CN220200656U - Vacuum pickup mechanism and manipulator device - Google Patents

Abstract

The utility model relates to a vacuum pickup mechanism and a manipulator device provided with the vacuum pickup mechanism, wherein the vacuum pickup mechanism comprises a cylinder body, an air passage and a piston cavity are arranged on the cylinder body, and the air passage is used for communicating with a vacuumizing mechanism; the vacuum part is arranged in the air passage, and a vacuum air passage communicated with the air passage is arranged in the vacuum part; the first end of the piston rod is arranged in the piston cavity in a sliding mode, and the second end of the piston rod extends out of the piston cavity in a sliding mode. According to the vacuum suction device, the vacuum piece is communicated with the suction nozzle assembly, the vacuum suction mechanism is communicated with the air passage, the vacuum suction mechanism can be communicated with the suction nozzle assembly based on the air passage and the vacuum air passage, and the vacuum suction mechanism can provide vacuum suction for the suction nozzle assembly, so that the suction nozzle assembly can complete suction work. This application is through all setting up vacuum part and piston rod on the cylinder body, need not to design the gas circuit again and supplies vacuum to use for overall structure can be compacter.

Description

Vacuum pickup mechanism and manipulator device

Technical Field

The utility model relates to the technical field of pneumatic elements, in particular to a vacuum pickup mechanism and a manipulator device.

Background

Along with the development of technology, electrical integrated equipment is widely used in various processing and production fields. In the existing processing equipment, an air cylinder is generally used as a pneumatic device, and the air cylinder and a vacuum chuck are combined to realize the picking and displacement actions of parts.

However, the existing standard air cylinder basically has the function of driving the component to reciprocate at a single station. Because the cylinder body does not have redundant air paths, after the cylinder is combined with the vacuum chuck, an air path is additionally designed for vacuum gas supply so that the cylinder can be matched with the vacuum chuck for vacuum pickup, but the space size of the whole structure can be increased undoubtedly.

In the industry environment, where devices are now required to be increasingly compact, the increase in structural size can lead to a decrease in their device competitiveness.

Disclosure of Invention

In view of the above, it is necessary to provide a vacuum pickup mechanism and a robot device that are compact and can vent a vacuum path.

A vacuum pick-up mechanism comprising:

the cylinder body is internally provided with an air passage and a piston cavity, and the air passage is used for being communicated with the vacuumizing mechanism;

the vacuum part is arranged in the air passage, and a vacuum air passage communicated with the air passage is arranged in the vacuum part;

the first end of the piston rod is arranged in the piston cavity in a sliding mode, and the second end of the piston rod extends out of the piston cavity in a sliding mode;

and the second end of the piston rod is detachably connected with the suction nozzle assembly, and the vacuum piece is communicated with the suction nozzle assembly.

According to the vacuum pickup mechanism, the piston rod is connected with the suction nozzle assembly, and the driving piece is arranged at one end of the piston cavity and can drive the piston rod to drive the suction nozzle assembly to move, so that the basic function of the single-acting cylinder is realized. And the vacuum part is communicated with the suction nozzle assembly, and the vacuumizing mechanism is communicated with the air passage, so that the vacuumizing mechanism is communicated with the suction nozzle assembly through the air passage and the vacuum air passage, and the vacuumizing mechanism can provide vacuum suction for the suction nozzle assembly, so that the suction nozzle assembly can complete suction work. This application is through all setting up vacuum part and piston rod on the cylinder body, need not to design the gas circuit again and supplies vacuum to use for overall structure can be compacter.

In one embodiment, the vacuum pick-up mechanism further comprises a conductive member disposed within the piston cavity and interfacing with the piston rod.

In the above embodiment, the vacuum pickup mechanism is provided with the conductive member connected with the piston rod in the piston cavity of the cylinder, so that the problem of resistance increase between the piston rod and the cylinder due to clearance can be solved by using the conductivity of the conductive member, so that after the vacuum pickup mechanism and the suction nozzle assembly are installed, the conductive member can conduct the electrostatic current at the end of the suction nozzle assembly to the ground in real time, and the risk of breakdown of the picked part by the electrostatic current is reduced.

In one embodiment, an elastic member is further disposed in the piston cavity, and a first end and a second end of the elastic member are disposed on the piston rod and the conductive member, respectively.

