CN220057024U - Butterfly cavity type MPCVD cavity structure - Google Patents
Butterfly cavity type MPCVD cavity structure Download PDFInfo
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- CN220057024U CN220057024U CN202321494267.1U CN202321494267U CN220057024U CN 220057024 U CN220057024 U CN 220057024U CN 202321494267 U CN202321494267 U CN 202321494267U CN 220057024 U CN220057024 U CN 220057024U
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- cavity
- cooling
- water inlet
- mpcvd
- water outlet
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- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 84
- 238000001816 cooling Methods 0.000 claims abstract description 64
- 238000005192 partition Methods 0.000 claims abstract description 16
- 239000000498 cooling water Substances 0.000 claims abstract description 6
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 4
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
The utility model belongs to the technical field of microwave plasma chemical vapor deposition, and particularly relates to a butterfly-shaped cavity type MPCVD cavity structure. The vacuum chamber comprises a chamber upper cover arranged at the top of a vacuum chamber, wherein the chamber upper cover is connected with a cooling device, and a cavity is arranged in the chamber upper cover; the middle part of (a) is provided with a partition plate for dividing the cavity into a first cooling cavity and a second cooling cavity, the partition plate is provided with a through groove for communicating the first cooling cavity with the second cooling cavity, the water outlet of the water inlet component of the cooling device is communicated with the first cooling cavity, and the water inlet of the water outlet component of the cooling device is communicated with the second cooling cavity. According to the utility model, the cooling device is arranged, and cooling water is introduced into the cavity upper cover to effectively cool the cavity upper cover, so that the temperature in the vacuum cavity is reduced, the risk of damaging the MPCVD equipment is reduced, and the service life of the MPCVD equipment is prolonged.
Description
Technical Field
The utility model belongs to the technical field of microwave plasma chemical vapor deposition, and particularly relates to a butterfly-shaped cavity type MPCVD cavity structure.
Background
Microwave plasma chemical vapor deposition (Microwaveplasmachemicalvapor deposition) is abbreviated as MPCVD, and the principle is as follows: the microwave resonates in the vacuum reaction cavity to form strong electromagnetic field area in specific position to ionize the mixed gas to form plasma and form solid matter deposit on the surface of the substrate.
The structure of the conventional butterfly-shaped cavity type MPCVD cavity is shown in the accompanying figure 3: microwaves enter the vacuum cavity from the waveguide feed-in port, and finally form plasma above the base station. Under the condition of proper microwave input power, when the top height in the cavity is matched with the dimensions of the height, the diameter and the like of the base, plasma (flat shape as shown in fig. 3) in an ideal state can be formed, and the effective deposition area of the MPCVD equipment is large and uniform.
However, with the increase of the thickness of the product and the increase of the microwave input power, under a certain specific condition, secondary plasma is formed at the top of the cavity, and the generation of the secondary plasma can cause the temperature at the top of the cavity to be too high, so that the MPCVD equipment has the risk of being damaged under the condition of long-time operation of the equipment, and the service life is greatly reduced.
Disclosure of Invention
To overcome the above-mentioned drawbacks of the prior art, the present utility model provides a butterfly cavity MPCVD cavity structure. The utility model reduces the risk of damage to MPCVD equipment and prolongs the service life.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
a butterfly cavity type MPCVD cavity structure comprises a cavity upper cover arranged at the top of a vacuum cavity, wherein the cavity upper cover is connected with a cooling device, and a cavity is arranged in the cavity upper cover; the middle part of (a) is provided with a partition plate for dividing the cavity into a first cooling cavity and a second cooling cavity, the partition plate is provided with a through groove for communicating the first cooling cavity with the second cooling cavity, the water outlet of the water inlet component of the cooling device is communicated with the first cooling cavity, and the water inlet of the water outlet component of the cooling device is communicated with the second cooling cavity.
Preferably, the first cooling cavity and the second cooling cavity are distributed from bottom to top.
Preferably, the water inlet assembly comprises a water inlet pipe, the water outlet end of the water inlet pipe penetrates through the partition plate to be communicated with the first cooling cavity, and through grooves are formed in two ends of the partition plate.
Preferably, the water outlet assembly comprises a water outlet pipe, the water inlet end of the water outlet pipe is communicated with the second cooling cavity, and the water outlet end of the water outlet pipe is connected with the water suction pump.
Preferably, the water inlet end of the water inlet pipe is connected with a cooling tank filled with cooling water.
Preferably, the water inlet pipe and the water outlet pipe are in an inverted L shape, the water outlet end of the water inlet pipe vertical section sequentially penetrates through the inside of the water outlet pipe vertical section, the partition plate is communicated with the first cooling cavity, and the water inlet end of the water inlet pipe vertical section extends out of the water outlet pipe vertical section.
Preferably, the cavity is horizontally arranged, and the volume of the cavity accounts for 30% -60% of the volume of the upper cover of the cavity.
Preferably, the device is a butterfly-shaped cavity type MPCVD cavity structure.
Preferably, the device further comprises a temperature sensor, the temperature sensor being connected to the cooling device.
The utility model has the advantages that:
due to the fact that the temperature of the top of the vacuum cavity of the MPCVD equipment is too high caused by the existence of plasma, cooling water is introduced into the upper cover of the cavity to effectively cool the cavity, so that the temperature in the vacuum cavity is reduced, the risk of damage to the MPCVD equipment is reduced, and the service life of the MPCVD equipment is prolonged.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model.
Fig. 2 is a schematic view of a partial enlarged structure of the present utility model.
FIG. 3 is a schematic diagram of a conventional microwave plasma chemical vapor deposition apparatus.
The meaning of the reference symbols in the figures is as follows:
1-vacuum cavity, 2-cavity upper cover, 3-division board, 4-cavity, 41-first cooling cavity, 42-second cooling cavity, 5-through groove, 6-inlet tube, 7-outlet pipe.
Detailed Description
The present utility model will be further described in detail with reference to the drawings and examples, wherein all other examples, which are obtained by a person skilled in the art without making any inventive effort, are included in the scope of the present utility model.
As shown in fig. 1-2, the device comprises a cavity upper cover 2 which is arranged at the top of a vacuum cavity 1 and is integrally formed with the device, the cavity upper cover 2 is connected with a cooling device, the cooling device comprises a water inlet component and a water outlet component, a cavity 4 is arranged in the cavity upper cover 2, the cavity 4 is horizontally arranged, and the volume of the cavity 4 accounts for 30% -60% of the volume of the cavity upper cover 2.
Specifically, the middle part of the cavity 4 is provided with a partition plate 3 for dividing the cavity 4 into a first cooling cavity 41 and a second cooling cavity 42, the first cooling cavity 41 and the second cooling cavity 42 are distributed from bottom to top, and the partition plate 3 is provided with a through groove 5 for communicating the first cooling cavity 41 and the second cooling cavity 42.
Further, the water outlet of the water inlet assembly is communicated with the first cooling cavity 41, and the water inlet of the water outlet assembly is communicated with the second cooling cavity 42. The water inlet assembly comprises a water inlet pipe 6, the water outlet end of the water inlet pipe 6 penetrates through the partition plate 3 to be communicated with the first cooling cavity 41, and through grooves 5 are formed in two ends of the partition plate 3. The water outlet assembly comprises a water outlet pipe 7, the water inlet end of the water outlet pipe 7 is communicated with the second cooling cavity 42, and the water outlet end of the water outlet pipe 7 is connected with a water suction pump.
Further, the water inlet end of the water inlet pipe 6 is connected with a cooling tank filled with cooling water. The water inlet pipe 6 and the water outlet pipe 7 are in an inverted L shape, the water outlet end of the vertical section of the water inlet pipe 6 sequentially penetrates through the inside of the vertical section of the water outlet pipe 7, the partition plate 3 is communicated with the first cooling cavity 41, and the water inlet end of the vertical section of the water inlet pipe 6 extends out of the vertical section of the water outlet pipe 7, so that the occupied area of the cooling device can be reduced. The device is of a butterfly cavity type MPCVD cavity structure. The device also comprises a temperature sensor which is connected with the cooling device.
The operation of the device will be described in detail with reference to the drawings in the embodiments.
When the MPCVD equipment works, when the temperature sensor detects that the temperature in the vacuum cavity 1 exceeds a set range, the controller can control the cooling device to work, cooling water enters the first cooling cavity 41 from the water inlet pipe 6, and the first cooling cavity 41 is closer to the vacuum cavity 1, so that the vacuum cavity 1 can be further cooled while the upper cover 2 of the vacuum cavity is cooled, the temperature in the vacuum cavity 1 is further reduced, the cooled water enters the second cooling cavity 42 through the through groove 5, and then flows into the water outlet pipe 7 through the water suction pump to be discharged.
The above embodiments are merely preferred embodiments of the present utility model and are not intended to limit the present utility model, and any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included in the scope of the present utility model.
Claims (9)
1. A butterfly-shaped cavity type MPCVD cavity structure, characterized in that: the structure comprises a cavity upper cover (2) arranged at the top of a vacuum cavity (1), wherein the cavity upper cover (2) is connected with a cooling device, and a cavity (4) is arranged in the cavity upper cover (2); the middle part of cavity (4) is equipped with division board (3) with cavity (4) partition into first cooling chamber (41) and second cooling chamber (42), be equipped with logical groove (5) of intercommunication first cooling chamber (41) and second cooling chamber (42) on division board (3), cooling device's water inlet subassembly's delivery port and first cooling chamber (41) intercommunication, cooling device's water outlet subassembly's water inlet and second cooling chamber (42) intercommunication.
2. A butterfly-cavity MPCVD cavity structure according to claim 1, wherein: the first cooling cavity (41) and the second cooling cavity (42) are distributed from bottom to top.
3. A butterfly-cavity MPCVD cavity structure according to claim 2, wherein: the water inlet assembly comprises a water inlet pipe (6), the water outlet end of the water inlet pipe (6) penetrates through the partition plate (3) to be communicated with the first cooling cavity (41), and through grooves (5) are formed in two ends of the partition plate (3).
4. A butterfly-cavity MPCVD cavity structure according to claim 3, wherein: the water outlet assembly comprises a water outlet pipe (7), the water inlet end of the water outlet pipe (7) is communicated with the second cooling cavity (42), and the water outlet end of the water outlet pipe (7) is connected with a water suction pump.
5. A butterfly-cavity MPCVD cavity structure according to claim 3, wherein: the water inlet end of the water inlet pipe (6) is connected with a cooling box filled with cooling water.
6. The butterfly-cavity MPCVD cavity structure of claim 4, wherein: the water inlet pipe (6) and the water outlet pipe (7) are in an inverted L shape, the water outlet end of the vertical section of the water inlet pipe (6) sequentially penetrates through the inside of the vertical section of the water outlet pipe (7), the partition plate (3) is communicated with the first cooling cavity (41), and the water inlet end of the vertical section of the water inlet pipe (6) extends out of the vertical section of the water outlet pipe (7).
7. A butterfly-cavity MPCVD cavity structure according to claim 1, wherein: the cavity (4) is horizontally arranged, and the volume of the cavity (4) accounts for 30% -60% of the volume of the cavity upper cover (2).
8. A butterfly-cavity MPCVD cavity structure according to claim 1, wherein: the device is of a butterfly cavity type MPCVD cavity structure.
9. A butterfly-cavity MPCVD cavity structure according to claim 1, wherein: the device further comprises a temperature sensor connected to the cooling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321494267.1U CN220057024U (en) | 2023-06-12 | 2023-06-12 | Butterfly cavity type MPCVD cavity structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321494267.1U CN220057024U (en) | 2023-06-12 | 2023-06-12 | Butterfly cavity type MPCVD cavity structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220057024U true CN220057024U (en) | 2023-11-21 |
Family
ID=88789713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321494267.1U Active CN220057024U (en) | 2023-06-12 | 2023-06-12 | Butterfly cavity type MPCVD cavity structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220057024U (en) |
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2023
- 2023-06-12 CN CN202321494267.1U patent/CN220057024U/en active Active
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