CN220186320U - Exercise device - Google Patents

Abstract

The utility model provides a movement device which comprises a base, a first structural member, an ultrasonic motor and a second structural member, wherein the first structural member is arranged on the base, one surface of the first structural member, which is far away from the base, is provided with a first inclined surface, the ultrasonic motor is arranged on the base, a stator of the ultrasonic motor is connected with the base, a rotor of the ultrasonic motor is connected with the first structural member to drive the first structural member to horizontally move relative to the base, the second structural member is arranged on the first structural member, one surface of the second structural member, which faces the first structural member, is provided with a second inclined surface, the second inclined surface is parallel to the first inclined surface, the second inclined surface is in sliding connection with the first inclined surface, and the second structural member vertically moves under the driving of the first structural member. The motion device adopts the ultrasonic motor as the driving device, has compact overall structure, high response speed and no electromagnetic interference in the driving process, can realize high-precision and high-speed driving, and has flat structure, high rigidity and higher load capacity.

Description

Exercise device

Technical Field

The utility model belongs to the field of semiconductor production and manufacturing and semiconductor equipment, and relates to a motion device.

Background

With the development of manufacturing technology in the semiconductor industry, the fine degree of the line width of an integrated circuit is continuously improved, for example, the performance requirement of semiconductor production equipment is continuously improved, for example, the resolution requirement of optical equipment (such as a photoetching machine) is also continuously improved, for the photoetching machine, the movement precision of a workpiece table directly influences the resolution of the photoetching machine, in addition, the speed and the acceleration of the movement of the workpiece table also directly influence the production efficiency of the photoetching machine, the workpiece table of the photoetching machine generally adopts a coarse-fine laminated structure, and the coarse-fine laminated structure is used for realizing micron-scale large-stroke movement, and the fine-fine laminated structure is used for realizing nanometer-scale small-stroke movement.

In some existing lithography machines, the motion process of the coarse motion stage is generally realized by air floatation and linear motor driving or by stepping motor and screw structure driving, wherein the linear motor driving has poor position stability, low dynamic rigidity and can not be locked by itself, while the stepping motor and screw structure has improved in-place stability compared with the linear motor, but the overall height of the motion device is increased, the rigidity is insufficient, the load capacity is smaller, in addition, electromagnetic interference cannot be avoided by the linear motor driving and the stepping motor driving, and the motion precision is easily disturbed by the working environment and is unstable.

Therefore, how to provide a motion device to obtain a motion device with high rigidity, stable in place, high load capacity and capability of avoiding electromagnetic interference is an important technical problem to be solved by those skilled in the art.

It should be noted that the foregoing description of the background art is only for the purpose of providing a clear and complete description of the technical solution of the present utility model and is presented for the convenience of understanding by those skilled in the art. The above-described solutions are not considered to be known to the person skilled in the art simply because they are set forth in the background of the utility model section.

Disclosure of Invention

In view of the above-mentioned drawbacks of the prior art, an object of the present utility model is to provide a movement apparatus for solving the problems of insufficient rigidity, poor position stability, limited load capacity and unavoidable electromagnetic interference of the movement apparatus in the prior art.

To achieve the above and other related objects, the present utility model provides a sports apparatus comprising:

a base;

the first structural member is arranged on the base, and one surface of the first structural member, which is far away from the base, is provided with a first inclined surface;

the ultrasonic motor is arranged on the base, a stator of the ultrasonic motor is connected with the base, and a rotor of the ultrasonic motor is connected with the first structural member to drive the first structural member to horizontally move relative to the base;

the second structural part is arranged on the first structural part, one surface of the second structural part, facing the first structural part, is provided with a second inclined plane, the second inclined plane is parallel to the first inclined plane and is in sliding connection with the first inclined plane, and the second structural part is driven by the first structural part to vertically move.

Optionally, the device further comprises a guide rail installation assembly and a slide block installation assembly, wherein the guide rail installation assembly is connected with the base and extends vertically, the slide block installation assembly is connected with the second structural member and extends vertically, and the position of the slide block installation assembly corresponds to the position of the guide rail installation assembly.

