CN220151909U

CN220151909U - Single crystal furnace rotary plate valve structure and single crystal furnace

Info

Publication number: CN220151909U
Application number: CN202223503501.0U
Authority: CN
Inventors: 请求不公布姓名; 王林; 黄江江
Original assignee: Sany Silicon Energy Zhuzhou Co Ltd
Current assignee: Sany Silicon Energy Zhuzhou Co Ltd
Priority date: 2022-12-21
Filing date: 2022-12-21
Publication date: 2023-12-08
Anticipated expiration: 2032-12-21

Abstract

The utility model relates to the technical field of single crystal manufacturing equipment, in particular to a single crystal furnace rotary plate valve structure and a single crystal furnace. The rotary plate valve structure of the single crystal furnace comprises: a base; the valve cover assembly comprises a valve shaft and a cover plate, the valve shaft is inserted into the base in a lifting manner, and the cover plate is connected with the valve shaft; the lifting assembly comprises a lifting driving part and a connecting rod mechanism, wherein the lifting driving part is arranged on the base, one end of the connecting rod mechanism is hinged with the base, the other end of the connecting rod mechanism is connected with the lifting driving part in a transmission way, the valve shaft is connected with the middle part of the connecting rod mechanism, and the middle part is positioned between one end and the other end of the connecting rod mechanism. Compared with the mode of directly driving the cover plate to lift through the lifting driving part, the lifting driving part is more labor-saving in driving, and can be selected to use a smaller-size lifting driving part, so that occupied area and installation space are saved, and the compactness of structural arrangement is improved.

Description

Single crystal furnace rotary plate valve structure and single crystal furnace

Technical Field

The utility model relates to the technical field of single crystal manufacturing equipment, in particular to a single crystal furnace rotary plate valve structure and a single crystal furnace.

Background

At present, the rotary plate valve on the single crystal furnace is mostly controlled to be opened or closed in a full-automatic mode, manual switching is not needed, and therefore the opening or closing efficiency of the rotary plate valve is improved. Specifically, the rotary plate valve is directly driven to lift and rotate by the air cylinder to open or close.

The above-described approach has the following drawbacks: the cylinder directly drives the valve to lift, so that the lifting force of the cylinder needs to be larger than the gravity of the rotary plate valve, and a driving cylinder with a larger size needs to be selected, so that the installation area and the space are occupied.

Disclosure of Invention

Therefore, the technical problem to be solved by the utility model is to overcome the defects of oversized driving cylinder of the rotary plate valve and occupied installation area and space in the prior art, thereby providing a rotary plate valve structure of a single crystal furnace and the single crystal furnace which save labor and installation area and space.

In order to solve the above problems, the present utility model provides a rotary plate valve structure of a single crystal furnace, comprising: a base; the valve cover assembly comprises a valve shaft and a cover plate, the valve shaft is inserted into the base in a lifting manner, and the cover plate is connected with the valve shaft; the lifting assembly comprises a lifting driving part and a connecting rod mechanism, wherein the lifting driving part is arranged on the base, one end of the connecting rod mechanism is hinged with the base, the other end of the connecting rod mechanism is in transmission connection with the lifting driving part, the valve shaft is connected with the middle part of the connecting rod mechanism, and the middle part is positioned between one end and the other end of the connecting rod mechanism.

Optionally, the linkage mechanism includes: the connecting rod is hinged with the base; the connector is hinged with the connecting rod and is suitable for being in transmission fit with the lifting driving part; and the lifting connecting part is connected with the connecting rod and the valve shaft, and is positioned between the hinge point of the connecting rod and the base and the connector.

Optionally, the outer wall of valve shaft is equipped with the arc draw-in groove along circumference, lift connecting portion relatively movable ground joint in the arc draw-in groove.

Optionally, the lifting connection part is a lifting roller, and the lifting roller is rotatably matched in the arc-shaped clamping groove.

Optionally, the connecting rod is the annular pole, the annular pole cover is located the periphery of valve shaft, the relative both sides of annular pole all be equipped with arc draw-in groove complex lift connecting portion.

Optionally, the valve cover assembly further comprises a valve rod arranged at an included angle with the valve shaft, and the valve rod is connected between the valve shaft and the cover plate; the rotary plate valve structure of the single crystal furnace further comprises a rotary assembly, and the rotary assembly is in transmission connection with the valve shaft so as to drive the valve shaft to rotate along the axis of the valve shaft.

Optionally, the rotating assembly includes: a rotation driving part arranged on the base; the rotary cam is in transmission connection with the rotary driving part; and a rotary connection unit connected to both the rotary cam and the valve shaft, wherein the rotary drive unit is configured to drive the rotary cam to rotate together with the valve shaft.

Optionally, a rotating groove is formed in the base, the rotating cam is rotatably installed in the rotating groove, and the rotating cam is sleeved on the periphery of the valve shaft; the rotating assembly further comprises a sealing plate, the sealing plate is connected with the base, and the sealing plate is in butt fit with the top of the rotating cam.

Optionally, the outer wall of valve shaft is equipped with the spout along the axial, rotary connection portion relatively movable joint in the spout.

Optionally, the rotary connection part is a rotary roller, and the rotary roller is rotatably matched in the chute.

Optionally, the single crystal furnace rotary plate valve structure further comprises a cooling mechanism, and the cooling mechanism comprises: the water inlet passage and the water return passage are arranged in the valve shaft at intervals; the water inlet pipe is communicated with the water inlet passage and the inlet of the circulating cooling passage on the cover plate, and the water return pipe is communicated with the water return passage and the outlet of the circulating cooling passage.

The utility model also provides a single crystal furnace, which comprises: a furnace body having an opening; according to the single crystal furnace rotary plate valve structure, the cover plate can be arranged on the opening in a covering mode.

The utility model has the following advantages:

1. according to the single crystal furnace rotary plate valve structure, when the cover plate needs to be opened or closed, the lifting driving part drives the connecting rod mechanism to rotate around the hinge point of the connecting rod mechanism and the base, the connecting rod mechanism drives the valve shaft to ascend relative to the base to drive the cover plate to open or drives the valve shaft to descend relative to the base to drive the cover plate to close, so that the connection point of the valve shaft of the single crystal furnace rotary plate valve structure and the connecting rod mechanism is positioned between the hinge point of the base and the connecting rod mechanism and the transmission connection point of the lifting driving part and the connecting rod mechanism, and according to a mechanical principle, the connecting rod mechanism forms a labor-saving lever structure, so that the lifting driving part can lift the cover plate far larger than the dead weight through the connecting rod mechanism.

2. The connecting rod mechanism comprises a connecting rod, a connector and a lifting connecting part, wherein the connecting rod is hinged with the base, the connector is hinged with the connecting rod, the connector is suitable for being in transmission fit with the lifting driving part, the lifting connecting part is connected with the connecting rod and the valve shaft, and the lifting connecting part is positioned between the hinge joint of the connecting rod and the base and the connector. Above-mentioned setting, lift connecting portion and connector transmission cooperation to the relative base of drive connecting rod rotates, and the relative connecting rod self-adaptation of connector rotates simultaneously, and then drives lift connecting portion and valve shaft and together elevating movement, realizes opening or closing of apron.

3. According to the rotary plate valve structure of the single crystal furnace, the arc-shaped clamping grooves are formed in the outer wall of the valve shaft along the circumferential direction, and the lifting connecting parts are clamped in the arc-shaped clamping grooves in a relatively movable mode. According to the arrangement, when the lifting connecting part lifts along with the connecting rod, the lifting connecting part can be clamped in the arc-shaped clamping groove to support the valve shaft and drive the valve shaft to lift, and meanwhile, when the valve shaft needs to rotate around the axis of the valve shaft, the lifting connecting part can move along the arc-shaped clamping groove, so that the valve shaft can rotate without influencing the rotation of the valve shaft.

4. According to the rotary plate valve structure of the single crystal furnace, the lifting connecting part is the lifting roller, and the lifting roller can be rotatably matched in the arc-shaped clamping groove, so that the lifting connecting part is in rolling contact with the valve shaft, and the rotation resistance of the valve shaft is reduced.

5. The valve cover assembly also comprises a valve rod which is arranged at an included angle with the valve shaft, the valve rod is connected between the valve shaft and the cover plate, and the single crystal furnace rotary plate valve structure also comprises a rotating assembly which is in transmission connection with the valve shaft so as to drive the valve shaft to rotate along the axis of the valve shaft. When the cover plate needs to be horizontally moved, the rotating assembly drives the valve shaft to rotate along the axis of the valve shaft, and the valve rod and the valve shaft are arranged at an included angle, so that the cover plate can horizontally move, namely, the cover plate is moved to the side from the original position to be opened or the cover plate is moved to be reset, and the cover plate is closed.

6. The rotary assembly comprises a rotary driving part, a rotary cam and a rotary connecting part, wherein the rotary driving part is arranged on a base, the rotary cam is in transmission connection with the rotary driving part, the rotary connecting part is connected with the rotary cam and a valve shaft, and the rotary driving part can drive the rotary cam to rotate together with the valve shaft. According to this setting, rotary drive portion drive rotary cam rotates, and then drives the valve shaft through rotary connection portion and rotate to realize driving the valve rod and the apron that are connected with the valve shaft and rotate together, realize that the removal of apron is opened or reset and close, this in-process, lift connecting portion removes along the arc draw-in groove, with the rotation of self-adaptation valve shaft, consequently, the rotating assembly of this embodiment and lift subassembly independently set up, mutually noninterfere, and the apron can select lift or rotary motion as required promptly.

7. According to the rotary plate valve structure of the single crystal furnace, the rotary cam is rotatably arranged in the rotary groove, the rotary cam is sleeved on the periphery of the valve shaft, the rotary assembly further comprises the sealing plate, the sealing plate is connected with the base, and the sealing plate is in butt fit with the top of the rotary cam. Through setting up the shrouding, shrouding and rotary cam's top butt cooperation to with rotary cam butt spacing in the rotary tank, make rotary cam only can rotate in the rotary tank, promote rotatory stationarity, and also can prevent rotary cam from jumping from top to bottom and deviating from the rotary tank.

8. According to the rotary plate valve structure of the single crystal furnace, the outer wall of the valve shaft is axially provided with the sliding groove, and the rotary connecting part is clamped in the sliding groove in a relatively movable manner. According to the arrangement, when the rotary connecting part rotates along with the rotary cam, the rotary connecting part can be blocked in the chute to drive the valve shaft to rotate, and meanwhile, when the valve shaft needs to be lifted, the rotary connecting part can move along the chute, so that the valve shaft can be lifted and the lifting movement of the valve shaft is not influenced

9. The utility model discloses a single crystal furnace rotary plate valve structure, which also comprises a cooling mechanism, wherein the cooling mechanism comprises a water inlet passage, a water return passage, a water inlet pipe and a water return pipe, the water inlet passage and the water return passage are arranged in a valve shaft at intervals, the water inlet pipe is communicated with the water inlet passage and the inlet of a circulating cooling passage on a valve cover, and the water return pipe is communicated with the water return passage and the outlets of the circulating cooling passage. When cooling is needed, the cooling water flows into the water inlet passage, flows into the circulating cooling passage of the cover plate through the inlet of the water inlet pipe and the inlet of the circulating cooling passage in sequence, cools the cover plate, flows into the water return pipe from the outlet of the circulating cooling passage after cooling, and flows back into the water return passage to flow out, so that cooling of the cover plate by the cooling water is realized.

10. The single crystal furnace comprises a furnace body and the single crystal furnace rotary plate valve structure of the embodiment, wherein the furnace body is provided with an opening, and a cover plate can be arranged on the opening in a covering mode. Therefore, the single crystal furnace of this embodiment can realize opening or closing the automation of apron, and the drive is laborsaving, save area and installation space, promotes the compactedness of structural arrangement.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 shows a schematic perspective view of a single crystal furnace rotary plate valve structure according to an embodiment of the utility model;

FIG. 2 shows a front view of a single crystal furnace spin-plate valve structure according to an embodiment of the present utility model;

FIG. 3 shows a top view of a single crystal furnace spin-plate valve structure according to an embodiment of the present utility model;

FIG. 4 shows an overall cross-sectional view of a single crystal furnace rotary plate valve according to an embodiment of the present utility model;

FIG. 5 illustrates a partial cross-sectional view of a first angle of a single crystal furnace flapper valve in accordance with an embodiment of the present utility model;

FIG. 6 illustrates a partial cross-sectional view of a second angle of a single crystal furnace flapper valve in accordance with an embodiment of the present utility model.

Reference numerals illustrate:

1. a base; 2. a valve cover assembly; 21. a valve shaft; 211. an arc-shaped clamping groove; 212. a chute; 213. a water inlet passage; 214. a water return passage; 22. a cover plate; 23. a valve stem; 24. installing a shaft sleeve; 3. a lifting assembly; 31. a lifting driving part; 32. a link mechanism; 321. a fixing frame; 322. a connecting rod; 323. a connector; 324. a lifting connection part; 33. a lifting seat; 4. a rotating assembly; 41. a rotation driving part; 42. rotating the cam; 43. a rotary connection part; 44. a sealing plate; 45. rotating the shaft sleeve; 46. a friction ring; 47. a rotating seat; 5. a cooling mechanism; 51. a water inlet pipe; 52. a water return pipe; 53. isolating the sealing ring; 6. a fixing plate; 61. a first seal ring; 62. and a second sealing ring.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.

As shown in fig. 1 to 6, the embodiment of the utility model discloses a rotary plate valve structure of a single crystal furnace, which comprises a base 1, a valve cover assembly 2 and a lifting component 3, wherein the valve cover assembly 2 comprises a valve shaft 21 and a cover plate 22, the valve shaft 21 is inserted into the base 1 in a lifting manner, the cover plate 22 is connected with the valve shaft 21, the lifting component 3 comprises a lifting driving part 31 and a connecting rod mechanism 32, the lifting driving part 31 is arranged on the base 1, one end of the connecting rod mechanism 32 is hinged with the base 1, the other end of the connecting rod mechanism 32 is in transmission connection with the lifting driving part 31, the valve shaft 21 is connected with the middle part of the connecting rod mechanism 32, and the middle part is positioned between one end and the other end of the connecting rod mechanism 32.

