CN220048578U - Electrostatic spraying device for graphite crucible - Google Patents

Abstract

The utility model discloses an electrostatic spraying device for a graphite crucible, and belongs to the technical field of electrostatic spraying equipment. The device comprises: the spraying device comprises a shell, wherein a spraying cavity is formed in the shell in a hollow mode, a cabinet door is arranged on the shell, and the cabinet door is used for placing or taking out a graphite crucible; the turntable is arranged at the bottom of the spraying cavity, is used for placing and fixing a graphite crucible to be sprayed and can drive the graphite crucible to rotate; the electrostatic spray gun is arranged in the spraying cavity and is connected with the slurry storage tank through a feed pipe; and the compressed air tank is connected with the electrostatic spray gun through an air inlet pipe. The device can avoid introducing impurities in spraying, can realize spraying while rotating, and improves the spraying uniformity of slurry, thereby ensuring that the inner surface and the outer surface of the graphite crucible are uniformly sprayed, and ensuring that the protective coating can effectively protect the graphite crucible.

Description

Electrostatic spraying device for graphite crucible

Technical Field

The utility model relates to an electrostatic spraying device for a graphite crucible, and belongs to the technical field of electrostatic spraying equipment.

Background

At present, the Si C is mainly grown by a Physical Vapor Transport (PVT) method, and an isostatic pressing graphite product is mainly used as a growth crucible and related components. Therefore, the high-temperature thermal bedroom and the S i C thermal bedroom have larger loss to the graphite crucible, so that the growing environment Wen Changbo is dynamic, various defects are generated, and the quality and the cost of Si C products are affected.

At present, in order to ensure that the performance of the graphite crucible is maintained stable, the loss of the graphite crucible in the crystal growth process is reduced, slurry is often coated in the graphite crucible, for example, taC slurry is coated on the graphite crucible, and a TaC coating is formed after drying, so that the graphite crucible protected by the graphite crucible is prevented from being corroded. However, the existing coating device is poor in spraying uniformity, so that the thickness of a protective coating is uneven, impurities are easily introduced in the spraying process, the compactness of the protective coating is reduced, and the graphite crucible cannot be effectively protected.

Disclosure of Invention

In order to solve the problems, the utility model provides an electrostatic spraying device for a graphite crucible, which adopts an electrostatic spray gun to spray slurry on the surface of the graphite crucible in a spraying cavity, so that impurities can be prevented from being introduced in spraying, the graphite crucible is placed on a turntable, spraying can be realized while rotating, the spraying uniformity of the slurry can be improved, and the inner surface and the outer surface of the graphite crucible are ensured to be uniformly sprayed, so that a protective coating can effectively protect the graphite crucible.

The utility model provides an electrostatic spraying device for a graphite crucible, which comprises:

the spraying device comprises a shell, wherein a spraying cavity is formed in the shell in a hollow mode, a cabinet door is arranged on the shell, and the cabinet door is used for placing or taking out a graphite crucible;

the turntable is arranged at the bottom of the spraying cavity, is used for placing and fixing a graphite crucible to be sprayed and can drive the graphite crucible to rotate;

the electrostatic spray gun is arranged in the spraying cavity and is connected with the slurry storage tank through a feed pipe;

and the compressed air tank is connected with the electrostatic spray gun through an air inlet pipe.

Optionally, the spray coating device further comprises an air pump, a dust removing opening is formed in the shell, the air pump is communicated with the dust removing opening through a dust removing pipe, and the air pump can blow and inhale air into the spray coating cavity.

Optionally, the electrostatic spray guns are disposed on the top and side walls of the housing, and the electrostatic spray guns on the top of the housing and the electrostatic spray guns on each side wall of the housing are at least two.

Optionally, the inside bracing piece that is provided with of casing, the static spray gun passes through the support frame and installs on the connecting rod, the support frame can drive the static spray gun is followed the bracing piece slides.

Optionally, there are at least two electrostatic spray guns on each support frame.

Optionally, a drying gun is further arranged on the support frame, and the drying gun is connected with the hot air buffer tank through a drying pipe.

Optionally, be provided with at least three fixture block on the carousel, the fixture block is followed the circumference of carousel evenly sets up, the fixture block be used for with graphite crucible's lateral wall butt.

Optionally, a sliding guide rail extending along the center of the turntable towards the circumferential direction is further arranged on the turntable, and the clamping block is arranged in the sliding guide rail and can slide along the sliding guide rail.

Optionally, an elastic sheet is arranged on the clamping block, and a toothed clamping strip matched with the elastic sheet is arranged at the edge of the sliding guide rail.

