CN220043698U - Electrode sealing insulation structure for vacuum cavity and vacuum cavity - Google Patents

Abstract

The utility model discloses an electrode sealing insulation structure for a vacuum cavity and the vacuum cavity. This electrode seal insulation structure of vacuum cavity, the electrode includes: the leading-in electrode and the leading-out electrode are connected to the vacuum cavity at the front end of the leading-in electrode, and the leading-out electrode is sleeved at a position, close to the rear end, on the leading-in electrode; the sealing structure comprises: the mounting plate, the insulating plate and the sealing plate are sequentially sleeved and attached along the direction from the front end to the rear end of the leading-in electrode, the sealing plate is attached to the front side of the leading-out electrode, a plurality of first nesting holes are circumferentially arranged on the sealing plate, and a plurality of first nesting pieces nested in the plurality of first nesting holes are circumferentially arranged on the rear side surface of the insulating plate; the mounting plate, the insulating plate, the sealing plate and the lead-out electrode are fixed on the vacuum cavity through fixing pieces. The utility model solves the technical problems of insufficient connection tightness between the sealing plate and the insulating plate and poor tightness and insulating effect.

Description

Electrode sealing insulation structure for vacuum cavity and vacuum cavity

Technical Field

The utility model relates to the field of vacuum and heating application, in particular to an electrode sealing insulation structure for a vacuum cavity and the vacuum cavity.

Background

The inventor finds that in the field of semiconductor or metal sintering, the combination application of vacuum and heating is more and more widespread, and in the operation process, a heating electrode penetrates through a cavity to supply power to an internal heating body for heating, so that the insulation between the electrode and the cavity is required to be ensured, and the sealing performance is also required to be ensured; therefore, the sealing plate and the insulating plate are arranged on the vacuum cavity through the flange, but the connection tightness between the sealing plate and the insulating plate is insufficient, the sealing performance and the insulating effect are poor, and damage to the heating body can be caused.

Aiming at the technical problems of insufficient connection tightness between a sealing plate and an insulating plate and poor sealing performance and insulating effect in the related art, no effective solution is proposed at present.

Disclosure of Invention

The utility model mainly aims to provide an electrode sealing insulation structure for a vacuum cavity and the vacuum cavity, which are used for solving the technical problems of insufficient connection tightness between a sealing plate and an insulation plate and poor sealing performance and insulation effect.

In order to achieve the above object, according to one aspect of the present utility model, there is provided an electrode sealing and insulating structure for a vacuum chamber.

The electrode sealing and insulating structure for a vacuum chamber according to the present utility model is characterized by comprising: the electrode includes: the leading-in electrode and the leading-out electrode are connected to the vacuum cavity at the front end of the leading-in electrode, and the leading-out electrode is sleeved at a position, close to the rear end, on the leading-in electrode; the sealing structure comprises: the mounting plate, the insulating plate and the sealing plate are sequentially sleeved and attached along the direction from the front end to the rear end of the leading-in electrode, the sealing plate is attached to the front side of the leading-out electrode, a plurality of first nesting holes are circumferentially arranged on the sealing plate, and a plurality of first nesting pieces nested in the plurality of first nesting holes are circumferentially arranged on the rear side surface of the insulating plate; the mounting plate, the insulating plate, the sealing plate and the lead-out electrode are fixed on the vacuum cavity through fixing pieces.

Further, the sealing structure further includes: the lead-in electrode is sleeved with the pressing plate, the pressing plate is arranged between the sealing plate and the lead-out electrode, the pressing plate is attached to the sealing plate and the lead-out electrode, and the pressing plate is a mica plate.

Further, a second nesting hole is formed in the mounting plate and located at the center, and a second nesting piece nested in the second nesting hole is arranged on the front side face of the insulating plate and located at the center.

Further, a third nesting hole is formed in the center position of the pressing plate, a third nesting piece nested in the third nesting hole is arranged in the center position of the rear side face of the sealing plate, and the left side face of the third nesting piece is attached to the right side face of the lead-out electrode.

Further, two first sealing rings are arranged between the sealing plate and the leading-in electrode, and the two first sealing rings are respectively arranged on the rear side surface of the insulating plate and the front side surface of the leading-out electrode.

Further, a second sealing ring is arranged between the mounting plate and the second nesting piece, and the second sealing ring is arranged at the junction of the main body part of the insulating plate and the second nesting piece.

Further, the insulating plate is located at the middle position of the second nesting piece, the sealing plate is located at the middle position, and the lead-out electrode is located at a position close to the end part and is provided with a sleeve hole matched with the lead-in electrode.

Further, the mounting plate is in threaded connection with a mounting flange of the vacuum cavity.

Further, the insulating plate is located at the middle position of the first embedded component, and fixing holes matched with the fixing pieces are formed in the mounting plate and the pressing plate and opposite to the middle position of the first embedded component.

To achieve the above object, according to the present utility model, there is provided a vacuum chamber.

The vacuum chamber according to the present utility model comprises: any one of the above electrode sealing insulation structures for vacuum cavity.

In the embodiment of the utility model, the insulating plate and the sealing plate are connected in a nested manner, and the electrode comprises: the leading-in electrode and the leading-out electrode are connected to the vacuum cavity at the front end of the leading-in electrode, and the leading-out electrode is sleeved at a position, close to the rear end, on the leading-in electrode; the sealing structure comprises: the mounting plate, the insulating plate and the sealing plate are sequentially sleeved and attached along the direction from the front end to the rear end of the leading-in electrode, the sealing plate is attached to the front side of the leading-out electrode, a plurality of first nesting holes are circumferentially arranged on the sealing plate, and a plurality of first nesting pieces nested in the plurality of first nesting holes are circumferentially arranged on the rear side surface of the insulating plate; the mounting plate, the insulating plate, the sealing plate and the lead-out electrode are fixed on the vacuum cavity through fixing pieces. Therefore, the purpose of enhancing the connection tightness between the sealing plate and the insulating plate is achieved, and further the technical effects of effectively improving the tightness and the insulating effect are achieved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model, are incorporated in and constitute a part of this specification. The drawings and their description are illustrative of the utility model and are not to be construed as unduly limiting the utility model. In the drawings:

fig. 1 is an electrode installation schematic view of an electrode sealing and insulating structure of a vacuum chamber according to an embodiment of the present utility model.

Fig. 2 is a schematic view of an electrode sealing structure of an electrode sealing insulating structure of a vacuum chamber according to an embodiment of the present utility model.

Fig. 3 is a schematic cross-sectional view of an electrode sealing structure of an electrode sealing insulating structure of a vacuum chamber according to an embodiment of the present utility model.

Reference numerals

1. A vacuum chamber; 21. a mounting plate; 22. a second seal ring; 23. an insulating plate; 24. a first seal ring; 25. a sealing plate; 26. a compacting plate; 27. a lead-out electrode; 28. an introduction electrode; 3. a first nesting hole; 4. a first nest; 5. a second nested hole; 6. a second nest; 7. a third nested hole; 8. a third nest; 9. and a fixing hole.

Detailed Description

In order that those skilled in the art will better understand the present utility model, a technical solution in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.

It should be noted that the terms "first," "second," and the like in the description and the claims of the present utility model and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe the embodiments of the utility model herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

In the present utility model, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are only used to better describe the present utility model and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.

Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the present utility model will be understood by those of ordinary skill in the art according to the specific circumstances.

Furthermore, the terms "mounted," "configured," "provided," "connected," "coupled," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other. The utility model will be described in detail below with reference to the drawings in connection with embodiments.

As shown in fig. 1 to 3, the present utility model relates to an electrode sealing and insulating structure for a vacuum chamber 1, in which an electrode includes: an leading-in electrode 28 and a leading-out electrode 27, wherein the front end of the leading-in electrode 28 is connected to the vacuum cavity 1, and the leading-out electrode 27 is sleeved on the leading-in electrode 28 at a position close to the rear end; the sealing structure comprises: the mounting plate 21, the insulating plate 23 and the sealing plate 25 are sleeved and attached in sequence along the direction from the front end to the rear end of the lead-in electrode 28, the sealing plate 25 is attached to the front side of the lead-out electrode 27, a plurality of first nesting holes 3 are circumferentially arranged on the sealing plate 25, and a plurality of first nesting pieces 4 nested in the plurality of first nesting holes 3 are circumferentially arranged on the rear side surface of the insulating plate 23; the mounting plate 21, insulating plate 23, sealing plate 25 and lead-out electrode 27 are fixed to the vacuum chamber 1 by fixing members.