In the single crystal furnace rotary plate valve structure of the embodiment, when the cover plate 22 needs to be opened or closed, the lifting driving part 31 drives the link mechanism 32 to rotate around the hinge point of the link mechanism 32 and the base 1, and the link mechanism 32 drives the valve shaft 21 to ascend relative to the base 1 to drive the cover plate 22 to open or drives the valve shaft 21 to descend relative to the base 1 to drive the cover plate 22 to close, so that the connection point of the valve shaft 21 and the link mechanism 32 of the single crystal furnace rotary plate valve structure is positioned between the hinge point of the base 1 and the link mechanism 32 and the transmission connection point of the lifting driving part 31 and the link mechanism 32, and the link mechanism 32 forms a labor-saving lever structure according to the mechanics principle, so that the lifting driving part 31 can lift the cover plate 22 far more than the dead weight through the link mechanism 32.

The structure of the single crystal furnace rotary plate valve is described in detail below with reference to the accompanying drawings.

In this embodiment, the center of the base 1 is provided with a circular through hole to facilitate the installation of the valve shaft 21. The base 1 is also provided with a rotary groove, the rotary groove is positioned at the top of the base 1 and is concentrically arranged with the circular through hole, and the size of the rotary groove is larger than that of the circular through hole.

The valve shaft 21 is a cylindrical rod, the outer diameter of the valve shaft 21 is smaller than the inner diameter of the circular through hole of the base 1, and when the valve shaft 21 is inserted into the circular through hole, the valve shaft can axially lift along the circular through hole, so that the cover plate 22 at the bottom of the valve shaft 21 is driven to lift, and the valve shaft is opened or closed.

The cover plate 22 is a circular cover plate 22. In this embodiment, the cover plate 22 is a spin-plate valve cover plate 22 of a single crystal furnace, and a circulation cooling passage is arranged in the cover plate 22 to cool the cover plate 22 when needed, so as to avoid overhigh temperature of the cover plate 22.

In addition, the valve cover assembly 2 further comprises a valve rod 23, the valve rod 23 is connected between the valve shaft 21 and the cover plate 22, and the valve rod 23 is arranged at an included angle with the valve shaft 21. Through the setting of valve rod 23, can realize the staggered arrangement of valve shaft 21 and apron 22, can dodge the space of apron 22 top, satisfy different use scene demands. In this embodiment, the valve shaft 21 and the valve rod 23 are directly connected, and the end of the valve rod 23 and the cover plate 22 are connected by a pin.

Illustratively, the lift driving portion 31 is a lift cylinder that may be coupled to the base 1 through a first mount 33. Specifically, the first mounting seat 33 is fixedly connected to the base 1, and the lifting cylinder is hinged to the first mounting seat 33 and can rotate relative to the first mounting seat 33 in a self-adaptive manner in the driving process.

The link mechanism 32 comprises a link 322, a connector 323 and a lifting connecting portion 324, wherein the link 322 is hinged with the base 1, the connector 323 is hinged with the link 322, the connector 323 is suitable for being in transmission fit with the lifting driving portion 31, the lifting connecting portion 324 is connected with the link 322 and the valve shaft 21, and the lifting connecting portion 324 is located between a hinge point of the link 322 and the base 1 and the connector 323. Above-mentioned setting, lift connecting portion 324 and connector 323 transmission cooperation to drive connecting rod 322 relative base 1 rotates, and the connector 323 is relative connecting rod 322 self-adaptation rotation simultaneously, and then drives lift connecting portion 324 and valve shaft 21 together elevating movement, realizes opening or closing of apron 22. It will be appreciated here that because the path of rotation of the link 322 is arcuate, there is some clearance between the valve shaft 21 and the base 1 to accommodate arcuate deflection, avoiding jamming of the valve shaft 21 within the base 1.

Further, the side of the base 1 is fixedly connected with a fixing frame 321, and the top of the fixing frame 321 is higher than the base 1, and the end of the connecting rod 322 is hinged to the portion of the fixing frame 321 higher than the base 1, so that the connecting rod 322 can smoothly rotate relative to the base 1.

In this embodiment, the link 322 is actually equivalent to an elongated arm, and the output power of the lifting driving portion 31 can be saved by half by using the link 322 for objects with the same weight, so that the power loss of the lifting driving portion 31 is greatly reduced, and a smaller power output portion can be provided.

In terms of a specific shape, the connecting rod 322 is an annular rod, the annular rod is sleeved on the periphery of the valve shaft 21, lifting connecting parts 324 are arranged on two opposite sides of the annular rod so as to support two sides of the valve shaft 21, and stability of the lifting process of the valve shaft 21 and the cover plate 22 is improved, and meanwhile, stress of the connecting rod 322 is more uniform.

In this embodiment, the outer wall of the valve shaft 21 is provided with an arc-shaped clamping groove 211 along the circumferential direction, and the lifting connection portion 324 is movably clamped in the arc-shaped clamping groove 211. According to this arrangement, when the lifting connection portion 324 lifts along with the connecting rod 322, it can be blocked in the arc-shaped clamping groove 211 to support the valve shaft 21 and drive the valve shaft 21 to lift, and meanwhile, when the valve shaft 21 needs to rotate around its own axis, the lifting connection portion 324 can move along the arc-shaped clamping groove 211, so that the valve shaft 21 can rotate, and the rotation of the valve shaft 21 is not affected. It can be appreciated that in this embodiment, a gap exists between the lifting connection portion 324 and the inner wall of the arc-shaped clamping groove 211, so that the lifting connection portion 324 can adaptively move in the arc-shaped clamping groove 211 during the lifting process of the valve shaft 21, and the valve shaft 21 is prevented from being blocked during the lifting process. In addition, a certain gap may be provided between the valve shaft 21 and the base 1, and the valve shaft 21 may be adaptively adjusted by the gap, so that the valve shaft 21 may be prevented from being locked.