Optionally, the guide rail installation component includes the first perpendicular plate and at least one horizontal plate that just parallel interval set up, the horizontal plate is located the below of first perpendicular plate and with first perpendicular plate is connected, perhaps, the horizontal plate is located between the first perpendicular plate and with the bottom of first perpendicular plate is connected, first perpendicular plate with horizontal plate components of a whole that can function independently is connected or integrated into one piece.

Optionally, the base is provided with a first groove and at least one second groove, the number of the first grooves is not less than that of the first vertical plates, the number of the second grooves is not less than that of the horizontal plates, the first grooves open from the top surface of the base and vertically extend downwards, the second grooves open from the bottom surface of the base and vertically extend upwards to be communicated with the first grooves, the opening range of the first grooves is within the opening range of the second grooves, the horizontal plates are located in the second grooves, and the top ends of the first vertical plates penetrate through the first grooves and extend upwards.

Optionally, the number of the first vertical plates is 2, the number of the horizontal plates is 1 or 2, or the number of the first vertical plates is 4, and the number of the horizontal plates is 1, 2 or 4.

Optionally, the guide rail installation component includes a pair of second vertical plates that are arranged on the base at intervals in parallel, and the second vertical plates are connected with the base separately or integrally formed.

Optionally, the device further comprises a first guide assembly, a second guide assembly and a third guide assembly which are arranged in pairs; the first guide assembly comprises a first guide rail and a first sliding block, the first guide rail is arranged on one surface of the base, which faces the first structural member, and extends in the horizontal direction, the first sliding block is arranged on one surface of the first structural member, which faces the base, or the first guide rail is arranged on one surface of the first structural member, which faces the base, and extends in the horizontal direction, the first sliding block is arranged on one surface of the base, which faces the first structural member, and the first sliding block is in sliding connection with the first guide rail; the second guide assembly comprises a second guide rail and a second slide block, the second guide rail is arranged on the first inclined plane and extends in the inclined direction of the first inclined plane, the second slide block is arranged on the second inclined plane, or the second guide rail is arranged on the second inclined plane and extends in the inclined direction of the second inclined plane, the second slide block is arranged on the first inclined plane, and the second slide block is in sliding connection with the second guide rail; the third guide assembly comprises a third guide rail and a third sliding block, the third guide rail is connected with the guide rail installation assembly and extends in the vertical direction, the third sliding block is connected with the sliding block installation assembly, and the third sliding block is in sliding connection with the third guide rail.

Optionally, the slope ratio of the first slope is equal to the slope ratio of the second slope and meets i=h/s=tan θ, where i is the slope ratio, s is any horizontal distance generated when the first structural member moves horizontally, h is a vertical distance generated when the second structural member moves horizontally under the driving of the horizontal movement of the horizontal distance s of the first structural member, and θ is the inclination angle of the first slope.

Optionally, the base further comprises at least one accommodating groove for accommodating the stator of the ultrasonic motor.

Optionally, a third groove and a fourth groove are formed on one surface of the base, facing the first structural member, the third grooves are formed in pairs at intervals, the fourth grooves are formed from the bottom openings of the third grooves and extend downwards, a protruding portion is formed between every two adjacent third grooves, a fifth groove and a sixth groove are formed on one surface of the first structural member, facing the base, the fifth grooves are formed in pairs at intervals, the sixth grooves are formed between every two adjacent fifth grooves, the protruding portion is embedded into the sixth grooves, and the fifth grooves are located above the fourth grooves.

As described above, the motion device of the utility model adopts the ultrasonic motor as the driving device, has compact structure, high response speed and no electromagnetic interference compared with other driving devices, and can realize high-precision and high-speed driving; the guide rail installation assembly installed on the base can improve the overall rigidity and the assembly precision of the movement device; in addition, the whole structure of the exercise device is flat, the rigidity is good, and the load capacity is obviously improved.

Drawings

Fig. 1 is a schematic view showing the overall structure of a sports apparatus according to a first embodiment of the present utility model.

Fig. 2 is a schematic front view showing the structure of the exercise apparatus according to the first embodiment of the present utility model.

Fig. 3 is a schematic side view of the movement device according to the first embodiment of the present utility model.

Fig. 4 is a schematic top view of a base of the exercise device according to the present utility model.

Fig. 5 is a schematic view showing the overall structure of a first structural member in a first embodiment of the exercise apparatus according to the present utility model.

Fig. 6 is a schematic diagram showing the overall structure of the second structural member in the first embodiment of the exercise apparatus according to the present utility model.

Fig. 7 is a schematic diagram showing the movement effects of the first structural member and the second structural member in the movement device according to the present utility model.

Fig. 8 is a schematic view showing an overall structure of a rail mounting assembly mounted on a base in an embodiment of a moving apparatus according to the present utility model.

Fig. 9 is a schematic view showing the whole structure after inverting the structure shown in fig. 8.

Fig. 10 is a schematic view showing the overall structure of the rail mounting assembly in the first embodiment of the exercise apparatus according to the present utility model.

Fig. 11 is a schematic view showing the entire structure of the rail mounting assembly of fig. 9 after being inverted.

Fig. 12 is a schematic view showing a sectional structure along the line B-B' in fig. 4.

Fig. 13 is a schematic view showing a sectional structure along A-A' in fig. 3.

Fig. 14 is a schematic cross-sectional view of the susceptor of fig. 13.

Description of element reference numerals

100. Base seat

101. First groove

102. Second groove

103. Third groove

104. Fourth groove

105. Raised portion

200. First structural member

201. First inclined plane

202. Fifth groove

203. Sixth groove

300. Second structural member

301. Second inclined plane

400. Guide rail installation assembly

401. First vertical plate

402. Horizontal plate

501. Slider mounting plate

601. First guide assembly

602. Second guide assembly

603. Third guide assembly

Detailed Description

Other advantages and effects of the present utility model will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present utility model with reference to specific examples. The utility model may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present utility model.

Please refer to fig. 1 to 14. It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present utility model by way of illustration, and only the components related to the present utility model are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.

Example 1

The present embodiment provides a movement device, please refer to fig. 1 to 3, wherein fig. 1 shows an overall structure diagram of the movement device, fig. 2 shows a front view of the movement device, and fig. 3 shows a side view of the movement device, the movement device includes a base 100, a first structural member 200, an ultrasonic motor (not shown in fig. 1 to 3) and a second structural member 300.

Specifically, referring to fig. 4, which is a schematic top view of the base 100 of the exercise device, the first structural member 200 is disposed on the base 100, and referring to fig. 5, which is a schematic overall structure of the first structural member 200 of the exercise device, a surface of the first structural member 200 away from the base 100 is provided with a first inclined surface 201. The ultrasonic motor is arranged on the base 100, a stator of the ultrasonic motor is connected with the base 100, and a rotor of the ultrasonic motor is connected with the first structural member 200 to drive the first structural member 200 to horizontally move relative to the base 100. Referring to fig. 6, an overall structure of the second structural member 300 in the movement device is shown as a schematic diagram of the second structural member 300, wherein a surface of the second structural member 300 facing the first structural member 200 has a second inclined plane 301, the second inclined plane 301 is parallel to the first inclined plane 201, and the second inclined plane 301 is slidably connected with the first inclined plane 201, so that the second structural member 300 moves vertically under the driving of the first structural member 200. It should be noted that, since the ultrasonic motor is used to provide a driving force for the first structural member 200 to move horizontally, specific positions of the stator and the mover in the ultrasonic motor may be flexibly set, and the ultrasonic motor may be used to drive the first structural member 200 to move horizontally relative to the base 100, which is not limited herein.

Specifically, the driving device for driving the first structural member 200 to move horizontally in the moving device adopts the ultrasonic motor, compared with other driving motors (such as a stepping motor, a servo motor, a linear motor and the like), the structure is compact, the response speed is high, more importantly, the ultrasonic motor works without electromagnetic interference and is powered off and self-locked, the defect (such as poor in-place stability and poor movement precision caused by unavoidable electromagnetic interference) existing in the existing moving device can be effectively overcome, the ultrasonic motor comprises a motor rotor and a ceramic friction belt serving as the rotor, and the first structural member 200 moves through friction between a stator and the rotor.

