CN220123200U

CN220123200U - Control cabinet of semiconductor equipment

Info

Publication number: CN220123200U
Application number: CN202321381221.9U
Authority: CN
Inventors: 徐雄; 谢进兴; 扶承碧; 王象
Original assignee: Zhejiang Jiafeng Electrical & Mechanical Co ltd
Current assignee: Zhejiang Jiafeng Electrical & Mechanical Co ltd
Priority date: 2023-06-01
Filing date: 2023-06-01
Publication date: 2023-12-01
Anticipated expiration: 2033-06-01

Abstract

The utility model relates to the technical field of control cabinets, in particular to a control cabinet of semiconductor equipment, which comprises a cabinet body, wherein square grooves are formed in the edges of the upper part and the lower part of the side wall of the cabinet body, heat dissipation components are arranged in the inner walls of the two square grooves, the two groups of heat dissipation components are arranged in an up-down symmetrical mode, the heat dissipation components comprise frame bodies which are inserted into the inner walls of the square grooves in a sliding mode, and the outer walls of the frame bodies are attached to the inner walls of the cabinet body, and the control cabinet has the advantages that: through mutually supporting between square groove, radiator unit, framework, fan, filter screen, mounting, copper sheet, elastic contact and the spacing subassembly, the dismouting of its fan of this semiconductor device switch board need not demolish the disconnection with the cable that the fan is connected earlier, and the fan need not with the help of instrument and a plurality of screws with the dismouting of filter screen, and just the dismouting of filter screen only uses a screw, compares current dismouting mode, and the operation is simple and easy, is convenient for carry out periodic maintenance and clearance to fan and filter screen.

Description

Control cabinet of semiconductor equipment

Technical Field

The utility model relates to the technical field of control cabinets, in particular to a control cabinet of semiconductor equipment.

Background

A control cabinet of a semiconductor device is an electrical and electronic system for controlling and managing semiconductor production equipment. The main function of the control cabinet is to provide stable and reliable electric power for the semiconductor production process, and simultaneously realize automatic control and monitoring of the production process. It generally includes a power module, a controller, an interface module, a protection device, a communication module, and the like.

During operation, internal components of the semiconductor device control cabinet (e.g., power modules, controllers, interface modules, etc.) may generate heat. In order to ensure the stable operation and the prolonged service life of the equipment, the cooling fan is installed inside the control cabinet, the filter screen is additionally installed at the air port to conduct dust prevention treatment, however, as the cooling fan runs for a long time, dust can be adhered to the fan blades or the filter screen, especially the filter screen is easy to block the meshes of the filter screen, ventilation is affected, and the heat dissipation efficiency is affected, therefore, workers are required to regularly detach and clean the cooling fan and the filter screen, however, the disassembly and assembly of the cooling fan of the traditional semiconductor equipment control cabinet may need to be firstly detached and disconnected with the cooling fan, and the disassembly and assembly of the cooling fan and the filter screen often need to be conducted by means of tools and a plurality of screws, so that the operation is not easy enough, and the regular maintenance and cleaning of the fan and the filter screen are inconvenient.

Disclosure of Invention

The utility model aims to provide a control cabinet of semiconductor equipment, which aims to solve the problems in the background technology.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a switch board of semiconductor equipment, includes the cabinet body, square groove has all been seted up to lower part edge on the lateral wall of the cabinet body, two all be equipped with radiator unit in the inner wall of square groove, two sets of radiator unit is the symmetry setting from top to bottom, radiator unit is including the framework that slides and alternates in square groove inner wall, the outer wall of framework is laminated mutually with the inner wall of the cabinet body, and the wall fixed the running through in the inside center of cabinet body of framework corresponds the wall, and the side wall slip of framework alternates there is the filter screen, be equipped with the mounting between filter screen and the framework, the polylith copper sheet is installed to the fixed embedding of another lateral wall of framework, a plurality of be electric connection between fan and the polylith copper sheet, the side fixedly connected with a plurality of elastic contact of the inside corresponding copper sheet of cabinet, a plurality of elastic contact is laminated mutually with the polylith copper sheet respectively, be equipped with spacing subassembly between framework and the cabinet body.

Preferably, the fixing member comprises a screw which is movably penetrated into the inner wall at the front edge of the upper end of the filter screen, and the screw is penetrated and screwed into the inner wall of the frame body.

Preferably, the spacing subassembly includes spacing groove and sleeve, the spacing groove is seted up on rear end one side edge of framework, sleeve fixed connection is in rear end one side edge of the cabinet body, and telescopic front and back end inner wall and the rear end inner wall joint activity of the cabinet body run through has the pull post, the front end fixedly connected with triangle piece of pull post, triangle piece and spacing groove sliding fit, the rear end fixedly connected with plectrum of pull post, and be equipped with the elastic component between pull post and the sleeve.

Preferably, the elastic piece comprises a baffle disc, the baffle disc is fixedly sleeved on the outer wall of the pull column, the front end of the baffle disc is attached to the front end of the inner side of the sleeve, a spring is fixedly connected between the rear end of the baffle disc and the rear end of the inner side of the sleeve, and the spring is slidably sleeved on the outer wall of the pull column.

Preferably, an inclined plate is fixedly connected between the front end face and the rear end face of the inner side of the upper frame body and one side face of the inner side of the upper frame body, the inclined plate is located above the corresponding fans, and the inclined plate is far away from the filter screen.

Preferably, the handles are fixedly connected to the side faces of the two frame bodies, and foot pads are fixedly connected to four corners of the lower end of the cabinet body.

Compared with the prior art, the utility model has the beneficial effects that: through mutually supporting between square groove, radiator unit, framework, fan, filter screen, mounting, copper sheet, elastic contact and the spacing subassembly, the dismouting of its fan of this semiconductor device switch board need not demolish the disconnection with the cable that the fan is connected earlier, and the fan need not with the help of instrument and a plurality of screws with the dismouting of filter screen, and just the dismouting of filter screen only uses a screw, compares current dismouting mode, and the operation is simple and easy, is convenient for carry out periodic maintenance and clearance to fan and filter screen.

Drawings

FIG. 1 is a schematic diagram of the overall structure of the present utility model;

FIG. 2 is a schematic illustration of two sets of heat dissipating components of the present utility model removed;

FIG. 3 is a schematic diagram of two heat dissipation assemblies according to the present utility model;

FIG. 4 is a schematic diagram of a heat dissipating assembly according to one embodiment of the present utility model;

fig. 5 is a schematic structural view of a limiting assembly according to the present utility model.

In the drawings, the list of components represented by the various numbers is as follows: 1. a cabinet body; 2. foot pads; 3. a frame; 4. a handle; 5. a filter screen; 6. copper sheets; 7. an elastic contact; 8. a sleeve; 9. pulling a column; 10. triangular blocks; 11. a pulling piece; 12. a square groove; 13. a sloping plate; 14. a fan; 15. a limit groove; 16. a screw; 17. a baffle disc; 18. and (3) a spring.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-5, a control cabinet of a semiconductor device in the drawings includes a cabinet body 1, square grooves 12 are formed at edges of upper and lower portions of side walls of the cabinet body 1, heat dissipation components are disposed in inner walls of the two square grooves 12, the two heat dissipation components are disposed symmetrically up and down, the heat dissipation components include a frame body 3 slidably inserted into the inner walls of the square grooves 12, an outer wall of the frame body 3 is attached to the inner wall of the cabinet body 1, a plurality of fans 14 fixedly penetrate through a wall surface of the frame body 3 corresponding to the inner center of the cabinet body 1, a filter screen 5 is slidably inserted into a side wall of the frame body 3, a fixing piece is disposed between the filter screen 5 and the frame body 3, a plurality of copper sheets 6 are fixedly embedded into another side wall of the frame body 3, the plurality of fans 14 are electrically connected with the plurality of copper sheets 6, a plurality of elastic contacts 7 are fixedly connected to a side surface of the copper sheets 6 inside the cabinet body 1, the plurality of elastic contacts 7 are attached to the plurality of copper sheets 6 respectively, and a limiting component is disposed between the frame body 3 and the cabinet body 1.

Referring to fig. 1-3, the fixing member shown in the drawings includes a screw 16, the screw 16 movably penetrates through the inner wall of the upper front edge of the filter screen 5, and the screw 16 is inserted and screwed into the inner wall of the frame 3.

Referring to fig. 2, 4 and 5, the limiting assembly in the illustration includes a limiting groove 15 and a sleeve 8, the limiting groove 15 is formed on a side edge of a rear end of the frame 3, the sleeve 8 is fixedly connected to a side edge of the rear end of the cabinet 1, a pull post 9 is movably penetrated through a front inner wall and a rear inner wall of the sleeve 8 and the rear inner wall of the cabinet 1 together, a triangle block 10 is fixedly connected to a front end of the pull post 9, the triangle block 10 is slidably matched with the limiting groove 15, a pulling piece 11 is fixedly connected to a rear end of the pull post 9, and an elastic piece is arranged between the pull post 9 and the sleeve 8.

Referring to fig. 2 and 5, the elastic member in the illustration includes a blocking disc 17, the blocking disc 17 is fixedly sleeved on the outer wall of the pull column 9, the front end of the blocking disc 17 is attached to the front end of the inner side of the sleeve 8, a spring 18 is fixedly connected between the rear end of the blocking disc 17 and the rear end of the inner side of the sleeve 8, and the spring 18 is slidably sleeved on the outer wall of the pull column 9.

Referring to fig. 3 and 4, an inclined plate 13 is fixedly connected between the front and rear end surfaces and one side surface of the upper frame 3, the inclined plate 13 is located above the corresponding fans 14, and the inclined plate 13 is far away from the filter screen 5.

Referring to fig. 1-3, the side surfaces of two frame bodies 3 in the illustration are fixedly connected with handles 4, and four corners of the lower end of a cabinet body 1 are fixedly connected with foot pads 2; through setting up callus on sole 2, can make cabinet body 1 put more stably.

Working principle: when the heat dissipation is required to be performed inside the cabinet body 1, the plurality of elastic contacts 7 in the two groups of heat dissipation components are communicated with an external power supply, the plurality of elastic contacts 7 can transmit power to the plurality of copper sheets 6 and the plurality of fans 14, and the plurality of fans 14 can be started because the plurality of fans 14 are electrically connected with the plurality of copper sheets 6, and the mode of transmitting power between the elastic contacts 7 and the copper sheets 6 is known in the prior art and is not repeated; the cooling air outside can be sucked into the cabinet body 1 after being filtered by the filter screen 5 through the fans 14 in the cooling assembly positioned below, meanwhile, the hot air inside the cabinet body 1 can be pumped upwards through the fans 14 in the scattering assembly positioned above, the hot air pumped upwards can be discharged to the outside of the cabinet body 1 through the corresponding filter screen 5 of the frame body 3, at the moment, when the hot air pumped upwards meets the inclined plate 13, the inclined plate 13 can guide the hot air to the filter screen 5, so that the hot air can be smoothly discharged outside, the two groups of cooling assemblies can form convection in the cabinet body 1, and a good cooling effect can be achieved on electric parts inside the cabinet body 1.

When the fan 14 and the filter screen 5 in the heat dissipation assembly need to be maintained and cleaned regularly, the pulling piece 11 is pulled outwards, at this moment, the pulling piece 11 can drive the pull column 9, the triangular block 10 and the baffle disc 17 to synchronously move outwards, at this moment, the baffle disc 17 can squeeze the spring 18 between the sleeve 8 until the triangular block 10 slides out of the limit groove 15, then the handle 4 is held by hand and pulled outwards, at this moment, the handle 4 can drive the frame 3, the fan 14 and the filter screen 5 to synchronously move outwards until the frame 3 is completely pulled out of the corresponding square groove 12, then the screw 16 is removed by a screwdriver, then the corresponding filter screen 5 can be pulled out of the corresponding frame 3, finally, the fan 14 and the filter screen 5 can be maintained and cleaned, and another group of heat dissipation assemblies can be removed for maintenance and cleaning by the same operation.

