CN220090989U - Single pump circulating water device for gas treatment device - Google Patents
Single pump circulating water device for gas treatment device Download PDFInfo
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- CN220090989U CN220090989U CN202321399289.XU CN202321399289U CN220090989U CN 220090989 U CN220090989 U CN 220090989U CN 202321399289 U CN202321399289 U CN 202321399289U CN 220090989 U CN220090989 U CN 220090989U
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- water
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- spray
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 167
- 239000007921 spray Substances 0.000 claims abstract description 48
- 238000005406 washing Methods 0.000 claims abstract description 32
- 238000004140 cleaning Methods 0.000 claims abstract description 10
- 238000011001 backwashing Methods 0.000 claims abstract description 6
- 239000003595 mist Substances 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 2
- 239000002351 wastewater Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 238000004064 recycling Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 27
- 239000007788 liquid Substances 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000001099 ammonium carbonate Substances 0.000 description 1
- 235000012501 ammonium carbonate Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model discloses a single pump circulating water device for a gas treatment device, which relates to the technical field of gas washing and comprises a water tank, a ball valve, a vertical pump and a controller, wherein the ball valve is connected on a water guide pipe in series, the inlet end and the outlet end of the water tank are respectively connected with an air inlet cavity and a washing spray pipe, second spray pipes are uniformly distributed in the two, a water return pipe and a first pressure sensor are connected on the water return pipe in series, one end of the water return pipe is communicated with the water guide pipe, and the other end of the water return pipe is connected with the water inlet end of the second spray pipe, and the utility model has the technical advantages that: the water return pipe and the ball valve are additionally arranged on the water guide pipe, and the cleaning water in the water tank is circularly pumped into the water tank by the vertical pump, so that the recycling of waste water is realized; when harmful gas is stopped to be introduced, clean water is introduced through the backwashing water inlet pipe, and the water tank and related pipelines are cleaned regularly; through a plurality of second shower that vertical range was laid, promoted the clearance effect to harmful gas.
Description
Technical Field
The utility model relates to the technical field of gas washing, in particular to a single-pump circulating water device for a gas treatment device.
Background
The harmful gas washing is a common gas treatment method, and is mainly suitable for treating substances such as solvent vapor, acid gas, alkaline gas and the like generated in the semiconductor production. The method comprises the steps of forcibly spraying waste gas containing harmful gas through a spray tower or a spray pipe to enable the waste gas to be in full contact with spray liquid, and then carrying out a series of water treatment steps such as sedimentation, filtration and the like to finally achieve the purpose of purifying the waste gas, wherein the spray liquid generally adopted comprises basic ammonium carbonate solution, sodium hydroxide solution, potassium hydroxide solution and the like.
Harmful gas washing has some defects, a large amount of waste water is generated in the washing process, and the waste water needs to be treated and discharged; the problem of regeneration of spray water is also a key point to be considered, and if the water washing liquid cannot be effectively recovered, resource waste and cost increase can be caused; how to use the washing liquid to carry out the circulating washing operation of the harmful gas is a problem which needs to be solved by the technicians in the field.
Disclosure of Invention
The device provides a single pump circulating water device for a gas treatment device, and the specific implementation mode is as follows:
a single pump circulating water apparatus for a gas treatment apparatus, comprising:
the water tank, its inlet and outlet ends are connected to the inlet cavity and the water-washing spray pipe respectively, there are second spray pipes in both inner parts, its water guide end is connected to the water guide pipe;
the water return pipe and the first pressure sensor are connected in series on the water return pipe, one end of the water return pipe is communicated with the water guide pipe, the other end of the water return pipe is connected with the water inlet end of the second spray pipe, and the water return pipe is used for pumping cleaning water in the water tank into the second spray pipe to be used as gas for circulating water washing operation;
the output end of the vertical pump is connected with the water guide pipe and is used for providing power for water circulation in the water tank;
the ball valve is connected in series to the water guide pipe, the installation position of the ball valve on the water guide pipe is positioned outside the junction of the water guide pipe and the water return pipe, and the ball valve realizes the purpose of switching the water supply route and the circulating water route of the water tank by changing the opening and closing state;
and the signal receiving end of the controller is electrically connected with the first pressure sensor, and the signal output end of the controller is electrically connected with the vertical pump.