As an example, referring to fig. 7, a schematic diagram of a movement effect of a first structural member and a second structural member in the movement device is shown, where the slope ratio of the first slope 201 is equal to the slope ratio of the second slope 301 and i=h/s=tan θ is satisfied, where i is the slope ratio, s is any horizontal distance occurring when the first structural member 200 moves horizontally, h is a vertical distance occurring when the second structural member 300 moves horizontally by a horizontal distance s, and θ is an inclination angle of the first slope 201.

As an example, the movement device further includes a rail mounting assembly 400 and a slider mounting assembly, please refer to fig. 8 and 9, wherein fig. 8 is a schematic diagram of an overall structure of the rail mounting assembly mounted on the base, fig. 9 is a schematic diagram of an overall structure of the inverted structure shown in fig. 8, the rail mounting assembly 400 is connected to the base 100 and extends vertically, it should be noted that, due to the structural feature of the rail mounting assembly 400 in this embodiment, only a portion of the rail mounting assembly 400 is shown in fig. 8, and please refer to fig. 6 again, the slider mounting assembly is connected to the second structural member 300 and extends vertically (refer to the position and the connection relationship of the slider mounting plate 501 in fig. 6), the position of the slider mounting assembly corresponds to the position of the rail mounting assembly 400, that is, since the number and the position relationship of the slider need to be guaranteed one-to-one correspondence, a preset number of rail mounting positions are provided on the rail mounting assembly 400, that is required to satisfy the corresponding number of slider mounting positions provided on the slider mounting assembly and align with each other, so as to guarantee the matching effect of the slider mounted subsequently. In addition, the rail mounting assembly 400 is used for mounting the rail, and also has a function of limiting the position of the second structural member 300 in the horizontal direction (horizontal degree of freedom) when the first structural member 200 moves horizontally, and without the limiting function of the rail mounting assembly 400, when the first structural member 200 and the second structural member 300 are connected with the second inclined plane 301 through the first inclined plane 201, the first structural member 200 moves horizontally while the second structural member 300 moves horizontally, and the second structural member 300 moves vertically only in a smaller stroke under the action of friction force of the contact surface, and cannot realize high-precision large-stroke vertical movement.

As an example, referring to fig. 10, an overall structure of the rail mounting assembly 400 in this embodiment is shown, the rail mounting assembly 400 includes a pair of first vertical plates 401 and at least one horizontal plate 402 disposed in parallel and spaced apart, and the horizontal plate 402 is located below the first vertical plates 401 and connected to the first vertical plates 401, or the horizontal plate 402 is located between the first vertical plates 401 and connected to the bottom of the first vertical plates 401, and for better understanding of the structure of the rail mounting assembly 400, referring to fig. 11, an overall structure of the rail mounting assembly 400 in fig. 10 after being inverted is shown. The guide rail mounting assembly 400 is composed of the pair of first vertical plates 401 and the horizontal plates 402 as described above, and functions to increase the structural rigidity of the guide rail mounting assembly 400 and thus the overall structural rigidity of the exercise apparatus, and to increase the structural stability of the exercise apparatus.

As an example, the first vertical plate 401 and the horizontal plate 402 are connected in a split manner or integrally formed, in this embodiment, the first vertical plate 401 and the horizontal plate 402 are integrally formed, so that the assembly precision can be effectively improved, and in other embodiments, the first vertical plate 401 and the horizontal plate 402 may be connected in a split manner.

