CN110773341A - Atomization cooling device, automatic processing equipment and method - Google Patents
Atomization cooling device, automatic processing equipment and method Download PDFInfo
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- CN110773341A CN110773341A CN201910971661.1A CN201910971661A CN110773341A CN 110773341 A CN110773341 A CN 110773341A CN 201910971661 A CN201910971661 A CN 201910971661A CN 110773341 A CN110773341 A CN 110773341A
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- 238000001816 cooling Methods 0.000 title claims abstract description 67
- 238000000889 atomisation Methods 0.000 title claims abstract description 23
- 238000012545 processing Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title abstract description 7
- 239000007788 liquid Substances 0.000 claims abstract description 69
- 239000007921 spray Substances 0.000 claims abstract description 34
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000003595 mist Substances 0.000 claims abstract description 24
- 230000001276 controlling effect Effects 0.000 claims description 13
- 230000001105 regulatory effect Effects 0.000 claims description 13
- 238000001914 filtration Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 9
- 238000005507 spraying Methods 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- 239000000779 smoke Substances 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/40—Filters located upstream of the spraying outlets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/12—Spray pistols; Apparatus for discharge designed to control volume of flow, e.g. with adjustable passages
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D1/00—Devices using naturally cold air or cold water
- F25D1/02—Devices using naturally cold air or cold water using naturally cold water, e.g. household tap water
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D29/00—Arrangement or mounting of control or safety devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nozzles (AREA)
Abstract
The invention relates to an atomization cooling device, automatic processing equipment and a method, wherein the atomization cooling device comprises an atomization assembly, a spray nozzle, a liquid inlet pipeline, an air inlet pipeline and a spray head, wherein an external water source is connected with the spray head through the liquid inlet pipeline; the air pressure control assembly is arranged on the air inlet pipeline; and the flow control assembly is arranged on the liquid inlet pipeline. An automated processing apparatus comprising: a base; the two upright columns are respectively arranged on two sides of the base; the cross beam is arranged between the two upright columns; the atomization cooling device is arranged on the cross beam in a sliding manner; and the object stage is arranged on the base in a sliding manner. An atomizing cooling method comprising the steps of: external liquid is conveyed to the spray head, and an external air source is conveyed to the spray head; the water mist sprayed out of the nozzle is uniform by controlling the flow of the external liquid and the air pressure of the external air source. The atomization cooling device, the automatic processing equipment and the method have good cooling effect.
Description
Technical Field
The invention relates to the technical field of automation equipment, in particular to an atomization cooling device, automation processing equipment and an atomization cooling method.
Background
With the development of clean energy, solar panels are widely used. In the production process of the solar cell panel, laser is required to be firstly utilized to irradiate so that the solar cell panel is heated, then the atomization cooling device is utilized to cool the local part of the solar cell panel, the temperature difference is utilized to generate thermal stress for splitting, and then the split solar cell panel is processed. However, the existing atomization cooling device has uneven water mist and poor cooling effect.
Disclosure of Invention
In view of the above, it is desirable to provide an atomizing and cooling device, an automated processing apparatus, and a method for solving the problem of non-uniform mist of the atomizing and cooling device.
An atomizing cooling device comprising:
the atomizing assembly comprises a nozzle, a liquid inlet pipeline, an air inlet pipeline and a spray head, wherein the liquid inlet pipeline is connected with the spray head, the air inlet pipeline is connected with the spray head, and the nozzle is connected with the spray head to spray water mist;
the air pressure control assembly is arranged on the air inlet pipeline and used for controlling the air pressure; and
and the flow control assembly is arranged on the liquid inlet pipeline and is used for controlling the liquid flow.
In the atomization cooling device, the air pressure control assembly is arranged on the air inlet pipeline to control the air pressure, and the flow control assembly is arranged on the liquid inlet pipeline to control the liquid flow, so that the water mist sprayed by the nozzle is uniform through the matching of the air pressure and the liquid flow, and the cooling effect on the workpiece to be processed is good.
In one embodiment, the air pressure control assembly includes a pressure regulating valve and a pressure sensor electrically connected to each other, the pressure sensor is configured to detect a gas pressure, and the pressure regulating valve is capable of adjusting the gas pressure according to the gas pressure detected by the pressure sensor.
In one embodiment, the flow control assembly includes a flow restrictor and a flow meter electrically connected to each other, the flow meter is used for detecting a liquid flow, and the flow restrictor can adjust the liquid flow according to the liquid flow detected by the flow meter.
