CN220063353U - Large-measurement-range spectrum confocal measuring head - Google Patents
Large-measurement-range spectrum confocal measuring head Download PDFInfo
- Publication number
- CN220063353U CN220063353U CN202320355723.8U CN202320355723U CN220063353U CN 220063353 U CN220063353 U CN 220063353U CN 202320355723 U CN202320355723 U CN 202320355723U CN 220063353 U CN220063353 U CN 220063353U
- Authority
- CN
- China
- Prior art keywords
- lens group
- dispersion
- lens
- dispersive
- light path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001228 spectrum Methods 0.000 title claims abstract description 8
- 239000006185 dispersion Substances 0.000 claims abstract description 79
- 238000009792 diffusion process Methods 0.000 claims abstract description 41
- 238000012546 transfer Methods 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 239000013307 optical fiber Substances 0.000 claims abstract description 8
- 238000000926 separation method Methods 0.000 claims abstract description 6
- 230000008859 change Effects 0.000 claims abstract description 5
- 238000012544 monitoring process Methods 0.000 claims abstract description 3
- 238000005259 measurement Methods 0.000 claims description 12
- 230000003595 spectral effect Effects 0.000 claims description 12
- 230000004075 alteration Effects 0.000 claims description 8
- 239000000523 sample Substances 0.000 claims description 5
- 238000009825 accumulation Methods 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 4
- 238000013507 mapping Methods 0.000 claims 1
- 238000005096 rolling process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
Abstract
The utility model relates to a large-measurement-range spectrum confocal measuring head, which comprises a lens barrel, wherein one end of the lens barrel is externally connected with an optical fiber and is used for introducing a compound-color light source and forming an input light path in the lens barrel, a diffusion lens group is arranged on the input light path in the lens barrel and is used for expanding an emitted light beam of the optical fiber to form an output light path, and a plurality of dispersion lens groups and switching lens groups are arranged on the output light path in the lens barrel, so that after the light beams with different wavelengths are subjected to dispersion separation and refraction focusing through the dispersion lens groups, focuses of the light beams are sequentially distributed along with the change of wavelengths on the axis of the output light path, the wavelength distribution of the compound-color light is mapped with the position information of a measured space, and the monitoring of the space position of the light beam is realized by utilizing the return wavelength detection of a measured object. The utility model adopts a structure that a plurality of dispersion lens groups are continuously overlapped and are combined by a plurality of transfer lens group bearings, and can expand the dispersion range of the spectrum confocal measuring head to 20mm.
Description
Technical Field
The utility model relates to the technical field of detection, in particular to a large-measurement-range spectrum confocal measuring head.
Background
With the gradual rise of front-edge technologies such as AR/VR and the rapid increase of intelligent detection requirements of traditional spherical lenses, non-contact rapid detection of asymmetric large-arc surfaces and optical devices with regular large calibers is a focus of increasing attention. The conventional laser displacement sensor can partially meet the requirements based on the characteristic of long measuring range, but has the characteristics of uneven light spots on the shaft, slightly larger size, oblique configuration between the emission and detection light paths and the like, so that the conventional laser displacement sensor cannot meet the precise measurement requirements of high precision, has overlarge integrated occupied space and cannot be widely applied to related detection equipment. In contrast, the mode of spectral confocal measurement has the advantages of small focal spot size and axisymmetry, high detection precision and good integration level, but has the problem of small conventional detection range.
The utility model aims to provide the spectral confocal measuring head with a large measuring range so as to solve the problems while fully playing the advantages of the spectral confocal measuring head through the existing optical design theory.
Disclosure of Invention
The utility model aims to overcome the problems existing in the prior art and provides a large-measurement-range spectral confocal measuring head.
In order to achieve the technical purpose and the technical effect, the utility model is realized by the following technical scheme:
the utility model provides a wide measurement range spectrum confocal gauge head, includes the lens cone, the external optic fibre of one end of lens cone for introduce the polychromatic light source and form the input light path in the lens cone, be equipped with the diffusion lens group on the input light path in the lens cone, be used for carrying out the beam expansion with the transmission light beam of optic fibre and form the output light path be equipped with a plurality of dispersion lens groups and switching lens group on the output light path in the lens cone for after the light beam of different wavelength separates and refraction focus through dispersion lens group chromatic dispersion, its focus distributes in proper order along with the change of wavelength on the output light path axis, and maps together the wavelength distribution of polychromatic light and the positional information in measured space, utilizes the detection of measured object return wavelength to realize its space position's monitoring, switching lens group sets up between dispersion lens group for the bearing of light between the dispersion lens group.
Further, the dispersion lens group comprises a first dispersion lens group, a second dispersion lens group and a third dispersion lens group, wherein the first dispersion lens group, the second dispersion lens group and the third dispersion lens group are sequentially arranged from an object space to an image space on an output light path and used for dispersion separation and refraction focusing, the transfer lens group comprises a first transfer lens group and a second transfer lens group, the first transfer lens group is arranged between the first dispersion lens group and the second dispersion lens group, and the second transfer lens group is arranged between the second dispersion lens group and the third dispersion lens group.
Further, the focal length of the diffusion lens group is negative, and is used for expanding the emitted light beam of the optical fiber, the focal lengths of the first dispersion lens group, the second dispersion lens group and the third dispersion lens group are positive, and are used for generating positive dispersion and bearing the dispersion weight of the whole lens group, and the focal lengths of the first transfer lens group and the second transfer lens group are negative, and are used for bearing the first dispersion lens group, the second dispersion lens group and the third dispersion lens group, and jointly generate negative spherical aberration with the diffusion lens group, so as to offset the accumulation of the positive spherical aberration of the first dispersion lens group, the second dispersion lens group and the third dispersion lens group, and derive smaller negative dispersion as far as possible.
Further, the diffusion lens group consists of a plurality of single lenses with negative focal lengths.
Further, the first dispersion lens group, the second dispersion lens group and the third dispersion lens group are respectively composed of a plurality of single lenses with positive focal lengths, and the first transfer lens group and the second transfer lens group are respectively composed of a plurality of single lenses with negative focal lengths.
The beneficial effects of the utility model are as follows:
the utility model adopts a structure that a plurality of dispersion lens groups are continuously overlapped and a plurality of transfer lens group bearings are combined, and can expand the dispersion range of the spectrum confocal measuring head to 20mm, thereby having higher applicability in the application scene with larger thickness measurement and ranging range change.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
The reference numerals in the figures illustrate: 1. a diffusion lens group, 2, a first diffusion lens group, 3, a first transfer lens group, 4, a second diffusion lens group, and 5, a second switching lens group, 6, a third dispersion lens group, 7, an optical fiber, 8 and a lens cone.
Detailed Description
The utility model will be described in detail below with reference to the drawings in combination with embodiments.
As shown in fig. 1, a spectral confocal probe with a large measurement range comprises a lens barrel 8, one end of the lens barrel 8 is externally connected with an optical fiber 7 and is used for introducing a multi-color light source and forming an input light path in the lens barrel 8, a diffusion lens group 1 is arranged on the input light path in the lens barrel 8 and is used for expanding an emission light beam of the optical fiber 7 to form an output light path, a plurality of dispersion lens groups and switching lens groups are arranged on the output light path in the lens barrel 8, so that after light beams with different wavelengths are subjected to dispersion separation and refraction focusing by the dispersion lens groups, focuses of the light beams are sequentially distributed along with the change of the wavelengths on the axis of the output light path, wavelength distribution of the multi-color light is mapped with position information of a measured space, and the detection of the spatial position of the measured object is realized by utilizing the return light wavelength detection of the measured object, and the switching lens groups are arranged between the dispersion lens groups and are used for bearing light among the dispersion lens groups.