Specifically, the lead-in electrode 28 has a function of supplying power and heating the inside through the vacuum chamber 1; in this embodiment, the leading end portion of the introduction electrode 28 has a screw thread, and is rotatable to be inserted into the vacuum chamber 1. The lead-out electrode 27 is connected to the rear end of the lead-in electrode 28, so that the lead-out electrode can be electrically connected with an external power supply to supply power to the lead-in electrode 28; thereby ensuring that the lead-in electrode 28 can supply power to heat the interior of the vacuum chamber 1. The mounting plate 21 has the function of adapting to the vacuum cavity 1; the insulating plate 23 has the function of ensuring a certain insulating effect between the electrode and the vacuum cavity 1; the sealing plate 25 has the function of ensuring a certain tightness between the electrode and the vacuum cavity 1; in this embodiment, the mounting plate 21, the insulating plate 23, the sealing plate 25 and the lead-out electrode 27 are sequentially sleeved on the lead-in electrode 28 and are mutually attached to each other, so that gaps between the plates can be reduced as much as possible, and a certain sealing performance and insulating effect are achieved between the electrodes and the vacuum cavity 1. The first nesting hole 3 has the function of nesting with the first nesting piece 4; thereby can make the connection compactness between closing plate 25 and the insulation board 23 obtain great promotion, and then guarantee insulating and sealed dual function, effectively promote the leakproofness and the insulating effect between electrode and the vacuum chamber 1. The fixing member has a function of fixing the mounting plate 21, the insulating plate 23, the sealing plate 25, and the lead-out electrode 27 to the vacuum chamber 1. During installation, the installation plate 21, the insulating plate 23, the sealing plate 25 and the lead-out electrode 27 are sequentially bonded and combined on the lead-in electrode 28, the lead-in electrode 28 is rotated to enter the vacuum cavity 1, the installation plate 21 is bonded to the outer side surface of the vacuum cavity 1, and then the installation plate 21, the insulating plate 23, the sealing plate 25 and the lead-out electrode 27 are fixed on the vacuum cavity 1 together through a fixing piece, so that the installation of the electrode sealing insulating structure in the utility model can be completed.

In the embodiment of the present utility model, the insulating plate 23 and the sealing plate 25 are connected in a nested manner, and the electrode comprises: an leading-in electrode 28 and a leading-out electrode 27, wherein the front end of the leading-in electrode 28 is connected to the vacuum cavity 1, and the leading-out electrode 27 is sleeved on the leading-in electrode 28 at a position close to the rear end; the sealing structure comprises: the mounting plate 21, the insulating plate 23 and the sealing plate 25 are sleeved and attached in sequence along the direction from the front end to the rear end of the lead-in electrode 28, the sealing plate 25 is attached to the front side of the lead-out electrode 27, a plurality of first nesting holes 3 are circumferentially arranged on the sealing plate 25, and a plurality of first nesting pieces 4 nested in the plurality of first nesting holes 3 are circumferentially arranged on the rear side surface of the insulating plate 23; the mounting plate 21, insulating plate 23, sealing plate 25 and lead-out electrode 27 are fixed to the vacuum chamber 1 by fixing members. Thereby achieving the purpose of enhancing the connection tightness between the sealing plate 25 and the insulating plate 23, further achieving the technical effect of effectively improving the tightness and the insulating effect, and solving the technical problem of poor tightness and insulating effect caused by insufficient connection tightness between the sealing plate 25 and the insulating plate 23.

Preferably, the sealed insulation structure further comprises: and a compacting plate 26 sleeved on the lead-in electrode 28 and arranged between the sealing plate 25 and the lead-out electrode 27, wherein the compacting plate 26 is attached to the sealing plate 25 and the lead-out electrode 27, and the compacting plate 26 is a mica plate. The pressing plate 26 plays a role of pressing the mounting plate 21, the insulating plate 23 and the sealing plate 25, so that good tightness among the plates is ensured; in this embodiment, preferably, the compacting plate 26 is made of mica plate, which has good rigidity and high strength, and is also temperature-resistant and insulating; therefore, the compression plate 26 is added, so that the structural components can be connected more tightly, and the overall insulation heat resistance is greatly improved.

Preferably, the mounting plate 21 is provided with a second nesting hole 5 at a central position, and the front side surface of the insulating plate 23 is provided with a second nesting piece 6 nested in the second nesting hole 5 at the central position. The nested connection structure is added between the mounting plate 21 and the insulating plate 23, so that the firmness is further improved, and the sealing and insulating effects between the vacuum cavity 1 and the electrodes are better achieved.

Preferably, the pressing plate 26 is provided with a third nesting hole 7 at a central position, a third nesting piece 8 nested in the third nesting hole 7 is arranged at the central position on the rear side surface of the sealing plate 25, and the left side surface of the third nesting piece 8 is attached to the right side surface of the lead-out electrode 27. The nested connection structure is added between the pressing plate 26 and the sealing plate 25, so that the firmness is further improved, and the sealing and insulation between the vacuum cavity 1 and the electrode can achieve better effect.

Preferably, two first sealing rings 24 are disposed between the sealing plate 25 and the lead-in electrode 28, and the two first sealing rings 24 are disposed on the rear side surface of the insulating plate 23 and the front side surface of the lead-out electrode 27, respectively. The two first sealing rings 24 not only can enable the connection between the insulating plate 23 and the sealing plate 25 and between the sealing plate 25 and the compacting plate 26 to be firmer, reduce collision and friction between every two, effectively reduce the abrasion of the electrode sealing insulating structure, but also improve the tightness.

