CN220233084U - Height calibration device for scanning electron microscope - Google Patents
Height calibration device for scanning electron microscope Download PDFInfo
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- CN220233084U CN220233084U CN202321586495.1U CN202321586495U CN220233084U CN 220233084 U CN220233084 U CN 220233084U CN 202321586495 U CN202321586495 U CN 202321586495U CN 220233084 U CN220233084 U CN 220233084U
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- 238000012546 transfer Methods 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 description 5
- 238000013459 approach Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Abstract
The utility model discloses a height calibration device for a scanning electron microscope, which comprises: the device comprises a first mounting seat, a first height adjusting assembly, a second height adjusting assembly and a sample table, wherein the first mounting seat is arranged on a mounting platform of the scanning electron microscope, the first height adjusting assembly is arranged on the first mounting seat and is movable along a first direction of a height calibrating device, the first height adjusting assembly is arranged between the first height adjusting assembly and the sample table, the second height adjusting assembly is suitable for driving the sample table to move along the first direction, and the height of the sample table is adjusted along the first direction through the first height adjusting assembly and the second height adjusting assembly so as to calibrate the distance between the sample table and an electron gun of the scanning electron microscope. Therefore, the distance between the sample table and the electron gun can be measured by adjusting the height of the sample table, so that the accurate calibration of the distance between the sample table and the electron gun is realized, and the calibration method is simple and convenient.
Description
Technical Field
The utility model relates to the technical field of scanning electron microscope height calibration, in particular to a height calibration device for a scanning electron microscope.
Background
At present, the distance between a scanning electron microscope sample stage and an electron gun is difficult to calibrate accurately, and the calibration efficiency is usually low.
Disclosure of Invention
The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model aims to provide a height calibration device for a scanning electron microscope, which can measure the distance between a sample stage and an electron gun by adjusting the height of the sample stage, thereby realizing the accurate calibration of the distance between the sample stage and the electron gun, and the calibration method is simple and convenient.
To achieve the above object, an embodiment of the present utility model provides a height calibration device for a scanning electron microscope, including:
the first mounting seat is arranged on a mounting platform of the scanning electron microscope;
the first height adjusting assembly is arranged on the first mounting seat and can move relative to the first mounting seat along the first direction of the height calibrating device;
the second height adjusting assembly is arranged between the first height adjusting assembly and the sample table, the second height adjusting assembly is suitable for driving the sample table to move along a first direction, and the height of the sample table is adjusted along the first direction through the first height adjusting assembly and the second height adjusting assembly so as to calibrate the distance between the sample table and the electron gun of the scanning electron microscope.
According to the height calibration device provided by the embodiment of the utility model, the first height adjusting component is movable relative to the first mounting seat, the second height adjusting component is arranged between the first height adjusting component and the sample stage, the second height adjusting component is suitable for driving the sample stage to move along the first direction, and the height of the sample stage can be adjusted along the first direction through the cooperation of the first height adjusting component and the second height adjusting component. Therefore, the distance between the sample table and the electron gun can be measured by adjusting the height of the sample table, so that the accurate calibration of the distance between the sample table and the electron gun is realized, and the calibration method is simple and convenient.
In some examples of the utility model, the adjustment step size of the first height adjustment assembly is greater than the adjustment step size of the second height adjustment assembly.
In some examples of the utility model, the first height adjustment assembly comprises:
the first transfer piece is suitable for being connected with the second height adjusting component, and the first height adjusting piece is arranged between the first transfer piece and the first installation seat and drives the first transfer piece to move along the first direction so as to adjust the height of the first transfer piece.
In some examples of the utility model, the first height adjustment member is configured as a height adjustment lever, the first height adjustment member having a first mounting portion, the first mount being provided with a first mounting hole cooperatively assembled with the first mounting portion, the first height adjustment member being cooperatively mounted through the first mounting portion and the first mounting hole to move the first height adjustment member relative to the first mount in the first direction.
In some examples of the utility model, the first height adjustment assembly further comprises: the first locking piece and the second locking piece are matched and assembled with the first height adjusting piece so as to fix the first height adjusting piece on the first mounting seat.
In some examples of the present utility model, the first locking member and the second locking member are both sleeved on the first mounting portion, and the first height adjusting member is fixed to the first mounting seat through locking cooperation of the first locking member and the first mounting portion and locking cooperation of the second locking member and the first mounting portion.
In some examples of the utility model, the second height adjustment assembly comprises:
the second installation seat is fixedly arranged on the first height adjusting component;
the second height adjusting piece, the guide piece and the second switching piece are all arranged on the second installation seat, the second switching piece is connected with the second height adjusting piece and matched with the guide piece in a guiding way, the sample table is fixedly arranged on the second switching piece, and the second switching piece is driven to move along the first direction through the second height adjusting piece so as to adjust the height of the sample table.
In some examples of the utility model, the guide has a first guide portion and the second adapter has a second guide portion, the second adapter being moved in the first direction by the first guide portion and the second guide portion being in guiding engagement.
In some examples of the utility model, one of the first and second guide portions is a guide block, the other of the first and second guide portions is a guide rail, the guide block is slidably disposed on the guide rail, and the guide rail extends in the first direction.
In some examples of the utility model, the sample stage has calibration surfaces of different heights in the first direction.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
fig. 1 is a perspective view of a first view angle of a height calibration device for a scanning electron microscope according to an embodiment of the present utility model.
Reference numerals:
a height calibration device 100;
a first mount 1;
a first height adjustment assembly 2; a first adapter 21; a first height adjuster 22; a first locking member 23; a second locking member 24;
a second height adjustment assembly 3; a second mount 31; a second height adjuster 32; a guide 33; a second adapter 34;
a sample stage 4; a calibration surface 41;
a first direction X.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
A height calibration apparatus 100 for a scanning electron microscope according to an embodiment of the present utility model is described below with reference to the accompanying drawings.
As shown in fig. 1, a height calibration apparatus 100 according to an embodiment of the present utility model includes: the first mount 1, the first height adjusting assembly 2, the second height adjusting assembly 3 and the sample stage 4, the first mount 1 is disposed on a mounting platform of the scanning electron microscope, the first height adjusting assembly 2 is disposed on the first mount 1, it is understood that the first height adjusting assembly 2 may be, but is not limited to, a motor adjusting assembly, a cylinder adjusting assembly or a bolt adjusting assembly, etc., and is movable relative to the first mount 1 along a first direction X of the height calibration device 100, the second height adjusting assembly 3 is disposed between the first height adjusting assembly 2 and the sample stage 4, it is understood that the second height adjusting assembly 3 may be, but is not limited to, a motor adjusting assembly, a cylinder adjusting assembly or a bolt adjusting assembly, etc., and the second height adjusting assembly 3 is adapted to drive the sample stage 4 to move along the first direction X, adjust a height of the sample stage 4 along the first direction X by the first height adjusting assembly 2 and the second height adjusting assembly 3, so as to calibrate a distance between the sample stage 4 and an electron gun of the scanning electron microscope.
Specifically, as shown in fig. 1, the first mounting seat 1 is fixedly mounted on the mounting platform of the scanning electron microscope, and the mounting manner includes, but is not limited to, bolting, etc., so that the second height adjusting assembly 3 is arranged between the first height adjusting assembly 2 and the sample stage 4, so that the second height adjusting assembly 3 is fixedly connected with the first height adjusting assembly 2, further, the first height adjusting assembly 2 is arranged on the first mounting seat 1 and moves up and down along the first direction X of the height adjusting assembly 100, i.e. along the height direction of the height adjusting assembly 100, the first height adjusting assembly 2 can move up and down along the first direction X relative to the first mounting seat 1, further, the height adjusting assembly 100 further includes a second height adjusting assembly 3 and the sample stage 4, wherein the second height adjusting assembly 3 is arranged between the first height adjusting assembly 2 and the sample stage 4, specifically, the second height adjusting assembly 3 can move up and down along the first direction X, and the second height adjusting assembly 3 can be driven by the first height adjusting assembly 4.