As an example, referring to fig. 12, which shows a schematic cross-sectional structure along B-B' in fig. 4, the base 100 is provided with a pair of first grooves 101 and at least one second groove 102 arranged in parallel at intervals, the number of the first grooves 101 is not less than the number of the first vertical plates 401, the number of the second grooves 102 is not less than the number of the horizontal plates 402, the first grooves 101 open from the top surface of the base 100 and extend vertically downward, the second grooves 102 open from the bottom surface of the base 100 and extend vertically upward to communicate with the first grooves 101, the opening range of the first grooves 101 is within the opening range of the second grooves 102, and referring to fig. 9, the horizontal plates 402 are located in the second grooves 102, and the top ends of the first vertical plates 401 pass through the first grooves 101 and extend upward. Preferably, the number of the first grooves 101 is consistent with the number of the first vertical plates 401, the number of the second grooves 102 is consistent with the number of the horizontal plates 402, and the number may not be consistent in other embodiments, and may be reasonably set according to practical needs. That is, the first groove 101 and the second groove 102 together form a mounting opening, on one hand, the first vertical plate 401 in the guide rail mounting assembly 400 vertically passes through the base 100, and on the other hand, the horizontal plate 402 in the guide rail mounting assembly 400 is embedded into the bottom surface of the base 100 and limited, so that the guide rail mounting assembly 400 and the base 100 form a whole, the overall rigidity of the movement device is improved, and the connection between the horizontal plate 402 and the base 100 can adopt detachable connection modes such as threaded connection, thereby facilitating subsequent maintenance operation of the movement device.

As an example, the dimensions of the second recess 102 in at least one direction are consistent with the dimensions of the horizontal plate 402 in the same direction, ensuring positional stability of the horizontal plate 402 in at least one direction after it is inserted into the second recess 102.

As an example, the number of the first vertical plates 401 is 2, the number of the horizontal plates 402 is 1 or 2, or the number of the first vertical plates 401 is 4, and the number of the horizontal plates 402 is 1, 2, or 4. When the number of the first vertical plates 401 is 2 and the number of the horizontal plates 402 is 1, both the first vertical plates 401 are connected to the horizontal plates 402; when the number of the first vertical plates 401 is 2 and the number of the horizontal plates 402 is 2, the two first vertical plates 401 are arranged in parallel at intervals, the two horizontal plates 402 are also arranged in parallel at intervals, each first vertical plate 401 is separately connected with one horizontal plate 402, or one end of each first vertical plate 401 is connected with one horizontal plate 402, and the other end of each first vertical plate 401 is connected with the other horizontal plate 402; when the number of the first vertical plates 401 is 4 and the number of the horizontal plates 402 is 1, the four first vertical plates 401 are connected to the horizontal plates 402; when the number of the first vertical plates 401 is 4 and the number of the horizontal plates 402 is 2, two horizontal plates 402 are arranged in parallel at intervals, and each horizontal plate 402 is connected with two first vertical plates 401; when the number of the first vertical plates 401 is 4 and the number of the horizontal plates 402 is 4, each first vertical plate 401 is individually connected with one horizontal plate 402. Of course, in other embodiments, the first vertical plates 401 and the horizontal plates 402 may not be disposed in the number and the connection relationship, and when the number of the horizontal plates 402 is greater than 1, the sizes and shapes of the horizontal plates 402 are preferably uniform. In this embodiment, the rail mounting assembly 400 includes two first vertical plates 401 and one horizontal plate 402, correspondingly, two first grooves 101 and one second groove 102 are provided on the base 100, the rail mounting assembly 400 is mounted on the base 100 according to the structure shown in fig. 8, and correspondingly, referring to fig. 6, the slider mounting assembly includes two slider mounting plates 501 disposed in parallel and spaced apart and extending vertically, each of the slider mounting plates 501 is disposed opposite to one of the first vertical plates 401.

As an example, the base 100 further includes at least one receiving groove (not shown in the drawings) for setting the stator of the ultrasonic motor, and since the position of the ultrasonic motor can be selected in various ways, the position of the receiving groove is randomly adjusted according to the position of the ultrasonic motor, which is not particularly limited herein, and the setting of the receiving groove can improve the stability of the stator of the ultrasonic motor when the stator is fixed and can also improve the space utilization.

As an example, please refer to fig. 13 for a schematic cross-sectional structure along A-A' in fig. 3, a side of the base 100 facing the first structural member 200 is provided with a pair of third grooves 103 and a fourth groove 104 that are spaced apart from each other and open from a bottom of the third grooves 103 and extend downward, a protrusion 105 is formed between two adjacent third grooves 103, a side of the first structural member 200 facing the base 100 is provided with a pair of fifth grooves 202 and a sixth groove 203 that are spaced apart from each other and are located between two adjacent fifth grooves 202, the protrusion 105 is embedded in the sixth groove 203, and the fifth groove 202 is located above the fourth groove 104, so as to better understand the positional relationship among the third grooves 103, the fourth grooves 104 and the protrusion 105 on the base 100, please refer to fig. 14 for a schematic cross-sectional structure of the base 100 in fig. 13. In the process of installing the first structural member 200 on the base 100, the protruding portion 105 formed between the adjacent third grooves 103 is embedded into the sixth groove 203, so that a certain limiting and installation guiding effect can be achieved on the first structural member 200, a larger position deviation is avoided when the first structural member 200 is installed on the base 100, and the assembly precision is improved.

