CN220241144U - Cleaning and fixing device for repairing and regenerating semiconductor chemical mechanical polishing head - Google Patents
Cleaning and fixing device for repairing and regenerating semiconductor chemical mechanical polishing head Download PDFInfo
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- CN220241144U CN220241144U CN202321966908.9U CN202321966908U CN220241144U CN 220241144 U CN220241144 U CN 220241144U CN 202321966908 U CN202321966908 U CN 202321966908U CN 220241144 U CN220241144 U CN 220241144U
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- 238000004140 cleaning Methods 0.000 title claims abstract description 29
- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- 239000000126 substance Substances 0.000 title claims abstract description 16
- 238000005498 polishing Methods 0.000 title claims description 14
- 230000001172 regenerating effect Effects 0.000 title claims description 9
- 239000002184 metal Substances 0.000 claims abstract description 31
- 238000012423 maintenance Methods 0.000 claims abstract description 9
- 230000008929 regeneration Effects 0.000 claims abstract description 9
- 238000011069 regeneration method Methods 0.000 claims abstract description 9
- 238000009826 distribution Methods 0.000 claims abstract description 5
- 229920001973 fluoroelastomer Polymers 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 9
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 abstract description 7
- 238000001035 drying Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The utility model discloses a cleaning and fixing device used in the maintenance and regeneration of a semiconductor chemical mechanical grinding head, which comprises a cleaning and fixing jig and an air compressor, wherein the cleaning and fixing jig comprises an upper round table and a lower round table, an air inlet channel is arranged in the lower round table, one end of the air inlet channel is connected with the air compressor, the other end of the air inlet channel is communicated with the bottom of an air conveying channel, the air conveying channel is arranged in the middle of the lower round table and the upper round table, an air flow sharing cavity is arranged in the upper round table and communicated with the top of the air conveying channel, an air distribution cover plate which is integrally structured with the upper round table is arranged above the air flow sharing cavity, a plurality of air outlet holes are distributed on the air distribution cover plate, and the air outlet holes are positioned below the hole positions of a metal carrier flange. The air flow enters the cavity from the hole position through the cleaning and fixing jig and flows out from the air outlet pipeline, so that the purpose of drying liquid is achieved, the filter screen can be prevented from falling off, and no residual liquid exists.
Description
Technical Field
The utility model relates to the technical field of maintenance and regeneration of semiconductor equipment, in particular to a cleaning and fixing device used in the maintenance and regeneration of a semiconductor chemical mechanical polishing head.
Background
When the semiconductor chemical mechanical polishing head reaches the service cycle, the parts are required to be replaced or maintenance and regeneration treatment is carried out, because rust is generated on the surface of the flange of the metal carrier in the mechanical polishing head, if the rust can be treated, the metal carrier can be reused, and the machine can be continuously used.
In the current maintenance and regeneration treatment process of the metal carrier flange in the mechanical grinding head, the surface of rust is required to be wiped and polished by using isopropyl alcohol, then DI water is used for wiping, finally residual liquid in a gap is blown off by an air gun, and dust-free cloth is used for wiping. The problems with this approach are: in the blowing process of the metal carrier flange inside the mechanical grinding head, when the air pressure of the air gun is too large, a filter screen inside the metal carrier flange can fall off, the reassembling is affected, residual liquid in a gap of the metal carrier flange can not be eradicated when the air pressure of the air gun is too small, and the practicability of the grinding head after the reassembling is finally affected.
Disclosure of Invention
The utility model aims to provide a cleaning and fixing device used in the maintenance and regeneration of a semiconductor chemical mechanical polishing head, which enables the performance of a cleaned metal carrier to meet the requirements by controlling air flow.
For realizing above-mentioned purpose, this application provides the clean fixing device that uses when semiconductor chemical mechanical grinding head maintenance regeneration, including clean fixed tool and air compressor, clean fixed tool includes round platform and lower round platform down, be equipped with gas access channel down in the round platform, this gas access channel one end links to each other with air compressor, and the other end is linked together with gas delivery channel bottom, gas delivery channel sets up in round platform and last round platform middle part down, be equipped with the air current in going up the round platform and equipartition the cavity, this air current equipartition the cavity is linked together with gas delivery channel top, and the air current equipartition the cavity top be equipped with the gas apron that divides of last round platform integrated structure, it has a plurality of ventholes to distribute on gas apron to divide, a plurality of ventholes are located under the hole position of metal carrier flange.