Preferably, the air path end of the ball valve is externally connected with an air pipe, and the air pipe is connected with a first manual valve in series.
Through above technical scheme, utilize first pressure sensor to measure the water pressure size of wet return, the output of vertical pump is adjusted to the controller according to its water pressure condition, and then has realized the cyclic regeneration of a large amount of waste water in the washing process and utilized, has practiced thrift the washing cost, has also effectively avoided the waste of resource simultaneously.
Preferably, the device also comprises a backwash water inlet pipe and a backwash assembly connected in series with the backwash water inlet pipe, wherein the backwash assembly comprises a flowmeter, a second pressure sensor and a pneumatic electromagnetic valve connected in series with the backwash water inlet pipe; the tail end of the backwashing water inlet pipe penetrates into the washing spray pipe and is connected with a first spray pipe in parallel.
Preferably, the signal receiving end of the controller is further electrically connected to the flowmeter and the second pressure sensor, and the signal output end of the controller is further electrically connected to the pneumatic electromagnetic valve.
Preferably, the backwashing assembly further comprises a second manual valve, and the second manual valve is connected to the backwashing water inlet pipe in series.
Through above technical scheme, when not carrying out the washing operation to gas, utilize backwash subassembly to reverse the leading-in water tank of clean water, wash clean water tank and relevant pipeline, improve the inside cleanliness and the life of device.
Preferably, the water guide pipe is further connected with a check valve in series, and the check valve is arranged at a position outside the ball valve in the water guide pipe.
Preferably, the water washing spray pipe is of a vertical pipe structure connected with the water mist separator in series, and the water mist separator, the first spray pipe and the plurality of second spray pipes are sequentially arranged from top to bottom.
Preferably, a plurality of second spray pipes in the air inlet cavity are vertically distributed.
Through above technical scheme, with the second shower in air inlet cavity and the washing shower, can promote the shower water and treat the area of contact of washing gas, promoted clean effect greatly.
In summary, the utility model has the following beneficial technical effects:
1. according to the utility model, the return pipe and the ball valve are additionally arranged on the water guide pipe, and the cleaning water in the water tank is pumped into the second spray pipe by the vertical pump, so that the recycling of waste water is realized.
2. According to the utility model, the backwash assembly and the backwash water inlet pipe are additionally arranged, and clean cleaning water is introduced through the backwash water inlet pipe when harmful gas is stopped from being introduced, so that the water tank and related pipelines are cleaned regularly;
3. the utility model has simple structure, integrates the water return pipe and the water guide pipe, and can realize water supply and water circulation operation by using a single vertical pump.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is an enlarged schematic view of a portion of the structure of FIG. 1 in accordance with the present utility model;
fig. 3 is an electrical control schematic of the present utility model.
Reference numerals illustrate:
1. the water tank, 2, the washing shower, 3, the vertical pump, 4, first shower, 5, the inlet chamber, 6, the aqueduct, 7, backwash subassembly, 8, second shower, 9, the wet return, 10, ball valve, 11, check valve, 12, trachea, 13, first manual valve, 14, the water smoke separator, 15, backwash inlet tube, 16, first pressure sensor, 17, controller, 701, flowmeter, 702, second pressure sensor, 703, second manual valve, 704, pneumatic solenoid valve.
Detailed Description
The following describes specific embodiments of the utility model with reference to the drawings and examples:
it should be noted that the structures, proportions, sizes, etc. shown in the drawings are merely for the purpose of understanding and reading the disclosure, and are not intended to limit the scope of the utility model, which is defined by the appended claims.
Also, the terms such as "upper," "lower," "left," "right," "middle," and "a" and the like recited in the present specification are merely for descriptive purposes and are not intended to limit the scope of the utility model, but are intended to provide relative positional changes or modifications without materially altering the technical context in which the utility model may be practiced.
The utility model is described in further detail below with reference to fig. 1-3.
The embodiment of the utility model discloses a single pump circulating water device for a gas treatment device.
Example 1
Referring to fig. 1 to 3, the embodiment discloses a single pump circulating water device for a gas treatment device, which comprises a water tank 1, a return pipe 9, a first pressure sensor 16, a vertical pump 3, a ball valve 10 and a controller 17, wherein the inlet end and the outlet end of the water tank 1 are respectively connected with an inlet cavity 5 and a water washing spray pipe 2, second spray pipes 8 are uniformly distributed in the two parts, the water guide ends of the second spray pipes are connected with the water guide pipe 6 in series, the return pipe 9 is connected with the first pressure sensor 16, one end of the return pipe 9 is communicated with the water guide pipe 6, the other end of the return pipe 9 is connected with the water inlet end of the second spray pipe 8, the output end of the vertical pump 3 is connected with the water guide pipe 6 for providing power for water circulation in the water tank 1, the ball valve 10 is connected with the water guide pipe 6 in series, the installation position of the ball valve 10 on the water guide pipe 6 is located beyond the junction of the water guide pipe 6 and the return pipe 9, the signal receiving end of the controller 17 is electrically connected with the first pressure sensor 16, the signal output end of the controller is electrically connected with the vertical pump 3, the second spray pipe 8 in the structure is realized by the vertical pump 3 and the return pipe 9, the second spray pipe 8 in the water guide and the water circulation in the water tank 1 is repeatedly utilized.
The gas path end of the ball valve 10 is externally connected with the gas pipe 12, the gas pipe 12 is connected with a first manual valve 13 in series, and the gas path is closed or opened in the structure by manually screwing the first manual valve 13, so that the opening and closing state of the ball valve 10 can be controlled.
The water guide pipe 6 is also connected with the check valve 11 in series, the check valve 11 is arranged at a position outside the ball valve 10 in the water guide pipe 6, and the check valve 11 in the structure can effectively prevent the water body from exceeding the junction of the water guide pipe 6 and the water return pipe 9 when the circulating water operation is carried out, and is led out from the water guide pipe 6 outside the check valve 11.
The specific implementation process is as follows: harmful gas is led into the air inlet cavity 5 and is subjected to the action of water body spraying in the second spraying pipe 8, so that the harmful gas is subjected to washing operation; harmful gas is discharged upwards through the water tank 1 and the water washing spray pipe 2; the cleaning water is prevented from being carried out by the action of the second spray pipe 8 in the water washing spray pipe 2 and the water mist separation action of the water mist separator 14; after the cleaning water in the water tank 1 reaches a certain liquid level, the ball valve 10 is closed, the controller 17 controls the vertical pump 3 to continuously guide the cleaning water in the water tank 1 into the second spray pipe 8 through the water return pipe 9, and the recycling of the cleaning water is completed.
Example 2
Referring to fig. 1 to 3, and based on embodiment 1, this embodiment further provides a single pump circulating water device for a gas treatment device, further comprising a backwash water inlet pipe 15 and a backwash assembly 7 connected in series to the backwash water inlet pipe 15, wherein the backwash assembly comprises a flowmeter 701, a second pressure sensor 702 and a pneumatic solenoid 704 connected in series to the backwash water inlet pipe 15, the end of the backwash water inlet pipe 15 penetrates into the water-washing spray pipe 2 and is connected with a first spray pipe 4 in parallel, and after the washing of harmful gas is finished, the cleaning water is sprayed out through the first spray pipe 4 to clean the water-washing section of the water-washing spray pipe 2 and the water tank 1.
The signal receiving end of the controller 17 is further electrically connected to the flowmeter 701 and the second pressure sensor 702, the signal output end of the controller is further electrically connected to the pneumatic electromagnetic valve 704, the backwash assembly 7 in the structure further comprises a second manual valve 703, the second manual valve 703 is connected to the backwash water inlet pipe 15 in series, and manual opening and closing of the backwash water inlet pipe 15 is also achieved by the aid of the second manual valve 703.
The water washing spray pipe 2 is of a vertical pipe structure connected with a water mist separator 14 in series, the water mist separator 14, the first spray pipe 4 and a plurality of second spray pipes 8 are sequentially arranged from top to bottom, the second spray pipes 8 in the air inlet cavity 5 are vertically provided with a plurality of second spray pipes 8, and the first spray pipe 4 in the structure can also be arranged on the upper part of the second spray pipes 8 in the air inlet cavity 5 to provide backwashing operation in the air inlet cavity 5.
Many other changes and modifications may be made without departing from the spirit and scope of the utility model. It is to be understood that the utility model is not to be limited to the specific embodiments, but only by the scope of the appended claims.
Claims (8)
1. The utility model provides a gaseous processing apparatus is with single pump circulating water device, includes water tank (1), its inlet and outlet end connects respectively in inlet chamber body (5) and washing shower (2), and both inside equipartitions are equipped with second shower (8), and its water guide end is in aqueduct (6), its characterized in that still includes:
the water return pipe (9) and the first pressure sensor (16) are connected in series on the water return pipe (9), one end of the water return pipe (9) is communicated with the water guide pipe (6), the other end of the water return pipe (9) is connected with the water inlet end of the second spray pipe (8), and the water return pipe (9) is used for pumping cleaning water in the water tank (1) into the second spray pipe (8) to perform circulating water washing operation as gas;
the output end of the vertical pump (3) is connected with the water guide pipe (6) and is used for providing power for water circulation in the water tank (1);
the ball valve (10) is connected in series to the water guide pipe (6), the installation position of the ball valve (10) on the water guide pipe (6) is located outside the junction of the water guide pipe (6) and the water return pipe (9), and the ball valve (10) achieves the purpose of switching the water supply route and the circulating water route of the water tank (1) by changing the opening and closing state;
and the signal receiving end of the controller (17) is electrically connected with the first pressure sensor (16), and the signal output end of the controller is electrically connected with the vertical pump (3).
2. The single pump circulating water apparatus for a gas treatment apparatus according to claim 1, further comprising a backwash water inlet pipe (15) and a backwash assembly (7) connected in series to the backwash water inlet pipe (15), comprising a flow meter (701), a second pressure sensor (702) and a pneumatic solenoid valve (704) connected in series to the backwash water inlet pipe (15);
the tail end of the backwashing water inlet pipe (15) penetrates into the washing spray pipe (2) and is connected with a first spray pipe (4) in parallel.
3. The single pump circulating water apparatus for a gas treatment apparatus according to claim 2, wherein the signal receiving end of the controller (17) is further electrically connected to the flow meter (701) and the second pressure sensor (702), and the signal output end thereof is further electrically connected to the pneumatic solenoid valve (704).
4. The single-pump circulating water device for the gas treatment device according to claim 1, wherein the gas path end of the ball valve (10) is externally connected with a gas pipe (12), and the gas pipe (12) is connected with a first manual valve (13) in series.
5. The single pump circulating water apparatus for a gas treatment apparatus according to claim 1, wherein the water guide pipe (6) is further connected in series with a check valve (11), and the check valve (11) is provided at a position other than the ball valve (10) in the water guide pipe (6).
6. The single-pump circulating water device for the gas treatment device according to claim 2, wherein the water washing spray pipe (2) is of a vertical pipe structure connected with a water mist separator (14) in series, and the water mist separator (14), the first spray pipe (4) and a plurality of second spray pipes (8) are sequentially distributed from top to bottom.
7. The single pump circulating water device for a gas treatment device according to claim 1, wherein a plurality of second spray pipes (8) in the gas inlet cavity (5) are vertically distributed.
8. A single pump circulating water apparatus for a gas treatment apparatus according to claim 2, wherein the backwash assembly (7) further comprises a second manual valve (703), the second manual valve (703) being connected in series to the backwash inlet pipe (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321399289.XU CN220090989U (en) | 2023-06-02 | 2023-06-02 | Single pump circulating water device for gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321399289.XU CN220090989U (en) | 2023-06-02 | 2023-06-02 | Single pump circulating water device for gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220090989U true CN220090989U (en) | 2023-11-28 |
Family
ID=88849412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321399289.XU Active CN220090989U (en) | 2023-06-02 | 2023-06-02 | Single pump circulating water device for gas treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220090989U (en) |
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2023
- 2023-06-02 CN CN202321399289.XU patent/CN220090989U/en active Active
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