CN220172084U - Vertical quartz boat - Google Patents
Vertical quartz boat Download PDFInfo
- Publication number
- CN220172084U CN220172084U CN202321727397.5U CN202321727397U CN220172084U CN 220172084 U CN220172084 U CN 220172084U CN 202321727397 U CN202321727397 U CN 202321727397U CN 220172084 U CN220172084 U CN 220172084U
- Authority
- CN
- China
- Prior art keywords
- placing
- quartz boat
- silicon wafer
- connecting frame
- rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 239000010453 quartz Substances 0.000 title claims abstract description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 38
- 229910052710 silicon Inorganic materials 0.000 abstract description 38
- 239000010703 silicon Substances 0.000 abstract description 38
- 235000012431 wafers Nutrition 0.000 description 31
- 235000012239 silicon dioxide Nutrition 0.000 description 25
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a vertical quartz boat, which comprises a quartz boat body, wherein the quartz boat body comprises an upper connecting frame, a lower connecting frame and a plurality of placing rods connected between the upper connecting frame and the lower connecting frame, the placing rods are provided with placing grooves, the placing grooves formed in the placing rods correspond to each other, and the vertical quartz boat also comprises a placing seat detachably fixed on the placing grooves, the placing seat comprises two mounting plates, an upper placing plate connected between the two mounting plates and an upper surface of the upper placing plate of the side placing plate, the upper surfaces of the upper placing plate are inclined surfaces, and the outer sides of the side placing plates are connected with convex points; the silicon wafer is placed by being placed on the convex points or the inclined surfaces, and when the silicon wafer is placed on the convex points, the convex points and the silicon wafer adopt a point-to-surface contact mode, so that the contact area of the silicon wafer is reduced; when the silicon wafer is placed on the inclined plane, the outer edge of the silicon wafer is contacted with the inclined plane, and a line-surface contact mode is adopted, so that the contact area of the silicon wafer is reduced.
Description
Technical Field
The utility model relates to the field of silicon wafer processing and manufacturing, in particular to a vertical quartz boat.
Background
The quartz boat, also called quartz glass, is prepared by high-temperature melting of silicon dioxide serving as a raw material, the silicon dioxide content of the quartz boat is much higher than that of common glass, and the silicon dioxide content of the common quartz glass is 99.999%; the quartz glass has excellent optical performance, and has particularly good visible light transmittance and ultraviolet and infrared light transmittance; quartz glass is mainly used in the fields of electric light sources, semiconductors, optical new technologies and the like.
The existing quartz boat is generally used for processing and manufacturing silicon wafers, and is particularly used for placing the silicon wafers, so that the silicon wafers are convenient to diffuse, however, the existing silicon wafers are generally placed on a placing groove of a placing rod, the bottom surface of the placing groove is a horizontal plane, after the silicon wafers are placed, the lower surfaces of the silicon wafers are attached to the bottom surface of the placing groove, because the silicon wafers and the bottom surface of the placing groove adopt a surface-attaching placing mode, the contact area is large, the area of a contact part cannot diffuse due to the surface attachment, and processing flaws appear in the area of the contact part, so that the vertical quartz boat capable of reducing the contact area of the silicon wafers is needed.
Disclosure of Invention
The utility model aims to solve the technical problem of providing a vertical quartz boat capable of reducing the contact area of silicon wafers.
In order to solve the technical problems, the technical solution of the vertical quartz boat of the utility model is as follows:
comprises a quartz boat body; the quartz boat body comprises an upper connecting frame, a lower connecting frame and a plurality of placing rods connected between the upper connecting frame and the lower connecting frame; the placing rods are provided with placing grooves, the placing grooves formed in the placing rods correspond to each other, and the placing rods further comprise placing seats which are detachably fixed on the placing grooves; the placing seat comprises two mounting plates, an upper placing plate and a side placing plate, wherein the upper placing plate and the side placing plate are connected between the two mounting plates; the upper placing plate is adjacent to the side placing plate; the upper surface of the upper placing plate is an inclined surface; the outer side of the side placing plate is connected with convex points.