As a specific example, the height calibration device 100 is used to calibrate the real distance between the sample stage 4 and the electron gun of the scanning electron microscope in combination with the standard sieve rule, specifically, in the process of height calibration, a suitable standard sieve rule is selected, for example, a standard sieve rule with a standard length of 2.5cm is selected, the standard sieve rule is placed on the surface of the sample stage 4 opposite to the electron gun, the standard sieve rule is placed along the first direction X, the first height adjustment assembly 2 is firstly adjusted, so that the standard sieve rule gradually approaches the electron gun under the common driving of the second height adjustment assembly 3 and the sample stage 4, and after the standard sieve rule approaches the electron gun by a certain distance, the second height adjustment assembly 3 is adjusted to drive the sample stage 4 to move along the first direction X, so that the standard sieve rule further approaches the electron gun until the lower end of the standard sieve rule is abutted to the lower end of the electron gun, and the second height adjustment assembly 3 is stopped, so that the standard sieve rule is located between the sample stage 4 and the electron gun, and two ends of the standard sieve rule are respectively attached to the sample stage 4 and the electron gun, and the real distance between the standard sieve rule and the sample stage 4 can be adjusted by the real distance between the standard sieve rule and the sample stage 4, namely, the real distance can be measured by the method of the real distance between the sample stage 4 and the sample can be adjusted by the real distance of the standard length of the sample 4.
According to the height calibration device 100 of the embodiment of the utility model, the first height adjusting component 2 is movable relative to the first mounting seat 1, the second height adjusting component 3 is arranged between the first height adjusting component 2 and the sample stage 4, and the second height adjusting component 3 is suitable for driving the sample stage 4 to move along the first direction X, and the height of the sample stage 4 can be adjusted along the first direction X through the cooperation of the first height adjusting component 2 and the second height adjusting component 3. Therefore, the distance between the sample table 4 and the electron gun can be measured by adjusting the height of the sample table 4, so that the accurate calibration of the distance between the sample table 4 and the electron gun is realized, and the calibration method is simple and convenient.
In some embodiments of the utility model, the adjustment step size of the first height adjustment assembly 2 is greater than the adjustment step size of the second height adjustment assembly 3. Specifically, the first height adjusting component 2 and the second height adjusting component 3 move along the first direction X by the same example, the length of time required for the movement of the first height adjusting component 2 is smaller than the length of time required for the movement of the second height adjusting component 3, that is, the adjusting step distance of the first height adjusting component 2 is longer than the adjusting step distance of the second height adjusting component 3, that is, the moving speed of the first height adjusting component 2 along the first direction X is longer than the moving speed of the second height adjusting component 3 along the first direction X, for example, the adjusting step distance of the first height adjusting component 2 is 0.1mm, the adjusting step distance of the second height adjusting component 3 is 0.01mm, so that the time required for the adjustment of the first height adjusting component 2 is 10 times of the time required for the adjustment of the second height adjusting component 3, so that when the standard sieve rule is adjusted to be close to an electronic gun, the moving speed of the first height adjusting component 2 is firstly greater than the moving speed of the second height adjusting component 3 along the first direction X, for example, the adjusting step distance of the second height adjusting component 3 is 0.01mm, so that the electronic gun can be close to the standard rule 3 can be driven by the electronic gun 3, and the electronic gun can be close to the second standard rule 3, and the electronic gun can be adjusted along the second direction X, and the distance can be adjusted to the standard rule, and the electronic gun can be close to the standard rule 3.
In some embodiments of the present utility model, as shown in fig. 1, the first height adjustment assembly 2 comprises: the first adaptor 21 and the first height adjusting piece 22, the first adaptor 21 is suitable for being connected with the second height adjusting assembly 3, the first height adjusting piece 22 is arranged between the first adaptor 21 and the first mounting seat 1, and the first adaptor 21 is driven to move along the first direction X through the first height adjusting piece 22 so as to adjust the height of the first adaptor 21.
Specifically, as shown in fig. 1, the first height adjusting component 2 includes a first height adjusting member 22, where the first height adjusting member 22 is provided on the first mounting seat 1 and is movable along the first direction X, the first height adjusting member 22 may be optionally configured as a lifting motor, a telescopic cylinder or a bolt rod, where there is no specific limitation, it is only required to ensure that the first height adjusting member 22 is movable along the first direction X relative to the first mounting seat 1, further, the first height adjusting component 2 further includes a first adaptor 21, where the first adaptor 21 may be configured as a circular platform, the first adaptor 21 is fixedly connected with the first height adjusting member 22, so that the height of the first adaptor 21 may be adjusted by adjusting the movement of the first height adjusting member 22 along the first direction X, and the second height adjusting component 3 is fixedly mounted on the first adaptor 21, so that the height of the second height adjusting component 3 may be adjusted in a simple manner along the first direction X, and further, the height of the sample 4 may be adjusted in a simple manner.