The chromatic dispersion lens group comprises a first chromatic dispersion lens group 2, a second chromatic dispersion lens group 4 and a third chromatic dispersion lens group 6, wherein the first chromatic dispersion lens group 2, the second chromatic dispersion lens group 4 and the third chromatic dispersion lens group 6 are sequentially arranged from an object space to an image space on an output light path and used for chromatic dispersion separation and refraction focusing, the transfer lens group comprises a first transfer lens group 3 and a second transfer lens group 5, the first transfer lens group 3 is arranged between the first chromatic dispersion lens group 2 and the second chromatic dispersion lens group 4 and used for light bearing between the first chromatic dispersion lens group 2 and the second chromatic dispersion lens group 4, and the second transfer lens group 5 is arranged between the second chromatic dispersion lens group 4 and the third chromatic dispersion lens group 6 and used for light bearing between the second chromatic dispersion lens group 4 and the third chromatic dispersion lens group 6.
The focal length of the diffusion lens group 1 is negative, and is used for expanding the emitted light beams of the optical fibers 7, the focal lengths of the first diffusion lens group 2, the second diffusion lens group 4 and the third diffusion lens group 6 are positive, are used for generating positive dispersion and bearing the dispersion weight of the whole lens group, and the focal lengths of the first transfer lens group 3 and the second transfer lens group 5 are negative, are used for bearing the first diffusion lens group 2, the second diffusion lens group 4 and the third diffusion lens group 6, and jointly generate negative spherical aberration with the diffusion lens group 1 so as to counteract the accumulation of the positive spherical aberration of the first diffusion lens group 2, the second diffusion lens group 4 and the third diffusion lens group 6 and derive smaller negative dispersion as far as possible.
The diffusion lens group 1 is composed of a plurality of single lenses with negative focal lengths, and in this embodiment, two single lenses are disposed in the diffusion lens group 1.
The first dispersive lens group 2, the second dispersive lens group 4 and the third dispersive lens group 6 are respectively composed of a plurality of single lenses with positive focal lengths, in this embodiment, three single lenses are respectively arranged in the first dispersive lens group 2, the second dispersive lens group 4 and the third dispersive lens group 6, the first switching lens group 3 and the second switching lens group 5 are respectively composed of a plurality of single lenses with negative focal lengths, and in this embodiment, two single lenses are respectively arranged in the first switching lens group 3 and the second switching lens group 5.
In this embodiment, each lens group and each single lens are numbered, specifically:
with continued reference to fig. 1, the diffusion lens group 1 is configured as a first lens group, the first diffusion lens group 2 is configured as a second lens group, the first transfer lens group 3 is configured as a third lens group, the second diffusion lens group 4 is configured as a fourth lens group, the second transfer lens group 5 is configured as a fifth lens group, and the third diffusion lens group 6 is configured as a sixth lens group; the single lens in the diffusion lens group 1 is orderly woven into a first lens and a second lens from the object space to the image space; the single lenses in the first dispersive lens group 2 are orderly organized into a third lens, a fourth lens and a fifth lens from the object space to the image space; the single lenses in the first switching lens group 3 are orderly woven into a sixth lens and a seventh lens from the object space to the image space; the single lens in the second dispersion lens group 4 is orderly arranged into an eighth lens, a ninth lens and a tenth lens from the object space to the image space; the single lens in the second switching lens group 5 is orderly woven into an eleventh lens and a twelfth lens from the object space to the image space; the single lenses in the third astigmatic lens group 6 are sequentially organized from the object side to the image side as a thirteenth lens, a fourteenth lens and a fifteenth lens.
The selected size of the lens barrel 8 and each single lens is restricted, and the diameter D of the lens barrel 8 of the spectral confocal measuring head is the working band range [ lambda ] 1 ，λ 2 ]In, wherein lambda 1 And lambda (lambda) 2 Short wave and long wave limits of the working wave band respectively;
the dispersion of each lens group is:wherein 1 to N are serial numbers of each lens group through which initial rays of an object plane emitted by a measuring head light source sequentially pass; 1 to N are serial numbers of each single lens in the N lens group, through which light rays sequentially pass; d (D) i The effective aperture of the ith single lens; />The optical power of the ith single lens; v i The relative Abbe number of the ith single lens in the working wave band of the measuring head;
wherein Abbe number v' i The calculation formula of (2) is as follows:wherein n is iF 、n iC 、/> The corresponding refractive indexes of the ith single lens at the wavelength limit of F, C light and the working wave band of the measuring head are respectively shown;
the first dispersive lens group 2 (second lens group), the second dispersive lens group 4 (fourth lens group) and the third dispersive lens group 6 (sixth lens group) bear the main dispersion of the dispersive lens groups, and their respective dispersions are respectively:the sum of negative dispersions derived from the diffusion lens group 1 (first lens group), the first relay lens group 3 (third lens group), and the second relay lens group 5 (fifth lens group) is:the sum of the dispersions of the lens groups is: />
In the present embodiment, the diffusion lens group 1 (first lens group) is responsible for the bearing of light rays between the first diffusion lens group 2 (second lens group), the second diffusion lens group 4 (fourth lens group) and the third diffusion lens group 6 (sixth lens group) together with the first relay lens group 3 (third lens group) and the second relay lens group 5 (fifth lens group), and derives negative spherical aberration to cancel the accumulation of positive spherical aberration of the first diffusion lens group 2 (second lens group), the second diffusion lens group 4 (fourth lens group) and the third diffusion lens group 6 (sixth lens group), that is:
in this embodiment, the spectral confocal probe is in its operating band [ lambda ] 1 ，…，λ 0 ，…，λ 2 ]Internal specific wavelength lambda 0 Where it corresponds to the back interceptShort wave limit lambda 1 Limit lambda of long wave 2 Corresponding rear intercept and difference
The absolute values are all 10mm, namely: -delta 1 ＝Δ 2 ＝10mm；
Spectral confocal probe at wavelength lambda 0 At the focal point of the outgoing light, see FIG. 1, the maximum aperture ray forms an angle with the optical axis
Furthermore, unless specifically stated or indicated otherwise, the terms "first," "second," "third," and the like in the description merely used for distinguishing between various components, elements, steps, etc. in the description, and not for indicating a logical or sequential relationship between various components, elements, steps, etc.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (5)
1. The utility model provides a wide measurement range spectrum confocal gauge head, includes lens cone (8), the external optic fibre (7) of one end of lens cone (8) is used for introducing the multiple-color light source and forms the input light path in lens cone (8), its characterized in that, be equipped with diffusion lens group (1) on the input light path in lens cone (8), be used for carrying out the beam expanding with the light beam of transmitting of optic fibre (7) and form the output light path be equipped with a plurality of dispersion lens groups and switching lens group on the output light path in lens cone (8), make the light beam of different wavelength pass through dispersion lens group chromatic dispersion separation and refraction focus after, its focus distributes in proper order along with the change of wavelength on the output light path axis to with the wavelength distribution of multiple-color light and the position information mapping correlation in measured space, utilize the detection of measured object return wavelength to realize its spatial position's monitoring, switching lens group sets up between dispersion lens group, is used for the rolling bearing of light between the dispersion lens group.
2. The large measurement range spectral confocal probe according to claim 1 wherein said dispersive lens group comprises a first dispersive lens group (2), a second dispersive lens group (4) and a third dispersive lens group (6), said first dispersive lens group (2), said second dispersive lens group (4) and said third dispersive lens group (6) are sequentially arranged from object side to image side on the output light path for chromatic dispersion separation and refractive focusing, said relay lens group comprises a first relay lens group (3) and a second relay lens group (5), said first relay lens group (3) is arranged between said first dispersive lens group (2) and said second dispersive lens group (4), and said second relay lens group (5) is arranged between said second dispersive lens group (4) and said third dispersive lens group (6).
