CN220067768U

CN220067768U - Stable control device

Info

Publication number: CN220067768U
Application number: CN202321518144.7U
Authority: CN
Inventors: 李哲; 胡敏捷; 魏鸣峰
Original assignee: Hefei Yingshibo Precision Equipment Co ltd
Current assignee: Hefei Yingshibo Precision Equipment Co ltd
Priority date: 2023-06-14
Filing date: 2023-06-14
Publication date: 2023-11-21
Anticipated expiration: 2033-06-14

Abstract

The utility model discloses a stable control device, which comprises a temperature stable control structure, wherein the temperature stable control structure comprises a mounting frame, a placing groove is formed in the mounting frame, a plasma chamber is placed in the placing groove, a setting frame is fixedly connected to the upper side of the mounting frame, a motor is fixedly installed on the upper side of the setting frame, a threaded rod is fixedly connected to the output end of the motor, and a moving block is arranged outside the threaded rod. According to the utility model, through the arrangement of the temperature stable control structure, the radio frequency generator is started so that the radio frequency antenna generates a radio frequency electric field, then the radio frequency electric field is introduced into the plasma chamber, electrons in the plasma are subjected to the action of the electric field to generate high-speed motion, so that ions and electrons in the plasma collide, heating of the plasma is realized, and the stability and reliability of radio frequency heating are ensured by measuring and analyzing the radio frequency power and frequency spectrum of the radio frequency generator by using the power meter and the frequency spectrum analyzer.

Description

Stable control device

Technical Field

The utility model relates to the technical field of plasma stability control, in particular to a stability control device.

Background

A plasma is an electrically neutral substance composed of a plurality of particles of different properties such as cations, neutral particles, free electrons, etc., in which the respective charge amounts of anions (free electrons) and cations are equal, which is physically called "plasma". The particles in the plasma move to generate an electromagnetic field and influence the motion of each charged particle in the material, which gives the plasma special properties that define what is called plasma.

When the plasma needs to be stably controlled, the plasma is generally stabilized in a space by using a stable control device, so that the plasma is conveniently controlled, most of the current stable control devices use microwaves to heat the plasma when the plasma is heated, but the microwave heating is directly connected to a control system, and the stability and controllability of the plasma are difficult to ensure because the plasma is a very complex physical process, so that the instability of the plasma is possibly caused, and the stable control device is provided for solving the problems.

Disclosure of Invention

The utility model mainly solves the technical problems existing in the prior art and provides a stable control device.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a stable control device, includes temperature stable control structure, temperature stable control structure includes the installing frame, the standing groove has been seted up to the inside of installing frame, the plasma chamber has been placed to the inside of standing groove, the upside fixedly connected with of installing frame sets up the frame, the upside fixed mounting of setting up the frame has the motor, the output fixedly connected with threaded rod of motor, the outside of threaded rod is provided with the movable block, the outside of movable block is provided with the spout, one side fixedly connected with mounting panel of movable block, one side of mounting panel passes through bolt fixedly connected with radio frequency generator, the upside fixed mounting of radio frequency generator has radio frequency antenna, one side fixed mounting of setting up the frame has the power meter, the opposite side fixed mounting of setting up the frame has spectrum analyzer, power meter and radio frequency generator electric connection set up into corresponding measurement mode and measuring range through the power meter, but the display screen on the radio frequency generator uses observable power value at the radio frequency generator, spectrum analyzer can be according to radio frequency generator's demonstration result, the characteristic such as frequency, bandwidth, further characteristic such as spectral analyzer signal performance.

Preferably, the threaded rod is in threaded connection with the moving block, the moving block is in sliding connection with the sliding groove, and the moving block is limited through the sliding groove, so that the threaded rod can drive the moving block to lift in the position limited by the sliding groove when rotating.

Preferably, a coil is disposed inside the placement groove, the coil is disposed outside the plasma chamber, and the coil is connectable with an external magnet and with an external power supply such that a current flows into the coil.

Preferably, the upper side threaded connection of plasma room has the closing cap, the upside fixedly connected with handle of closing cap, the upside fixed mounting of closing cap has first vacuum pump, and the output of vacuum pump extends to the inside of plasma room through the closing cap for can be through the air extraction in the vacuum pump with the plasma room makes the plasma indoor formation vacuum.

Preferably, the lower surface of installing frame has seted up and has set up the groove, the top fixed mounting in setting up the groove has electric putter, electric putter's downside fixed mounting has the second vacuum pump, the downside fixedly connected with sucking disc of second vacuum pump, second vacuum pump and sucking disc all set up in setting up the inslot, use and make the accessible electric putter shift out the sucking disc from setting up the inslot as required.