As an example, referring to fig. 5 and 8 again, the movement device further includes a first guide assembly 601, a second guide assembly 602, and a third guide assembly 603 arranged in pairs; the first guide assembly 601 includes a first guide rail and a first slider, the first guide rail is disposed on a surface of the base 100 facing the first structural member 200 and extends in a horizontal direction, the first slider is disposed on a surface of the first structural member 200 facing the base 100, or the first guide rail is disposed on a surface of the first structural member 200 facing the base 100 and extends in a horizontal direction, the first slider is disposed on a surface of the base 100 facing the first structural member 200, and the first slider is slidably connected with the first guide rail; the second guiding component 602 includes a second guide rail and a second slider, the second guide rail is disposed on the first inclined plane 201 and extends in the inclined direction of the first inclined plane 201, the second slider is disposed on the second inclined plane 301, or the second guide rail is disposed on the second inclined plane 301 and extends in the inclined direction of the second inclined plane 301, the second slider is disposed on the first inclined plane 201, and the second slider is slidably connected with the second guide rail; the third guide assembly 603 includes a third guide rail connected to the guide rail mounting assembly 400 and extending in a vertical direction, and a third slider connected to the slider mounting assembly. That is, the first guide assembly 601 is installed between the base 100 and the first structural member 200 as a horizontal guide device to slidably connect the base 100 and the first structural member 200, so as to realize that the first structural member 200 is driven by the ultrasonic motor to horizontally move along the extending direction of the first guide assembly 601, and the mover (first slider) and the stator (first guide rail) of the first guide assembly 601 can be optionally arranged on the base 100 or the first structural member 200 as required, so that the horizontal movement of the first structural member 200 can be realized; similarly, the second guiding component 602 is used as an inclined guiding device between the first structural component 200 and the second structural component 300 so as to enable the first structural component 200 to be slidably connected with the second structural component 300, and the third guiding component 603 is used as a vertical guide rail between the base 100 and the second structural component 300 so as to enable the second structural component 300 to vertically move relative to the base 100 under the driving of the horizontal movement of the first structural component 200.

As an example, the first guide component 601, the second guide component 602 and the third guide component 603 all adopt crossed roller guide tracks, and the crossed roller guide tracks have relatively small friction coefficient, small transverse clearance, good rigidity and high movement precision relative to other types of guide tracks, so that the overall working performance of the conveying device can be ensured, wherein the first guide component 601 comprises two pairs of crossed roller guide tracks which are horizontally and symmetrically arranged between the base 100 and the first structural component 200, and the output movement of the ultrasonic motor is converted into the horizontal movement of the first structural component 200; the second guide assembly 602 includes two pairs of crossed roller guides disposed between the first structural member 200 and the second structural member 300 in an obliquely symmetrical manner, and converts the horizontal movement of the first structural member 200 into the oblique movement of the second structural member 300 in the direction of the oblique extension, wherein the oblique movement includes a horizontal movement and a vertical movement; the third guide assembly 603 includes four pairs of cross roller guides to reduce the lateral play of movement and further limit the horizontal freedom of the second structural member 300 such that horizontal movement in diagonal movement of the second structural member 300 is eliminated while only vertical movement is maintained, thereby ensuring accurate movement of the second structural member 300 in the vertical direction and improving the accuracy of the vertical movement.

As an example, grooves (not shown in the drawings) are formed in corresponding positions of the base 100, the first structural member 200, the second structural member 300 and the rail mounting assembly 400 for mounting the rails, and the rails are mounted in the grooves, so that the overall integration level and structural stability of the movement device can be improved, the space utilization rate can be improved, the miniaturization of the movement device can be realized, and the requirements of more application occasions can be met.