After maintenance and cleaning of the removed heat dissipation assembly are completed, the frame body 3 is firstly inserted into the inner wall of the corresponding square groove 12 by holding the handle 4, then the handle 4 and the frame body 3 are pushed towards the direction of the elastic contact 7 by force, at the moment, the frame body 3 contacts with the inclined surface of the triangular block 10, the triangular block 10 is extruded outwards by the extrusion force between the frame body 3 and the triangular block 10, the triangular block 10 drives the pull column 9 and the baffle disc 17 to synchronously move outwards, then the frame body 3 is pushed towards the direction of the elastic contact 7 continuously until the elastic contact 7 contacts with the corresponding copper sheet 6, and the triangular block 10 is enabled to reset under the action force of the spring 18 and is inserted into the inner wall of the limit groove 15 at the moment, and at the moment, the installation of one group of heat dissipation assembly can be completed.

It should be noted that, the disassembly and assembly of the fan 14 of the semiconductor device control cabinet do not need to disassemble and disconnect the cable connected with the fan 14, the disassembly and assembly of the fan 14 and the filter screen 5 do not need to be carried out by means of tools and a plurality of screws, and the disassembly and assembly of the fan 14 and the filter screen 5 only use one screw.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a switch board of semiconductor equipment, includes cabinet body (1), its characterized in that: the utility model discloses a cabinet, including cabinet body (1), filter screen (5) are installed in the side wall of cabinet body (1), square groove (12) have all been seted up to lower part edge, two all be equipped with radiator unit in the inner wall of square groove (12), two sets of radiator unit is the symmetry setting from top to bottom, radiator unit is including sliding frame body (3) of interlude in square groove (12) inner wall, the outer wall of frame body (3) is laminated mutually with the inner wall of cabinet body (1), and frame body (3) correspond the wall at cabinet body (1) inside center and fixedly run through have a plurality of fans (14), and one side wall of frame body (3) slides and alternates there is filter screen (5), be equipped with the mounting between filter screen (5) and the frame body (3), another lateral wall fixed embedding of frame body (3) is installed polylith copper sheet (6), a plurality of fans (14) are electric connection between polylith copper sheet (6), the side fixed connection of corresponding copper sheet (6) in cabinet body (1) is a plurality of elastic contact (7) are laminated mutually with copper sheet (6) respectively, between cabinet body (3) and the spacing subassembly.

2. A control cabinet for a semiconductor device according to claim 1, wherein: the fixing piece comprises a screw (16), the screw (16) movably penetrates through the inner wall of the front edge of the upper end of the filter screen (5), and the screw (16) is inserted and screwed into the inner wall of the frame body (3).

3. A control cabinet for a semiconductor device according to claim 1, wherein: the limiting assembly comprises a limiting groove (15) and a sleeve (8), wherein the limiting groove (15) is formed in the edge of one side of the rear end of the frame body (3), the sleeve (8) is fixedly connected to the edge of one side of the rear end of the cabinet body (1), the front end inner wall and the rear end inner wall of the sleeve (8) are jointly movable to penetrate through a pull column (9), the front end of the pull column (9) is fixedly connected with a triangular block (10), the triangular block (10) is in sliding fit with the limiting groove (15), the rear end of the pull column (9) is fixedly connected with a pulling piece (11), and an elastic piece is arranged between the pull column (9) and the sleeve (8).

4. A control cabinet for a semiconductor device according to claim 3, wherein: the elastic piece comprises a baffle disc (17), the baffle disc (17) is fixedly sleeved on the outer wall of the pull column (9), the front end of the baffle disc (17) is attached to the inner front end of the sleeve (8), a spring (18) is fixedly connected between the rear end of the baffle disc (17) and the inner rear end of the sleeve (8), and the spring (18) is slidably sleeved on the outer wall of the pull column (9).

5. A control cabinet for a semiconductor device according to claim 1, wherein: an inclined plate (13) is fixedly connected between the front end face and the rear end face of the inner side of the upper frame body (3) and one side face, the inclined plate (13) is located above the corresponding fans (14), and the inclined plate (13) is far away from the filter screen (5).

6. A control cabinet for a semiconductor device according to claim 1, wherein: the two side faces of the frame body (3) are fixedly connected with handles (4), and foot pads (2) are fixedly connected to four corners of the lower end of the cabinet body (1).