3. The large measurement range spectral confocal measurement head according to claim 2 wherein the focal length of said diffusion lens group (1) is negative for expanding the emitted light beam of the optical fiber (7), the focal lengths of said first (2), second (4) and third (6) diffusion lens groups are positive for generating positive dispersion, bearing the dispersion weight of the whole lens group, the focal lengths of said first (3) and second (5) transfer lens groups are negative for bearing the first (2), second (4) and third (6) diffusion lens groups and together with the diffusion lens group (1) generating negative spherical aberration to counteract the accumulation of positive spherical aberration of the first (2), second (4) and third (6) diffusion lens groups and deriving as little negative dispersion as possible.
4. A large measurement range spectral confocal measurement head according to claim 3 wherein said diffusing lens group (1) consists of a plurality of single lenses of negative focal length.
5. The large measurement range spectral confocal probe according to claim 3 or 4 wherein said first (2), second (4) and third (6) dispersive lens groups are each composed of a plurality of single lenses with positive focal lengths, and said first (3) and second (5) relay lens groups are each composed of a plurality of single lenses with negative focal lengths.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320355723.8U CN220063353U (en) | 2023-03-01 | 2023-03-01 | Large-measurement-range spectrum confocal measuring head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320355723.8U CN220063353U (en) | 2023-03-01 | 2023-03-01 | Large-measurement-range spectrum confocal measuring head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220063353U true CN220063353U (en) | 2023-11-21 |
Family
ID=88762846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320355723.8U Active CN220063353U (en) | 2023-03-01 | 2023-03-01 | Large-measurement-range spectrum confocal measuring head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220063353U (en) |
-
2023
- 2023-03-01 CN CN202320355723.8U patent/CN220063353U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4400065A (en) | Multi-purpose telescope | |
| CN106405803B (en) | A kind of linear dispersion object lens of big axial chromatic aberration | |
| CN213399086U (en) | Large-zoom-ratio multi-wavelength laser shaping beam expanding collimating lens | |
| US20150268454A1 (en) | Extreme ultraviolet laser marking fø shot and laser processing device | |
| KR101890047B1 (en) | Device for contactless optical distance measurement | |
| CN104040408A (en) | Reversal system for endoscope, and endoscope | |
| CN220063353U (en) | Large-measurement-range spectrum confocal measuring head | |
| RU192789U1 (en) | FOUR-LENS APOCHROMATIC LENS | |
| CN116256153A (en) | Large-measurement-range spectrum confocal measuring head | |
| CN116299979A (en) | Line scanning spectrum confocal dispersion objective lens | |
| CN116500755A (en) | Spectrum confocal measuring lens and spectrum confocal sensor | |
| CN219736773U (en) | Super-large angle spectrum confocal measuring head | |
| JPH09222565A (en) | Microscope objective | |
| CN103744183A (en) | Infrared broadband multi-interference compound optical system | |
| CN116105982A (en) | Super-large angle spectrum confocal measuring head | |
| JP2013148626A (en) | Optical antenna for optical radio communication apparatus using infrared laser beam | |
| US6798585B2 (en) | Reference lens for interferometer and interferometer that uses it | |
| CN117826371B (en) | Compact spectral confocal measuring lens with long working distance and spectral confocal sensor | |
| CN206331176U (en) | A kind of linear dispersion object lens of big axial chromatic aberration | |
| RU2629887C1 (en) | High-speed three-lens objective for ir spectrum | |
| JP2018508832A (en) | Telecentric lens | |
| CN219416084U (en) | Small-caliber axisymmetric spectrum confocal measuring head | |
| CN114236761B (en) | Quasi-linear dispersion objective lens for high-precision surface morphology detection | |
| RU2620202C1 (en) | Lens for infrared spectral area | |
| RU2341816C1 (en) | Objective |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |