CN220260610U - Spliced workbench mechanism - Google Patents

Abstract

The utility model discloses a spliced workbench mechanism, which comprises: a support frame; the workbench unit is arranged on the support frame and comprises a plurality of partitioned workbenches; and the execution mechanism units are arranged on the plurality of block-type work tables in a scattered manner. The utility model can flexibly arrange the modules (taking the polishing unit as an example, the modules refer to polishing discs, polishing arms, trimmers, liquid supply arms and the like) in the execution mechanism unit according to the process requirements, the layout is arbitrarily defined, the modules can be arbitrarily replaced, and meanwhile, the height of each module in the execution mechanism unit can be defined through an adjusting mechanism; the shape and the number of each block type workbench can be selected according to the process requirement, so that the required functions are realized; if the workbench is required to be maintained, the actuating mechanism unit of any station can be disassembled in a movable mode, and the support frame and all parts connected with the support frame are not required to be disassembled.

Description

Spliced workbench mechanism

Technical Field

The utility model belongs to the field of semiconductor integrated circuit chip manufacturing, and particularly relates to a spliced workbench mechanism.

Background

Chemical mechanical polishing planarization (Chemical Mechanical Planarization, simply CMP) apparatus generally includes a semiconductor device front end module (EFEM), a cleaning unit, and a polishing unit. The EFEM mainly comprises a wafer box for storing wafers, a wafer conveying manipulator, an air purifying system and the like; the cleaning unit mainly comprises megasonic cleaning parts, rolling brush cleaning parts, drying parts, devices for conveying wafers between the parts and the like, wherein the number of the megasonic cleaning parts is different; the polishing unit generally includes a table, a polishing disk, a polishing head, a polishing arm, a dresser, a polishing liquid arm, and the like, each of which is arranged on the table in accordance with a processing position. A large amount of chemical liquid is used in the wafer polishing process, and the polishing workbench is usually coated with a corrosion-resistant coating on the surface of the metal plate so as to prolong the service life of the workbench. The corrosion-resistant coating gradually thins after long-term use until partial metal exposure occurs, so that the metal plate is exposed to the polishing solution to corrode, and the mechanical strength is reduced. The table needs to be removed and repainted. The work table is usually stationary in the polishing unit and is connected to the support frame of the apparatus, which means that the support frame and the components connected to the support frame need to be removed during maintenance of the work table. After reinstallation of the platen, it is necessary to perform a leveling operation on the polishing unit. Typically, more than one polishing element is present in a CMP apparatus, for example, an apparatus having 6 polishing elements. Each polishing element must be adjusted to a level that will ensure process uniformity for each region that would otherwise affect the processing quality of the wafer.

The fixed integral table has the following disadvantages: 1) The service life of the anti-corrosion coating is reduced after long-term use, so that the workbench and the support frame are required to be maintained, and the workbench, the support frame and all connected parts thereof are required to be removed and reinstalled for maintenance, so that the cost is excessive; meanwhile, as the service life of each workbench is different due to the use frequency and the different process working conditions, the maintenance time of each workbench is different, and the independent maintenance of the polishing unit at any station cannot be realized; 2) After maintenance, all polishing units need to be adjusted to the horizontal position, the horizontal position of each polishing unit is not completely consistent due to factors such as machining precision, manual installation and the like, the horizontal adjustment mode of the integral workbench is the integral horizontal adjustment (through adjusting the height of the foot), the CMP equipment with a 6-disc structure is particularly difficult and has low precision, the performance of a polishing system on the workbench is directly influenced, the polishing efficiency and polishing effect of each polishing unit are different due to long-time operation of the workbench, and the stable operation of the workbench and the polishing effect of a final wafer are directly influenced. The position of the whole equipment is adjusted to ensure that each polishing unit is positioned horizontally, so that the difficulty is high; 3) The workbench of the current CMP equipment is integral, so that the whole polishing unit is required to be disassembled when a part of polishing modules (a plate polishing table, a polishing arm and cross) of the polishing unit are maintained, the independent maintenance of any polishing modules cannot be achieved, and the integral workbench is too heavy to be used for the pumping work (the aluminum-beautifying material is adopted by the current workbench, the bearing and the weight of the workbench are considered, the total mass of a single polishing workbench is 150kg, the mass of a single polishing disc is 500kg, the mass of a single polishing arm is 300kg, the mass of a single pad trimmer is 100kg, and the mass of a single slurry liquid supply arm is 50kg.

Disclosure of Invention

In order to overcome the defects of the prior art, the utility model provides the spliced workbench mechanism with convenient maintenance and various layout.

The technical scheme adopted for solving the technical problems is as follows: a splice table mechanism comprising:

a support frame;

the workbench unit is arranged on the support frame and comprises a plurality of partitioned workbenches;

and the execution mechanism units are arranged on the plurality of block-type work tables in a scattered manner.

According to the utility model, the workbench unit is divided into a plurality of block type workbench, each workbench can be provided with different or same executing mechanism units, the modules in the executing mechanism units can be flexibly arranged according to the process requirements, the modules can be replaced at will, the application scenes are more, and the use is more flexible.

Further, the workbench unit further comprises a supporting member, and the plurality of partitioned workbenches are arranged on the supporting member.

Further, a movable beam is arranged on the support frame, and the plurality of block-type work tables are erected on the movable beam.

Further, the plurality of block-type workbenches are spliced to form a square.

Further, the plurality of block-type work tables are connected to each other.

Further, the workbench unit and the support frame are provided with at least two supporting points.

Further, at least one side of the support frame forms a transfer window for separating the block type workbench from the support frame.

Further, an operation window is formed below the workbench unit and at the side of the support frame.

Further, the executing mechanism unit is a polishing unit and at least comprises a polishing disc, a polishing arm, a trimmer and a liquid supply arm; the polishing disk, the polishing arm, the trimmer and the liquid supply arm are respectively arranged on a single block type workbench, or two or more of the polishing disk, the polishing arm, the trimmer and the liquid supply arm are respectively arranged on a single block type workbench.

Further, the polishing unit also includes a groove reworking assembly disposed on the segmented table.

The beneficial effects of the utility model are as follows: 1) The modules (taking a polishing unit as an example, wherein the modules refer to a polishing disk, a polishing arm, a trimmer, a liquid supply arm and the like) in the execution mechanism unit can be flexibly arranged according to the process requirements, the layout is arbitrarily defined, the modules can be arbitrarily replaced, and meanwhile, the height of each module in the execution mechanism unit can be defined through an adjusting mechanism; 2) The shape and the number of each block type workbench can be selected according to the process requirement, so that the required functions are realized; when a new function is needed, the block type workbench can be additionally and newly added for independent installation or replacement, when modules are needed to be reduced, the block type workbench can be independently removed, and the single block type workbench can be partially replaced after failure; 3) If the workbench is required to be maintained, the actuating mechanism unit of any station can be disassembled in a movable mode, and the support frame and all parts connected with the support frame are not required to be disassembled; 4) The workbench unit can be separated from the support frame from the transfer window, so that the maintenance is convenient, the effect of corresponding multiple processes of a single machine can be realized through the replacement of the workbench unit, and the applicability is wider; 5) The layout of the execution mechanism units and the heights of the execution mechanism units can be adjusted at will, so that more process requirements can be met; 6) The installation efficiency is high, the disassembly and assembly workload of the workbench unit is reduced, only the workbench is required to be disassembled and installed, other supporting frames and other executing mechanism units are not required to be disassembled, and the executing mechanism units can be independently maintained without influencing the operation of other stations; 7) Compared with the integral workbench, the adjustable workbench has higher adjustment precision, the adjustment quantity of the adjusting mechanism is easier to control, and the position of the actuating mechanism unit can be finely adjusted by completing tiny adjustment.

Drawings

Fig. 1 is a perspective view of a splice table mechanism in accordance with the present utility model.

Fig. 2 is an enlarged view of the structure at a in fig. 1.

Fig. 3 is a schematic diagram of a split structure of the split type workbench mechanism in the utility model, and the block type workbench moves out of the support frame from the transfer window.

Fig. 4 is a schematic structural view of the CMP apparatus of the present utility model, in which a plurality of splice table mechanisms are connected by a frame.

Fig. 5 is a schematic structural view of a frame according to the present utility model.

Fig. 6 is a schematic diagram of a matching structure of a plurality of block-type workbenches and a part of supporting frames in the present utility model, wherein the supporting frames are provided with movable beams.

FIG. 7 is a schematic view of the mating structure of a plurality of segmented tables and supports according to the present utility model.

Fig. 8 is a schematic structural view of a plurality of block-type tables placed on a support member according to the present utility model.

Fig. 9 is a schematic perspective view of an adjusting mechanism according to the present utility model.

Fig. 10 is a schematic structural view of an upper adjusting block of the adjusting mechanism in the present utility model.

Fig. 11 is a schematic structural view of a lower adjusting block of the adjusting mechanism in the present utility model.

Fig. 12 is a schematic structural view of a locking member according to the present utility model.

Fig. 13 is a schematic perspective view of an adjusting mechanism according to the present utility model.

Fig. 14 is a schematic perspective view of a second embodiment of the adjusting mechanism.

Fig. 15 is a schematic structural view of an adjusting mechanism in the present utility model.

Detailed Description

In order to make the present utility model better understood by those skilled in the art, the following description of the technical solutions of the present utility model will be made in detail, but not all embodiments of the present utility model are apparent to some embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.

As shown in fig. 1 and 2, a spliced workbench mechanism comprises a support frame 2, a workbench unit 3 arranged on the support frame 2, and an actuator unit 32. The table unit 3 includes a plurality of block tables 310, that is, tables having cross-sectional shapes adapted to the cross-sectional shapes of the support frames 2 are divided into a plurality of blocks, and a plurality of parts of the actuator unit 32 are provided on the plurality of block tables 310.

At least one side of the support frame 2 forms a transfer window 21, the table unit 3 may be detached from the support frame 2 from the transfer window 21, and in particular, the plurality of block tables 310 may be detached from the support frame 2 from the transfer window 21. An operation window 22 is also formed below the table unit 3 and laterally to the support frame 2.

At least two supporting points 30 are provided between the table unit 3 and the supporting frame 2, or the number of the supporting points 30 is three or more, and in this embodiment, the number of the supporting points 30 is four.

Taking the actuator unit 32 as an example of the polishing unit, the polishing disk 321, the polishing arm 322, the dresser 323, and the liquid supply arm 324 are respectively provided on the individual block tables 310, that is, one module is provided for each block table 310. Alternatively, two or more of the polishing pad 321, the polishing arm 322, the dresser 323, and the liquid supply arm 324 are provided on a single block table 310, i.e., each block table 310 is provided with two or three modules.

When another module needs to be added to the actuator unit 32, the added module may be separately provided on the single block type table 310, and the structure of the entire table unit 3 may not need to be changed. And the plurality of block type workbenches 310 can be freely combined to adjust the arrangement of each functional module, and the functional modules can be replaced at will. Such as when the actuator unit 32 is a polishing unit, a groove re-work assembly may also be included and disposed on the segmented table 310.

In order to realize the support of the plurality of block-type work tables 310, the movable beam 5 is provided on the support frame 2, and the plurality of block-type work tables 310 may be erected on the movable beam 5. The movable beam 5 may have a net structure as shown in fig. 6, an X-shaped structure, or a beam column provided below, and the upper end of the beam column may be supported at a joint of the adjacent block type tables 310, and the lower end of the beam column may be supported at a position such as the ground.

At this time, the supporting point 30 may be provided on the movable beam 5, so that the adjusting mechanism 4 is provided on the movable beam 5. The number of the support points 30 is not less than three, as the case may be.

In order to facilitate the whole drawing of the table unit 3, as shown in fig. 7 and 8, the table 31 is a plurality of block tables 310 and a supporting member 33, the block tables 310 are placed on the supporting member 33, and at least two supporting points 30 are provided between the supporting member 33 and the supporting frame 2. Specifically, the ribs 331 are formed around the support 33, so as to prevent the plurality of block tables 310 from moving or even separating at will.

When maintenance is required, the block type work table 310 on which the module to be maintained is located may be taken out from the transfer window 21 according to the maintenance requirement, or the support 33 may be integrally pulled out, and then the module to be maintained may be taken out. The transfer windows 21 are arranged around the support frame 2, so that the direction of taking out the block workbench 310 is not limited, and the block workbench can translate on the xy plane or move in xyz three-position space, such as obliquely upwards (without avoiding problems) or just upwards, and the block workbench is configured according to space and maintenance requirements.

Specifically, for example, only a portion of the simple modules are maintained, and the block table 310 is directly disassembled, for example, if it is involved in disassembling a particular polishing module (the disassembly is performed on the premise that all other modules must be disassembled), then the polishing module that does not require maintenance needs to be disassembled.

Specifically, as shown in fig. 3, when the module of the actuator unit 32 needs to be maintained or replaced, for example, when the polishing unit needs to be maintained or replaced, for example, the polishing disk 321, the polishing arm 322, the trimmer 323, or the liquid supply arm 324, the block-type workbench 310 where the single module is located can be pulled out from the transfer window 21 of the support frame 1 for local maintenance or replacement.

Of course, a plurality of block tables 310 may be connected to each other to form a rigid body.

The adjusting mechanism 4 is provided below the table unit 3 at a position of the supporting point 30, and is used for adjusting the level of the table 31 and also for adjusting the height of the table 31.

As shown in fig. 9 to 12, the adjusting mechanism 4 includes an upper adjusting block 41 which can be connected to the table 31, a lower adjusting block 42 which is placed at the supporting point 30, and a locking member 43, the contact surfaces of the upper adjusting block 41 and the lower adjusting block 42 are inclined surfaces, and the locking member 43 passes through the upper adjusting block 41 and the lower adjusting block 42 respectively and locks the two relatively.

Taking the direction shown in fig. 9 as an example, the upper adjusting block 41 is inclined from left to right, from bottom to top so that the thickness of the upper adjusting block 41 is reduced, and the lower adjusting block 42 is inclined from right to left, from top to bottom so that the thickness of the lower adjusting block 42 is reduced. The horizontal upper end surface of the upper adjusting block 41 is provided with a connecting column 411 which can be inserted into the lower surface of the workbench 31, and the upper adjusting block 41 is internally provided with an internal threaded hole 412; the lower adjusting block 42 is also provided with a slot 421, the position of the slot 421 corresponds to the position of the internal threaded hole 412, and when the inclined surfaces of the upper adjusting block 41 and the lower adjusting block 42 slide to the target position, the locking member 43 passes through the lower adjusting block 42, enters the slot 421 and is in threaded connection with the internal threaded hole 412, so as to realize fixed assembly.

When the horizontal height of the supporting point 30 needs to be adjusted by the adjusting mechanism 4, the adjustment of the entire height can be achieved by the contact area of the inclined surfaces of the upper adjusting block 41 and the lower adjusting block 42. In order to prevent the upper adjustment block 41 from slipping off the lower adjustment block 42, an anti-drop tip 422 is provided at the thicker end of the lower adjustment block 42. In this embodiment, the end of the locking member 43 has an end with an increased outer diameter, and the anti-drop tip 422 may also be used to lock the end of the locking member 43.

As to another structure of the adjusting mechanism 4, as shown in fig. 13 to 14, the adjusting mechanism 4 includes a base 461 disposed at a supporting point 30, a first fork 462 rotatably connected to the base 461, a second fork 471 rotatably connected to the first fork 462 and having an X shape, a slider 472 rotatably connected to a bottom end of the second fork 471, an upper supporting block 48, and a positioning block 49.

The rotation connection structure of the first fork 462 and the second fork 471 may be a hinge structure in the prior art, or may be another structure, which is not limited in particular. The base 461 forms a track, the sliding block 472 can slide in the track, the positioning block 49 can be detachably connected to the base 461, after the positioning block 49 is adjusted to a target position, the positioning block 49 is fixedly assembled with the base 461, and the sliding block 472 can abut against the positioning block 49, so that the relative positions of the first fork 462 and the second fork 471 are fixed, namely the included angles of the first fork 462 and the second fork 471 are relatively fixed, and at the moment, the relative height of the upper supporting block 48 positioned at the top of the second fork 471 is fixed. In this embodiment, one end of the upper supporting block 48 is rotatably connected to the second fork 471, the bottom of the upper supporting block 48 is provided with a travel slot 481, two sides of the top of the first fork 462 are provided with protruding columns 463, and the protruding columns 463 on both sides can slide horizontally in the travel slots 481 on both sides.

Of course, the above structure may be replaced by a structure in which two sides of the top of the second fork 471 are provided with protruding columns, and the top of the first fork 462 is rotatably connected with the upper supporting block 48, which is not limited in particular.

When the included angle between the first fork 462 and the second fork 471 is changed, the relative height of the upper supporting block 48 is changed, so as to adjust the relative height of the workbench 31. When the heights of the adjusting mechanisms 4 of the plurality of supporting points 30 are respectively and independently adjusted, the overall level adjustment of the workbench 31 can be realized.

As to still another structure of the adjusting mechanism 4, as shown in fig. 15, the adjusting mechanism 4 includes a limiting post 44 connected to the supporting point 30, and an adjusting member 45 connected to the limiting post 44, a limiting hole 311 into which the limiting post 44 extends is formed on the lower surface of the table 31, and the table 31 is supported above the adjusting member 45, and the adjusting member 45 can move up and down relative to the limiting post 44.

Specifically, the limiting post 44 may be a screw vertically connected to the supporting point 30, the adjusting member 45 may be a nut screwed on the screw, the lower end of the screw is fixedly connected to the supporting point 30, the upper end of the screw is inserted into the limiting hole 311 on the lower surface of the workbench 31, and the axial length of the upper end of the screw extending into the limiting hole 311 is variable, so that the relative height of the workbench 31 can be adjusted, and the nut forms a supporting function on the workbench 31.

Specifically, the limiting post 44 may be a screw rod vertically connected to the supporting point 30, the adjusting member 45 may be a screw nut screwed on the screw rod, the lower end of the screw rod is fixedly connected to the supporting point 30, the upper end of the screw rod is inserted into the limiting hole 311 on the lower surface of the workbench 31, and the axial length of the upper end of the screw rod extending into the limiting hole 311 is variable, so that the relative height of the workbench 31 can be adjusted, and at this time, the screw nut forms a bearing function on the workbench 31.

When the heights of the adjusting mechanisms 4 of the plurality of supporting points 30 are respectively and independently adjusted, the overall level adjustment of the workbench 31 can be realized.

With respect to still another structure of the adjusting mechanism 4, the adjusting mechanism 4 is an air bag provided at the supporting point 30, and the amount of air in the air bag is variable, thereby changing the relative height of the table 31. When the heights of the adjusting mechanisms 4 of the plurality of supporting points 30 are respectively and independently adjusted, the overall level adjustment of the workbench 31 can be realized.

In another structure of the adjusting mechanism 4, the adjusting mechanism 4 is a mast type lifting structure, which can be specifically implemented by a structure in the prior art, and will not be described again.

As shown in fig. 4, a CMP apparatus includes the above-described splice table mechanism, and in this case, the actuator unit 32 is a polishing unit.

The number of the spliced workbench mechanisms is more, specifically six, and the spliced workbench mechanisms are connected through the frame 6, as shown in fig. 5, that is, the six spliced workbench mechanisms are connected into a whole, and the single spliced workbench mechanism cannot be independently adjusted in level or horizontal height.

The foregoing detailed description is provided to illustrate the present utility model and not to limit the utility model, and any modifications and changes made to the present utility model within the spirit of the present utility model and the scope of the appended claims fall within the scope of the present utility model.

Claims (10)

1. A splice table mechanism, comprising:

a support frame;

the workbench unit is arranged on the support frame and comprises a plurality of partitioned workbenches;

and the execution mechanism units are arranged on the plurality of block-type work tables in a scattered manner.

2. The splice table mechanism of claim 1, wherein: the table unit further includes a support, and the plurality of block-type tables are placed on the support.

3. The splice table mechanism of claim 1, wherein: the support frame is provided with a movable beam, and the plurality of block-type work tables are erected on the movable beam.

4. The splice table mechanism of claim 1, wherein: the plurality of block-type workbenches are spliced to form a square.

5. The splice table mechanism of claim 1, wherein: the plurality of block-type work tables are connected with each other.

6. The splice table mechanism of claim 1, wherein: the workbench unit and the support frame are provided with at least two support points.

7. The splice table mechanism of claim 1, wherein: at least one side of the support frame forms a transfer window for separating the block type workbench from the support frame.

8. The splice table mechanism of claim 1, wherein: an operation window is formed below the workbench unit and beside the supporting frame.

9. The splice table mechanism of claim 1, wherein: the actuating mechanism unit is a polishing unit and at least comprises a polishing disc, a polishing arm, a trimmer and a liquid supply arm; the polishing disk, the polishing arm, the trimmer and the liquid supply arm are respectively arranged on a single block type workbench, or two or more of the polishing disk, the polishing arm, the trimmer and the liquid supply arm are respectively arranged on a single block type workbench.

10. The splice table mechanism of claim 9, wherein: the polishing unit also includes a groove re-work assembly disposed on the segmented table.