According to the moving device, on one hand, the ultrasonic motor is used as the driving device, so that the overall structure of the moving device is more compact, the response speed is faster, the driving process is not affected by electromagnetic interference, high-precision and high-speed driving can be realized, on the other hand, the integral rigidity and the assembly precision of the moving device can be improved by embedding the guide rail mounting assembly fixedly connected with the base in the base structure of the moving device, the loading capacity of the moving device is effectively improved, and in addition, the moving device is flat in integral structure and high in rigidity, the moving stability of the moving device is good, and the stability of the working performance of the moving device can be ensured.

Example two

Referring to fig. 1, the present embodiment provides a movement device, which includes a base 100, a first structural member 200, an ultrasonic motor, and a second structural member 300. The difference from the first embodiment is that the rail mounting assembly 400 in this embodiment includes only a vertical plate member, whereas the rail mounting assembly 400 in the first embodiment includes both a vertical plate member and a horizontal plate member 402.

As an example, the moving apparatus further includes a rail mounting assembly 400 connected to the base 100 and extending vertically, and a slider mounting assembly connected to the second structural member 300 and extending vertically, the position of the slider mounting assembly corresponding to the position of the rail mounting assembly 400.

As an example, the rail mounting assembly 400 includes a pair of second vertical plates disposed on the base 100 at a parallel interval.

As an example, the second vertical plate is connected to the base 100 separately or integrally formed, and in this embodiment, the second vertical plate is integrally formed with the base 100, so as to improve the vertical rigidity and the assembly accuracy of the exercise device.

According to the moving device, on one hand, the ultrasonic motor is used as the driving device, so that the overall structure of the moving device is more compact, the response speed is faster, the driving process is not affected by electromagnetic interference, high-precision and high-speed driving can be realized, on the other hand, the vertical rigidity and the assembly precision of the moving device can be improved through the guide rail mounting assembly integrally formed with the base in the moving device, the loading capacity of the moving device is effectively improved, and in addition, the moving device is flat in overall structure and high in rigidity, the moving stability of the moving device is good, and the stability of the working performance of the moving device can be guaranteed.

In summary, according to the moving device disclosed by the utility model, on one hand, the ultrasonic motor is adopted as the driving device, so that the overall structure of the moving device is more compact, the response speed is faster, the driving process is not affected by electromagnetic interference, high-precision and high-speed driving can be realized, and on the other hand, the guide rail mounting assembly fixedly connected with the base can improve the overall rigidity and the assembly precision of the moving device, so that the loading capacity of the moving device is effectively improved, and in addition, the moving device disclosed by the utility model is flat in overall structure and high in rigidity, so that the moving stability of the moving device is good, and the stability of the working performance of the moving device can be ensured. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.

The above embodiments are merely illustrative of the principles of the present utility model and its effectiveness, and are not intended to limit the utility model. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the utility model. Accordingly, it is intended that all equivalent modifications and variations of the utility model be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.

Claims (10)

1. A exercise device, comprising:

a base (100);

the first structural member (200) is arranged on the base (100), and one surface of the first structural member (200) far away from the base (100) is provided with a first inclined surface (201);

the ultrasonic motor is arranged on the base (100), a stator of the ultrasonic motor is connected with the base (100), and a rotor of the ultrasonic motor is connected with the first structural member (200) to drive the first structural member (200) to horizontally move relative to the base (100);

the second structural member (300) is arranged on the first structural member (200), one surface of the second structural member (300) facing the first structural member (200) is provided with a second inclined surface (301), the second inclined surface (301) is parallel to the first inclined surface (201) and is in sliding connection with the first inclined surface (201), and the second structural member (300) is driven by the first structural member (200) to move vertically.

2. The exercise device of claim 1, wherein: the novel structure comprises a base (100), and is characterized by further comprising a guide rail installation assembly (400) and a slide block installation assembly, wherein the guide rail installation assembly (400) is connected with the base (100) and extends vertically, the slide block installation assembly is connected with the second structural member (300) and extends vertically, and the position of the slide block installation assembly corresponds to the position of the guide rail installation assembly (400).