In the above embodiment, the piston rod after moving can be driven to return by the elastic force of the elastic member.

In one embodiment, the cylinder body is provided with at least two air passage and two piston cavities, each air passage is internally provided with the vacuum piece, and each piston cavity is internally provided with the piston rod.

In the above embodiment, by forming a group of adjacent vacuum components and a piston rod, each group of vacuum components and piston rod can be connected with a suction nozzle assembly, so that multiple groups of vacuum components and piston rods integrated on one cylinder body can act on multiple groups of suction nozzle assemblies at the same time, and the vacuum components and the piston rods of the groups are not interfered with each other, thereby realizing the application of the multi-station cylinder.

In one embodiment, the vacuum pick-up mechanism further comprises a connecting seat, the vacuum piece and the piston rod are connected with the connecting seat, and the connecting seat is provided with a communicated gas path in a penetrating manner; one end of the communication gas path is communicated with the vacuum gas path, and the other end of the communication gas path is communicated with the external environment.

In the above embodiments, the vacuum member and the piston rod may be assisted to be connected with the nozzle assembly through the connection base.

In one embodiment, the central axis of the vacuum member is parallel to the central axis of the piston rod.

In the above embodiment, the connection between the vacuum member and the piston rod is facilitated, and the overall aesthetic property is ensured.

In one embodiment, the vacuum pick-up mechanism further includes a first connecting piece, the piston cavity has a first port and a second port, the first connecting piece is installed in the cylinder and is communicated with the first port, and the first connecting piece is used for being connected with a driving piece, and the driving piece is used for driving the piston rod to act.

In the above embodiment, the cylinder body and the gas generating mechanism may be connected by the first connecting member, the auxiliary compressed gas enters the cylinder body, and the piston rod is driven to move by the high pressure of the compressed gas.

In one embodiment, the vacuum pickup mechanism further comprises a second connecting piece, wherein the second connecting piece is installed on the cylinder body and communicated with the air-out air passage, and the second connecting piece is used for being communicated with the vacuumizing mechanism.

In the above embodiment, the cylinder may be assisted by the second connection member to connect with a vacuum pump, a vacuum generator, or the like.

In one embodiment, a first sealing member is arranged between the vacuum member and the inner wall surface of the cylinder body, the first sealing member is used for sealing the air passage, a second sealing member is arranged between the piston rod and the inner wall surface of the cylinder body, and the second sealing member is used for sealing the piston cavity.

In the above embodiment, the first sealing member attached to the inner wall surface of the air passage formed by the cylinder body is arranged on the outer side of the vacuum member to seal the air passage, so that the air passage of the vacuum member is always in a sealing state when the vacuum member moves, and meanwhile, the second sealing member attached to the inner wall surface of the piston cavity formed by the cylinder body is arranged on the outer side of the piston rod to seal the piston cavity, so that the piston cavity is always in a sealing state when the piston rod moves.

A manipulator device comprises the vacuum pick-up mechanism. The suction nozzle assembly is arranged on a piston rod of the vacuum pickup mechanism and is communicated with a vacuum air channel of the vacuum pickup mechanism.

In the above embodiment, the piston rod on the vacuum pick-up mechanism can drive the suction nozzle assembly to move, and the vacuum gas path on the vacuum pick-up mechanism can provide a vacuum pumping path for the suction nozzle assembly, and the vacuum pumping mechanism is matched to provide vacuum suction force for the suction nozzle assembly, so that the suction nozzle assembly completes the suction work.

Drawings

FIG. 1 is a schematic view of a partial structure of a vacuum pick-up mechanism according to some embodiments of the present application;

FIG. 2 is a schematic diagram of a vacuum pick-up mechanism according to some embodiments of the present application;

fig. 3 is a schematic view illustrating an internal structure of a manipulator device according to some embodiments of the present application.