Specifically, the arc-shaped clamping groove 211 is an annular groove penetrating through the periphery of the valve shaft 21, so that the rotation angle of the valve shaft 21 is not limited, 360 degrees of free rotation can be performed, and meanwhile, the valve shaft 21 can be stopped at any position after each rotation, and the next rotation operation can be facilitated without resetting. More specifically, the lifting connection portion 324 is a lifting roller, and the lifting roller is rotatably fitted in the arc-shaped slot 211, so that the lifting connection portion 324 is in rolling contact with the valve shaft 21, so as to reduce the rotation resistance of the valve shaft 21.

In this embodiment, the lifting roller is fixedly connected to the connecting rod 322 by a screw, and the axis of the lifting roller is parallel to the axis of the valve shaft 21, that is, the lifting roller can roll along the arc-shaped clamping groove 211 when the valve shaft 21 rotates.

The rotary plate valve structure of the single crystal furnace further comprises a rotary assembly 4, and the rotary assembly 4 is in transmission connection with the valve shaft 21 so as to drive the valve shaft 21 to rotate along the axis of the rotary plate valve. When the cover plate 22 needs to be horizontally moved, the rotating assembly 4 drives the valve shaft 21 to rotate along the axis of the rotating assembly, and the valve rod 23 and the valve shaft 21 form an included angle, so that the cover plate 22 can horizontally move, namely, the cover plate 22 is moved to the side from the original position to be opened or the cover plate 22 is moved to be reset, and the cover plate 22 is closed.

In this embodiment, the rotation assembly 4 includes a rotation driving portion 41, a rotation cam 42, and a rotation connection portion 43, wherein the rotation driving portion 41 is disposed on the base 1, the rotation cam 42 is in transmission connection with the rotation driving portion 41, the rotation connection portion 43 is connected with both the rotation cam 42 and the valve shaft 21, and the rotation driving portion 41 can drive the rotation cam 42 to rotate together with the valve shaft 21. According to this arrangement, the rotation driving portion 41 drives the rotation cam 42 to rotate, and then drives the valve shaft 21 to rotate through the rotation connecting portion 43, so as to drive the valve rod 23 connected with the valve shaft 21 and the cover plate 22 to rotate together, so as to realize the movement of the cover plate 22 to open or reset and close, and in this process, the lifting connecting portion 324 moves along the arc-shaped clamping groove 211 to adapt to the rotation of the valve shaft 21, so that the rotation assembly 4 and the lifting assembly 3 of this embodiment are independently arranged and do not interfere with each other, that is, the cover plate 22 can select lifting or rotation according to the needs.

Specifically, the rotation driving unit 41 is a rotation driving cylinder, and the rotation driving cylinder is connected to the base 1 through the second mount 47. Specifically, the second mounting seat 47 is fixedly connected to the base 1, and the rotary driving cylinder is hinged to the second mounting seat 47, so that the rotary driving cylinder can adaptively follow the rotary cam 42 to swing at a certain angle in the process of driving the rotary cam 42 to rotate.

Further, the rotating assembly 4 further comprises a piston rod joint hinged with the rotating cam 42, and the piston rod joint is in transmission fit with a piston rod of the rotary driving cylinder. The rotary cam 42 is driven to rotate through the expansion and contraction of the piston rod of the rotary driving cylinder, so that the cover plate 22 is driven to rotate, and when the cover plate 22 rotates, the piston rod of the rotary driving cylinder cannot rotate along with the cover plate 22 greatly, so that the abrasion of the sealing ring of the rotary driving cylinder can be effectively reduced, and the service life is prolonged.

The rotary cam 42 is rotatably mounted in the rotary groove, the rotary cam 42 is sleeved on the periphery of the valve shaft 21, the rotary assembly 4 further comprises a sealing plate 44, the sealing plate 44 is connected with the base 1, and the sealing plate 44 is in abutting fit with the top of the rotary cam 42. By arranging the sealing plate 44, the sealing plate 44 is in butt fit with the top of the rotary cam 42, so that the rotary cam 42 is in butt limit in the rotary groove, the rotary cam 42 can only rotate in the rotary groove, the rotary stability is improved, and the rotary cam 42 can be prevented from moving up and down to be separated from the rotary groove. Specifically, the center of the sealing plate 44 is provided with a avoiding hole, the sealing plate 44 is sleeved on the periphery of the valve shaft 21 through the avoiding hole, and the size of the sealing plate 44 is larger than that of the rotary groove, so that the sealing plate 44 seals the opening of the rotary groove to press the rotary cam 42 in the rotary groove.