3. The apparatus according to claim 2, wherein: the guide rail mounting assembly (400) comprises a first vertical plate (401) and at least one horizontal plate (402), wherein the first vertical plate (401) and the horizontal plate (402) are arranged in pairs at intervals, the horizontal plate (402) is located below the first vertical plate (401) and connected with the first vertical plate (401), or the horizontal plate (402) is located between the first vertical plates (401) and connected with the bottom of the first vertical plate (401), and the first vertical plate (401) and the horizontal plate (402) are connected in a split mode or integrally formed.

4. A device according to claim 3, characterized in that: the base (100) is provided with a first groove (101) and at least one second groove (102) which are arranged in pairs and in parallel at intervals, the number of the first grooves (101) is not less than that of the first vertical plates (401), the number of the second grooves (102) is not less than that of the horizontal plates (402), the first grooves (101) are opened from the top surface of the base (100) and vertically extend downwards, the second grooves (102) are opened from the bottom surface of the base (100) and vertically extend upwards to be communicated with the first grooves (101), the opening range of the first grooves (101) is within the opening range of the second grooves (102), the horizontal plates (402) are positioned in the second grooves (102), and the top ends of the first vertical plates (401) penetrate through the first grooves (101) and extend upwards.

5. The apparatus according to claim 4, wherein: the number of the first vertical plates (401) is 2, the number of the horizontal plates (402) is 1 or 2, or the number of the first vertical plates (401) is 4, and the number of the horizontal plates is 1, 2 or 4.

6. The apparatus according to claim 2, wherein: the guide rail mounting assembly (400) comprises a pair of second vertical plates arranged on the base (100) at intervals in parallel, and the second vertical plates are connected with the base (100) in a split mode or integrally formed.

7. The apparatus according to claim 2, wherein: the device also comprises a first guide component (601), a second guide component (602) and a third guide component (603) which are arranged in pairs; the first guide assembly (601) comprises a first guide rail and a first sliding block, the first guide rail is arranged on one surface of the base (100) facing the first structural member (200) and extends in the horizontal direction, the first sliding block is arranged on one surface of the first structural member (200) facing the base (100), or the first guide rail is arranged on one surface of the first structural member (200) facing the base (100) and extends in the horizontal direction, the first sliding block is arranged on one surface of the base (100) facing the first structural member (200), and the first sliding block is in sliding connection with the first guide rail; the second guide assembly (602) comprises a second guide rail and a second slide block, the second guide rail is arranged on the first inclined plane (201) and extends in the inclined direction of the first inclined plane (201), the second slide block is arranged on the second inclined plane (301), or the second guide rail is arranged on the second inclined plane (301) and extends in the inclined direction of the second inclined plane (301), the second slide block is arranged on the first inclined plane (201), and the second slide block is in sliding connection with the second guide rail; the third guide assembly (603) comprises a third guide rail and a third sliding block, the third guide rail is connected with the guide rail installation assembly (400) and extends in the vertical direction, the third sliding block is connected with the sliding block installation assembly, and the third sliding block is in sliding connection with the third guide rail.

8. The apparatus according to claim 1, wherein: the slope ratio of the first slope (201) is equal to that of the second slope (301) and meets i=h/s=tan θ, wherein i is the slope ratio, s is any horizontal distance generated when the first structural member (200) moves horizontally, h is the vertical distance generated when the second structural member (300) is driven by the horizontal movement of the first structural member (200) by the horizontal distance s, and θ is the inclination angle of the first slope (201).

9. The apparatus according to claim 1, wherein: the base (100) further comprises at least one accommodating groove for accommodating the stator of the ultrasonic motor.

10. The apparatus according to claim 1, wherein: the base (100) is provided with a third groove (103) which is arranged in pairs at intervals and a fourth groove (104) which is opened at the bottom of the third groove (103) and extends downwards, a protruding portion (105) is formed between every two adjacent third grooves (103), the base (100) is provided with a fifth groove (202) which is arranged in pairs at intervals and a sixth groove (203) which is arranged between every two adjacent fifth grooves (202), the protruding portion (105) is embedded into the sixth groove (203), and the fifth groove (202) is located above the fourth groove (104).