In some embodiments of the present utility model, the first height adjusting piece 22 is configured as a height adjusting lever, the first height adjusting piece 22 has a first mounting portion, the first mounting seat 1 is provided with a first mounting hole cooperatively assembled with the first mounting portion, and the first height adjusting piece 22 is moved relative to the first mounting seat 1 in the first direction X by the first mounting portion and the first mounting hole cooperatively mounted.
Specifically, the first height adjusting member 22 may be configured as a height adjusting rod having a first mounting portion, optionally, an outer side wall of the first mounting portion has a screw thread, further, the first mounting seat 1 is provided with a first mounting hole cooperatively assembled with the first mounting portion, the inner side wall of the first mounting hole has a screw thread, it is understood that the first mounting portion is matched with the screw thread provided by the first mounting hole, when the first height adjusting member 22 needs to be adjusted, the first mounting hole of the first mounting seat 1 is used as a reference, the movement of the first height adjusting member 22 can be realized by rotating the first mounting portion cooperatively assembled with the first mounting hole, for example, when the first mounting portion rotates clockwise relative to the first mounting hole, the first height adjusting member 22 moves away from the first mounting seat 1 along the first direction X, and when the first mounting portion rotates counterclockwise relative to the first mounting hole, the first height adjusting member 22 moves toward the first mounting seat 1 along the first direction X, so that the first mounting seat 22 can be realized by rotating the screw thread, and the first height adjusting member 22 can move along the first direction X with low cost.
In some embodiments of the present utility model, as shown in fig. 1, the first height adjustment assembly 2 further comprises: the first locking member 23 and the second locking member 24, the first locking member 23 and the second locking member 24 are assembled in cooperation with the first height adjusting member 22 to fix the first height adjusting member 22 to the first mounting base 1. That is, in order to ensure the stability of the first height adjusting member 22, the first height adjusting member 2 further includes a locking structure, specifically, the first height adjusting member 2 includes a first locking member 23 and a second locking member 24, further, the first height adjusting member 22 is configured as a height adjusting rod, and the first locking member 23 and the second locking member 24 are assembled in cooperation with the height adjusting rod, wherein the height adjusting rod has a second mounting portion, the second mounting portion is spaced apart from the first mounting portion, and the outer surface of the second mounting portion has a thread, the first locking member 23 and the second locking member 24 may be configured as a locking nut, and the internal thread of the locking nut is matched with the thread of the second mounting portion, when the first height adjusting member 22 needs to be adjusted, the first locking member 23 and the second locking member 24 are rotated so that the first locking member 23 and the second locking member 24 are moved toward a direction away from the first mounting seat 1, thereby releasing the locking of the first height adjusting member 22, and when the first height adjusting member 22 is adjusted, the first locking member 23 and the second locking member 24 need to be rotated, and the first locking member 24 can be sequentially unlocked, and the first locking member 23 and the second locking member 24 can be sequentially arranged, thereby realizing the locking of the first height adjusting member and the first locking member 1.
In some embodiments of the present utility model, as shown in fig. 1, the first locking member 23 and the second locking member 24 are both sleeved on the first mounting portion, so that the first height adjusting member 22 is fixed to the first mounting seat 1 through locking engagement of the first locking member 23 with the first mounting portion and locking engagement of the second locking member 24 with the first mounting portion. That is, when the first height adjusting member 22 is configured as the height adjusting rod having the first mounting portion, the first locking member 23 and the second locking member 24 are both sleeved on the first mounting portion, the outer side wall of the first mounting portion has the threads, further, the first locking member 23 and the second locking member 24 are configured as the locking nut, the internal threads of the locking nut are matched with the threads of the first mounting portion, when the first height adjusting member 22 needs to be adjusted, the first locking member 23 and the second locking member 24 are rotated to enable the first locking member 23 and the second locking member 24 to move towards the direction far away from the first mounting seat 1, so that locking of the first height adjusting member 22 can be released, when the first height adjusting member 22 needs to be fastened after the first height adjusting member 22 is adjusted, the first locking member 23 and the second locking member 24 are rotated to enable the first locking member 23, the second locking member 24 and the first mounting seat 1 to be sequentially abutted, thereby achieving fixing of the first height adjusting member 22, and thus setting, the first height adjusting member 22 can be easily and reliably unlocked by rotating the first locking member 23 and the second locking member 24.