The rotary connecting portion 43 is integrally connected to the rotary cam 42 via a fixing base.

In the present embodiment, the outer wall of the valve shaft 21 is axially provided with a chute 212, and the rotary connection portion 43 is relatively movably engaged in the chute 212. According to the arrangement, when the rotary connecting part 43 rotates along with the rotary cam 42, the rotary connecting part 43 can be blocked in the chute 212 to drive the valve shaft 21 to rotate, and meanwhile, when the valve shaft 21 needs to be lifted, the rotary connecting part 43 can move along the chute 212, so that the valve shaft 21 can be lifted and lifted without influencing the lifting motion of the valve shaft 21.

Specifically, the sliding groove 212 is a long-strip-shaped groove, and the length of the sliding groove 212 determines the lifting height of the valve shaft 21, so the lifting height of the valve shaft 21 can be controlled by designing the length of the sliding groove 212, and the length of the sliding groove 212 is not specifically limited in this embodiment.

More specifically, the rotary connection portion 43 is a rotary roller, and the rotary roller is rotatably fitted in the chute 212, so that the rotary connection portion 43 is in rolling contact with the valve shaft 21, so as to reduce the lifting resistance of the valve shaft 21.

In the embodiment, the rotary roller is fixedly connected to the rotary cam 42 by a bolt, the axis of the rotary roller is perpendicular to the axis of the valve shaft 21, that is, when the valve shaft 21 rotates, the side surface of the rotary roller abuts against the side wall of the chute 212, and when the valve shaft 21 ascends and descends, the rotary roller can roll along the chute 212.

In addition, the inner wall of the rotary cam 42 is provided with a rotary shaft sleeve 45 to reduce friction between the inner wall of the rotary cam 42 and the outer wall of the valve shaft 21, reduce abrasion between the two, and ensure the service life of the structure.

Further, friction rings 46 are provided between the rotary cam 42 and the seal plate 44 and between the bottom wall of the rotary cam 42 and the bottom wall of the rotary groove to reduce friction resistance of the rotary cam 42 and power loss of the rotary drive portion 41. Specifically, the friction ring 46 is made of ultra-high molecular weight polyethylene, and has a low friction coefficient, so that the friction resistance of the rotating cam 42 during rotation can be effectively reduced.

Correspondingly, the mounting shaft sleeve 24 is embedded in the inner cavity of the base 1, and the valve shaft 21 can move up and down or rotate relative to the mounting sleeve, so that friction between the base 1 and the valve shaft 21 is reduced, and abrasion to the valve shaft 21 is reduced. In this embodiment, a mounting boss 24 is provided at both the upper and lower ends of the base 1.

In this embodiment, the rotary plate valve structure of the single crystal furnace further comprises a cooling mechanism 5, and the cooling mechanism 5 is connected with the cover plate 22 to cool the cover plate 22, so as to avoid overhigh temperature of the cover plate 22.

Specifically, the cooling mechanism 5 includes a water inlet passage 213, a water return passage 214, a water inlet pipe 51 and a water return pipe 52, wherein the water inlet passage 213 and the water return passage 214 are spaced apart in the valve shaft 21, the water inlet pipe 51 is communicated with the water inlet passage 213 and the inlet of the circulation cooling passage on the cover plate 22, and the water return pipe 52 is communicated with the water return passage 214 and the outlet of the circulation cooling passage. When cooling is needed, the cooling water flows into the water inlet passage 213 and flows into the circulating cooling passage of the cover plate 22 through the inlet pipe 51 and the inlet of the circulating cooling passage in sequence to cool the cover plate 22, and after cooling, the cooling water flows into the water return pipe 52 from the outlet of the circulating cooling passage and then flows back into the water return passage 214 to flow out, so that cooling of the cover plate 22 by the cooling water is realized.

In this embodiment, cooling water pipe connectors are respectively arranged on the valve rod 23 and the cover plate 22, two cooling water pipe connectors on the valve rod 23 are respectively communicated with the water inlet passage 213 and the water return passage 214 in the valve shaft 21, two cooling water pipe connectors on the cover plate 22 are respectively communicated with the inlet and the outlet of the circulating cooling passage, and two cooling water pipe connectors on the valve rod 23 and two cooling water pipe connectors on the cover plate 22 are respectively in butt joint through the water inlet pipe 51 and the water return pipe 52. Specifically, the water inlet pipe 51 and the water return pipe 52 are all metal braided hoses, and have high temperature resistance and high deformation resistance.

In addition, the communication place of the water inlet passage 213, the water return passage 214 and the cooling water pipe joint of the valve rod 23 in the valve shaft 21 is provided with an isolation seal ring 53 to isolate and seal the communication place, thereby avoiding water leakage at the communication place.

In addition, a water inlet pipe and a water outlet pipe can be correspondingly arranged on the valve shaft 21, the water inlet pipe is communicated with the water inlet passage 213, the water outlet pipe is communicated with the water return passage 214, the water inlet pipe and the water outlet pipe are blocked when not in use, and are opened when cooling is needed, and the valve is connected with external cooling equipment, so that the valve is convenient to use.

In addition, the single crystal furnace rotary plate valve structure further comprises a fixed plate 6, and the fixed plate 6 is fixedly connected with the base 1 so as to support and fix the base 1. Specifically, the fixing plate 6 is sleeved on the outer periphery of the valve shaft 21, and the fixing plate 6 and the bottom of the base 1 are directly fixed by bolts. The fixed plate 6 is directly connected with the rotary plate valve housing, and the lower end surface of the fixed plate 6 is provided with a first sealing ring 61 to increase the tightness of the connection between the fixed plate 6 and the rotary plate valve housing. The inner wall of the fixed plate 6 is provided with a second sealing ring 62, and the second sealing ring 62 elastically abuts against the outer wall of the valve shaft 21 to achieve a sealing effect when the valve shaft 21 moves up and down or rotates. Illustratively, the first seal ring 61 is an O-ring and the second seal ring 62 is a star-ring. Two star-shaped rings are arranged on the inner wall of the fixed plate 6 at intervals up and down to enhance the sealing effect.

In order to facilitate understanding of the structure of the rotary plate valve of the single crystal furnace in this embodiment, the following description will be given to the use process:

when the cover plate 22 needs to be opened, the lifting driving part 31 drives the connecting rod 322 to rotate upwards relative to the base 1, the connecting rod 322 drives the valve shaft 21 to lift upwards relative to the base 1 through the lifting connecting part 324 so as to drive the valve rod 23 and the cover plate 22 to lift together, in the process, the rotary connecting part 43 moves relative to the chute 212 so as to adapt to the lifting of the valve shaft 21, and after the cover plate 22 rises to a certain height, the rotary driving part 41 drives the rotary cam 42 to rotate forwards so as to drive the rotary connecting part 43 and the valve shaft 21 to rotate forwards together, and further drive the valve rod 23 and the cover plate 22 to rotate forwards by taking the valve shaft 21 as a rotation center, in the process, the lifting connecting part 324 moves relative to the arc-shaped clamping groove 211 so as to adapt to the rotation of the valve shaft 21, so that the cover plate 22 is opened;

when the cover plate 22 needs to be closed, the rotary driving part 41 drives the rotary cam 42 to reversely rotate so as to drive the rotary connecting part 43 and the valve shaft 21 to reversely rotate together, and further drive the valve rod 23 and the cover plate 22 to reversely rotate and reset together by taking the valve shaft 21 as a rotation center, in the process, the lifting connecting part 324 moves relative to the arc-shaped clamping groove 211 so as to adapt to the rotation of the valve shaft 21, after the cover plate 22 rotates in place, the lifting driving part 31 drives the connecting rod 322 to downwardly rotate relative to the base 1, and the connecting rod 322 drives the valve shaft 21 to downwardly move and reset relative to the base 1 through the lifting connecting part 324 so as to drive the valve rod 23 and the cover plate 22 to downwardly descend together, and in the process, the rotary connecting part 43 moves relative to the sliding groove 212 so as to adapt to the descent of the valve shaft 21, thereby closing the cover plate 22 is realized.

It should be noted that the above-mentioned forward rotation and reverse rotation are two opposite rotation reverse directions, including counterclockwise and clockwise, that is, if the rotating cam 42 rotates clockwise when the cover 22 is opened, the cover 22 rotates counterclockwise when the rotating cam 42 is closed; and vice versa.

It should be understood that, in the above-mentioned use process, the lifting assembly 3 and the rotating assembly 4 may be alternatively started according to the use requirement of the cover 22, i.e. only the lifting assembly 3 is used to drive the cover 22 to lift or only the rotating assembly 4 is used to drive the cover 22 to rotate, which is not limited to the above description.

The embodiment also discloses a single crystal furnace, which comprises a furnace body and the single crystal furnace rotary plate valve structure of the embodiment, wherein the furnace body is provided with an opening, and the cover plate 22 can be covered on the opening. Therefore, the single crystal furnace of the embodiment can automatically open or close the cover plate 22, so that the driving is labor-saving, the occupied area and the installation space are saved, and the compactness of structural arrangement is improved.

It should be noted that the above description is only an optimal technical solution of the present embodiment, and in addition:

in some embodiments, the lifting connection portion 324 or the rotating connection portion 43 may be configured as a rolling bearing, and the rolling bearing may be rotatably fitted in the arc-shaped slot 211 or the chute 212, so as to support the valve shaft 21, and reduce the rotation or lifting resistance of the valve shaft 21; or the lifting connection 324 or the swivel connection 43 may be provided directly as a non-rotatable shaft or rod.

In some embodiments, the rotating sleeve 45 may be further disposed on the outer wall of the valve shaft 21 or the rotating sleeve 45 may be disposed on both the outer wall of the valve shaft 21 and the inner wall of the rotating cam 42, so that friction between the inner wall of the rotating cam 42 and the outer wall of the valve shaft 21 may be reduced.

In some embodiments, friction ring 46 may be disposed between rotating cam 42 and seal plate 44 or at a location between the bottom wall of rotating cam 42 and the bottom wall of the rotating slot.

In some embodiments, the length of the arc-shaped slot 211 may be designed according to the rotation angle range of the valve shaft 21, and is not limited to the annular slot in this embodiment.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the utility model.

Claims

1. The utility model provides a single crystal growing furnace rotary plate valve structure which characterized in that includes:

a base (1);

the valve cover assembly (2) comprises a valve shaft (21) and a cover plate (22), wherein the valve shaft (21) is inserted into the base (1) in a lifting manner, and the cover plate (22) is connected with the valve shaft (21);

lifting assembly (3), including lift drive portion (31) and link mechanism (32), lift drive portion (31) set up in on base (1), link mechanism (32) one end with base (1) are articulated, link mechanism (32) the other end with lift drive portion (31) transmission is connected, valve shaft (21) with link mechanism (32) the middle part is connected, the middle part is located link mechanism (32) one end with between the other end.

2. The single crystal furnace rotary plate valve structure according to claim 1, wherein the linkage mechanism (32) comprises:

a connecting rod (322) hinged with the base (1);

the connector (323) is hinged with the connecting rod (322), and the connector (323) is suitable for being in transmission fit with the lifting driving part (31);

and the lifting connecting part (324) is connected with the connecting rod (322) and the valve shaft (21), and the lifting connecting part (324) is positioned between the hinge point of the connecting rod (322) and the base (1) and the connector (323).

3. The rotary plate valve structure of the single crystal furnace according to claim 2, wherein an arc-shaped clamping groove (211) is formed in the outer wall of the valve shaft (21) along the circumferential direction, and the lifting connecting portion (324) is clamped in the arc-shaped clamping groove (211) in a relatively movable manner.

4. A single crystal furnace rotary plate valve structure according to claim 3, wherein the lifting connection part (324) is a lifting roller, and the lifting roller is rotatably matched in the arc-shaped clamping groove (211).

5. A single crystal furnace rotary plate valve structure according to claim 3, wherein the connecting rod (322) is an annular rod, the annular rod is sleeved on the periphery of the valve shaft (21), and the lifting connecting parts (324) matched with the arc clamping grooves (211) are arranged on two opposite sides of the annular rod.

6. The single crystal furnace rotary plate valve structure according to any one of claims 1 to 5, wherein the valve cover assembly (2) further comprises a valve rod (23) disposed at an angle to the valve shaft (21), the valve rod (23) being connected between the valve shaft (21) and the cover plate (22);

the single crystal furnace rotary plate valve structure further comprises a rotating assembly (4), and the rotating assembly (4) is in transmission connection with the valve shaft (21) so as to drive the valve shaft (21) to rotate along the axis of the valve shaft.

7. The single crystal furnace rotor valve structure according to claim 6, wherein the rotating assembly (4) comprises:

a rotation driving unit (41) provided on the base (1);

a rotary cam (42) in transmission connection with the rotary drive unit (41);

and a rotation connection unit (43) connected to both the rotation cam (42) and the valve shaft (21), wherein the rotation driving unit (41) can drive the rotation cam (42) to rotate together with the valve shaft (21).

8. The rotary plate valve structure of the single crystal furnace according to claim 7, wherein a rotary groove is formed in the base (1), the rotary cam (42) is rotatably installed in the rotary groove, and the rotary cam (42) is sleeved on the periphery of the valve shaft (21);

the rotating assembly (4) further comprises a sealing plate (44), the sealing plate (44) is connected with the base (1), and the sealing plate (44) is in abutting fit with the top of the rotating cam (42).

9. The rotary plate valve structure of the single crystal furnace according to claim 7, wherein a chute (212) is provided on the outer wall of the valve shaft (21) along the axial direction, and the rotary connecting portion (43) is relatively movably clamped in the chute (212).

10. The single crystal furnace rotary plate valve structure according to claim 9, wherein the rotary connection part (43) is a rotary roller, and the rotary roller is rotatably matched in the chute (212).

11. The single crystal furnace rotor plate valve structure according to any one of claims 1 to 5, further comprising a cooling mechanism (5), the cooling mechanism (5) comprising:

a water inlet passage (213) and a water return passage (214) which are provided in the valve shaft (21) at intervals;

the water inlet pipe (51) and the water return pipe (52), the water inlet pipe (51) is communicated with the water inlet passage (213) and the inlet of the circulating cooling passage on the cover plate (22), and the water return pipe (52) is communicated with the water return passage (214) and the outlet of the circulating cooling passage.

12. A single crystal growing furnace, comprising:

a furnace body having an opening;

the single crystal furnace rotor plate valve structure according to any one of claims 1 to 11, wherein the cover plate (22) is capable of being covered on the opening.