CN220079254U

CN220079254U - Epitaxial growth equipment with guiding movement function

Info

Publication number: CN220079254U
Application number: CN202320278515.2U
Authority: CN
Inventors: 傅林坚; 刘毅; 曹建伟; 朱亮; 周建灿; 苏婷
Original assignee: Zhejiang Qiushi Semiconductor Equipment Co Ltd
Current assignee: Zhejiang Qiushi Semiconductor Equipment Co Ltd
Priority date: 2023-02-08
Filing date: 2023-02-08
Publication date: 2023-11-24
Anticipated expiration: 2033-02-08

Abstract

The utility model provides epitaxial growth equipment with a guiding movement function, which comprises a reaction chamber body, a transmission chamber body, a moving mechanism and a guiding component, wherein the moving mechanism is arranged at the bottom of one of the reaction chamber body and the transmission chamber body and comprises a roller group, the roller group comprises a first roller and a second roller, the first roller and the second roller are arranged at intervals in a first direction, the guiding component is arranged at the other one of the reaction chamber body and the transmission chamber body and comprises a first guiding part and a second guiding part, the first guiding part and the second guiding part are arranged at intervals in the first direction, the first guiding part is used for guiding the first roller, and the second guiding part is used for guiding the second roller. The epitaxial growth equipment guides the moving mechanism through the guide assembly, so that the reaction chamber body and the transmission chamber body are separated and combined in a guided way, and the installation positions of the reaction chamber body and the transmission chamber body can be adjusted.

Description

Epitaxial growth equipment with guiding movement function

Technical Field

The utility model relates to the technical field of epitaxial growth, in particular to epitaxial growth equipment with a guiding movement function.

Background

The epitaxial growth equipment is used for realizing epitaxial growth of silicon carbide and comprises a reaction chamber and a transmission chamber, wherein the transmission chamber is used for feeding and/or discharging, and the reaction chamber is used for reacting materials to realize epitaxial growth. In the related art, the reaction chamber and the transmission chamber are detachably connected, a guide rail is arranged on the ground, a guide rail wheel is arranged at the bottom of the reaction chamber, and the reaction chamber is driven to be separated from and combined with the transmission chamber through the movement of the guide rail wheel on the guide rail. However, the position of the transmission chamber relative to the guide rail cannot be changed due to the arrangement of the guide rail, and the transmission chamber has high position accuracy requirements when in need of maintenance, replacement and installation, so that the epitaxial growth equipment has high installation difficulty and is inconvenient to maintain.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems in the related art to some extent. To this end, an embodiment of the present utility model proposes an epitaxial growth apparatus having a guide movement function, which is provided with a movement mechanism in one of a reaction chamber body and a transfer chamber body, a guide assembly in the other of the reaction chamber body and the transfer chamber body, guides the movement mechanism through the guide assembly to enable the reaction chamber body and the transfer chamber body to be separated and combined by the guide, and is capable of adjusting installation positions of the reaction chamber body and the transfer chamber body.

The epitaxial growth equipment with the guiding movement function comprises:

the reaction chamber body is used for carrying out epitaxial growth on materials;

the conveying chamber body is used for conveying materials to the reaction chamber body;

the bottom of one of the reaction chamber body and the transmission chamber body is provided with the moving mechanism, the moving mechanism comprises a roller group, the roller group comprises a first roller and a second roller, and the first roller and the second roller are arranged at intervals in a first direction;

the guide assembly is arranged on the other one of the reaction chamber body and the transmission chamber body and comprises a first guide part and a second guide part, the first guide part and the second guide part are arranged at intervals in the first direction, the first guide part is used for guiding the first roller, and the second guide part is used for guiding the second roller.

The epitaxial growth equipment with the guiding and moving function is provided with a moving mechanism in one of a reaction chamber body and a transmission chamber body, the moving mechanism comprises a first roller and a second roller, a guiding component is arranged in the other one of the reaction chamber body and the transmission chamber body, the guiding component comprises a first guiding part and a second guiding part, and in the process of separating and combining the reaction chamber body and the transmission chamber body, the first guiding part guides the first roller, and the second guiding part guides the second roller, so that the reaction chamber body and the transmission chamber body are separated and combined in a guiding way. Meanwhile, the guide component is arranged on the other one of the reaction chamber body and the transmission chamber body, so that the installation position of the other one of the reaction chamber body and the transmission chamber body can be adjusted, and the position of the one of the reaction chamber body and the transmission chamber body is only required to be arranged opposite to the other one of the reaction chamber body and the transmission chamber body.

In some embodiments, the guide assembly further comprises a guide plate, the first guide portion and the second guide portion are disposed on the guide plate, the first guide portion has a first guide groove extending along a second direction, the first guide groove is adapted to be embedded in the first roller, the second guide portion has a second guide groove extending along a second direction, and the second guide groove is adapted to be embedded in the second roller, and the second direction is orthogonal to the first direction.

In some embodiments, the moving mechanism further includes a moving frame, at least two sets of roller sets are disposed on the moving frame, and at least two sets of roller sets are disposed at intervals in the second direction.

In some embodiments, the moving mechanism further comprises a driving component, and the driving component is connected with a group of the roller groups to drive the roller groups to rotate;

the driving assembly comprises a rotating motor, a speed reducer and a driving shaft, wherein the rotating motor is connected with a power input end of the speed reducer, a power output end of the speed reducer is in transmission connection with the driving shaft so as to drive the driving shaft to rotate around the axis of the driving shaft, a first roller is connected with one end of the driving shaft, and a second roller is connected with the other end of the driving shaft.

In some embodiments, the driving assembly further comprises a first expansion sleeve, a second expansion sleeve, a first belt pulley, a second belt pulley and a transmission belt, wherein the first belt pulley is arranged at the power input end of the speed reducer through the first expansion sleeve, the second belt pulley is arranged on the driving shaft through the second expansion sleeve, and the transmission belt is arranged on the first belt pulley and the second belt pulley, so that the first belt pulley drives the second belt pulley to rotate around the axis of the second belt pulley.

In some embodiments, the drive assembly further comprises a base, a first mounting member and a second mounting member, the base is connected to the mobile frame or to one of the reaction chamber body and the transfer chamber body, the first mounting member and the second mounting member are disposed on the base, the rotating electric machine is disposed on the first mounting member, and the speed reducer is disposed on the second mounting member.

In some embodiments, the moving frame includes a rectangular frame and a reinforcement, the reinforcement is connected to the rectangular frame, and the reinforcement extends along the first direction, the driving shaft is disposed at one end of the rectangular frame, and the reinforcement is disposed at the other end of the rectangular frame.

In some embodiments, the epitaxial growth apparatus with the guided movement function further includes a controller electrically connected to the rotating electrical machine for controlling start and stop and a rotation direction of the rotating electrical machine.

In some embodiments, the epitaxial growth apparatus with the guided movement function further includes a contact switch provided on one of the reaction chamber body and the transfer chamber body for transmitting a signal to the controller when contacting the other one of the reaction chamber body and the transfer chamber body, the controller controlling the rotating electric machine to stop when receiving the signal.

In some embodiments, the epitaxial growth apparatus with guiding movement function further comprises a positioning rod provided on one of the reaction chamber body and the transfer chamber body, and a linear bearing provided on the other of the reaction chamber body and the transfer chamber body, the positioning rod being adapted to be penetrated within the linear bearing to define the relative positions of the reaction chamber body and the transfer chamber body.

Drawings

FIG. 1 is a schematic view of a connection structure between a transfer chamber body and a moving mechanism in an embodiment of the present utility model;

FIG. 2 is a schematic view of the moving mechanism of FIG. 1;

FIG. 3 is an enlarged schematic view of a portion of the structure of the moving mechanism of FIG. 2;

FIG. 4 is a schematic view showing a connection structure between a reaction chamber body and a guide assembly in an embodiment of the present utility model;

fig. 5 is an enlarged schematic view of a portion of the guide assembly of fig. 4.

Reference numerals:

1. a reaction chamber body; 2. a transfer chamber body; 3. a moving mechanism; 31. a first roller; 32. a second roller; 33. a moving frame; 331. a rectangular frame; 332. a reinforcement; 34. a drive assembly; 341. a rotating electric machine; 342. a speed reducer; 343. a drive shaft; 344. a first expansion sleeve; 345. the second expansion sleeve; 346. a second pulley; 347. a transmission belt; 348. a base; 349. a first mounting member; 3410. a second mounting member; 4. a guide assembly; 41. a first guide part; 42. a second guide part; 43. a guide plate; 5. and a contact switch.

Detailed Description

Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

An epitaxial growth apparatus having a guided movement function according to an embodiment of the present utility model is described below with reference to fig. 1 to 5.

As shown in fig. 1 to 5, the epitaxial growth apparatus with a guided movement function according to the embodiment of the present utility model includes a reaction chamber body 1, a transfer chamber body 2, a movement mechanism 3, and a guide assembly 4.

The reaction chamber body 1 is used for carrying out epitaxial growth on materials, the transmission chamber body 2 is used for conveying the materials to the reaction chamber body 1, the bottom of one of the reaction chamber body 1 and the transmission chamber body 2 is provided with a moving mechanism 3, the moving mechanism 3 comprises a roller group, the roller group comprises a first roller 31 and a second roller 32, and the first roller 31 and the second roller 32 are arranged at intervals in a first direction (the front-back direction shown in fig. 1).

Specifically, as shown in fig. 1 and 2, the reaction chamber body 1 is used for carrying out epitaxial growth of materials, the bottom of the reaction chamber body 1 is provided with a moving mechanism, the moving mechanism comprises a roller group, the roller group comprises a first roller 31 and a second roller 32 which are arranged at intervals in the front-back direction, the reaction chamber body 1 can move in the left-right direction through the first roller 31 and the second roller 32, so that the reaction chamber body 1 and the transmission chamber body 2 can relatively move in the left-right direction, and the reaction chamber body 1 and the transmission chamber body 2 can be combined and separated.

The other of the reaction chamber body 1 and the transfer chamber body 2 is provided with a guide assembly 4, the guide assembly 4 includes a first guide portion 41 and a second guide portion 42, the first guide portion 41 and the second guide portion 42 are disposed at intervals in a first direction, the first guide portion 41 is used for guiding the first roller 31, and the second guide portion 42 is used for guiding the second roller 32.

Specifically, as shown in fig. 4, the conveying chamber body 2 is used for conveying materials to the reaction chamber body 1, one side of the reaction chamber body 1 in the left-right direction is provided with a guide assembly 4, the guide assembly 4 comprises a first guide part 41 and a second guide part 42 which are arranged at intervals in the front-back direction, the first guide part 41 and the second guide part 42 extend along the left-right direction, in the process that the reaction chamber body 1 and the conveying chamber body 2 relatively move along the left-right direction, the first roller 31 can move onto the first guide part 41 and move along the left-right direction under the guidance of the first guide part 41, and the second roller 32 can move onto the second guide part 42 and move along the left-right direction under the guidance of the second guide part 42, so that the reaction chamber body 1 and the conveying chamber body 2 can be accurately combined.

It will be appreciated that the epitaxial growth apparatus is not limited to the provision of a guide assembly in the reaction chamber body and a movement mechanism in the transfer chamber body, and in other embodiments the guide assembly is provided in the transfer chamber body and the movement mechanism is provided in the reaction chamber body.

The epitaxial growth equipment with the guiding and moving function is provided with a moving mechanism in one of a reaction chamber body and a transmission chamber body, the moving mechanism comprises a first roller and a second roller, a guiding component is arranged in the other one of the reaction chamber body and the transmission chamber body, the guiding component comprises a first guiding part and a second guiding part, and in the process of separating and combining the reaction chamber body and the transmission chamber body, the first guiding part guides the first roller, and the second guiding part guides the second roller, so that the reaction chamber body and the transmission chamber body are separated and combined in a guiding way. Meanwhile, as the guide component is arranged on the other one of the reaction chamber body and the transmission chamber body, the installation position of the other one of the reaction chamber body and the transmission chamber body can be adjusted, and the position of the one of the reaction chamber body and the transmission chamber body is only required to be arranged opposite to the other one of the reaction chamber body and the transmission chamber body, so that the installation precision requirements of the reaction chamber body and the transmission chamber body are reduced.

In some embodiments, the guide assembly 4 further includes a guide plate 43, the first guide portion 41 and the second guide portion 42 are provided on the guide plate 43, the first guide portion 41 has a first guide groove extending in a second direction (a left-right direction as viewed in fig. 1), the first guide groove is adapted to be fitted into the first roller 31, the second guide portion 42 has a second guide groove extending in the second direction, and the second guide groove is adapted to be fitted into the second roller 32, the second direction being orthogonal to the first direction.

As shown in fig. 4 and 5, the guide plate 43 is extended outwardly from one end of the reaction chamber body 1 in the left-right direction, the first guide portion 41 and the second guide portion 42 are bar-shaped members provided on the guide plate 43, the first guide portion 41 has a first guide groove extending in the left-right direction, the first guide groove is adapted to be fitted into the first roller 31 to guide the first roller 31 to move in the left-right direction, and the second guide portion 42 has a second guide groove extending in the left-right direction, the second guide groove is adapted to be fitted into the second roller 32 to guide the second roller 32 to move in the left-right direction.

The deflector plays a role in fixing the first guide part and the second guide part, and avoids the first guide part and the second guide part from being offset due to external force.

It will be appreciated that the structure of the guide assembly is not limited to having a guide plate, and in other embodiments, the reaction chamber body is provided directly with a first guide and a second guide.

In some embodiments, the moving mechanism 3 further includes a moving frame 33, where at least two sets of roller sets are disposed on the moving frame 33, and the at least two sets of roller sets are disposed at intervals in the second direction.

As shown in fig. 1 and 2, the moving mechanism 3 includes a moving frame 33, the moving frame 33 carries the conveying chamber body 2, at least two sets of roller sets, preferably two sets, are disposed on the moving frame 33, and the at least two sets of roller sets are arranged at intervals in the left-right direction, so that the moving mechanism 3 can drive the conveying chamber body 2 to move steadily.

It will be appreciated that the configuration of the movement mechanism is not limited to having a movement housing, and in other embodiments, the roller set is mounted directly to the transfer chamber body.

It will be appreciated that the roller set is not limited to at least two sets, and in other embodiments, only one set of roller sets is provided, and one supporting wheel is provided on the moving frame, where the supporting wheel and the roller set are spaced apart in a left-right direction, and a projection of the supporting wheel is located between a projection of the first roller and a projection of the second roller in a projection plane orthogonal to the left-right direction.

In some embodiments, the moving mechanism 3 further includes a driving assembly 34, where the driving assembly 34 is connected to a set of roller sets to drive the roller sets to rotate. The driving assembly 34 includes a rotating motor 341, a speed reducer 342 and a driving shaft 343, the rotating motor 341 is connected with a power input end of the speed reducer 342, a power output end of the speed reducer 342 is in transmission connection with the driving shaft 343 to drive the driving shaft 343 to rotate around an axis of the driving shaft 343, the first roller 31 is connected with one end of the driving shaft 343, and the second roller 32 is connected with the other end of the driving shaft 343.

As shown in fig. 2 and 3, a set of roller groups at the right end is connected to the driving assembly 34, so that the roller groups at the right end are used as driving roller groups, the roller groups at the left end are used as driven roller groups, and the conveying chamber body 2 is driven to move in the left-right direction by the moving mechanism.

The driving assembly 34 includes a rotating motor 341, a speed reducer 342 and a driving shaft 343, the rotating motor 341 is disposed in an up-down direction, the speed reducer 342 is located below the rotating motor 341, an output shaft of the rotating motor 341 extends downward and is connected with a power input end of the speed reducer 342, the power input end of the speed reducer 342 may be a shaft or a flange, a power output end of the speed reducer 342 is a rotating shaft extending in a front-back direction, the power output end of the speed reducer 342 is in transmission connection with the driving shaft 343 to drive the driving shaft 343 to rotate around an axis of the driving shaft 343, the driving shaft 343 is located below the speed reducer 342 and extends in the front-back direction, a front end of the driving shaft 343 is coaxially connected with the first roller 31, and a rear end of the driving shaft 343 is coaxially connected with the second roller 32, so that the first roller 31 and the second roller 32 are driven to rotate by the rotating motor 341.

The speed reducer is arranged to play a role in adjusting the moving speed of the transmission chamber body, so that the transmission chamber body can move slowly and stably, and the phenomenon that the transmission chamber body is toppled or the components on the transmission chamber body shake and damage due to the fact that the moving speed of the transmission chamber body is too high is avoided.

It will be appreciated that the drive assembly is not limited to having a rotating motor, a speed reducer, and a drive shaft, and in other embodiments the transfer chamber body is moved by manually pushing the transfer chamber body.

In some embodiments, the drive assembly 34 further includes a first expansion sleeve 344, a second expansion sleeve 345, a first pulley, a second pulley 346, and a drive belt 347, the first pulley being disposed at the power input end of the speed reducer 342 via the first expansion sleeve 344, the second pulley 346 being disposed on the drive shaft 343 via the second expansion sleeve 345, the drive belt 347 being disposed on the first and second pulleys 346 such that the first pulley drives the second pulley 346 about the axis of the second pulley 346.

As shown in fig. 3, the first pulley is disposed at the power input end of the speed reducer 342 through the first expansion sleeve 344, the first pulley is coupled with the power input end of the speed reducer 342 through the first expansion sleeve 344 in a keyless manner, the second pulley 346 is disposed on the driving shaft 343 through the second expansion sleeve 345, the second pulley 346 is coupled with the driving shaft 343 through the second expansion sleeve 345 in a keyless manner, and the driving belt 347 is disposed on the first pulley and the second pulley 346, so that the first pulley drives the second pulley 346 to rotate around the axis of the second pulley 346 through the driving belt 347, thereby driving the driving shaft 343 to rotate around the axis of the driving shaft 343, and at the same time, noise can be effectively reduced and abrasion loss can be reduced by adopting the belt transmission. Preferably, the belt 347 employs a toothed belt to avoid belt slippage.

It will be appreciated that the configuration of the drive assembly is not limited to use with belt drives and that in other embodiments the drive assembly may use a gear drive.

In some embodiments, the drive assembly 34 further includes a base 348, a first mount 349 and a second mount 3410, the base 348 being coupled to the mobile frame 33 or to one of the reaction chamber body 1 and the transfer chamber body 2, the first mount 349 and the second mount 3410 being provided on the base 348, the rotating electric machine 341 being provided on the first mount 349, and the speed reducer 342 being provided on the second mount 3410.

As shown in fig. 3, the driving unit 34 further includes a base 348, a first mounting member 349 and a second mounting member 3410, the base 348 is connected to the transfer chamber body 2 by a connecting member, preferably a bolt, the first mounting member 349 and the second mounting member 3410 are provided on the base 348 by the connecting member, the first mounting member 349 is preferably a flange, the rotating electric machine 341 is provided on the first mounting member 349 by the connecting member, the second mounting member 3410 is preferably a bracket, the second mounting member 3410 is provided at intervals in the front-rear direction, the speed reducer 342 is provided between the two second mounting members 3410 and is connected to the second mounting member 3410 by the connecting member, and the power output end of the speed reducer 342 is provided through the second mounting member 3410.

It will be appreciated that the base is not limited to connection to the transfer chamber body, and in other embodiments, the base is connected to a mobile frame.

In some embodiments, the moving frame 33 includes a rectangular frame 331 and a reinforcement 332, the reinforcement 332 is connected to the rectangular frame 331, and the reinforcement 332 extends in a first direction, a driving shaft 343 is provided at one end of the rectangular frame 331, and the reinforcement 332 is provided at the other end of the rectangular frame 331.

As shown in fig. 2, the moving frame 33 includes a rectangular frame 331 and a reinforcement 332, the two sets of roller sets are disposed on the rectangular frame 331, wherein a first roller and a second roller of the roller set at a left end are disposed at a left end of the rectangular frame 331 through a connection member, preferably a bolt, and the first roller and the second roller of the roller set at the left end are connected with the rectangular frame 331 through ball bearings so as to improve a bearing capacity of the first roller and the second roller, a driving shaft 343 is disposed at a right end of the rectangular frame 331 in a penetrating manner and is connected with the roller set at the right end, the reinforcement 332 extends along a front-rear direction and is connected between the rectangular frames 331, and the reinforcement 332 is disposed at the left end of the rectangular frame 331 so as to prevent the left end of the rectangular frame 331 from loosening, thereby ensuring that a space between the first roller and the second roller is unchanged. Preferably, the reinforcement 332 is a plate member and the ball bearings are deep groove ball bearings.

In some embodiments, the epitaxial growth apparatus with a guided movement function according to the embodiments of the present utility model further includes a controller electrically connected to the rotating electric machine 341 for controlling the start and stop and the rotation direction of the rotating electric machine 341.

Specifically, the controller may be disposed on the reaction chamber body, or may be disposed on the transmission chamber body, or may be disposed independently, and the controller is electrically connected to the rotating motor 341, so as to control the start and stop and the rotation direction of the rotating motor 341, thereby controlling the relative movement of the reaction chamber body and the transmission chamber body for combination and separation.

In some embodiments, the epitaxial growth apparatus with guiding movement function of the embodiment of the present utility model further includes a contact switch 5, the contact switch 5 being provided on one of the reaction chamber body 1 and the transfer chamber body 2, the contact switch 5 being used to send a signal to the controller when contacting the other one of the reaction chamber body 1 and the transfer chamber body 2, the controller controlling the rotating motor 341 to stop when receiving the signal.

As shown in fig. 1, a contact switch 5 is arranged at the right end of the transmission chamber body 2, when the reaction chamber body 1 and the transmission chamber body 2 are relatively close to each other and reach a combining position, the contact switch 5 contacts with the reaction chamber body 1 and sends a signal to a controller, and the controller controls the rotating motor 341 to stop when receiving the signal, so that the moving mechanism 3 and the transmission chamber body 2 stop moving, and the reaction chamber body 1 and the transmission chamber body 2 are prevented from being damaged by collision or deviating from the installation position.

It will be appreciated that the contact switch is not limited to being provided on the transfer chamber body, and in other embodiments, the contact switch is provided on the reaction chamber body for transmitting a signal when contacting the transfer chamber body.

In some embodiments, the epitaxial growth apparatus with guiding movement function according to the embodiments of the present utility model further includes a positioning rod provided on one of the reaction chamber body 1 and the transfer chamber body 2, and a linear bearing provided on the other of the reaction chamber body 1 and the transfer chamber body 2, the positioning rod being adapted to be inserted into the linear bearing to define the relative positions of the reaction chamber body 1 and the transfer chamber body 2.

Specifically, the left end of the reaction chamber body 1 is provided with a positioning rod extending along the left-right direction, the right end of the transmission chamber body 2 is provided with a linear bearing, and the linear bearing is arranged opposite to the positioning rod, so that when the reaction chamber body 1 and the transmission chamber body 2 are relatively close to each other, the positioning rod firstly penetrates through the linear bearing and forms a guiding function, thereby guiding the reaction chamber body 1 and the transmission chamber body 2 to reach a merging position, and limiting the relative positions of the reaction chamber body 1 and the transmission chamber body 2 at the same time, and avoiding that the reaction chamber body 1 and the transmission chamber body 2 cannot be merged due to position movement.

In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between and not for indicating or implying a relative importance or an implicit indication of the number of features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

For purposes of this disclosure, the terms "one embodiment," "some embodiments," "example," "a particular example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

While the above embodiments have been shown and described, it should be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives, and variations of the above embodiments may be made by those of ordinary skill in the art without departing from the scope of the utility model.

Claims

1. An epitaxial growth apparatus having a guided movement function, comprising:

the reaction chamber comprises a reaction chamber body (1), wherein the reaction chamber body (1) is used for carrying out epitaxial growth on materials;

the conveying chamber body (2), the conveying chamber body (2) is used for conveying materials to the reaction chamber body (1);

the device comprises a reaction chamber body (1) and a transmission chamber body (2), wherein the bottom of the reaction chamber body (1) and the bottom of the transmission chamber body (2) are provided with the movement mechanism (3), the movement mechanism (3) comprises a roller group, the roller group comprises a first roller (31) and a second roller (32), and the first roller (31) and the second roller (32) are arranged at intervals in a first direction;

the guide assembly (4), another one of the reaction chamber body (1) and the transmission chamber body (2) is provided with the guide assembly (4), the guide assembly (4) comprises a first guide part (41) and a second guide part (42), the first guide part (41) and the second guide part (42) are arranged at intervals in the first direction, the first guide part (41) is used for guiding the first roller (31), and the second guide part (42) is used for guiding the second roller (32).