Further, an air pressure display regulating valve is arranged on a connecting pipeline between the air compressor and the air inlet channel.
Further, a barometer is arranged on a connecting pipeline between the air compressor and the gas inlet channel.
Further, a circle of groove is formed in the top of the upper round table, and a fluororubber O-shaped ring is arranged in the groove.
Further, the fluororubber O-shaped ring is positioned on the periphery of the air distribution cover plate.
Furthermore, one side of the upper round table is provided with a jig positioning column, the other side of the upper round table is provided with a jig positioning hole, and the jig positioning column and the jig positioning hole are symmetrically arranged on the outer side of the fluororubber O-shaped ring.
Further, the diameter of the upper round table is smaller than that of the lower round table, and when the metal carrier flange is placed on the upper round table, the fluororubber O-shaped ring is compressed.
Further, the metal carrier flange is connected with a plurality of air outlet pipelines, and each air outlet pipeline is communicated with the corresponding hole.
Further, the jig positioning column is located in a part positioning groove of the metal carrier flange, and part positioning columns are connected in the jig positioning holes.
Further, the cleaning and fixing jig is made of steel materials.
Compared with the prior art, the technical scheme adopted by the utility model has the advantages that: the clean fixed jig of this application is formed by steel processing, convenient to use, but reuse uses manpower sparingly, has improved work efficiency. The upper surface of the cleaning fixing jig is provided with an air outlet hole corresponding to the hole position of the metal carrier flange to be cleaned, the lower round table is provided with a gas inlet channel and is connected with an air compressor, and the air flow is output from the air outlet hole after passing through the gas conveying channel and the air flow equipartition cavity. Under the sealed state of the clean fixed jig and the metal carrier flange, the air inflow is controlled by the air pressure display regulating valve, and under the action of positive and negative pressure, air flows enter the cavity from the hole position through the clean fixed jig and flows out of the air outlet pipeline, so that the purpose of drying liquid is achieved, the filter screen can be prevented from falling off, and no residual liquid exists.
Drawings
FIG. 1 is a top view of a cleaning fixture;
FIG. 2 is a cross-sectional view of a cleaning fixture;
FIG. 3 is a perspective view of a cleaning fixture;
FIG. 4 is a schematic view of a metal carrier structure;
FIG. 5 is an assembly view of the cleaning fixture and the metal carrier;
wherein: 1. the device comprises an upper round table, 2 fluororubber O-shaped rings, 3, air outlet holes, 4, a jig positioning column, 5, a lower round table, 6, an air distribution cover plate, 7, a jig positioning hole, 8, an air flow uniform distribution cavity, 9, an air inlet channel, 10, a part positioning groove, 11, a filter screen, 12, a part positioning column, 13, a metal carrier, 14 and an air outlet pipeline.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
The embodiment provides a cleaning and fixing device used in the maintenance and regeneration of a semiconductor chemical mechanical polishing head, which comprises a cleaning and fixing jig, an air compressor, a fluororubber O-shaped ring, an air pressure display regulating valve and an air pressure gauge; the cleaning and fixing jig is shown in fig. 1-3: the upper surface of the flange is provided with a plurality of air outlet holes corresponding to the positions of holes of the flange of the metal carrier to be cleaned, the side wall of the lower part is provided with a gas inlet channel, the gas is conveyed through a connecting pipeline, and the gas is conveyed into the flange from the air outlet holes after passing through the gas conveying channel and the gas flow equipartition cavity. The connecting pipeline is sequentially provided with an air pressure display regulating valve and an air pressure gauge. The fluororubber O-shaped ring seals the air passage and positions the metal carrier flange, the metal carrier structure is shown in figure 4, the metal carrier flange is connected to the metal carrier structure, and the filter screen is arranged at the hole of the metal carrier flange.
The cleaning and fixing device is used in the following manner: drawing a part positioning column at the top of the metal carrier flange into a jig positioning hole from a side opening, and placing the jig positioning column into a part positioning groove, so as to ensure that an air outlet hole is positioned below the hole position of the metal carrier flange, as shown in fig. 5; connecting the gas inlet channel to the air compressor, and controlling the opening, closing and air inflow through the air pressure display regulating valve; the air flow enters the metal carrier flange through the cleaning and fixing jig, and the flowing air flow brings out residual liquid in the metal carrier flange, so that the aim of drying is fulfilled after a specific time. According to the actual use condition, the air pressure display regulating valve is regulated, and the air flow speed is controlled by regulating the pressure of compressed air. The drying time and the pressure are obtained through experiments before use, and the purpose of accurately drying is achieved.
It should be noted that, in this application, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a clean fixing device that uses when semiconductor chemical mechanical grinding head maintenance regeneration, its characterized in that, including clean fixed tool and air compressor, clean fixed tool includes round platform and lower round platform down, be equipped with gas access channel down in the round platform, this gas access channel one end links to each other with air compressor, and the other end is linked together with gas delivery channel bottom, gas delivery channel sets up in round platform and last round platform middle part down, upward be equipped with the air current in the round platform and equally divide the cavity, this air current equally divide the cavity and be linked together with gas delivery channel top, the air current equally divide the cavity top be equipped with the gas dividing cover plate of last round platform integral structure, it has a plurality of ventholes to distribute on gas dividing cover plate, a plurality of ventholes are located the hole position below of metal carrier flange.
2. The cleaning and fixing device for repairing and regenerating a semiconductor chemical mechanical polishing head according to claim 1, wherein a gas pressure display regulating valve is provided on a connection line between the air compressor and the gas inlet passage.
3. The cleaning fixture for use in repairing and regenerating a semiconductor chemical mechanical polishing head as recited in claim 1, wherein a barometer is provided on a connection line between the air compressor and the gas inlet passage.
4. The cleaning and fixing device for repairing and regenerating a semiconductor chemical mechanical polishing head according to claim 1, wherein a circle of groove is arranged at the top of the upper round table, and a fluororubber O-ring is arranged in the groove.
5. The cleaning fixture for use in repairing and regenerating a semiconductor chemical mechanical polishing head as recited in claim 4, wherein said fluororubber O-ring is located at the outer periphery of the gas distribution cover plate.
6. The cleaning and fixing device for repairing and regenerating a semiconductor chemical mechanical polishing head according to claim 4, wherein one side of the upper round table is provided with a jig positioning column, the other side is provided with a jig positioning hole, and the jig positioning column and the jig positioning hole are symmetrically arranged on the outer side of the fluororubber O-shaped ring.
7. The cleaning fixture for use in repairing and regenerating a semiconductor chemical mechanical polishing head as recited in claim 4, wherein the upper platen has a diameter smaller than a diameter of the lower platen, and the fluororubber O-ring is compressed when the metal carrier flange is placed on the upper platen.
8. The cleaning fixture of claim 1, wherein the metal carrier flange is connected to a plurality of gas outlet lines, each gas outlet line being in communication with a corresponding hole.
9. The cleaning and fixing device for repairing and regenerating a semiconductor chemical mechanical polishing head according to claim 6, wherein the jig positioning column is located in a part positioning groove of the metal carrier flange, and the part positioning column is connected in the jig positioning hole.
10. The cleaning fixture of claim 1, wherein the cleaning fixture is made of steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321966908.9U CN220241144U (en) | 2023-07-25 | 2023-07-25 | Cleaning and fixing device for repairing and regenerating semiconductor chemical mechanical polishing head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321966908.9U CN220241144U (en) | 2023-07-25 | 2023-07-25 | Cleaning and fixing device for repairing and regenerating semiconductor chemical mechanical polishing head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220241144U true CN220241144U (en) | 2023-12-26 |
Family
ID=89229401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321966908.9U Active CN220241144U (en) | 2023-07-25 | 2023-07-25 | Cleaning and fixing device for repairing and regenerating semiconductor chemical mechanical polishing head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220241144U (en) |
-
2023
- 2023-07-25 CN CN202321966908.9U patent/CN220241144U/en active Active
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