Preferably, a second sealing ring 22 is disposed between the mounting plate 21 and the second nesting piece 6, and the second sealing ring 22 is disposed at the junction of the main body portion of the insulating plate 23 and the second nesting piece 6. The second sealing ring 22 is made of fluorine rubber, is temperature resistant and corrosion resistant, and can provide a more excellent sealing effect.

Preferably, the insulating plate 23 is located at a middle position of the second nest member 6, the sealing plate 25 is located at a middle position, and the lead-out electrode 27 is located near an end portion and has a sleeve hole matched with the lead-in electrode 28. The sleeved holes are arranged to facilitate the sleeving of the insulating plate 23, the sealing plate 25 and the outgoing electrode 27 on the incoming electrode 28, so that the incoming electrode 28 and the vacuum cavity 1 are isolated and insulated.

Preferably, the mounting plate 21 is screwed with a mounting flange of the vacuum chamber 1. The mounting flange is provided with holes, and the two flanges can be tightly connected by bolts. The electrode sealing and insulating structure is then screwed onto the vacuum chamber 1 by means of a mounting flange using a fastener such as a nail.

Preferably, the insulating plate 23 is located at a middle position of the first nesting component 4, and fixing holes matched with the fixing components are formed at positions of the mounting plate 21 and the pressing plate 26 opposite to the middle position of the first nesting component 4. The fixing member is a nail, and the pressing plate 26, the insulating plate 23, the sealing plate 25 and the mounting plate 21 are fixedly connected to the mounting flange of the vacuum chamber 1 through the fixing holes by using the nail.

The utility model also provides a vacuum cavity 1, and the vacuum cavity 1 is provided with an electrode sealing insulation structure. The technical effect of the electrode sealing and insulating structure of the vacuum chamber 1 can be achieved as well.

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (10)

1. An electrode sealing and insulating structure for a vacuum chamber, characterized in that the electrode comprises: the leading-in electrode and the leading-out electrode are connected to the vacuum cavity at the front end of the leading-in electrode, and the leading-out electrode is sleeved at a position, close to the rear end, on the leading-in electrode; the sealing structure comprises: the mounting plate, the insulating plate and the sealing plate are sequentially sleeved and attached along the direction from the front end to the rear end of the leading-in electrode, the sealing plate is attached to the front side of the leading-out electrode, a plurality of first nesting holes are circumferentially arranged on the sealing plate, and a plurality of first nesting pieces nested in the plurality of first nesting holes are circumferentially arranged on the rear side surface of the insulating plate; the mounting plate, the insulating plate, the sealing plate and the lead-out electrode are fixed on the vacuum cavity through fixing pieces.

2. The electrode sealing and insulating structure of a vacuum chamber according to claim 1, wherein the sealing structure further comprises: the lead-in electrode is sleeved with the pressing plate, the pressing plate is arranged between the sealing plate and the lead-out electrode, the pressing plate is attached to the sealing plate and the lead-out electrode, and the pressing plate is a mica plate.

3. The electrode sealing and insulating structure of a vacuum chamber according to claim 1, wherein the mounting plate is provided with a second nesting hole at a central position, and the front side surface of the insulating plate is provided with a second nesting piece nested in the second nesting hole at the central position.

4. The electrode sealing and insulating structure of a vacuum cavity according to claim 2, wherein a third nesting hole is formed in the pressing plate at a central position, a third nesting piece nested in the third nesting hole is arranged on the rear side surface of the sealing plate at the central position, and the left side surface of the third nesting piece is attached to the right side surface of the lead-out electrode.

5. The electrode sealing and insulating structure of a vacuum chamber according to claim 1, wherein two first sealing rings are provided between the sealing plate and the lead-in electrode, the two first sealing rings being disposed on the rear side surface of the insulating plate and the front side surface of the lead-out electrode, respectively.

6. A vacuum chamber electrode sealing and insulating structure according to claim 3, wherein a second sealing ring is provided between the mounting plate and the second nest member, the second sealing ring being arranged at the interface of the main body portion of the insulating plate and the second nest member.

7. The electrode sealing and insulating structure of a vacuum chamber according to claim 3, wherein the insulating plate is positioned at a middle position of the second nesting piece, the sealing plate is positioned at the middle position, and the leading-out electrode is positioned near the end part and is provided with a sleeved hole matched with the leading-in electrode.

8. The electrode sealing and insulating structure of a vacuum chamber according to claim 1, wherein the mounting plate is screw-coupled to a mounting flange of the vacuum chamber.

9. The electrode sealing and insulating structure of a vacuum chamber according to claim 2, wherein the insulating plate is provided with a fixing hole matched with the fixing piece at a position opposite to the middle position of the first nesting piece on the mounting plate and the pressing plate.

10. A vacuum chamber, comprising: an electrode sealing and insulating structure of the vacuum chamber of any one of claims 1 to 3, 5 to 9.