction heating;
a stirring sheet is arranged in the coating bin to control the displacement of the materials;
the material collecting bin can collect and store materials;
the gas filtering and mixing unit can pre-filter and mix the gas to reduce impurities and convey gas to an outlet pipe of the coating bin and an inlet end of the feeding bin.
2. The rotary kiln apparatus for CVD process for silicon-based battery materials according to claim 1, wherein a heat-insulating layer is provided between the induction coil and the coating chamber.
3. The rotary furnace device for CVD process of silicon-based battery material according to claim 1 or 2, wherein the induction coil is a copper induction coil, the copper induction coil is a hollow copper tube, and circulating cooling water is supplied inside the copper induction coil.
4. The rotary kiln apparatus for a CVD process for silicon-based battery materials according to claim 1, wherein the stirring blade is a double stirring blade structure comprising a bevel blade structure and an arc blade structure.
5. The rotary furnace device for the silicon-based battery material CVD process according to claim 1, wherein an air pressure balance mechanism is arranged at the outlet of the air filtering and mixing unit, a filter screen is arranged at the bottom of the feeding bin, and a screw shaft is arranged in the feeding bin.
6. The rotary furnace device for the CVD process of silicon-based battery materials according to claim 1, wherein a lifting unit is arranged below one end of the coating bin close to the feeding bin so as to control one side of the coating bin to lift and/or lower.
7. A rotary kiln apparatus for a CVD process for silicon-based battery material according to claim 1 or 6, further comprising a tail gas treatment unit connected to the inlet pipe of the coating chamber.
8. The rotary furnace device for the CVD process of silicon-based battery materials according to claim 7, wherein a dynamic sealing structure is arranged at each rotating shaft of the device, and the dynamic sealing structure adopts multistage dynamic sealing and is one or more of packing dynamic sealing, labyrinth dynamic sealing and oil sealing dynamic sealing.
9. The rotary furnace device for the CVD process of silicon-based battery materials according to claim 1, wherein an air damper is arranged in the coating bin.
10. The rotary kiln apparatus for a CVD process for silicon-based battery material according to claim 1, further comprising an electronic control unit located below the coating bin configured as a general control center of the apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321467770.8U CN220270030U (en) | 2023-06-09 | 2023-06-09 | Rotary furnace device for silicon-based battery material CVD process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321467770.8U CN220270030U (en) | 2023-06-09 | 2023-06-09 | Rotary furnace device for silicon-based battery material CVD process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220270030U true CN220270030U (en) | 2023-12-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321467770.8U Active CN220270030U (en) | 2023-06-09 | 2023-06-09 | Rotary furnace device for silicon-based battery material CVD process |
Country Status (1)
| Country | Link |
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2023
- 2023-06-09 CN CN202321467770.8U patent/CN220270030U/en active Active
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