Reference numerals:

1. a cylinder; 11. an air passage; 12. a piston chamber; 13. a second seal; 14. a first port; 15. a second port;

2. a vacuum member; 21. a vacuum gas circuit; 22. a first seal;

3. a piston rod;

4. a first connector;

5. a conductive member;

6. an elastic member;

7. a connecting seat; 71. the air channel is communicated;

8. a second connector;

9. a suction nozzle assembly; 91. a housing; 92. a suction nozzle; 93. and a vacuum channel.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

The standard cylinder on the market basically only has the function of driving the component to reciprocate by a single station. Because the cylinder body does not have redundant air paths, when the cylinder is used in the semiconductor industry requiring vacuum pickup chips, the air paths can only be designed separately for vacuum air leakage, but the space size of the whole structure can be increased undoubtedly. In addition, the gap between the piston rod and the cylinder body can increase the resistance between the cylinder and the suction nozzle assembly, and when the resistance is too large to lead static electricity away from the suction nozzle assembly to the ground, the risk that the static electricity breaks down the chip and causes the chip to be damaged exists. In addition, the conventional cylinder is provided with only one piston rod, and only one component can be driven to move, namely one cylinder corresponds to one station. However, as the requirements of customers on equipment in the industry are more and more compact, the stations for picking up chips by a manipulator are more and more increasing in order to improve the efficiency in the semiconductor industry. Therefore, if one cylinder corresponds to one station, the structural size is increased, the requirement of customers on equipment compactness cannot be met, and the equipment competitiveness is reduced.

Based on the above consideration, in order to solve the problem that the existing cylinder cannot have vacuum gas passing, the utility model provides a vacuum pickup mechanism, and the vacuum gas passing is realized by directly designing a gas passing gas path on a cylinder body, so that the gas path is not required to be additionally designed outside, and the structural space is saved.

Referring to fig. 1 and 2, a vacuum pickup mechanism according to an embodiment of the present utility model includes a cylinder 1, a vacuum member 2, a piston rod 3, and a nozzle assembly 9.

The cylinder body 1 is provided with an air passage 11 penetrating through the cylinder body 1, and the air passage 11 is used for communicating with a vacuumizing mechanism. The cylinder 1 is used to connect the fittings together.

The vacuum part 2 is arranged in the air passage 11, and a vacuum air passage 21 communicated with the air passage 11 is arranged in the vacuum part 2. The suction nozzle assembly 9 is detachably connected with the second end of the piston rod 3 and is communicated with the vacuum air passage 21 of the vacuum part 2. The structure is that the vacuumizing mechanism can suck air in the air passage 11 and the vacuum air passage 21 after the air suction end of the vacuumizing mechanism is communicated with the air passage 11. Wherein, when the vacuum part 2 is fixedly connected with the suction nozzle component 9, the vacuum part 2 can be connected with the cylinder body 1 in a sliding fit manner; when the vacuum part 2 is connected with the suction nozzle assembly 9 in a sliding fit manner, the vacuum part 2 can be fixedly connected with the cylinder body 1, so that when the vacuum part 2 moves along with the suction nozzle assembly 9 relative to the cylinder body 1, the vacuumizing mechanism can still suck air in the vacuum air channel 21. The air passage 11 can be a vertical passage, the vacuum part 2 can be a vacuum rod, and the rod structure can ensure the stability of the vacuum part 2 in the air passage 11 and is convenient to move in the air passage 11. When the vacuum element 2 moves, the first end of the vacuum element is always positioned in the air passage 11, and the second end of the vacuum element is always positioned outside the air passage 11.

The cylinder 1 is further provided with a piston chamber 12, the piston chamber 12 having a first port 14 and a second port 15. The piston rod 3 is arranged in the piston chamber 12, and a first end of the piston rod 3 is slidably arranged in the piston chamber 12, and a second end is slidably extended out of the piston chamber 12. When the piston rod 3 is moved, its first end is always located inside the piston chamber 12 and its second end is always located outside the piston chamber 12.

According to the vacuum pickup mechanism, a user can connect the piston rod 3 with the suction nozzle assembly 9 when using the vacuum pickup mechanism, and a driving piece is arranged at the first through hole 14, and can drive the piston rod 3 to drive the suction nozzle assembly 9 to move, so that the basic function of a single-acting cylinder is realized. Meanwhile, the vacuum piece 2 is installed in a communicating way with the suction nozzle assembly 9, and the vacuumizing mechanism is installed in a communicating way with the air passage 11, so that the vacuumizing mechanism can be communicated with the suction nozzle assembly 9 through the air passage 11 and the vacuum air passage 21, and the vacuumizing mechanism can provide vacuum suction for the suction nozzle assembly 9, so that the suction nozzle assembly 9 can complete suction work. According to the vacuum cylinder, the vacuum part 2 and the piston rod 3 are arranged on the cylinder body 1, and the air circuit is not required to be additionally designed for vacuum use, so that the whole structure can be more compact.

In one embodiment, the vacuum pick-up mechanism further comprises an electrically conductive member 5, the electrically conductive member 5 being arranged in the piston chamber 12 and being in contact with the piston rod 3. Wherein, the conductive member 5 can be arranged at the second port 15, which is convenient for installing the conductive member 5 in the piston cavity 12 and bringing the conductive member 5 into contact with the inner wall surface of the piston rod 3 and the cylinder body 1 forming the piston cavity 12. When the conductive member 5 is disposed at the second port 15, a through hole may be formed in the conductive member 5, and the piston rod 3 passes through the through hole and is in close contact with the conductive member 5, so as to ensure the conductive effect of the conductive member 5 on the piston rod 3. Similarly, the outer wall of the conductive piece 5 is tightly contacted with the inner wall of the piston cavity 12 formed by the cylinder body, so that the conductive effect of the conductive piece 5 on the cylinder body 1 is ensured. By arranging the conductive piece 5 between the cylinder body 1 and the piston rod 3, the problem of resistance increase between the piston rod 3 and the cylinder body 1 due to clearance is solved by utilizing the conductivity of the conductive piece 5, so that after the vacuum pickup mechanism is installed with the suction nozzle assembly 9, the electrostatic current at the end of the suction nozzle assembly 9 can be led out to the ground in real time, and the risk of breakdown of the picked part by the electrostatic current is reduced. The conductive material 5 may be a metal material having good conductivity such as copper, and the problem of the increase in resistance due to the clearance between the piston rod 3 and the cylinder 1 is solved by the good conductivity of the metal such as copper.

In one embodiment, an elastic member 6 is further disposed in the piston chamber 12, and a first end and a second end of the elastic member 6 are disposed on the piston rod 3 and the conductive member 5, respectively. Specifically, the first end of the elastic member 6 may be connected to the first end of the piston rod 3, the second end of the elastic member 6 may be connected to the conductive member 5, when the piston rod 3 receives the pushing force and moves in a direction approaching the second port 15, the elastic member 6 may be compressed, and when the piston rod 3 no longer receives the pushing force in a direction approaching the second port 15, the elastic member 6 may drive the piston rod 3 to return in a direction approaching the first port 14 through the elastic force thereof. The elastic piece 6 can be a spring, and can be sleeved on the outer wall of the piston rod 3 through the structure of the spring, so that the elastic piece 6 and the piston rod 3 can be conveniently installed, and the elastic piece 6 can assist the piston rod 3 to reset. In addition, after the conductive member 5 is disposed in the piston cavity 12, the second end of the elastic member 6 may be connected to the conductive member 5, and since the conductive member 5 is not moving, the elastic member 6 will be in a compressed state when receiving the pressure of the piston rod 3, and when the piston rod 3 no longer applies the pressure to the elastic member 6, the elastic member 6 will drive the piston rod 3 to return, so as to implement the basic function of a single-acting cylinder. The conductive member 5 can solve the problem of resistance increase between the piston rod 3 and the cylinder body 1 due to clearance, and can also fix the elastic member 6.

In one embodiment, at least two air passages 11 and two piston cavities 12 are arranged on the cylinder body 1, each air passage 11 is provided with a vacuum piece 2, and a piston rod 3 is arranged in each piston cavity 12. By forming a group of station units by the adjacent vacuum parts 2 and the piston rods 3, each group of station units can be connected with a suction nozzle assembly 9, so that a plurality of groups of station units integrated on one cylinder body 1 can act on a plurality of suction nozzle assemblies 9 at the same time, and the station units in each group are not interfered with each other, thereby realizing the application of the multi-station cylinder. Referring to fig. 2, taking the number of four as an example, four air-out air paths 11 and four piston cavities 12, four vacuum components 2 and four piston rods 3 are arranged on the cylinder 1, so that four groups of station units are formed, and can respectively act on four suction nozzle assemblies 9.

In one embodiment, the vacuum pick-up mechanism further includes a connection seat 7, the vacuum element 2 and the piston rod 3 are connected with the connection seat 7, the connection seat 7 is provided with a communication air path 71 in a penetrating manner, one end of the communication air path 71 is communicated with the vacuum air path 21, and the other end of the communication air path 71 is communicated with the external environment. The second end of the vacuum element 2 is connected with the communicating air path 71, and when the piston rod 3 drives the connecting seat 7 to move, the vacuum element 2 can move along with the connecting seat 7 so as to ensure that the vacuum element 2 is always communicated with the connecting seat 7; at the same time, the vacuum element 2 and the piston rod 3 are connected with the suction nozzle assembly 9 through the connecting seat 7.

In one of the embodiments, the central axis of the vacuum element 2 is parallel to the central axis of the piston rod 3, ensuring that the movement direction of the vacuum element 2 and the piston rod 3 is consistent. The first end of the air passage 11 and the first port 14 are located on the same side of the cylinder 1, and the second end of the air passage 11 and the second port 15 are located on the same side of the cylinder 1, so that the arrangement is convenient, and the attractive appearance of the whole structure is ensured while the connecting seat 7 is connected with the vacuum part 2 and the piston rod 3.

In one embodiment, the vacuum pick-up mechanism further comprises a first connecting member 4, the first connecting member 4 is mounted on the cylinder 1 and communicates with the first port 14, and the first connecting member 4 is adapted to be connected to a driving member for driving the piston rod 3 to act by the driving member. Wherein, the driving piece can be compressed gas generator or electric push rod and motor. When the driving part is a compressed gas generator, the gas generated by the compressed gas generator can be input into the piston cavity 12 through the first connecting part 4, and the piston rod 3 is pushed to move by the pressure of the compressed gas. When the driving piece selects the electric push rod, the push rod of the electric push rod can directly push the piston rod 3 to move through the first connecting piece 4. When the driving piece selects the motor, a screw rod can be arranged on a motor shaft of the motor, a threaded channel can be arranged on a central shaft of the piston rod 3, the screw rod is screwed with the piston rod 3 through the threaded channel, and the motor drives the screw rod to rotate so as to drive the piston rod 3 to move. In addition, when the driving member drives the piston rod 3 to move, the second end of the piston rod 3 may move in a direction approaching or moving away from the second port 15. In addition, when the driving member is a compressed gas generator, the first connecting member 4 may be a compressed gas connector, and the compressed gas connector communicates the interior of the piston cavity 12 with the outside. The cylinder body 1 can be connected with the gas generating mechanism through the compressed gas connector, auxiliary compressed gas enters the cylinder body 1, and the piston rod 3 is driven to move through the high pressure of the compressed gas. In addition, the piston rod 3 is driven to move by using compressed gas, so that the driving piece does not need to control the piston rod 3 to reset, and the elastic piece 6 can automatically assist the piston rod 3 to reset.

In one embodiment, the vacuum pick-up mechanism further comprises a second connecting piece 8, the second connecting piece 8 is arranged on the cylinder body 1 and communicated with the air-out air passage 11, and the second connecting piece 8 is used for being connected with the vacuumizing mechanism. The second connecting piece 8 may be a vacuum connector, and the second connecting piece 8 may assist the cylinder 1 to connect with a vacuum pump, a vacuum generator, and other vacuum pumping mechanisms, so that the vacuum pumping mechanism may pump out air in the air-out air path 11.

In one embodiment, in order to make the gas-passing path and the piston cavity in a sealed state, a first sealing piece 22 is arranged between the vacuum piece 2 and the inner wall surface of the cylinder body 1 forming the gas-passing path 11, and the first sealing piece 22 is tightly attached to the inner wall surface of the cylinder body and the vacuum piece 2, namely, the inner wall surface of the cylinder body 1 and the vacuum piece 2 are sealed by the first sealing piece 22; a second sealing element 13 is arranged between the piston rod 3 and the inner wall surface of the piston cavity 12 formed by the cylinder body, namely, the second sealing element 13 is arranged in the piston cavity 12, and the piston rod 3 passes through the second sealing element 13 and is in close contact with the second sealing element 13; in addition, the first sealing member 22 may be disposed on the first end of the vacuum member 2, so as to ensure that the first sealing member 22 may be located in the air passage 11 all the time; a second seal 13 may be provided on the first end of the piston rod 3, ensuring that the second seal 13 may be located all the way inside the piston chamber 12.