The inclined surface has an inclination angle of 6 DEG to 20 deg.
The placing seat is clamped with the placing groove.
The two mounting plates are respectively fixed on the placing rod through bolts.
Three placing rods are connected between the upper connecting frame and the lower connecting frame.
The utility model has the following technical effects: the utility model relates to a vertical quartz boat, which comprises a quartz boat body, wherein the quartz boat body comprises an upper connecting frame, a lower connecting frame and a plurality of placing rods connected between the upper connecting frame and the lower connecting frame, the placing rods are provided with placing grooves, the placing grooves formed in the placing rods correspond to each other, and the vertical quartz boat also comprises a placing seat detachably fixed on the placing grooves, the placing seat comprises two mounting plates, an upper placing plate and a side placing plate, the upper surface of the upper placing plate is an inclined surface, and the outer side of the side placing plate is connected with a salient point; the silicon wafer is placed by being placed on the convex points or the inclined surfaces, and when the silicon wafer is placed on the convex points, the convex points are contacted with the silicon wafer, so that the contact area of the silicon wafer is reduced; when the silicon wafer is placed on the inclined plane, the outer edge of the silicon wafer is contacted with the inclined plane, so that the contact area of the silicon wafer is reduced.
Drawings
The utility model is described in further detail below with reference to the attached drawings and detailed description:
FIG. 1 is a schematic view of a vertical quartz boat according to the present utility model;
fig. 2 is an enlarged view of a portion a of fig. 1;
FIG. 3 is a schematic view of a vertical quartz boat unset placement base according to the present utility model;
fig. 4 is an enlarged view of a portion B of fig. 3;
FIG. 5 is a schematic view of the structure of the placement base;
FIG. 6 is a vertical cross-sectional view of a vertical quartz boat of the present utility model;
fig. 7 is an enlarged view of a portion C of fig. 6;
fig. 8 is an enlarged view of a portion D of fig. 6;
fig. 9 is a transverse cross-sectional view of a vertical quartz boat of the present utility model.
Detailed Description
The utility model is further described in detail below with reference to the accompanying drawings.
See fig. 1-9.
The vertical quartz boat comprises a quartz boat body, wherein the quartz boat body comprises an upper connecting frame 1, a lower connecting frame 2 and a plurality of placing rods 4 connected between the upper connecting frame 1 and the lower connecting frame 2, and in particular, three placing rods 4 are connected between the upper connecting frame 1 and the lower connecting frame 2; the three placing rods 4 are provided with the placing grooves 5, the placing grooves 5 formed in the three placing rods 4 correspond to each other, and specifically, the three placing rods 4 are provided with the placing grooves 5 which correspond to each other and are located at the same height, so that when the silicon wafers 3 are placed in the placing grooves 5 which correspond to each other, the silicon wafers 3 are not prone to falling in an inclined mode.
The utility model relates to a vertical quartz boat, which also comprises a placing seat detachably fixed on a placing groove 5, wherein the placing seat can be connected with the placing groove 5 in a clamping way or can be connected with the placing groove 5 through bolts; when the placement seat is connected with the placement groove 5 through bolts, the two mounting plates 6 are respectively fixed on the placement rod 4 through bolts.