In one embodiment, the device further comprises a filter which is arranged on one side of the air inlet pipeline close to the air source and is used for filtering impurities in the external air source.
In one embodiment, the device further comprises a moving platform, and the moving platform is connected with the nozzle to drive the nozzle to move.
In one embodiment, the moving platform includes a first moving platform, a second moving platform, and a third moving platform, the first moving platform is connected to the nozzle to drive the nozzle to move along a first direction, the second moving platform is connected to the first moving platform to drive the first moving platform to move along a second direction, the third moving platform is connected to the second moving platform to drive the second moving platform to move along a third direction, the second direction is perpendicular to the first direction, and the third direction is perpendicular to both the first direction and the second direction.
In one embodiment, the apparatus further comprises a support, the support comprises a first support plate and a second support plate which are vertically connected, the second support plate is connected with the spray head, and the first support plate is connected with the first moving platform.
In one embodiment, the spray head is pivotally connected to the second plate such that the spray nozzle is angularly adjustable relative to the second plate.
An automated processing apparatus comprising:
a base;
the two upright columns are respectively arranged on two sides of the base;
the cross beam spans between the two upright columns;
in the atomization cooling device, the atomization cooling device is slidably disposed on the cross beam and can move along the extending direction of the cross beam; and
the objective table is arranged on the base in a sliding mode and located below the atomization cooling device, the objective table is used for placing a workpiece to be processed, and the objective table can slide relative to the base along a direction perpendicular to the extending direction of the cross beam.
Foretell automatic processing equipment is equipped with atomizing cooling device, and the work piece of treating that places on the objective table can move near atomizing cooling device, readjusts atomizing cooling device's position, aims at accurately and treats that the work piece sprays, and operating efficiency is high, and the water smoke of nozzle is even, and cooling effect is good.
An atomizing cooling method comprising the steps of:
external liquid is conveyed to the spray head, and an external air source is conveyed to the spray head;
the water mist sprayed out of the nozzle is uniform by controlling the flow of the external liquid and the air pressure of the external air source.
According to the atomization cooling method, the air source is better matched with the water source by controlling the air pressure and the liquid flow, so that the water mist sprayed by the nozzles is uniform, and the cooling effect on the workpiece to be processed is good.
Drawings
FIG. 1 is an isometric view of the automated processing equipment of this embodiment;
FIG. 2 is an enlarged view of a portion A of FIG. 1;
FIG. 3 is an exploded view of the atomizing cooling device of the automated processing equipment of FIG. 1;
fig. 4 is a schematic view of a liquid inlet pipeline and a gas inlet pipeline in the automated processing equipment shown in fig. 1.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 3 and 4, an embodiment of the cooling device 10 includes an atomizing element 100, a flow control element 200, and a pressure control element 300.
The atomizing assembly 100 includes a nozzle 110, a liquid inlet pipe 120, an air inlet pipe 130, and a nozzle 140, wherein the nozzle 110 is provided with a liquid inlet, a gas inlet, and an outlet (not shown).
It should be noted that the liquid inlet pipe 120 is used as a pipe for supplying liquid to the spray head 140, and generally has an input end and an output end, wherein the output end is connected to the liquid inlet of the spray head 110, and the input end can be connected to a liquid supply device (not shown in the figures), so that the external liquid 150 can reach the spray head 110 through the liquid inlet pipe 120 and be sprayed out through the spray nozzle 140 to cool the position to be cooled.
In some embodiments, the external liquid 150 is purified water. In other embodiments, the external liquid 150 may be a cooling fluid, such as one of a coolant, glycol, a mixture of glycol and water, synthetic hydrocarbon oil, and the like.
Referring to fig. 4, a first end of the air inlet pipe 130 is disposed at the air inlet, a second end of the air inlet pipe 130 is connected to an external air source 160, and the nozzle 140 is disposed at the outlet. During the use, open air inlet pipeline 130 and feed liquor pipeline 120 simultaneously, nozzle 140 department can form water smoke, and water smoke sprays to waiting to process work piece 20 surface, can make waiting to process work piece 20 surface rapid cooling.
In some embodiments, the liquid inlet pipe 120 and the air inlet pipe 130 are both flexible pipes to meet the rotation requirement of the nozzle 110, so that the nozzle 110 can be placed more flexibly. In other embodiments, the liquid inlet pipe 120 and the air inlet pipe 130 may be made telescopic to further satisfy the length requirement of the pipes.
In some embodiments, the liquid inlet pipe 120 and the air inlet pipe 130 are spaced side by side to make full use of space and reduce the space occupied by the atomizing assembly 100. In other embodiments, the liquid inlet pipe 120 and the air inlet pipe 130 may also be coaxially disposed, and the liquid inlet pipe 120 wraps the periphery of the air inlet pipe 130, so that the water mist sprayed from the nozzle 140 is more uniform.
In some embodiments, the air inlet pipe 130 and the liquid inlet pipe 120 are provided at the same time, so that the liquid is dispersed into tiny droplets by high-speed airflow, the water mist is uniform, and the cooling effect is better. In other embodiments, only the air inlet pipe 130 may be provided to generate the mist, or only the liquid inlet pipe 120 may be provided to generate the mist, and the mist or the mist is sprayed onto the surface of the workpiece 20 to be processed through the nozzle 140, so as to reduce the temperature of the surface of the workpiece 20 to be processed.
Further, to facilitate opening and closing of the air intake pipeline 130 and the liquid intake pipeline 120, please refer to fig. 4, the liquid intake pipeline 120 is provided with a liquid intake valve 121, and the air intake pipeline 130 is provided with an air intake valve 131.
In some embodiments, the air inlet valve 131 and the liquid inlet valve 121 are both solenoid valves, which are not easy to leak and save energy. In other embodiments, the air intake valve 131 and the liquid intake valve 121 may be mechanical valves.
Further, referring to fig. 4, in order to make the water mist atomized by the nozzle 110 more uniform, the liquid inlet pipe 120 is provided with a flow control assembly 200 for controlling the liquid flow, and the gas inlet pipe 130 is provided with a gas pressure control assembly 300 for controlling the gas pressure.
Preferably, in some embodiments, under the cooperation of water flow with a flow rate of 2 to 4ML/min and compressed air with an air pressure of 0.1 to 0.3MPa, the nozzles 140 spray uniform water mist to just meet the cooling requirement of the workpiece 20 to be processed, so that the workpiece can be effectively cooled without changing the production speed, and the phenomenon that the workpiece needs to be dried for a long time due to excessive water mist can be avoided. In other embodiments, the air pressure value and the liquid flow value may be other values to meet the actual processing requirement.
In some embodiments, referring to fig. 4, the flow control assembly 200 includes a flow restrictor 210 and a flow meter 220 electrically connected to each other, the flow restrictor 210 and the flow meter 220 are both disposed on the liquid inlet pipe 120, the flow meter 220 is used for detecting a liquid flow, and the flow restrictor 210 is used for adjusting the liquid flow according to the liquid flow detected by the flow meter 220. The liquid inlet valve 121 is disposed at an end close to the external water source 150, and the flow restrictor 210 and the flow meter 220 are both disposed at a side of the liquid inlet valve 121 away from the external water source 150, so that the liquid flow is detected and adjusted after the liquid inlet valve 121 is opened, and the flow restrictor 210 is prevented from being damaged by the external water source 150 directly impacting the flow restrictor 210. In other embodiments, the flow restrictor 210 and the flow meter 220 may also be combined into one flow restrictor 210, and the flow restrictor 210 may detect the flow rate or adjust the flow rate, thereby simplifying the assembly structure and facilitating the use.
In some embodiments, referring to fig. 4, the pneumatic control assembly 300 includes a pressure regulating valve 310 and a pressure sensor 320, the pressure regulating valve 310 and the pressure sensor 320 are both disposed on the air inlet pipeline 130, the pressure sensor 320 is used for detecting the gas pressure, and the pressure regulating valve 310 is used for regulating the gas pressure according to the gas pressure detected by the pressure sensor 320. The air inlet valve 131 is disposed at one end close to the external air source 160, and the pressure regulating valve 310 and the pressure sensor 320 are both disposed at one side of the air inlet valve 131 far from the external air source 160, so that the air flow is detected and regulated after the air inlet valve 131 is opened, and the external air source 160 is prevented from leaking. In other embodiments, the pressure regulating valve 310 and the pressure sensor 320 may also be combined into one pressure regulating pressure sensor 320, and the pressure regulating pressure sensor 320 may detect the air pressure and regulate the air pressure, so that the assembly is simpler and more convenient, the use is safer, and the risk of air leakage is reduced.
Further, in some embodiments, a filter 330 is further disposed on the air intake line 130, the filter 330 is located between the external air source 160 and the air intake valve 131, and the filter 330 is used for filtering the foreign particles in the external air source 160, so as to prevent the foreign particles from entering the air intake valve 131 and blocking the air intake valve 131, which affects the air supply of the air intake line 130. Specifically, the filter 330 is an oil mist separator.
Referring to fig. 2 and 3, the atomizing cooling device 10 further includes a moving platform connected to the nozzle 110 to drive the nozzle 110 to move.
Specifically, the moving platform includes a first moving platform 400, a second moving platform 500 and a third moving platform 600, the first moving platform 400 is connected to the showerhead 110 to drive the showerhead 110 to move back and forth along a first direction (i.e., X direction in the figure), the second moving platform 500 is connected to the first moving platform 400 to drive the first moving platform 400 to move back and forth along a second direction (i.e., Y direction in the figure), the third moving platform 600 is connected to the second moving platform 500 to drive the second moving platform 500 to move back and forth along a third direction (i.e., Z direction in the figure), and the first direction, the second direction and the third direction are all perpendicular to each other.
Referring to fig. 3, the first moving platform 400 includes a first slide rail 410, a first sliding block 420 and a first adjusting handle 430, the nozzle 110 is connected to the first slide rail 410, the first slide rail 410 is slidably connected to the first sliding block 420, the first adjusting handle 430 is fixedly connected to the first slide rail 410, and the first slide rail 410 is driven to slide along a first direction relative to the first sliding block 420 by rotating the first adjusting handle 430.
In some embodiments, the first moving platform 400 further includes a first fixing plate 440, the showerhead 110 is connected to the first fixing plate 440, the first slide rail 410 is disposed on the first fixing plate 440, the first slide block 420 is U-shaped, and the first slide block 420 and the first fixing plate 440 can form a whole, so that the first slide rail 410 is wrapped in the first slide block 420, the first slide rail 410 can be protected, the service life of the first slide rail 410 is prolonged, and the integrity and the sliding stability of the first moving platform 400 can be enhanced. In other embodiments, the first fixing plate 440 may not be provided, and the showerhead 110 may be directly connected to the first slide rail 410.
Referring to fig. 3, the second moving platform 500 includes a second slide rail 510, a second slide block 520 and a second adjusting handle 530. The first fixing plate 440 of the first mobile platform 400 is connected to the second sliding rail 510, the second sliding rail 510 is slidably connected to the second sliding block 520, the second adjusting handle 530 is fixedly connected to the second sliding rail 510, and the second sliding rail 510 is driven to slide along the second direction relative to the second sliding block 520 by rotating the second adjusting handle 530, and simultaneously drives the first mobile platform 400 to move along the second direction.
In some embodiments, the second moving platform 500 further includes a second fixing plate 540, the second sliding rail 510 is disposed on the second fixing plate 540, the first fixing plate 440 is connected to the second fixing plate 540, the second sliding block 520 is U-shaped, and the second sliding block 520 and the second fixing plate 540 can form an integral body, so that the second sliding rail 510 is wrapped in the second sliding block 520, the second sliding rail 510 can be protected, and the integrity of the second moving platform 500 can be enhanced. In other embodiments, the second fixing plate 540 may not be provided.
The third moving platform 600 has the same structure as the second moving platform 500, and will not be described in detail herein, and the third moving platform 600 is connected to the second slider 520 of the second moving platform 500.
Further, referring to fig. 3, the cooling device 10 further includes a bracket 700, the bracket 700 includes a first plate 710 and a second plate 720 that are vertically connected, the first plate 710 is disposed on the first fixing plate 440, and the nozzle 110 is rotatably disposed on the second plate 720, so that the nozzle 110 rotates relative to the second plate 720, thereby facilitating to realize omnidirectional spraying.
In some embodiments, the first plate 710 and the second plate 720 are rectangular, the first plate 710 extends along the Z direction, the second plate 720 extends towards the Y direction away from the first fixing plate 440, the showerhead 110 is connected to the second plate 720 by the adjusting nut 740, and the showerhead 110 extends along the Z direction. In the initial state, the nozzle 140 is perpendicular to the second plate 720; by screwing or unscrewing the adjusting nut 740, the nozzle 140 can be tilted downward (the angle between the nozzle 140 and the second support plate 720 is less than 90 degrees) or tilted upward (the angle between the nozzle 140 and the second support plate 720 is greater than 90 degrees) relative to the second support plate 720, so that the nozzle 140 can spray the workpiece 20 to be processed in all directions. In other embodiments, the nozzle 110 can be rotatably disposed on the second plate 720 through a rotating shaft or a hinge, so that the angle adjustment range of the nozzle 140 is wider and the operation is more convenient.
In some embodiments, the number of nozzles 140 is one. In other embodiments, the number of the nozzles 140 may also be multiple, and multiple nozzles 140 are disposed around the showerhead 110 to better satisfy the requirement of omni-directional spraying.
Referring to fig. 1, an automated processing apparatus 80 includes a base 810, two columns 820, a beam 830, a stage 840, and the atomizing cooling device 10.
The two sides of the base 810 are respectively provided with a column 820, the beam 830 is arranged between the two columns 820, the atomization cooling device 10 is slidably arranged on the beam 830, the atomization cooling device 10 can slide along the beam 830, the objective table 840 is slidably arranged on the base 810 and located below the atomization cooling device 10, and the objective table 840 is used for placing a workpiece 20 to be processed. The beam 830 is spaced from the base 810 such that the stage 840 can pass through the gap when sliding along the base 810 without interference between the stage 840 and the atomizing cooling device 10.
In some embodiments, the above automatic processing apparatus 80 further includes a first mounting plate 850, the atomizing and cooling device 10 is fixed on the first mounting plate 850, a laser apparatus 900 is further disposed on the first mounting plate 850, the laser apparatus 900 is disposed in a staggered manner with respect to the atomizing and cooling device 10, the laser apparatus 900 is configured to heat the workpiece 20 to be processed on the irradiation stage 840, and then the atomizing and cooling device 10 is used to locally spray and cool the workpiece 20 to be processed, so that the workpiece 20 to be processed locally generates a temperature difference to crack, and then the cracked workpiece 20 to be processed is processed. The beam 830 is provided with a third slide rail 831, the third slide rail 831 extends along the Y direction, and the first mounting plate 850 is slidably connected to the third slide rail 831 to drive the laser device 900 and the atomization cooling device 10 to move along the Y direction. In other embodiments, a lifting mechanism may be further added to the cross beam 830, and the first mounting plate 850 is connected to the lifting mechanism, so that the lifting mechanism drives the atomizing cooling device 10 to lift along the Z direction.
In some embodiments, the base 810 is provided with a fourth sliding rail 811, the fourth sliding rail 811 extends along the X direction, the bottom of the stage 840 is provided with a fourth sliding block 841, and the fourth sliding block 841 is slidably connected with the fourth sliding rail 811, so that the stage 840 can slide along the X direction relative to the base 810. In other embodiments, the object stage 840 may be fixedly disposed on the base 810.
In some embodiments, the object stage 840 is provided with a plurality of air exhaust holes, the workpiece 20 to be processed is placed on the object stage 840, and an external device evacuates the workpiece 20 to be processed through the air exhaust holes and fixes the workpiece 20 to be processed on the object stage 840 in a vacuum adsorption manner, so that the damage to the workpiece 20 to be processed is safe and can be reduced. In other embodiments, the workpiece 20 to be processed may be held directly on the stage 840.
The atomization cooling device 10 is provided with the air inlet pipeline 130 and the liquid inlet pipeline 120, the air pressure control assembly 300 is arranged on the air inlet pipeline 130 and used for controlling air pressure, the flow control assembly 200 is arranged on the liquid inlet pipeline 120 and used for controlling liquid flow, and water mist sprayed by the nozzles 140 is uniform through the matching of air pressure and liquid flow, so that the cooling effect of the workpiece 20 to be processed is good; the first moving platform 400, the second moving platform 500 and the third moving platform 600 can drive the nozzle 140 to move in three different directions, so that the spraying of the workpiece 20 to be processed is facilitated, the efficiency is high, and the operation is simple and convenient; the nozzle 140 is rotatably arranged on the support 700, the angle of the nozzle 140 can be adjusted, so that all-dimensional spraying is realized, and the structural design is reasonable.
The automatic processing equipment 80 is provided with the atomizing and cooling device 10, the workpiece 20 to be processed placed on the objective table 840 can be moved to the position near the atomizing and cooling device 10, the position of the atomizing and cooling device 10 is adjusted again, the workpiece 20 to be processed is accurately aimed at for spraying, the operation efficiency is high, the water mist of the nozzles 140 is uniform, and the cooling effect is good.
An embodiment of an atomized cooling method includes the steps of:
an external water source 150 enters the showerhead 110 while an external gas source enters the showerhead 110. Specifically, an external water source 150 enters the showerhead 110 through the inlet line 120 and an external air source enters the showerhead 110 through the inlet line 130.
The water mist sprayed from the nozzle 140 is uniform by controlling the flow rate of the external water source 150 and the air pressure of the external air source 160. Specifically, the flow meter 220 is used for detecting the liquid flow, the flow restrictor 210 is used for adjusting the liquid flow, the pressure sensor 320 is used for detecting the gas pressure, and the pressure adjusting valve 310 is used for adjusting the gas pressure, so that the water mist sprayed by the nozzle 140 is uniform under the cooperation of a water source with the flow of 2-4ML/min and a gas source with the gas pressure of 0.1-0.3MPa, and the requirement of cooling the workpiece 20 to be processed is met.
The atomization cooling method enables the air source to be better matched with the water source by controlling the air pressure and the liquid flow, so that the water mist sprayed by the nozzles 140 is uniform, and the cooling effect of the workpiece 20 to be processed is good.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. An atomizing cooling device, comprising:
the atomizing assembly comprises a nozzle, a liquid inlet pipeline, an air inlet pipeline and a spray head, wherein the liquid inlet pipeline is connected with the spray head, the air inlet pipeline is connected with the spray head, and the nozzle is connected with the spray head to spray water mist;
the air pressure control assembly is arranged on the air inlet pipeline and used for controlling the air pressure; and
and the flow control assembly is arranged on the liquid inlet pipeline and is used for controlling the liquid flow.
2. The atomizing cooling device of claim 1, wherein said pneumatic control assembly comprises a pressure regulating valve and a pressure sensor electrically connected to each other, said pressure sensor is configured to detect a gas pressure, and said pressure regulating valve is configured to adjust the gas pressure according to the gas pressure detected by said pressure sensor.
3. The atomizing cooling device of claim 1, wherein said flow control assembly includes a flow restrictor and a flow meter electrically connected to each other, said flow meter being configured to detect a liquid flow rate, said flow restrictor being configured to regulate the liquid flow rate in response to the liquid flow rate detected by said flow meter.
4. The atomizing cooling device of claim 1, further comprising a filter disposed on a side of said air inlet line adjacent to said air supply for filtering impurities from an external air supply.
5. The atomizing cooling device of claim 1, further comprising a moving platform coupled to said nozzle for moving said nozzle.
6. The atomizing cooling device of claim 5, wherein said moving platform includes a first moving platform, a second moving platform, and a third moving platform, said first moving platform is connected to said nozzle to drive said nozzle to move along a first direction, said second moving platform is connected to said first moving platform to drive said first moving platform to move along a second direction, said third moving platform is connected to said second moving platform to drive said second moving platform to move along a third direction, said second direction is perpendicular to said first direction, and said third direction is perpendicular to both said first direction and said second direction.
7. The atomizing cooling device of claim 6, further comprising a support, said support including a first support plate and a second support plate connected vertically, said second support plate being connected to said spray head, said first support plate being connected to said first movable stage.
8. The atomizing cooling device of claim 7, wherein said spray head is pivotally connected to said second plate such that said spray nozzle is angularly adjustable relative to said second plate.
9. An automated processing apparatus, comprising:
a base;
the two upright columns are respectively arranged on two sides of the base;
the cross beam spans between the two upright columns;
the cooling device according to any one of claims 1 to 8, wherein the cooling device is slidably mounted on the cross beam and is capable of moving along the extension direction of the cross beam; and
the objective table is arranged on the base in a sliding mode and located below the atomization cooling device, the objective table is used for placing a workpiece to be processed, and the objective table can slide relative to the base along a direction perpendicular to the extending direction of the cross beam.
10. An atomizing cooling method, comprising the steps of:
external liquid is conveyed to the spray head, and an external air source is conveyed to the spray head;
the water mist sprayed out of the nozzle is uniform by controlling the flow of the external liquid and the air pressure of the external air source.
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