Optionally, the carousel passes through the lift tray setting to be in the bottom of spraying cavity, the lift tray with be provided with the lifter between the casing, the lifter stretches out or contracts, so as to drive the lift tray with the carousel rises or descends.

The beneficial effects that can be produced by the present utility model include, but are not limited to:

1. according to the electrostatic spraying device for the graphite crucible, provided by the utility model, the turntable can be used for fixing and driving the graphite crucible to rotate, so that spraying can be realized while rotating, the spraying uniformity of slurry can be improved, the spraying effect is improved, and a compact protective coating can be conveniently formed on the graphite crucible.

2. According to the electrostatic spraying device for the graphite crucible, provided by the utility model, the spraying chamber can be ventilated by blowing and sucking the air pump, so that the cleanliness of the spraying chamber is improved, the fact that no metal impurity foreign matters and the like adhere to a graphite substrate through electrostatic action in the spraying process is ensured, and meanwhile, the fact that impurities such as external dust particles and the like cannot enter the electrostatic protection cover to pollute a sample in the spraying process is ensured.

3. According to the electrostatic spraying device for the graphite crucible, provided by the utility model, the arrangement of the electrostatic spray gun can improve the spraying efficiency and the spraying uniformity, and the graphite crucible can be coated and sprayed in an all-round manner, so that the occurrence of spraying dead angles is avoided, the spraying uniformity is further improved, and the thickness uniformity of a protective coating is further improved.

4. According to the electrostatic spraying device for the graphite crucible, the position of the electrostatic spraying gun is flexibly adjusted through the supporting frame, so that the graphite crucibles with different sizes are uniformly sprayed, the practicability, the use convenience and the universality of the device are improved, and the spraying cost of the graphite crucible is reduced.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and do not constitute a limitation on the utility model. In the drawings:

fig. 1 is a schematic perspective view of an electrostatic spraying device according to an embodiment of the present utility model;

fig. 2 is a schematic structural view of an electrostatic spraying device according to an embodiment of the present utility model for opening a cabinet door;

list of parts and reference numerals:

10. a housing; 11. a spray chamber; 12. a cabinet door; 13. a dust removal port; 20. a turntable; 21. a clamping block; 22. a sliding guide rail; 23. lifting the tray; 24. a lifting rod; 30. an electrostatic spray gun; 31. a support rod; 32. a support frame; 40. a compressed air tank; 41. an electrostatic generator; 42. a slurry storage tank; 43. a hot air buffer tank; 50. a drying gun; 60. an air pump; 61. a dust removing pipe 70 and a graphite crucible.

Detailed Description

In order to more clearly illustrate the general inventive concept, a detailed description is given below by way of example with reference to the accompanying drawings.

In order that the above-recited objects, features and advantages of the present utility model will be more clearly understood, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description. It should be noted that, without conflict, the embodiments of the present utility model and features in the embodiments may be combined with each other.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, however, the present utility model may be practiced in other ways than those described herein, and therefore the scope of the present utility model is not limited to the specific embodiments disclosed below.

In addition, in the description of the present utility model, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Referring to fig. 1-2, an embodiment of the present utility model discloses an electrostatic spraying apparatus for a graphite crucible, comprising: the device comprises a shell 10, a turntable 20, an electrostatic spray gun 30 and a compressed air tank 40, wherein a spraying cavity 11 is formed in the shell 10 in a hollow mode, a cabinet door 12 is arranged on the shell 10, and the cabinet door 12 is used for placing or taking out a graphite crucible; the turntable 20 is arranged at the bottom of the spraying chamber 11, and the turntable 20 is used for placing and fixing a graphite crucible to be sprayed and can drive the graphite crucible to rotate; the electrostatic spray gun 30 is arranged in the spraying chamber 11, and the electrostatic spray gun 30 is connected with the slurry storage tank 42 through a feeding pipe; the compressed air tank 40 is connected to the electrostatic spray gun 30 through an air intake pipe.

The spraying cavity 11 is formed in the shell 10, and the spraying cavity 11 is opened and closed by opening or closing the cabinet door 12, so that the graphite crucible can be placed on the turntable 20 at the cabinet door 12 or taken down on the turntable 20, and an operator can conveniently operate the graphite crucible. And after the cabinet door 12 is closed, the spraying cavity 11 is a sealed space, and the whole spraying process is carried out in the sealed space, so that new impurities can be prevented from entering in the spraying process, and the quality of electrostatic spraying is improved. The turntable 20 can fix and drive the graphite crucible to rotate, so that spraying can be realized while rotating, the spraying uniformity of slurry can be improved, and the spraying effect is improved, thereby being convenient for forming a compact protective coating on the graphite crucible. The graphite crucible sprayed by the device is used in the crystal growth process of Si C, so that the fluctuation of the crystal growth environment can be reduced, and the quality of Si C crystals can be improved.

When the device is used for spraying, an operator opens the cabinet door 12 to place and fix the graphite crucible to be sprayed on the turntable 20, the turntable 20 and the graphite crucible can be positively charged through the circuit ground, the slurry can be fed into the electrostatic spraying gun 30 through the feeding pipe, the electrostatic generating machine 41 gives static to the slurry flowing into the electrostatic spraying gun 30, and finally the air inlet pipe is filled with compressed air to spray the slurry on the graphite crucible, and the turntable 20 drives the graphite crucible to rotate, so that the slurry can be ensured to be uniformly sprayed on the graphite crucible.

Specifically, the electrostatic generator 41 may be used to act on the turntable 20 or the electrostatic spray gun 30 in a manner known in the prior art, the flow rate of the slurry may be controlled by providing a feed valve on the feed pipe, the amount of the compressed air may be controlled by providing an intake valve on the intake pipe, and the specific control manner is not limited and does not limit the present utility model.

Specifically, the manner in which the turntable 20 can fix the graphite crucible is not particularly limited, for example, the graphite crucible can be adsorbed by a vacuum chuck, a clamping groove can be formed in the turntable 20, the graphite crucible can be limited in the clamping groove, and the existing fixing manner in the prior art can be adopted, so long as the graphite crucible can be stably fixed on the turntable 20 in the rotating process of the turntable 20, and no sliding occurs.

Specifically, the turntable 20 rotates to drive the graphite crucible to rotate, the rotation mode of the turntable 20 is not particularly limited, for example, electromagnetic driving of the turntable 20 to rotate can be adopted, a rotating motor can be arranged at the bottom of the turntable 20, the turntable 20 can be driven to rotate through rotation of the rotating motor, other modes capable of driving components to rotate in the prior art can also be adopted, and the rotation modes do not form limitation on the rotation direction of the turntable 20, namely, the turntable 20 can rotate positively or reversely according to requirements.

Specifically, the compressed air tank 40, the slurry storage tank 42 and the static electricity generator 41 in the device may be disposed in the housing 10, or may be disposed outside the housing 10, and those skilled in the art may perform the setting according to the actual requirements and the size of the designed device.

As an embodiment, the spray coating device further comprises an air pump 60, the shell 10 is provided with a dust removing opening 13, the air pump 60 is communicated with the dust removing opening 13 through a dust removing pipe 61, and the air pump 60 can blow and suck air into the spray coating chamber 11. The air pump 60 and the spraying cavity 11 are communicated through the dust removing pipe 61 and the dust removing opening 13, air blowing and air suction of the air pump 60 can realize ventilation of the spraying cavity 11, so that the spraying cavity 11 can be cleaned by the air pump 60 before and after spraying, and ventilation can be performed for a plurality of times as required, so that the cleanliness of the spraying cavity 11 is improved, the fact that no metal impurity foreign matters and the like adhere to a graphite substrate through electrostatic action in the spraying process is ensured, meanwhile, the fact that impurities such as external dust particles and the like cannot enter an electrostatic protection cover to pollute a sample in the spraying process is ensured, and the spraying quality of the device is further improved.

As one embodiment, the electrostatic spray guns 30 are disposed on the top and side walls of the housing 10, and there are at least two electrostatic spray guns 30 on the top of the housing 10 and at least two electrostatic spray guns 30 on the side walls of each housing 10. Referring to fig. 2, except for the side wall and the bottom of the cabinet door 12, the rest three side walls and the top of the shell 10 are provided with at least two electrostatic spray guns 30, so that the spraying efficiency and the spraying uniformity can be improved under the arrangement, the electrostatic spray guns 30 on each surface can be set to different angles, the graphite crucible can be coated in an omnibearing manner, the occurrence of spraying dead angles is avoided, the spraying uniformity is further improved, and the thickness uniformity of a protective coating is further improved.

As an embodiment, a supporting rod 31 is arranged in the shell 10, the electrostatic spray gun 30 is mounted on the connecting rod through a supporting frame 32, and the supporting frame 32 can drive the electrostatic spray gun 30 to slide along the supporting rod 31. The bracing piece 31 provides holding power for support frame 32 and static spray gun 30 to support frame 32 can drive static spray gun 30 and slide, can realize the position adjustment of static spray gun 30, when the graphite crucible size that needs the spraying changes, can adjust the position of static spray gun 30 in a flexible way through support frame 32, in order to realize carrying out even spraying to the graphite crucible of equidimension, improves the practicality of the device, use convenience and universality, and reduces the spraying cost of graphite crucible.

Specifically, the number of the turntables 20 can be one or more than two, and the turntables can be set according to the size of the spraying chamber 11 and the size of the graphite crucible, and when the number of the turntables 20 is multiple, each turntable 20 is fixedly provided with one graphite crucible, so that electrostatic spraying of the multiple graphite crucibles can be synchronously completed, and mass production and processing are facilitated.

Specifically, the number of the supporting frames 32 on each supporting rod 31 may be one or more than two, and the number and the size of the graphite crucible to be sprayed may be set according to the requirement.

Specifically, the sliding manner of the support frame 32 along the support rod 31 is not limited, and may be any manner known in the art. For example, a through hole is formed in the support frame 32, the support frame 32 is sleeved on the support rod 31 through the through hole, a telescopic rod can be arranged between the support frame 32 and the shell 10, and the support frame 32 is pushed to slide along the support rod 31 through the telescopic of the telescopic rod; for example, referring to fig. 2, a threaded hole may be further formed on the support frame 32, a screw is used as the support rod 31, one end of the support rod 31 is connected with a rotating motor, and the support rod 31 is driven by the rotating motor to rotate, so as to realize sliding on the support rod 31 on the support frame 32.

As one embodiment, there are at least two electrostatic spray guns 30 on each support 32. Under this setting, not only can improve spraying efficiency, can also be when damage appears in one of them static spray gun 30, still can accomplish the spraying operation, guarantees the normal operating of device. The electrostatic spray guns 30 on each support frame 32 can be set to the same spraying angle or can be set to different spraying angles, and as a preferred embodiment, the electrostatic spray guns 30 on each support frame 32 are set to different spraying angles, and the included angle between two adjacent electrostatic spray guns 30 is 10-60 degrees, so that the omnibearing spraying of the graphite crucible can be realized while the normal spraying is ensured.

As an embodiment, a drying gun 50 is further provided on the support frame 32, and the drying gun 50 is connected to the hot air buffer tank 43 through a drying pipe. After the electrostatic spraying of the graphite crucible is completed, the drying gun 50 can dry the graphite crucible, so that the drying efficiency of the slurry is improved, the rapid formation of a protective coating is facilitated, and the use convenience of the device is further improved. And the drying gun 50 is arranged on the support frame 32, and the movement of the drying gun 50 can be realized through the movement of the support frame 32, so that the sprayed graphite crucible can be dried in all directions, and the drying efficiency is improved.

Specifically, the hot air buffer tank 43 may be disposed in the housing 10, or may be disposed outside the housing 10, and hot air is stored in the hot air buffer tank 43, and the hot air may be heated by the heating mechanism and then transferred into the hot air buffer tank 43, or may be transferred into the hot air buffer tank 43, and then heated by the hot air buffer tank 43 to form hot air.

More specifically, the air output of the drying gun 50 can be set according to actual needs, and the slurry on the graphite crucible is prevented from sliding in the blowing process of the drying gun 50, namely, uneven slurry spraying is avoided, and even slurry spraying is only quickly dried, so that an even and consistent protective coating is ensured to be quickly formed.

As an embodiment, at least three clamping blocks 21 are arranged on the turntable 20, the clamping blocks 21 are uniformly arranged along the circumferential direction of the turntable 20, and the clamping blocks 21 are used for being abutted against the outer side wall of the graphite crucible. The clamping block 21 is abutted with the outer side wall of the graphite crucible, and can fix the graphite crucible in the circumferential direction, so that the stability of the graphite crucible in the spraying process is further improved, and the spraying effect is further improved.

As an embodiment, the turntable 20 is further provided with a sliding rail 22 extending circumferentially along the center of the turntable 20, and the latch 21 is provided in the sliding rail 22 and is slidable along the sliding rail 22. The clamping block 21 can slide along the sliding guide rail 22, so that the position of the clamping block 21 can be adjusted according to graphite crucibles with different sizes to meet different spraying requirements, and universality of the device is further improved.

As an embodiment, the clip 21 is provided with a spring, and the edge of the sliding rail 22 is provided with a toothed clip strip matched with the spring. The shell fragment and the cooperation of tooth form card strip, tooth form card strip can play spacing effect to the shell fragment, consequently make fixture block 21 can enough follow slide rail 22 and slide, can be fixed in required position again, increase the stability of fixture block 21, and then improve the restriction effect to graphite crucible.

It can be understood by those skilled in the art that the influence of the graphite crucible on the Si C crystal growth environment is mainly caused by the damage to the interior of the graphite crucible, so that the electrostatic spraying device of the utility model mainly ensures the spraying uniformity of the interior of the graphite crucible, the clamping block 21 arranged as described above is abutted with the outer side wall of the graphite crucible and is positioned below the graphite crucible, and even if the clamping block 21 is arranged so that the outer side wall of the graphite crucible positioned at the corresponding position of the clamping block 21 cannot be sprayed with sizing agent, the use of the whole graphite crucible after spraying is not affected, and the protective coating formed after spraying the sizing agent can still effectively protect the graphite crucible.

As an embodiment, the turntable 20 is disposed at the bottom of the spraying chamber 11 through a lifting tray 23, and a lifting rod 24 is disposed between the lifting tray 23 and the housing 10, and the lifting rod 24 is extended or retracted to drive the lifting tray 23 and the turntable 20 to ascend or descend. The lifting tray 23 and the lifting rod 24 can enable the turntable 20 and the graphite crucible to ascend or descend, the position of the graphite crucible in the vertical direction can be flexibly adjusted according to the height and the spraying distance of the graphite crucible to be sprayed, the working difficulty is effectively reduced, and the spraying effect is improved.

Specifically, in order to ensure that the turntable 20 can be lifted and rotated simultaneously, a rotating motor is arranged between the lifting tray 23 and the turntable 20, the lifting rod 24 is driven by the lifting motor, and the lifting motor and the rotating motor are not interfered with each other and are connected with the controller through lines.

In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for system embodiments, since they are substantially similar to method embodiments, the description is relatively simple, as relevant to see a section of the description of method embodiments.

The foregoing is merely exemplary of the present utility model and is not intended to limit the present utility model. Various modifications and variations of the present utility model will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are to be included in the scope of the claims of the present utility model.

Claims (10)

1. An electrostatic spraying device for a graphite crucible, comprising:

the spraying device comprises a shell, wherein a spraying cavity is formed in the shell in a hollow mode, a cabinet door is arranged on the shell, and the cabinet door is used for placing or taking out a graphite crucible;

the turntable is arranged at the bottom of the spraying cavity, is used for placing and fixing a graphite crucible to be sprayed and can drive the graphite crucible to rotate;

the electrostatic spray gun is arranged in the spraying cavity and is connected with the slurry storage tank through a feed pipe;

and the compressed air tank is connected with the electrostatic spray gun through an air inlet pipe.

2. The electrostatic spraying device for a graphite crucible according to claim 1, further comprising an air pump, wherein a dust removing port is formed in the housing, the air pump is communicated with the dust removing port through a dust removing pipe, and the air pump can blow and suck air into the spraying chamber.

3. An electrostatic spraying device for a graphite crucible as claimed in claim 1, in which the electrostatic spraying guns are provided on the top and side walls of the housing, at least two electrostatic spraying guns on the top of the housing and on each side wall of the housing.

4. An electrostatic spraying device for a graphite crucible as claimed in claim 3, in which a supporting rod is provided inside the housing, the electrostatic spraying gun is mounted on the connecting rod by a supporting frame, and the supporting frame can drive the electrostatic spraying gun to slide along the supporting rod.

5. An electrostatic spraying device for a graphite crucible as claimed in claim 4, in which there are at least two electrostatic spraying guns on each of the holders.

6. An electrostatic spraying device for a graphite crucible as claimed in claim 5, wherein a drying gun is further provided on the supporting frame, and the drying gun is connected with the hot air buffer tank through a drying pipe.

7. An electrostatic spraying device for a graphite crucible as claimed in any one of claims 1 to 6, in which at least three clamping blocks are provided on the turntable, the clamping blocks being uniformly provided along the circumference of the turntable, the clamping blocks being for abutment with the outer side walls of the graphite crucible.

8. An electrostatic spraying device for a graphite crucible as claimed in claim 7, in which a slide rail is further provided on the turntable, extending circumferentially along the center of the turntable, and the clamp block is provided in the slide rail and is slidable along the slide rail.

9. The electrostatic spraying device for a graphite crucible as claimed in claim 8, wherein the clip is provided with a spring, and the edge of the sliding rail is provided with a toothed clip strip engaged with the spring.

10. An electrostatic spraying device for a graphite crucible as claimed in any one of claims 1 to 6, in which the turntable is arranged at the bottom of the spraying chamber by a lifting tray, a lifting rod is arranged between the lifting tray and the housing, and the lifting rod is extended or retracted to drive the lifting tray and the turntable to rise or fall.