Wherein, the first sealing element 22 and the second sealing element 13 can be sealing rings. The first sealing element 22 ensures that the air passage 11 is always in a sealed state when the vacuum element 2 moves, and the second sealing element 13 ensures that the piston rod 3 is always in a sealed state when the piston rod 3 moves.

Referring to fig. 2 and 3, a robot apparatus includes the vacuum pick-up mechanism described above. Wherein, suction nozzle assembly 9 can include shell 91 and suction nozzle 92, set up vacuum passageway 93 in shell 91, vacuum passageway 93's first end communicates with vacuum member 2 or connecting seat 7, vacuum passageway 93's second end communicates with suction nozzle 92. When in use, a user can connect the connecting seat 7 with the suction nozzle assembly 9, and the communicating air channel 71 is communicated with the vacuum air channel 21, and the vacuumizing mechanism is installed on the cylinder body 1 in a communicating way through the second connecting piece 8, so that the vacuumizing mechanism can provide vacuum suction for the suction nozzle assembly 9, and the suction nozzle assembly 9 can complete suction work. In addition, the driving piece can be installed on the first through hole 14 of the cylinder body 1 in a communicating manner through the first connecting piece 4, the driving piece can drive the piston rod 3 to drive the suction nozzle assembly 9 to move, the position of the suction nozzle assembly 9 is adjusted, and the basic function of a single-acting cylinder is realized.

The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The foregoing examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims (10)

1. A vacuum pick-up mechanism, comprising:

the cylinder body (1), the cylinder body (1) is provided with an air passage (11) and a piston cavity (12), and the air passage (11) is used for communicating with a vacuumizing mechanism;

the vacuum part (2), the vacuum part (2) is arranged in the air passage (11), and a vacuum air passage (21) communicated with the air passage (11) is arranged in the vacuum part (2);

the first end of the piston rod (3) is arranged in the piston cavity (12) in a sliding mode, and the second end of the piston rod (3) extends out of the piston cavity (12) in a sliding mode;

and the second end of the piston rod (3) is detachably connected with the suction nozzle assembly (9), and the vacuum piece (2) is communicated with the suction nozzle assembly (9).

2. Vacuum pick-up mechanism according to claim 1, further comprising an electrically conductive member (5), said electrically conductive member (5) being arranged in said piston chamber (12) and being in contact with said piston rod (3).

3. Vacuum pick-up mechanism according to claim 2, characterized in that an elastic member (6) is further provided in the piston chamber (12), and that the first and second ends of the elastic member (6) are provided on the piston rod (3) and the conductive member (5), respectively.

4. Vacuum pick-up mechanism according to claim 1, characterized in that at least two air-out air passages (11) and two piston cavities (12) are arranged on the cylinder (1), the vacuum piece (2) is arranged in each air-out air passage (11), and the piston rod (3) is arranged in each piston cavity (12).

5. Vacuum pick-up mechanism according to claim 1, further comprising a connection seat (7), both the vacuum element (2) and the piston rod (3) being connected to the connection seat (7); the connecting seat (7) is provided with a communicating air passage (71) in a penetrating way, one end of the communicating air passage (71) is communicated with the vacuum air passage (21), and the other end of the communicating air passage is communicated with the external environment.

6. Vacuum pick-up mechanism according to claim 1, characterized in that the central axis of the vacuum element (2) is parallel to the central axis of the piston rod (3).

7. Vacuum pick-up mechanism according to claim 1, further comprising a first connection (4), the piston chamber (12) having a first port (14) and a second port (15), the first connection (4) being mounted to the cylinder (1) and communicating with the first port (14), and the first connection (4) being adapted to be connected to a driving member for driving the piston rod (3) in motion.

8. Vacuum pick-up mechanism according to claim 1, further comprising a second connection (8), said second connection (8) being mounted on said cylinder (1) and communicating with said air passage (11), said second connection (8) being adapted to communicate with a vacuum suction mechanism.

9. Vacuum pick-up mechanism according to claim 1, characterized in that a first sealing member (22) is arranged between the vacuum member (2) and the inner wall surface of the cylinder (1), the first sealing member (22) being used for sealing the gas-off gas path (11); a second sealing piece (13) is arranged between the piston rod (3) and the inner wall surface of the cylinder body (1), and the second sealing piece (13) is used for sealing the piston cavity (12).

10. A robot apparatus comprising a vacuum pick-up mechanism as claimed in any one of claims 1 to 9.