CN220106453U - Flower basket and silicon wafer cleaning system - Google Patents

Abstract

The embodiment of the utility model provides a flower basket and silicon wafer cleaning system. The basket of flowers includes: two end plates arranged at intervals along the first direction; a connecting rod connected between the two end plates; the two groups of reinforcing rib plate assemblies are arranged along a second direction and at least partially movably connected with the end plates so as to adjust the distance between the two groups of reinforcing rib plate assemblies along the second direction, and the second direction is perpendicular to the first direction; and two groups of toothed bars, wherein one group of toothed bars is connected to one group of reinforcing rib plate assemblies, and the two groups of toothed bars can be driven to correspondingly adjust the distance between the two groups of toothed bars along the second direction under the condition that the distance between the two groups of reinforcing rib plate assemblies along the second direction is adjusted. The flower basket provided by the embodiment of the utility model is used for bearing silicon wafers with different sizes, so that the production cost of the silicon wafers is reduced, and the production efficiency of the silicon wafers is improved.

Description

Flower basket and silicon wafer cleaning system

Technical Field

The utility model belongs to the technical field of photovoltaics, and particularly relates to a flower basket and silicon wafer cleaning system.

Background

With the development of photovoltaic technology, silicon wafers are increasingly used. The silicon wafer is usually obtained by slicing a silicon rod. In the production process of silicon wafers, a basket of flowers is usually required to carry a plurality of silicon wafers so as to facilitate cleaning and transferring of the silicon wafers.

In the prior art, the flower basket is designed according to the size of the whole silicon wafer, so that when the half silicon wafer is required to be supported, a special flower basket suitable for the half silicon wafer needs to be additionally designed. Simultaneously, the inserting piece and the tool clamp of the cleaning end are matched according to the size of the special flower basket. When half silicon wafers are produced, the tool clamps for cleaning the flower baskets with different sizes and the corresponding inserting sheets are required to be switched, so that the production cost of the silicon wafers can be increased, and the production efficiency of the silicon wafers can be reduced.

Disclosure of Invention

The utility model aims to provide a flower basket and silicon wafer cleaning system, which aims to solve the problem that the existing flower basket affects the production cost and the production efficiency of silicon wafers.

In order to solve the technical problems, the utility model is realized as follows:

in a first aspect, the present utility model discloses a flower basket comprising:

two end plates arranged at intervals along the first direction;

a connecting rod connected between the two end plates;

the two groups of reinforcing rib plate assemblies are arranged along a second direction and at least partially movably connected with the end plates so as to adjust the distance between the two groups of reinforcing rib plate assemblies along the second direction, and the second direction is perpendicular to the first direction;

and two groups of toothed bars, wherein one group of toothed bars is connected to one group of reinforcing rib plate assemblies, and the two groups of toothed bars can be driven to correspondingly adjust the distance between the two groups of toothed bars along the second direction under the condition that the distance between the two groups of reinforcing rib plate assemblies along the second direction is adjusted.

Optionally, the reinforcing rib plate assembly includes a first reinforcing rib plate, and the first reinforcing rib plate can be movably connected to the end plate along the second direction so as to adjust the distance between the first reinforcing rib plates of the two groups of reinforcing rib plate assemblies;

the toothed bar is connected with the first reinforcing rib plate.

Optionally, the flower basket further comprises a first fastener;

the end plate is provided with a slideway extending along the second direction;

the first reinforcing rib plate is provided with a first mounting hole, and the first fastener penetrates through the first mounting hole and is connected to a target position in the slideway, so that the distance between the first reinforcing rib plates in the two groups of reinforcing rib plate assemblies is adjusted to a target distance corresponding to the target position.

Optionally, the reinforcing rib plate assembly further comprises a second reinforcing rib plate, and the second reinforcing rib plate is arranged on one side of the first reinforcing rib plate, which is far away from the center of the end plate; wherein,

the second reinforcing rib plate is fixedly connected to the end plate;

the toothed bar is detachably connected with the first reinforcing rib plate or the second reinforcing rib plate.

Optionally, in the case that the toothed bars are connected to the second reinforcing rib plate, a distance between the two sets of toothed bars along the second direction is a distance for carrying the whole piece of silicon wafer.

Optionally, in the case that the first fastening member passes through the first mounting hole and is connected to an end portion of the slideway near the center of the end plate, and the toothed bars are connected to the first reinforcing rib plate, a distance between the two sets of toothed bars along the second direction is a distance of the bearing half piece of the silicon wafer.

Optionally, the number of the second reinforcing rib plates is multiple, and the multiple second reinforcing rib plates are distributed at intervals along the second direction;

the toothed bar is detachably connected to one of the plurality of second reinforcing rib plates.

Optionally, the flower basket further comprises a second fastener;

the toothed bar is provided with a second mounting hole;

the first reinforcing rib plate and the second reinforcing rib plate are respectively provided with a third mounting hole, and the second fastener penetrates through the second mounting holes and is connected with the third mounting holes so as to detachably connect the toothed bar with the first reinforcing rib plate or the second reinforcing rib plate.

Optionally, the flower basket further comprises a gasket;

the axial directions of the second mounting hole and the third mounting hole are the second direction;

the second fastener sequentially passes through the gasket, the second mounting hole and the third mounting hole;

wherein the shims and thickness and the number of shims are adjustable to adjust the distance between two sets of the toothed bars along the second direction.

In a second aspect, the present utility model also discloses a silicon wafer cleaning system, which comprises: a flower basket according to any one of the preceding claims.

In an embodiment of the present utility model, the flower basket may include two end plates spaced apart along the first direction; two groups of reinforcing rib plate assemblies arranged along the second direction, wherein at least part of the two groups of reinforcing rib plate assemblies are movably connected with the end plate; and two groups of toothed bars, wherein one group of toothed bars is connected to one group of reinforcing rib plate components. In specific application, the distance between two groups of reinforcing rib plate components along the second direction can be adjusted, so that the distance between two groups of toothed bars along the second direction can be correspondingly adjusted, the two groups of toothed bars can be used for bearing silicon wafers with different sizes, and the universality of the flower basket is improved. Like this, under the circumstances of the not unidimensional silicon chip of production, especially half silicon chip, only need to two sets of the distance between the deep floor subassembly can, need not to switch not unidimensional basket of flowers and corresponding inserted sheet abluent frock clamp, not only can reduce the manufacturing cost of silicon chip, can also improve the production efficiency of silicon chip.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic view of a flower basket according to an embodiment of the present utility model;

FIG. 2 is a second schematic view of a basket according to an embodiment of the present utility model;

FIG. 3 is a third schematic view of a basket according to an embodiment of the present utility model;

FIG. 4 is a schematic view of a flower basket according to an embodiment of the present utility model;

FIG. 5 is a fifth schematic view of a basket according to an embodiment of the present utility model;

reference numerals: the novel reinforced rib plate comprises a 1-end plate, a 2-toothed bar, a 3-reinforced rib plate assembly, a 31-first reinforced rib plate, a 32-second reinforced rib plate, a 4-first fastener, a 5-slideway, a 6-third mounting hole, a 7-connecting rod, and a first direction and a B-second direction.

Detailed Description

Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements throughout or elements having like or similar functionality. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The features of the utility model "first", "second" and the like in the description and in the claims may be used for the explicit or implicit inclusion of one or more such features. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The embodiment of the utility model provides a flower basket which can be used for a silicon wafer cleaning system, in particular to a flower basket which can be used for bearing a plurality of silicon wafers so as to facilitate cleaning and transferring of the silicon wafers.

Referring to fig. 1 to 5, there are shown schematic structural views of a flower basket according to an embodiment of the present utility model. As shown in fig. 1 to 5, the basket may specifically include: two end plates 1 arranged at intervals in the first direction a; a connecting rod 7, the connecting rod 7 being connected between the two end plates 1; the two groups of reinforcing rib plate assemblies 3 are arranged along the second direction B, and the two groups of reinforcing rib plate assemblies 3 are at least partially movably connected with the end plate 1 so as to adjust the distance between the two groups of reinforcing rib plate assemblies 3 along the second direction B, wherein the second direction B is perpendicular to the first direction A; and two groups of toothed bars 2, wherein one group of toothed bars 2 is connected to one group of reinforcing rib plate assemblies 3, and the distance between the two groups of toothed bars 2 along the second direction B can be driven to be correspondingly adjusted under the condition that the distance between the two groups of reinforcing rib plate assemblies 3 along the second direction B is adjusted.

In the embodiment of the present utility model, the flower basket may include two end plates 1 spaced apart along the first direction a; two groups of reinforcing rib plate assemblies 3 are arranged along the second direction B, and at least part of the two groups of reinforcing rib plate assemblies 3 are movably connected with the end plate 1; and two groups of toothed bars 2, wherein one group of toothed bars 2 is connected to one group of reinforcing rib plate components 3. In specific application, the distance between the two groups of reinforcing rib plate assemblies 3 along the second direction B can be adjusted so as to drive the two groups of toothed bars 2 to correspondingly adjust the distance between the two groups of toothed bars 2 along the second direction B, so that the two groups of toothed bars 2 can be used for bearing silicon wafers with different sizes, and the universality of the flower basket is improved. Like this, in the circumstances of producing not unidimensional silicon chip, especially half silicon chip, only need to adjust the distance between two sets of deep floor subassemblies 3 can, need not to switch not unidimensional basket of flowers and corresponding inserted sheet abluent frock clamp, not only can reduce the manufacturing cost of silicon chip, can also improve the production efficiency of silicon chip.

In a specific application, the two end plates 1 may be "U" shaped plates, and the end plates 1 may be provided with reinforcing rib plate assemblies 3, where the reinforcing rib plate assemblies 3 may be used to strengthen the strength of the end plates 1. The connecting rod 7 is connected between the two end plates 1, and the connecting rod 7 and the end plates 1 can be enclosed to form a frame for accommodating silicon wafers. Because the reinforcing rib plate assembly 3 is movably connected to the end plate 1, and the toothed bar 2 is connected to the reinforcing rib plate assembly 3, the distance between the two groups of reinforcing rib plate assemblies 3 along the second direction B can be adjusted through the position adjustment of the reinforcing rib plate assembly 3 on the end plate 1. In the case of an adjustment of the distance between the two sets of reinforcing webs in the second direction B, the distance between the two sets of toothed bars 2 in the second direction B can be adjusted accordingly. In this way, the basket according to the embodiment of the utility model can correspondingly adjust the distance between the two groups of toothed bars 2 according to the size of the silicon wafer to be carried, so that the basket can carry baskets with different sizes, and the universality of the basket is improved.

As shown in fig. 5, the stiffener plate assembly 3 may include a first stiffener plate 31, where the first stiffener plate 31 may be movably connected to the end plate 1 along a second direction B to adjust a distance between the first stiffener plates 31 of the two sets of stiffener plate assemblies 3; the toothed bar 2 is connected to a first reinforcing web 31. In a specific application, the distance between the two first reinforcing ribs 31 can be adjusted by adjusting the positions of the first reinforcing ribs 31 along the second direction B, so that the distance between the toothed bars 2 connected to the first reinforcing ribs 31 is adjusted, so that the two groups of toothed bars 2 can bear silicon wafers with different sizes.

In a specific application, the first reinforcing ribs 31 in the two sets of reinforcing rib plate assemblies 3 may be symmetrically disposed on the end plate 1 along the second direction B, where the distance between the two sets of first reinforcing ribs 31 may be shortened when the two sets of first reinforcing ribs 31 move relatively along the second direction B, and the distance between the two sets of toothed bars 2 may be correspondingly shortened, so that the toothed bars 2 may be used to bear silicon wafers with smaller widths, for example, half silicon wafers. In case the two sets of first stiffening webs 31 are moved away from each other in the second direction B, the distance between the two sets of first stiffening webs 31 may be increased and the distance between the two sets of toothed bars 2 may be correspondingly increased, so that the toothed bars 2 may be used for carrying silicon wafers of larger width, e.g. whole pieces of silicon wafers.

In some alternative embodiments of the utility model, the basket may further comprise a first fastener 4; the end plate 1 is provided with a slideway 5 extending along the second direction B; the first reinforcing rib plates 31 are provided with first mounting holes (not shown in the figure), and the first fasteners 4 penetrate through the first mounting holes and are connected to target positions in the slide ways 5, so that the distance between the first reinforcing rib plates 31 in the two groups of reinforcing rib plate assemblies 3 is adjusted to a target distance corresponding to the target positions, and a target silicon wafer is borne.

In a specific application, the first reinforcing rib plates 31 in the two groups of reinforcing rib plate assemblies 3 can be adjusted to a required position according to the actual requirement of the target silicon wafer borne by the toothed bar 2, at this time, the first mounting holes in the first reinforcing rib plates 31 correspond to the target positions in the slide ways 5, and the distance between the first reinforcing rib plates 31 in the two groups of reinforcing rib plate assemblies 3 is the required target distance. The first fasteners 4 are then passed through the first mounting holes in the first stiffener plate 31 and attached to the target locations in the slide 5 such that the distance between the first stiffener plates 31 in the two sets of stiffener plate assemblies 3 is maintained at the target distance to facilitate the rack bar 2 carrying the target silicon wafers.

Illustratively, the first fastener 4 may include, but is not limited to, at least one of a bolt, a screw, and a stud, and the embodiment of the present utility model may not be limited to the specific content of the first fastener 4.

As shown in fig. 2, the reinforcing rib plate assembly 3 may further include a second reinforcing rib plate 32, where the second reinforcing rib plate 32 is disposed on a side of the first reinforcing rib plate 31 away from the center of the end plate 1; wherein, the second reinforcing rib plate 32 is fixedly connected to the end plate 1; the toothed bar 2 is detachably connected to the first reinforcing rib 31 or the second reinforcing rib 32. Wherein, the first reinforcing rib plate 31 and the second reinforcing rib plate 32 can be stainless steel plates with the thickness of 6-8 mm.

In a specific application, in the case where the rack bars 2 are connected to the second reinforcing rib plate 32, the distance between the two groups of rack bars 2 in the second direction B is the largest, and the larger the size of silicon wafer that the rack bars 2 can carry. Since the second reinforcing rib plates 32 are fixed to the end plate 1, the connection of the second reinforcing rib plates 32 to the end plate 1 is reliable, and the distance between the two sets of second reinforcing rib plates 32 in the second direction B is fixed. In practical applications, since most of the production processes are performed by using the basket to carry silicon wafers with a certain fixed size, the size between the two sets of second reinforcing rib plates 32 can be designed according to the silicon wafers with the fixed size. In this way, the toothed bar 2 is fixed to the second stiffener plate 32 during most of the production process, so as to reduce the position adjustment frequency of the stiffener plate assembly 3 and improve the supporting reliability of the toothed bar 2 for the silicon wafer. When silicon wafer production of certain special sizes is required, the toothed bar 2 can be connected to the first reinforcing rib plate 31 so as to adapt to the silicon wafer production of the special sizes through the position adjustment of the first reinforcing rib plate 31.

In some alternative embodiments of the present utility model, where the rack bars 2 are attached to the second stiffener plate 32, the distance between the two sets of rack bars 2 in the second direction B is the distance that carries the entire piece of silicon.

In practical application, because most of the production processes are carried by the flower basket, the distance between the two groups of toothed bars 2 along the second direction B is the distance for carrying the whole piece of silicon wafer when the toothed bars 2 are connected to the second reinforcing rib plate 32. In the case of carrying the whole piece of silicon wafer, the toothed bar 2 is only required to be fixed on the second reinforcing rib plate 32 (as shown in fig. 2), and the position of the second reinforcing rib plate 32 is not required to be adjusted. In this way, not only the position adjustment efficiency of the toothed bar 2 is improved, but also the connection reliability of the toothed bar 2 on the flower basket can be improved because the second reinforcing rib plate 32 is fixed on the end plate 1 by welding and the like, thereby improving the reliability of the toothed bar 2 for bearing the whole piece of silicon wafers.

In alternative embodiments of the utility model, where the first fastener 4 is attached to the end of the slideway 5 near the centre of the end plate 1 through the first mounting hole, and the toothed bars 2 are attached to the first stiffener plate 31, the distance between the two sets of toothed bars 2 in the second direction B is the distance to carry the half piece of said silicon wafer.

In practical application, in the production process of the silicon wafer, besides the production requirement of the whole silicon wafer, the other silicon wafer with larger production requirement is a half silicon wafer. Since the first fastening member 4 is connected to the end portion of the slide 5 near the center of the end plate 1 through the first mounting hole, and the rack bars 2 are connected to the first reinforcing rib plate 31, the distance between the two groups of rack bars 2 in the second direction B is the distance for carrying the half pieces of the silicon wafer. Under the condition that half silicon wafers need to be borne, the first reinforcing rib plate 31 is only required to be fixed at the end part (shown in fig. 5) of the slideway 5, which is close to the center of the end plate 1, through the first fastening piece 4, and the toothed bar 2 is fixed on the first reinforcing rib plate 31, so that the position adjusting efficiency of the first reinforcing rib plate 31 is higher. Thus, the position adjustment efficiency of the toothed bar 2 can be improved, and the production efficiency of the half silicon wafer can be improved.

In some alternative embodiments of the present utility model, the number of second reinforcing ribs 32 is plural, and the plural second reinforcing ribs 32 are spaced apart along the second direction B; the rack bar 2 is detachably connected to one of the plurality of second reinforcing ribs 32.

Specifically, the second reinforcing rib plates 32 in the two sets of reinforcing rib plate assemblies 3 are correspondingly arranged along the second direction B, and the distances between the second reinforcing rib plates 32 in each pair are not equal. The rack bars 2 may be connected to a pair of second reinforcing ribs 32 therein according to actual needs to rapidly adjust the distance between the two sets of rack bars 2 to a desired distance.

For example, the distance between each pair of second reinforcing ribs 32 may be set according to actual production requirements. For example, the distance between each pair of second reinforcing ribs 32 may correspond to a whole piece, three-quarters piece, half piece, or quarter piece of silicon wafer, etc., which is not limited in the embodiment of the present utility model.

In some alternative embodiments of the utility model, the basket may further comprise a second fastener; the toothed bar 2 is provided with a second mounting hole; third mounting holes 6 are formed in the first reinforcing rib plate 31 and the second reinforcing rib plate 32, and a second fastener can penetrate through the second mounting holes and be connected to the third mounting holes 6 so as to detachably connect the toothed bar 2 to the first reinforcing rib plate 31 or the second reinforcing rib plate 32.

The number of the third mounting holes 6 in the first reinforcing rib plate 31 and the second reinforcing rib plate 32 may be set according to actual conditions. For example, for a smaller silicon wafer, the third mounting holes 6 are 2 on each side. For another example, for a larger silicon wafer, the third mounting holes 6 are 3 on each side. The number of the third mounting holes 6 is not particularly limited.

In some alternative embodiments of the utility model, the basket may further comprise a spacer (not shown); the axial directions of the second mounting hole and the third mounting hole 6 are the second direction B; the second fastening piece sequentially passes through the gasket, the second mounting hole and is connected to the third mounting hole 6; wherein the shims and thickness and the number of shims are adjustable to adjust the distance between the two sets of toothed bars 2 in the second direction B.

For example, in the case where the distance between the two sets of rack bars 2 in the second direction B needs to be increased, the thickness of the shims or the number of shims may be adaptively increased. In case the distance between the two sets of toothed bars 2 in the second direction B needs to be reduced, the thickness of the shims or the number of shims may be reduced adaptively.

Illustratively, the second fastener may include, but is not limited to, at least one of a bolt, a screw, and a stud, and the embodiment of the present utility model may not be limited to the specific content of the second fastener.

In summary, the basket according to the embodiments of the present utility model may include at least the following advantages:

in an embodiment of the present utility model, the flower basket may include two end plates spaced apart along the first direction; two groups of reinforcing rib plate assemblies arranged along the second direction, wherein at least part of the two groups of reinforcing rib plate assemblies are movably connected with the end plate; and two groups of toothed bars, wherein one group of toothed bars is connected to one group of reinforcing rib plate components. In specific application, the distance between two groups of reinforcing rib plate components along the second direction can be adjusted, so that the distance between two groups of toothed bars along the second direction can be correspondingly adjusted, the two groups of toothed bars can be used for bearing silicon wafers with different sizes, and the universality of the flower basket is improved. Like this, under the circumstances of the not unidimensional silicon chip of production, especially half silicon chip, only need to two sets of the distance between the deep floor subassembly can, need not to switch not unidimensional basket of flowers and corresponding inserted sheet abluent frock clamp, not only can reduce the manufacturing cost of silicon chip, can also improve the production efficiency of silicon chip.

The embodiment of the utility model also provides a silicon wafer cleaning system, which can specifically comprise the flower basket according to the embodiment.

It should be noted that in the embodiment of the present utility model, the structure of the flower basket is the same as that of the flower basket described in any of the above embodiments, and the beneficial effects thereof are also similar, and are not described herein.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A basket of flowers, characterized in that it comprises:

two end plates arranged at intervals along the first direction;

a connecting rod connected between the two end plates;

the two groups of reinforcing rib plate assemblies are arranged along a second direction and at least partially movably connected with the end plates so as to adjust the distance between the two groups of reinforcing rib plate assemblies along the second direction, and the second direction is perpendicular to the first direction;

and two groups of toothed bars, wherein one group of toothed bars is connected to one group of reinforcing rib plate assemblies, and the two groups of toothed bars can be driven to correspondingly adjust the distance between the two groups of toothed bars along the second direction under the condition that the distance between the two groups of reinforcing rib plate assemblies along the second direction is adjusted.

2. The flower basket according to claim 1, wherein said gusset assembly comprises a first gusset movably connected to said end plate in said second direction for adjusting a distance between said first gussets of two sets of said gusset assemblies;

the toothed bar is connected with the first reinforcing rib plate.

3. The basket according to claim 2, further comprising a first fastener;

the end plate is provided with a slideway extending along the second direction;

the first reinforcing rib plate is provided with a first mounting hole, and the first fastener penetrates through the first mounting hole and is connected to a target position in the slideway, so that the distance between the first reinforcing rib plates in the two groups of reinforcing rib plate assemblies is adjusted to a target distance corresponding to the target position.

4. The flower basket according to claim 3, wherein the gusset assembly further comprises a second gusset disposed on a side of the first gusset remote from the center of the end plate; wherein,

the second reinforcing rib plate is fixedly connected to the end plate;

the toothed bar is detachably connected with the first reinforcing rib plate or the second reinforcing rib plate.

5. The basket of claim 4 wherein the distance between two sets of said bars in said second direction is the distance to carry a full piece of silicon sheet with said bars attached to said second reinforcing web.

6. The basket according to claim 5, wherein the distance between the two sets of racks in the second direction is the distance of the silicon wafer carrying half with the first fastener passing through the first mounting hole and being attached to the end of the slideway near the center of the end plate and the rack attached to the first reinforcing plate.

7. The flower basket according to claim 4, wherein the number of second reinforcing ribs is plural, and the plural second reinforcing ribs are spaced apart along the second direction;

the toothed bar is detachably connected to one of the plurality of second reinforcing rib plates.

8. The basket according to claim 4, further comprising a second fastener;

the toothed bar is provided with a second mounting hole;

the first reinforcing rib plate and the second reinforcing rib plate are respectively provided with a third mounting hole, and the second fastener penetrates through the second mounting holes and is connected with the third mounting holes so as to detachably connect the toothed bar with the first reinforcing rib plate or the second reinforcing rib plate.

9. The basket according to claim 8, further comprising a spacer;

the axial directions of the second mounting hole and the third mounting hole are the second direction;

the second fastener sequentially passes through the gasket, the second mounting hole and the third mounting hole;

wherein the shims and thickness and the number of shims are adjustable to adjust the distance between two sets of the toothed bars along the second direction.

10. A silicon wafer cleaning system, the silicon wafer cleaning system comprising: the flower basket according to any one of claims 1 to 9.