The placement base comprises two mounting plates 6, an upper placement plate 7 and a side placement plate 8 connected between the two mounting plates 6, the upper placement plate 7 being adjacent to the side placement plate 8 (refer to fig. 2 or 5); the upper surface of the upper placing plate 7 is provided with an inclined surface 9, and specifically, the inclined angle of the inclined surface 9 is 6 degrees to 20 degrees; the outside of the side placing plate 8 is connected with a bump 10. When the silicon wafer placing device is used, the placing seats are arranged on the placing grooves 5 with the same height of the three placing rods 4, and the placing seats arranged on the placing grooves 5 with the same height are supported by the inclined surfaces 9, namely, the upper placing plate 7 is positioned in the placing grooves 5 (refer to fig. 8), at the moment, the silicon wafer 3 is placed on the inclined surfaces 9 of the three upper placing plates 7 for supporting, and in particular, the outer edges of the silicon wafer 3 are respectively placed on the inclined surfaces 9 of the three upper placing plates 7 for supporting, so that the contact area is smaller compared with the contact mode of the existing surface and the surface; of course, the utility model can also be realized by installing the placing seats on the placing grooves 5 with the same height of the three placing rods 4, and the placing seats installed on the placing grooves 5 with the same height are supported by the side placing plates 8, namely, the side placing plates 8 are positioned in the placing grooves 5 (refer to fig. 7), and at the moment, the silicon wafer 3 is placed above the salient points 10 of the side placing plates 8 for supporting, so that the contact area of the silicon wafer is smaller than that of the prior surface-to-surface contact mode. In summary, the utility model can change the installation mode of the placement seat according to the situation, so as to determine the placement mode of the silicon wafer 3 (namely, the silicon wafer can be supported by adopting the inclined plane 9 or the convex point 10); because the space in the placing groove 5 is smaller, the inclined surface 9 or the convex point 10 is difficult to process, and the placing seat adopts a detachable fixing mode, so that the placing seat is relatively convenient to process the inclined surface 9 or the convex point 10; after the silicon wafer 3 is placed, a distance L1 (refer to fig. 7) exists between the silicon wafer 3 and the side wall of the placing groove 5, the distance is 0.5-2.5 mm, the center of the silicon wafer 3 is positioned in a triangular area formed by supporting points of three placing rods 4, and specifically, the transverse distance L2 between the silicon wafer 3 and the supporting points of two placing rods 4 on the side is 5-10 mm (refer to fig. 9), so that the silicon wafer 3 is placed more firmly.
Claims (5)
1. A vertical quartz boat comprises a quartz boat body; the quartz boat body comprises an upper connecting frame (1), a lower connecting frame (2) and a plurality of placing rods (4) connected between the upper connecting frame (1) and the lower connecting frame (2); a plurality of the placing rods (4) are provided with placing grooves (5), and the placing grooves (5) which are arranged on the placing rods (4) correspond to each other, and the device is characterized in that: the device also comprises a placing seat which is detachably fixed on the placing groove (5); the placing seat comprises two mounting plates (6), an upper placing plate (7) and a side placing plate (8), wherein the upper placing plate (7) and the side placing plate (8) are connected between the two mounting plates (6); the upper placing plate (7) is adjacent to the side placing plate (8); the upper surface of the upper placing plate (7) is an inclined surface (9); the outer side of the side placing plate (8) is connected with a bump (10).
2. The vertical quartz boat of claim 1, wherein: the inclination angle of the inclined surface (9) is 6-20 degrees.
3. The vertical quartz boat of claim 1, wherein: the placing seat is clamped with the placing groove (5).
4. The vertical quartz boat of claim 1, wherein: the two mounting plates (6) are respectively fixed on the placing rod (4) through bolts.
5. The vertical quartz boat of claim 1, wherein: three placing rods (4) are connected between the upper connecting frame (1) and the lower connecting frame (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321727397.5U CN220172084U (en) | 2023-07-04 | 2023-07-04 | Vertical quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321727397.5U CN220172084U (en) | 2023-07-04 | 2023-07-04 | Vertical quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220172084U true CN220172084U (en) | 2023-12-12 |
Family
ID=89066630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321727397.5U Active CN220172084U (en) | 2023-07-04 | 2023-07-04 | Vertical quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220172084U (en) |
-
2023
- 2023-07-04 CN CN202321727397.5U patent/CN220172084U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |