CN220026553U - Trichlorosilane synthesis tail gas pressure swing adsorption recovery system - Google Patents
Trichlorosilane synthesis tail gas pressure swing adsorption recovery system Download PDFInfo
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- CN220026553U CN220026553U CN202321577490.2U CN202321577490U CN220026553U CN 220026553 U CN220026553 U CN 220026553U CN 202321577490 U CN202321577490 U CN 202321577490U CN 220026553 U CN220026553 U CN 220026553U
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- 238000001179 sorption measurement Methods 0.000 title claims abstract description 108
- 238000011084 recovery Methods 0.000 title claims abstract description 84
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 22
- 238000003786 synthesis reaction Methods 0.000 title claims abstract description 22
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 239000005052 trichlorosilane Substances 0.000 title claims abstract description 21
- 239000007789 gas Substances 0.000 claims abstract description 66
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 41
- 239000001257 hydrogen Substances 0.000 claims abstract description 28
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 28
- 239000005046 Chlorosilane Substances 0.000 claims abstract description 26
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 26
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims abstract description 26
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 24
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims abstract description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 23
- 238000007599 discharging Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 238000005265 energy consumption Methods 0.000 abstract description 6
- 239000006227 byproduct Substances 0.000 abstract description 4
- 238000004064 recycling Methods 0.000 abstract description 4
- 238000010521 absorption reaction Methods 0.000 description 16
- 238000003795 desorption Methods 0.000 description 9
- 239000000047 product Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002808 molecular sieve Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000008929 regeneration Effects 0.000 description 3
- 238000011069 regeneration method Methods 0.000 description 3
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical group [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000010902 straw Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002336 sorption--desorption measurement Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
Abstract
The utility model discloses a trichlorosilane synthesis tail gas pressure swing adsorption recovery system, which is characterized in that hydrogen chloride/chlorosilane and nitrogen/hydrogen are respectively adsorbed and regenerated by two sections of adsorption units, and high-purity hydrogen is obtained at the tail part; the adsorption units respectively comprise at least two adsorption towers, realize pressure equalizing among towers, and provide power for analysis through a vacuum pump, so that low energy consumption is realized, recycling of two mixed gases and high-purity hydrogen is realized, and the economic value of recycling of tail gas byproducts is improved.
Description
Technical Field
The utility model relates to the technical field of gas recovery, in particular to a trichlorosilane synthesis tail gas pressure swing adsorption recovery system.
Background
The tail gas generated in the synthesis of the hydrogen chloride and the silicon dioxide contains a large amount of mixed gas such as hydrogen chloride, chlorosilane, hydrogen, nitrogen and the like, and the tail gas is subjected to water absorption and alkali absorption and then is discharged to the air after reaching standards, or is recycled after simple compression and condensation or is recycled after being subjected to adsorption and condensation and other systems, so that more waste water is formed during the treatment, and the environmental protection pressure is high; or the gas is not thoroughly recycled, so that impurities are caused to maliciously circulate in the system, and the trichlorosilane synthesis system has lower efficiency.
Patent document CN207745676U discloses a recovery treatment system for trichlorosilane synthesis tail gas, wherein the tail gas is subjected to primary adsorption treatment, and resolved hydrogen chloride and chlorosilane are condensed and then recycled; the hydrogen and the nitrogen enter a second-stage adsorption, the nitrogen and the hydrogen chloride are discharged to the air, the hydrogen is reused after being pressurized, and the purity of the hydrogen is 99.9 percent. The method preheats raw material gas in advance, then selectively adsorbs the raw material gas by using multistage pressure, the desorbed chlorosilane is condensed to cause higher energy consumption, and simultaneously, the discharged nitrogen and chlorosilane gas can cause environmental protection.
Therefore, it is necessary to provide a trichlorosilane synthesis tail gas pressure swing adsorption recovery system, and the problems of high energy consumption and incomplete recovery of trichlorosilane synthesis tail gas adsorption recovery in the prior art are solved.
Disclosure of Invention
The utility model provides a trichlorosilane synthesis tail gas pressure swing adsorption recovery system, which is used for solving the problems of high energy consumption and incomplete recovery of trichlorosilane synthesis tail gas adsorption recovery in the prior art.
In order to achieve the above object, the present utility model is as follows:
a trichlorosilane synthesis tail gas pressure swing adsorption recovery system comprises a feed pipe, a first recovery section and a second recovery section; wherein:
the first recovery section comprises a first adsorption unit and a first recovery unit; the second recovery section comprises a second adsorption unit, a second recovery unit and a third recovery unit;
the feeding pipe and the first recovery unit are respectively communicated with the feeding end of the first adsorption unit, the discharging end of the first adsorption unit and the feeding end of the second recovery unit are respectively communicated with the feeding end of the second adsorption unit, and the third recovery unit is communicated with the discharging end of the second adsorption unit; the first adsorption unit and the second adsorption unit are respectively provided with at least more than two adsorption towers which are connected in parallel; the first recovery unit and the second recovery unit are respectively provided with a vacuum pump;
the first adsorption unit is used for adsorbing hydrogen chloride and chlorosilane, and the second adsorption unit is used for adsorbing nitrogen and hydrogen.
Further, the first adsorption unit and the second adsorption unit are respectively provided with more than three adsorption towers which are connected in parallel.
Further, a deoxidizer is arranged at the feeding end of the second adsorption unit.
Preferably, the feeding end of the second adsorption unit is also provided with a heat exchanger; the feeding end and the discharging end of the deoxidizer are respectively correspondingly communicated with the medium channel and the material channel of the heat exchanger.
Further, the feeding end of the second adsorption unit is provided with a condenser and a gas-liquid separator which are communicated, and the gas-phase discharging end of the gas-liquid separator is communicated with the feeding end of the second adsorption unit.
Further, the first recovery section further comprises a first circulation pipe connected in parallel with the first recovery unit; the discharge end of the first circulating pipe is communicated with the feeding pipe, and a compressor is arranged on the first circulating pipe.
Further, the second recovery section further comprises a second circulation pipe connected in parallel with the second recovery unit; the discharge end of the second circulating pipe is communicated with the discharge end of the first adsorption unit, and a compressor is arranged on the second circulating pipe.
Further, the first recovery unit is provided with two condensers at the output end of the vacuum pump, and a compressor is arranged between the condensers.
Compared with the prior art, the beneficial effects of the utility model include, but are not limited to:
1. the trichlorosilane synthesis tail gas adsorption unit provided by the utility model realizes pressure equalization by using the parallel absorption towers, and the desorption power is provided by combining a vacuum pump, so that the energy consumption is reduced; and the tail gas generated in the synthesis of trichlorosilane is separated into hydrogen chloride/chlorosilane mixed gas, hydrogen-nitrogen mixed gas and high-purity hydrogen through multistage absorption, so that the full recycling of the tail gas is realized, and the economic value of recycling of the tail gas byproduct is improved.
2. The trichlorosilane synthesis tail gas adsorption recovery system provided by the utility model can improve the adsorption utilization rate and the high-purity hydrogen yield can reach more than 85% by arranging the circulating system; in addition, through the adsorption of hydrogen chloride/chlorosilane firstly and the deoxidation, and then the adsorption of hydrogen and nitrogen mixed gas, the purity of the hydrogen chloride/chlorosilane can reach 99 percent, the content of the hydrogen chloride/chlorosilane in the hydrogen and nitrogen mixed gas is less than 15ppm, and the purity of high-purity hydrogen can reach 5N or more.
Drawings
FIG. 1 is a schematic diagram of a trichlorosilane synthesis tail gas pressure swing adsorption recovery system.
The labels in the figures are: 10. a feed pipe; 11. a circulating pipe I; 12. a first straw is removed; 20. a tail gas output pipe; 21. deoxidizing a feeding pipe; 22. a deoxidizing discharging pipe; 23. a gas phase output pipe; 24. a circulation pipe II; 25. a second straw is removed; 100. a first recovery unit; 200. a second recovery unit; 300. a third recovery unit; e1, a heat exchanger; e2, a first condenser; e3, a second condenser; e4, a condenser III; f1, a valve I; f2, a valve II; f3, valve three; f4, valve four; f5, valve five, F6, valve six; p1, compressor I, P2, compressor II; p4, compressor III, P4, compressor IV; p5, a fifth compressor; p6, a compressor six; r1, deoxidizer; t1, a first adsorption unit; t2, a second adsorption unit; v1, a buffer tank I; v2, a buffer tank II; v3, a buffer tank III; v4, a buffer tank IV; v5, a buffer tank V; v6, a buffer tank six; v7, a buffer tank seven; v8, a buffer tank eight; v9, a buffer tank nine; v10, a buffer tank is ten; v11, buffer tank eleven; VP1, a first vacuum pump; VP2, vacuum pump II; x1, a gas-liquid separator.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It is to be understood that the terms "upper," "lower," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship based on that shown in the drawings, merely to facilitate describing the present utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.
It should be further noted that, unless explicitly stated or limited otherwise, terms such as "connected," "disposed," and the like should be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between the two parts or interaction relationship between the two parts. The terms "a," "an," "the second," "the third," and the like, are merely used for convenience in describing a distinction of similar or identical elements and do not imply a particular order or number, and the above terms are not to be construed as limitations of the utility model. It will be apparent to those skilled in the art that the terms described above have the particular meaning in the present utility model, as the case may be.
In the following examples, the trichlorosilane synthesis tail gas components and volume ratios are as follows: 50-60% of hydrogen, 10-15% of hydrogen chloride, 10-15% of nitrogen and the balance of chlorosilane.
As shown in fig. 1, in one embodiment, a trichlorosilane synthesis tail gas pressure swing adsorption recovery system is provided, comprising a feed pipe 10, a first recovery section and a second recovery section which are communicated; wherein:
the first recovery section comprises a first adsorption unit T1 and a first recovery unit 100; the second recovery section includes a second adsorption unit T2, a second recovery unit 200, and a third recovery unit 300; the first adsorption unit T1 is used for adsorbing hydrogen chloride and chlorosilane, and the second adsorption unit T2 is used for adsorbing nitrogen and hydrogen;
specifically, the left end of the feeding pipe 10 is communicated with a buffer tank I V1, the right end of the feeding pipe 10 is communicated with the bottom of the first adsorption unit T1, and a valve I F1 is arranged on the feeding pipe 10; the bottom of the first adsorption unit T1 is provided with a first desorption pipe 12 which is communicated with the first recovery unit 100, and the first desorption pipe 12 is provided with a second valve F2; the first recovery unit 100 comprises a six V6 buffer tank, a one VP1 vacuum pump and an eight V8 buffer tank which are sequentially arranged;
the top tail gas outlet of the first adsorption unit T1 is communicated to the bottom of the second adsorption unit T2, the bottom of the second adsorption unit T2 is provided with a second desorption pipe 25 communicated with the second recovery unit 200, and the second desorption pipe 25 is provided with a valve six F6; the second recovery unit 200 comprises a buffer tank ten V10, a vacuum pump two VP2, a buffer tank eleven V11 and a compressor six P6 which are sequentially communicated;
the top tail gas outlet of the second adsorption unit T2 is communicated with the third recovery unit 300, and the third recovery unit 300 comprises a buffer tank four V4, a compressor two P2 and a buffer tank five V5 which are communicated in sequence.
In the above embodiment, the first adsorption unit T1 and the second adsorption unit T2 are respectively provided with more than two adsorption towers connected in parallel, so that adsorption/desorption and pressure equalizing treatment are facilitated; the first recovery unit 100 is provided with a vacuum pump one VP1, and the second recovery unit 200 is provided with a vacuum pump two VP2, for respectively providing desorption power. Specifically, after the trichlorosilane synthesis tail gas enters the system along with the feeding pipe 10, hydrogen chloride and chlorosilane are adsorbed by one absorption tower of the first adsorption unit T1, and the residual gas which is not adsorbed enters the second adsorption unit T2. In the process, after one absorption tower in the first absorption unit T1 absorbs hydrogen chloride and chlorosilane to saturation, pressure release is carried out on other absorption towers connected in parallel to realize pressure equalization, when the pressure is reduced to a certain range, a valve two F2 is opened, a vacuum pump VP1 is started to provide desorption power, and the hydrogen chloride and chlorosilane absorbed in the first absorption unit T1 enter the first recovery unit 100 along with negative pressure so as to obtain the hydrogen chloride and the chlorosilane. The gas which is not adsorbed at the outlet of the first adsorption unit T1 enters the second adsorption unit T2, one adsorption tower adsorbs nitrogen and hydrogen, and the residual gas which is not adsorbed enters the third recovery unit 300 to obtain high-purity hydrogen. And after the second adsorption unit T2 adsorbs to a certain pressure, the pressure is released into other towers connected in parallel, then the valve six F6 is opened, and the vacuum pump two VP2 is started to analyze and obtain nitrogen and hydrogen.
In the above embodiment, the recovery system separates the trichlorosilane synthesis tail gas into hydrogen chloride/chlorosilane mixed gas, hydrogen-nitrogen mixed gas and high-purity hydrogen through a plurality of steps, so as to realize the full recovery and utilization of the tail gas. The hydrogen chloride/chlorosilane mixed gas can be used for resynthesis of trichlorosilane, the hydrogen-nitrogen mixed gas can be used for synthesizing ammonia, and high-purity hydrogen can be output as a single product, so that the maximum utilization of a tail gas byproduct is realized.
In the above embodiment, the first adsorption unit T1 is filled with a common 15A molecular sieve adsorbent for adsorbing hydrogen chloride and chlorosilane; the second adsorption unit T2 is a 3A molecular sieve adsorbent filled with a common gas, and is used for adsorbing nitrogen and hydrogen. Specifically, the molecular sieves are all molecular sieves synthesized by aluminosilicate.
In a preferred embodiment, in order to improve adsorption and regeneration efficiency, the first adsorption unit T1 and the second adsorption unit T2 are preferably connected in parallel with three or more adsorption towers, and are provided with a pressure equalizing channel and a resolving channel (not shown in the figure) which is in communication with the first recovery unit 100; at least one absorption tower is in an absorption state, at least one absorption tower is in an analysis regeneration state, and at least one tower is used for equalizing pressure operation.
In a preferred embodiment, an oxygen and liquid removal device is also provided to enhance the purity of the gas. Specifically, a second buffer tank V2, a first compressor P1 and a third buffer tank V3 are sequentially communicated with an output pipeline at the top of the first adsorption unit T1; the top of the buffer tank III V3 is communicated with a tube side input end of the heat exchanger E1, a tube side output end of the heat exchanger E1 is communicated with the deoxidizer R1, an output end of the deoxidizer R1 is communicated with a shell side input end of the heat exchanger E1, and a shell side output end of the E1 is communicated with the condenser I E1, the gas-liquid separator X1 and the valve IV F4 and is further communicated with a feeding end of the second adsorption unit T2. On one hand, the gas flow of the gas output from the top of the first adsorption unit T1 deoxidized by the heat exchanger E1 and the deoxidizer R1 generates self-heat exchange, so that oxygen and carbon dioxide are removed, and meanwhile, the energy consumption is reduced; on the other hand, the purity of the mixed gas is improved after the mixed gas is condensed by the condenser E1.
In the above embodiment, the deoxidizer R1 is a common catalytic deoxidizer, and the main component is a palladium metal catalyst, which can reduce oxygen and carbon dioxide to below 3 ppm.
In the preferred embodiment, the bottom of the first adsorption unit T1 is further provided with a first circulation pipe 11 connected to the first buffer tank V1, and the first circulation pipe 11 is provided with a valve three F3, a nine buffer tank V9 and a five compressor P5, so that when the pressure of the first adsorption unit T1 is equalized to a certain pressure (e.g. 2 bar), part of the gas is re-entered into the first buffer tank V1 from the first circulation pipe 11 to realize cyclic re-absorption, so as to improve the adsorption efficiency. Similarly, the bottom of the second adsorption unit T2 is also provided with a second circulating pipe 24 communicated with the third buffer tank V3, and the second circulating pipe 24 is provided with a valve five F5 and a third compressor P3, so that part of gas is re-introduced into the third buffer tank V3 from the second circulating pipe 24 when the pressure of the second adsorption unit T2 is equalized, and the cyclic re-absorption is realized. The yield of the high-purity hydrogen produced by the system can reach more than 85%, and the high added value of the product is obvious.
In a preferred embodiment, the first recovery unit 100 further includes a buffer tank seven V7, a condenser two E3, a compressor four P4 and a condenser three E4 disposed at the output end of the vacuum pump one VP 1. The heat generated by the gas from the first VP1 of the vacuum pump is condensed and cooled by the second E3 of the condenser, compressed by the fourth P4 of the compressor and condensed by the third E4 of the condenser to obtain the hydrogen chloride/chlorosilane mixed gas, and the impurity content of nitrogen and hydrogen can be reduced to below 1 percent.
In the above embodiment, in any working condition, at least one tower in the first adsorption unit T1 and the second adsorption unit T2 is in the adsorption process, and the other towers are in regeneration and pressure equalizing. Taking the second adsorption unit T2 tower as an example, when gas enters the first adsorption tower through the valve four F4 to be adsorbed and saturated, the pressure is discharged to other towers through an inter-tower valve (not shown in the figure), after the pressure reaches 6bar, the pressure in the first adsorption tower is discharged to the compressor three P3 through the valve five F5 to be pressurized, and the pressure is returned to the buffer tank three V3 part to be circulated so as to improve the purity and the recovery rate of the product hydrogen. When the pressure in the absorption tower is released to 0bar, the valve five F5 is closed, the valve six F6 is opened, the pressure in the tower is released to the V0110 buffer tank 10, and the absorption cycle is finished after the pressure is taken to be minus 0.8bar through the vacuum pump two VP 2. The outlet gas of the second VP2 of the vacuum pump is pressurized to 200bar by the six P6 of the compressor after being stabilized by the eleven V11 of the buffer tank, and the hydrogen-nitrogen mixed gas is filled by a tube bundle vehicle and can be conveyed to an upstream ammonia synthesis factory for use, wherein the impurity content of hydrogen chloride and chlorosilane in the hydrogen-nitrogen mixed gas is as low as below 15 ppm. In addition, the residual product gas from the second adsorption unit T2 is stabilized by a buffer tank IV 4, then enters a compressor II P2 to be pressurized to 200bar, then enters a buffer tank V P5, finally is filled into a high-purity hydrogen tube bundle vehicle, and is sold as a 5N electronic grade hydrogen product.
In a comparative example, the exchange sequence of the first adsorption unit T1 and the second adsorption unit T2 affects the adsorption effect and affects the possibility of overall operation. The specific reason is that: the chlorosilane molecules are the largest, if nitrogen is adsorbed first, the corresponding adsorbent is not selected well, and the chlorosilane is mixed in the nitrogen desorption gas, so that the desorption gas cannot be used any more. In addition, the metal catalyst used in deaerator R1 may be poisoned by hydrogen chloride and chlorosilane. It can be seen that the first adsorption unit T1 adsorbs hydrogen chloride/chlorosilane first, and then the second adsorption unit T2 adsorbs nitrogen/hydrogen, which is necessary for improving the purity of the byproduct recovery gas and improving the operational reliability of the system.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The pressure swing adsorption recovery system for trichlorosilane synthesis tail gas is characterized by comprising a feed pipe (10), a first recovery section and a second recovery section; wherein:
the first recovery section comprises a first adsorption unit (T1) and a first recovery unit (100); the second recovery section comprises a second adsorption unit (T2), a second recovery unit (200) and a third recovery unit (300);
the feeding pipe (10) and the first recovery unit (100) are respectively communicated with the feeding end of the first adsorption unit (T1), the discharging end of the first adsorption unit (T1) and the feeding end of the second recovery unit (200) are respectively communicated with the feeding end of the second adsorption unit (T2), and the third recovery unit (300) is communicated with the discharging end of the second adsorption unit (T2); the first adsorption unit (T1) and the second adsorption unit (T2) are respectively provided with at least more than two adsorption towers which are connected in parallel; the first recovery unit (100) and the second recovery unit (200) are respectively provided with a vacuum pump;
the first adsorption unit (T1) is used for adsorbing hydrogen chloride and chlorosilane, and the second adsorption unit (T2) is used for adsorbing nitrogen and hydrogen.
2. The recovery system according to claim 1, wherein the first adsorption unit (T1) and the second adsorption unit (T2) are each provided with three or more adsorption towers connected in parallel.
3. Recovery system according to claim 1, characterized in that the feed end of the second adsorption unit (T2) is provided with a deoxygenator (R1).
4. A recovery system according to claim 3, characterized in that the feed end of the second adsorption unit (T2) is further provided with a heat exchanger (E1); the feeding end and the discharging end of the deoxidizer (R1) are respectively correspondingly communicated with a medium channel and a material channel of the heat exchanger.
5. The recovery system according to claim 1, characterized in that the feed end of the second adsorption unit (T2) is provided with a condenser and a gas-liquid separator (X1) which are in communication, and the gas-phase discharge end of the gas-liquid separator (X1) is in communication with the feed end of the second adsorption unit (T2).
6. The recovery system according to claim 1, wherein the first recovery section further comprises a first circulation pipe (11) in parallel with the first recovery unit (100); the discharge end of the first circulating pipe (11) is communicated with a feed pipe (10), and a compressor is arranged on the first circulating pipe (11).
7. The recovery system according to claim 1, wherein the second recovery section further comprises a second circulation pipe (24) in parallel with the second recovery unit (200); the discharge end of the second circulating pipe (24) is communicated with the discharge end of the first adsorption unit (T1), and a compressor is arranged on the second circulating pipe (24).
8. The recovery system according to claim 1, wherein the first recovery unit (100) is provided with two condensers at the output of the vacuum pump, with a compressor between the condensers.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202321577490.2U CN220026553U (en) | 2023-06-20 | 2023-06-20 | Trichlorosilane synthesis tail gas pressure swing adsorption recovery system |
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| CN202321577490.2U CN220026553U (en) | 2023-06-20 | 2023-06-20 | Trichlorosilane synthesis tail gas pressure swing adsorption recovery system |
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| CN202321577490.2U Active CN220026553U (en) | 2023-06-20 | 2023-06-20 | Trichlorosilane synthesis tail gas pressure swing adsorption recovery system |
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