2. The epitaxial growth apparatus with guided movement function according to claim 1, characterized in that the guide assembly (4) further comprises a guide plate (43), the first guide portion (41) and the second guide portion (42) being provided on the guide plate (43), the first guide portion (41) having a first guide groove extending in a second direction, the first guide groove being adapted to be embedded in the first roller (31), the second guide portion (42) having a second guide groove extending in a second direction, the second guide groove being adapted to be embedded in a second roller (32), the second direction being orthogonal to the first direction.

3. The epitaxial growth apparatus with guiding movement function according to claim 2, characterized in that the movement mechanism (3) further comprises a movement frame (33), at least two sets of the roller sets are provided on the movement frame (33), the at least two sets of the roller sets being arranged at intervals in the second direction.

4. An epitaxial growth apparatus with guided movement according to claim 3, characterized in that the movement mechanism (3) further comprises a driving assembly (34), the driving assembly (34) being connected to a set of the roller sets to drive the roller sets in rotation;

the driving assembly (34) comprises a rotating motor (341), a speed reducer (342) and a driving shaft (343), the rotating motor (341) is connected with a power input end of the speed reducer (342), a power output end of the speed reducer (342) is connected with the driving shaft (343) in a transmission mode so as to drive the driving shaft (343) to rotate around an axis of the driving shaft (343), a first roller (31) is connected with one end of the driving shaft (343), and a second roller (32) is connected with the other end of the driving shaft (343).

5. The epitaxial growth apparatus with guiding movement function according to claim 4, wherein the driving assembly (34) further comprises a first expansion sleeve (344), a second expansion sleeve (345), a first pulley, a second pulley (346) and a transmission belt (347), the first pulley is provided at a power input end of the speed reducer (342) through the first expansion sleeve (344), the second pulley (346) is provided on the driving shaft (343) through the second expansion sleeve (345), and the transmission belt (347) is provided on the first pulley and the second pulley (346) so that the first pulley drives the second pulley (346) to rotate around an axis of the second pulley (346).

6. The epitaxial growth apparatus with guided movement function according to claim 4, wherein the drive assembly (34) further comprises a base (348), a first mount (349) and a second mount (3410), the base (348) being connected to the moving frame (33) or to one of the reaction chamber body (1) and the transfer chamber body (2), the first mount (349) and the second mount (3410) being provided on the base (348), the rotating motor (341) being provided on the first mount (349), the speed reducer (342) being provided on the second mount (3410).

7. The epitaxial growth apparatus with the guide movement function according to claim 4, wherein the movement frame (33) includes a rectangular frame (331) and a reinforcement (332), the reinforcement (332) is connected to the rectangular frame (331), and the reinforcement (332) extends in the first direction, the driving shaft (343) is provided at one end of the rectangular frame (331), and the reinforcement (332) is provided at the other end of the rectangular frame (331).

8. The epitaxial growth apparatus with the guided movement function according to claim 4, further comprising a controller electrically connected to the rotating electric machine (341) for controlling start-stop and rotation direction of the rotating electric machine (341).

9. The epitaxial growth apparatus with guide movement function according to claim 8, further comprising a contact switch (5), the contact switch (5) being provided on one of the reaction chamber body (1) and the transfer chamber body (2), the contact switch (5) being for sending a signal to the controller when contacting the other of the reaction chamber body (1) and the transfer chamber body (2), the controller controlling the rotating electric machine (341) to stop when receiving the signal.

10. Epitaxial growth apparatus with guided movement according to any one of claims 1-9, characterized in that it further comprises a positioning rod provided on one of the reaction chamber body (1) and the transfer chamber body (2) and a linear bearing provided on the other of the reaction chamber body (1) and the transfer chamber body (2), the positioning rod being adapted to be threaded inside the linear bearing to define the relative position of the reaction chamber body (1) and the transfer chamber body (2).