Preferably, the output end of the second vacuum pump is arranged in the sucker, the rubber pad is fixedly connected to the lower side of the mounting frame, and the air in the sucker is pumped out through the vacuum pump, so that the sucker can be better adsorbed on a platform where the device is to be placed.

Compared with the prior art, the utility model has the following beneficial effects:

1. according to the utility model, through the arrangement of the temperature stable control structure, the radio frequency generator is started so that the radio frequency antenna generates a radio frequency electric field, then the radio frequency electric field is introduced into the plasma chamber, electrons in the plasma are subjected to the action of the electric field to generate high-speed motion, so that ions and electrons in the plasma collide, heating of the plasma is realized, and the stability and reliability of radio frequency heating are ensured by measuring and analyzing the radio frequency power and frequency spectrum of the radio frequency generator by using the power meter and the frequency spectrum analyzer.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:

FIG. 1 is a schematic view of a first overall structure of the present utility model;

FIG. 2 is a schematic diagram of a second overall structure of the present utility model;

FIG. 3 is a schematic view of a first front cross-section of the present utility model;

fig. 4 is a schematic structural view of a second front section of the present utility model.

In the figure: 1. a mounting frame; 2. a placement groove; 3. a plasma chamber; 4. setting a frame; 5. a motor; 6. a threaded rod; 7. a moving block; 8. a chute; 9. a mounting plate; 10. a radio frequency generator; 11. a radio frequency antenna; 12. a power meter; 13. a spectrum analyzer; 14. a coil; 15. a closing cap; 16. a handle; 17. a first vacuum pump; 18. a groove is arranged; 19. an electric push rod; 20. a second vacuum pump; 21. a suction cup; 22. and a rubber pad.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-4, a stable control device comprises a temperature stable control structure, the temperature stable control structure comprises a mounting frame 1, a placing groove 2 is formed in the mounting frame 1, a plasma chamber 3 is placed in the placing groove 2, a setting frame 4 is fixedly connected to the upper side of the mounting frame 1, a motor 5 is fixedly mounted on the upper side of the setting frame 4, a threaded rod 6 is fixedly connected to the output end of the motor 5, a moving block 7 is arranged on the outer portion of the threaded rod 6, a sliding groove 8 is arranged on the outer portion of the moving block 7, a mounting plate 9 is fixedly connected to one side of the moving block 7, a radio frequency generator 10 is fixedly connected to one side of the mounting plate 9 through bolts, a radio frequency antenna 11 is fixedly mounted on the upper side of the radio frequency generator 10, a power meter 12 is fixedly mounted on one side of the setting frame 4, a spectrum analyzer 13 is fixedly mounted on the other side of the setting frame 4, the power meter 12 and the spectrum analyzer 13 are electrically connected with the radio frequency generator 10, the threaded rod 6 is in threaded connection with the moving block 7, the moving block 7 is in sliding connection with the chute 8, a coil 14 is arranged in the placing groove 2, the coil 14 is arranged outside the plasma chamber 3, when plasma in the plasma chamber 3 is required to be heated, the radio frequency generator 10 is started so that the radio frequency antenna 11 generates a radio frequency electric field, then the radio frequency electric field is introduced into the plasma chamber 3, electrons in the plasma are subjected to the action of the electric field to generate high-speed motion, so that the ions and the electrons in the plasma collide, heating of the plasma is realized, the radio frequency power and the frequency spectrum of the radio frequency generator 10 are measured and analyzed by using the power meter 12 and the spectrum analyzer 13 to ensure the stability and the reliability of the radio frequency heating, meanwhile, the threaded rod 6 is driven to rotate by the motor 5, through threaded rod 6 and movable block 7 threaded connection's setting, carry out spacing setting down to movable block 7 through spout 8 for threaded rod 6 drives movable block 7 and removes, makes movable block 7 drive radio frequency generator 10 through mounting panel 9 and carries out the regulation of height and make radio frequency generator 10 can heat the plasma at suitable height, and coil 14 is connected with magnet and external power source, makes the electric current import to the magnet through coil 14 on, makes shape and the size that can decide the magnetic field through coil 14.

In one aspect of the present embodiment, the closing cap 15 is screwed into the upper position of the plasma chamber 3 with the aid of the handle 16, so that the plasma chamber 3 is closed, and the first vacuum pump 17 is started to pump out the air of the plasma chamber 3, so that the plasma chamber is used in a state of maintaining a vacuum.

In one aspect of this embodiment, when the mounting frame 1 needs to be placed more stably, the device is placed on a flat and smooth platform, the friction force between the device and the platform is increased by the rubber pad 22, and the electric push rod 19 is started to drive the second vacuum pump 20 and the sucker 21 to extend out of the setting groove 18, so that the sucker 21 contacts the platform, the second vacuum pump 20 is started, so that air in the sucker 21 is pumped out, and the sucker 21 can be firmly adsorbed on the platform, so that the device is placed more firmly.

The working principle of the utility model is as follows: when the stability control device is used, the electric push rod 19 is started to drive the second vacuum pump 20 and the sucker 21 to extend out of the setting groove 18, so that the sucker 21 contacts the platform, the second vacuum pump 20 is started, so that air in the sucker 21 is pumped out, the sucker 21 can be firmly adsorbed on the platform, the plasma chamber 3 is placed in the placing groove 2, the coil 14 surrounds the inner position, the sealing cover 15 is screwed into the upper side position of the plasma chamber 3 through the sealing cover 15 under the assistance of the handle 16, the plasma chamber 3 is sealed, the first vacuum pump 17 is started to pump out the air of the plasma chamber 3, the plasma chamber is used in a vacuum state, the motor 5 drives the threaded rod 6 to rotate, the threaded rod 6 is in threaded connection with the moving block 7, and the moving block 7 is limited through the chute 8, the threaded rod 6 drives the moving block 7 to move, the moving block 7 drives the radio frequency generator 10 to adjust the height through the mounting plate 9, so that the radio frequency generator 10 can heat plasmas at a proper height, then the radio frequency generator 10 is started to enable the radio frequency antenna 11 to generate a radio frequency electric field, then the radio frequency electric field is introduced into the plasma chamber 3, electrons in the plasmas are subjected to the action of the electric field to generate high-speed motion, so that ions and electrons in the plasmas collide, heating of the plasmas is achieved, the radio frequency power and the frequency spectrum of the radio frequency generator 10 are measured and analyzed through the power meter 12 and the frequency spectrum analyzer 13, stability and reliability of radio frequency heating are guaranteed, and all electric equipment in the scheme is powered through an external power supply.

Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A stable control device, includes temperature stability control structure, its characterized in that: the temperature stabilization control structure comprises a mounting frame (1), standing groove (2) has been seted up to the inside of mounting frame (1), plasma room (3) have been placed to the inside of standing groove (2), upside fixedly connected with of mounting frame (1) sets up frame (4), upside fixedly mounted of setting frame (4) has motor (5), the output fixedly connected with threaded rod (6) of motor (5), the outside of threaded rod (6) is provided with movable block (7), the outside of movable block (7) is provided with spout (8), one side fixedly connected with mounting panel (9) of movable block (7), one side of mounting panel (9) is through bolt fixedly connected with radiofrequency generator (10), upside fixedly mounted of radiofrequency generator (10) has radiofrequency antenna (11), one side fixedly mounted of setting frame (4) has power meter (12), the opposite side fixedly mounted of setting frame (4) has spectrum analyzer (13), power meter (12) and radiofrequency analyzer (13) and radiofrequency analyzer (10) electric connection.

2. A stability control device according to claim 1, characterized in that: the threaded rod (6) is in threaded connection with the moving block (7), and the moving block (7) is in sliding connection with the sliding groove (8).

3. A stability control device according to claim 1, characterized in that: the inside of standing groove (2) is provided with coil (14), coil (14) set up in the outside of plasma room (3).

4. A stability control device according to claim 1, characterized in that: the upper side threaded connection of plasma room (3) has closing cap (15), the upside fixedly connected with handle (16) of closing cap (15), the upside fixed mounting of closing cap (15) has first vacuum pump (17).

5. A stability control device according to claim 1, characterized in that: the electric vacuum pump is characterized in that a setting groove (18) is formed in the lower surface of the mounting frame (1), an electric push rod (19) is fixedly arranged at the top of the setting groove (18), a second vacuum pump (20) is fixedly arranged at the lower side of the electric push rod (19), and a sucker (21) is fixedly connected to the lower side of the second vacuum pump (20).

6. The stability control device of claim 5, wherein: the output end of the second vacuum pump (20) is arranged in the sucker (21), and a rubber pad (22) is fixedly connected to the lower side of the mounting frame (1).