In some embodiments of the present utility model, as shown in fig. 1, the second height adjustment assembly 3 comprises: the second mount pad 31, second altitude mixture control spare 32, guide 33 and second adaptor 34, second mount pad 31 sets firmly in first altitude mixture control subassembly 2, second altitude mixture control spare 32 and guide 33 all locate second mount pad 31, second adaptor 34 is connected and with guide 33 direction cooperation with second altitude mixture control spare 32, and sample platform 4 sets firmly in second adaptor 34, drives second adaptor 34 along first direction X through second altitude mixture control spare 32 and removes in order to adjust the height of sample platform 4.
Specifically, the main function of the second height adjusting assembly 3 is to realize precise adjustment of the height of the sample stage 4, based on which, the second height adjusting assembly 3 of the present application includes a second mounting seat 31, a second height adjusting member 32, a guiding member 33 and a second adapter 34, wherein the second mounting seat 31 is fixedly mounted on the first adapter 21, and the mounting manner includes, but is not limited to, bolting, etc., so as to realize the detachment of the first height adjusting assembly 2 and the second height adjusting assembly 3, so as to facilitate the replacement of the second height adjusting assembly 3, further, the guiding member 33 is fixedly mounted on the second mounting seat 31, the second height adjusting member 32 is mounted on the second mounting seat 31, and the second height adjusting member 32 is movable relative to the second mounting seat 31 along the first direction X, and the second adapter 34 is fixedly connected with the second height adjusting member 32, so as to set, the second adaptor 34 is driven by the second height adjusting member 32 to move along the first direction X, and it should be noted that the second height adjusting member 32 may be configured as a lifting motor, a telescopic cylinder or a bolt rod, which is not limited herein, further, the second adaptor 34 is in guiding fit with the guiding member 33, and the guiding member 33 has a guiding function, so that the second adaptor 34 is driven by the second height adjusting member 32 and guided by the guiding member 33, so that smooth movement of the second adaptor 34 in the first direction X is ensured, and precise adjustment of the second adaptor 34 in the first direction X is facilitated, and further, the sample stage 4 is fixedly arranged on the second adaptor 34, thereby facilitating precise adjustment of the sample stage 4 in the first direction X, and further facilitating precise adjustment function of the second height adjusting assembly 3.
In some embodiments of the present utility model, the guide 33 has a first guide portion and the second adapter 34 has a second guide portion, and the second adapter 34 is moved in the first direction X by the guide engagement of the first guide portion and the second guide portion.
Specifically, the guide member 33 has a first guide portion, the second adaptor 34 has a second guide portion, when the second height adjusting member 32 drives the second adaptor 34 to move, the second adaptor 34 can move along the first direction X under the guiding action of the first guide portion and the second guide portion, and by using the first guide portion and the second guide portion in cooperation, the second adaptor 34 can be ensured to move smoothly along the first direction X, so that the direction deviation in the moving process is avoided, the moving stability of the second adaptor 34 in the first direction X is improved, and the precise adjusting function of the second height adjusting assembly 3 is facilitated.
In some embodiments of the utility model, one of the first and second guide portions is a guide block, the other of the first and second guide portions is a guide rail, the guide block is slidably disposed on the guide rail, and the guide rail extends in the first direction X. Specifically, the first guide portion and the second guide portion are correspondingly arranged, if the first guide portion is arranged as a guide block, the second guide portion is arranged as a guide rail, and if the first guide portion is arranged as a guide rail, the second guide portion is arranged as a guide block, and the guide block can slide along the guide rail in the first direction X. Therefore, the second adapter 34 can stably move in the first direction X through the cooperation of the guide blocks and the guide rails, and the guide blocks and the guide rails are simple in structure and convenient to assemble.
In some embodiments of the utility model, as shown in fig. 1, the sample stage 4 has calibration surfaces 41 of different heights in a first direction X. That is, the sample stage 4 may be provided with calibration surfaces 41 having different heights, for example, the sample stage 4 has four calibration surfaces 41, the heights of the calibration surfaces 41 are 2cm, 2.5cm, 4cm, and 6cm, respectively, the number and the height of the calibration surfaces 41 are selected according to specific needs, which are not particularly limited herein, and further, different standard sieves are selected according to the calibration surfaces 41 having different heights, that is, the four calibration surfaces 41 of the sample stage 4 are calibrated by using standard sieves having 2cm, 2.5cm, 4cm, and 6cm, respectively, so that the accuracy of the distance calibration between the sample stage 4 and the electron gun is further improved by performing multiple calibrations by the height calibration device 100.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A height calibration device for a scanning electron microscope, comprising:
the first mounting seat is arranged on the mounting platform of the scanning electron microscope;
the first height adjusting assembly is arranged on the first mounting seat and is movable relative to the first mounting seat along a first direction of the height calibrating device;
the second height adjusting assembly is arranged between the first height adjusting assembly and the sample stage, the second height adjusting assembly is suitable for driving the sample stage to move along the first direction, and the height of the sample stage is adjusted along the first direction through the first height adjusting assembly and the second height adjusting assembly so as to calibrate the distance between the sample stage and the electron gun of the scanning electron microscope.
2. The height calibration device of claim 1, wherein the adjustment step of the first height adjustment assembly is greater than the adjustment step of the second height adjustment assembly.
3. The height calibration device of claim 2, wherein the first height adjustment assembly comprises:
the first transfer piece is suitable for being connected with the second height adjusting component, the first height adjusting piece is arranged between the first transfer piece and the first mounting seat, and the first transfer piece is driven to move along the first direction through the first height adjusting piece so as to adjust the height of the first transfer piece.
4. A height calibration apparatus as recited in claim 3, wherein said first height adjustment member is configured as a height adjustment lever, said first height adjustment member having a first mounting portion, said first mounting seat being provided with a first mounting hole cooperatively assembled with said first mounting portion, said first height adjustment member being cooperatively mounted through said first mounting portion and said first mounting hole to move relative to said first mounting seat in said first direction.
5. The height calibration device of claim 4, wherein the first height adjustment assembly further comprises: the first locking piece and the second locking piece are matched and assembled with the first height adjusting piece, so that the first height adjusting piece is fixed on the first mounting seat.
6. The height calibration device according to claim 5, wherein the first locking member and the second locking member are both sleeved on the first mounting portion, and the first height adjusting member is fixed to the first mounting seat by locking engagement of the first locking member with the first mounting portion and locking engagement of the second locking member with the first mounting portion.
7. The height calibration device of any one of claims 1-6, wherein the second height adjustment assembly comprises:
the second installation seat is fixedly arranged on the first height adjusting component;
the second height adjusting piece, the guide piece and the second switching piece, the second height adjusting piece with the guide piece is all located the second mount pad, the second switching piece with the second height adjusting piece is connected and with the guide piece direction cooperation, just the sample platform set firmly in the second switching piece, through the second height adjusting piece drive the second switching piece is followed the first direction removes in order to adjust the height of sample platform.
8. The height calibration device of claim 7, wherein the guide has a first guide portion and the second adapter has a second guide portion, the second adapter being moved in the first direction by the first guide portion and the second guide portion being in guiding engagement.
9. The height calibration device of claim 8, wherein one of the first guide portion and the second guide portion is a guide block, the other of the first guide portion and the second guide portion is a guide rail, the guide block is slidably disposed on the guide rail, and the guide rail extends in the first direction.
10. The height calibration device of any one of claims 1-6, wherein the sample stage has calibration surfaces of different heights along the first direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321586495.1U CN220233084U (en) | 2023-06-20 | 2023-06-20 | Height calibration device for scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321586495.1U CN220233084U (en) | 2023-06-20 | 2023-06-20 | Height calibration device for scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220233084U true CN220233084U (en) | 2023-12-22 |
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ID=89197140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321586495.1U Active CN220233084U (en) | 2023-06-20 | 2023-06-20 | Height calibration device for scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220233084U (en) |
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2023
- 2023-06-20 CN CN202321586495.1U patent/CN220233084U/en active Active
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