CN207478240U - A kind of polysilicon tail gas purifying plant - Google Patents
A kind of polysilicon tail gas purifying plant Download PDFInfo
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- CN207478240U CN207478240U CN201721183170.3U CN201721183170U CN207478240U CN 207478240 U CN207478240 U CN 207478240U CN 201721183170 U CN201721183170 U CN 201721183170U CN 207478240 U CN207478240 U CN 207478240U
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- adsorption tower
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- adsorption
- absorption
- tail gas
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Abstract
The utility model discloses a kind of polysilicon tail gas purifying plant, including hydrogen container and several adsorption towers, the adsorption tower includes the first group of adsorption tower and second group of adsorption tower of series connection, polysilicon tail gas is stored in after first group of adsorption tower, second group of adsorption tower absorption purification in hydrogen container successively, first group of adsorption tower and second group of adsorption tower respectively include at least three adsorption towers in parallel, successively, adsorb the hydrogen purification effect that may insure in polysilicon tail gas step by step.
Description
【Technical field】
The utility model is related to technical field of polysilicon production, and in particular to a kind of hydrogen for being used to recycle polysilicon tail gas
Purifying plant.
【Background technology】
The a large amount of tail gas generated in improved Siemens production process, main component is hydrogen, chlorosilane, hydrogen chloride, is returned
Receipts utilization benefit is very high, and tail gas recycle is exactly to separate and recover hydrogen, chlorosilane, the hydrogen chloride in tail gas.In tail gas
Adsorption column act as recycling hydrogen cleaning, and adsorption column is adsorbed using activated carbon, and absorption end regeneration needs anti-with hydrogen
The function to reach adsorption cleaning again is blown, the mode that the regeneration of adsorption column is mainly swept using high-temperature low-pressure repeated hydrogenation air-blowing at present
It carries out, the hydrogen entered in adsorption column when assimilation effect difference will be mingled with a large amount of chlorosilane and enter adsorption column, and adsorption column is just
Meeting overload operation, hydrogen quality does not ensure, influences downstream product quality, activated carbon will appear regeneration effect in adsorption column at this time
Be deteriorated, when adsorbing again adsorption temp it is high, from the time of absorption distance Wen Sheng it is short the shortcomings of.
It is entitled " for separating and recovering the activated carbon adsorption of polysilicon tail gas again application No. is CN201520174956.3
The utility model patent of raw system " is disclosed in detail a kind of realizes purification tail gas by three active carbon adsorption columns in parallel
The operation principle of absorption regeneration system, wherein three active carbon adsorption columns play suction-operated successively, since adsorption column is regenerated
Time is longer, more than the time of absorption, i other words every time only there are one adsorption column in the other two that plays a role all in regeneration
In the process, it is clear that the purity of the hydrogen recycled by this set system is also greatly improved space.
【Utility model content】
Hydrogen in polysilicon tail gas is remarkably improved the technical problem to be solved by the utility model is to provide one kind to return
Receive the recycling purifying plant of purity.
Technical problem to be solved in the utility model is achieved through the following technical solutions：A kind of polysilicon tail is provided
Gas purifying plant, including hydrogen container and several adsorption towers, the adsorption tower includes the first group of adsorption tower connected and second group
Adsorption tower, polysilicon tail gas are stored in after first group of adsorption tower, second group of adsorption tower absorption purification in hydrogen container successively, institute
It states first group of adsorption tower and second group of adsorption tower respectively includes at least three adsorption towers in parallel.
Further, each adsorption tower by depressurizing, heating, it is renewable after thermal purging, cooling and the several steps of pressurization
It utilizes, wherein, the sum of the sum of time and pressure release of pressurization and cooling and the time of heating are equal, time for cooling down and thermal purging
Time is equal, and the time that each adsorption tower is used for absorption is the half of recovery time summation.
Further, first group of adsorption tower includes the first adsorption tower, the second adsorption tower and third adsorption tower, wherein the
In absorption, the second adsorption tower is in third adsorption tower in regenerative process one adsorption tower；Second adsorption tower is in absorption, and first
Adsorption tower is in third adsorption tower in regenerative process；Third adsorption tower is in absorption, at the first adsorption tower and the second adsorption tower
In regenerative process.
Further, second group of adsorption tower includes the 4th adsorption tower, the 5th adsorption tower and the 6th adsorption tower, wherein the
In absorption, the 5th adsorption tower and the 6th adsorption tower are in regenerative process four adsorption towers；5th adsorption tower is in absorption, and the 4th
Adsorption tower and the 6th adsorption tower are in regenerative process；6th adsorption tower is in absorption, at the 4th adsorption tower and the 5th adsorption tower
In regenerative process.
Further, the hydrogen outlet end of first group of adsorption tower and second group of adsorption tower is separately installed with hydrogen filter group
It closes.
Further, the hydrogen filter combination includes two hydrogen filters in parallel.
Compared to the prior art, the polysilicon tail gas purifying plant disclosed by the utility model effectively increases recycling hydrogen
Purity, and ensure that exhaust gas recovery system can long-term and effective operation.
【Description of the drawings】
Fig. 1 is the structure diagram for the polysilicon tail gas purifying plant for meeting the utility model.
【Specific embodiment】
As shown in Figure 1, the polysilicon tail gas purifying plant 100 for meeting the utility model includes hydrogen container 32 and by several
The first group of adsorption tower 10 and second group of adsorption tower 20 that adsorption tower is formed, there are one which also has
Gas inlet 31, gas inlet 31 come from the polysilicon tail gas of absorption tower (not shown) for receiving.Polysilicon tail gas passes through successively
The first group of adsorption tower 10 and second group of adsorption tower 20 of series connection are crossed, is stored in hydrogen container after adsorbing purification step by step.
Each adsorption tower can by depressurizing, heating, regeneration after thermal purging, cooling and the several steps of pressurization, wherein, add
The sum of the sum of time of pressure and cooling and the time of pressure release and heating are equal；The time of cooling is equal with the time of thermal purging；Respectively
The time that adsorption tower is used for absorption is the half of recovery time summation.In order to ensure hydrogen quality, in the present embodiment, each group is inhaled
Attached tower is arranged in parallel respectively including at least three adsorption towers, and first group of adsorption tower 10 includes the first adsorption tower, the second absorption
Three adsorption towers being arranged in parallel of tower and third adsorption tower；Second group of adsorption tower 20 includes the 4th adsorption tower, the 5th absorption
Three adsorption towers being arranged in parallel of tower and the 6th adsorption tower.
Polysilicon tail gas can be selectively entered the first adsorption tower after gas inlet 31 is entered by valve (not shown)
Either in any one of the second adsorption tower or third adsorption tower.Pass through first by the polysilicon tail gas of the first adsorption tower
After adsorption tower purification, any one of the 4th adsorption tower either in the 5th adsorption tower or the 6th adsorption tower can be selectively entered
A middle carry out secondary purification, is then then exhausted from into hydrogen container 32.
In absorption, the second adsorption tower is in third adsorption tower in regenerative process wherein the first adsorption tower.Second absorption
In absorption, the first adsorption tower is in third adsorption tower in regenerative process tower.Third adsorption tower is in absorption, the first adsorption tower
It is in regenerative process with the second adsorption tower.
In absorption, the 5th adsorption tower and the 6th adsorption tower are in regenerative process 4th adsorption tower.5th adsorption tower exists
During absorption, the 4th adsorption tower and the 6th adsorption tower are in regenerative process.6th adsorption tower is in absorption, the 4th adsorption tower and the
Five adsorption towers are in regenerative process.
Preferably, it in the present embodiment, (is not marked at the hydrogen outlet end of first group of adsorption tower 10 and second group of adsorption tower 20
Number) hydrogen filter combination is separately installed with, the hydrogen filter combination includes two hydrogen filters 33 in parallel, when it
In a hydrogen filter 33 because replace or damage when, ensure at least another hydrogen filter 33 playing
Filtration.The main function of hydrogen filter 33 is the solid particle polluter filtered out in hydrogen.
Since each adsorption tower alternately performs absorption purification task, and inhale step by step by two groups of adsorption towers of series connection successively
It is attached, therefore can realize uninterrupted, high-purity the purification effect of polysilicon tail gas purifying plant 100, it ensure that polysilicon tail
Gas recovery system can long-term and effective operation, tests prove that, the present apparatus have preferable economic value.
Claims (6)
1. a kind of polysilicon tail gas purifying plant, including hydrogen container and several adsorption towers, it is characterised in that：The adsorption tower packet
The first group of adsorption tower and second group of adsorption tower of series connection are included, polysilicon tail gas is successively by first group of adsorption tower, second group of absorption
It is stored in hydrogen container after tower absorption purification, first group of adsorption tower and second group of adsorption tower respectively include at least three parallel connections
Adsorption tower.
2. polysilicon tail gas purifying plant according to claim 1, it is characterised in that：Each adsorption tower by depressurizing, plus
Reproducible utilization after heat, thermal purging, cooling and the several steps of pressurization, wherein, the sum of time of pressurization and cooling is with depressurizing and adding
The sum of the time of heat is equal, the time of cooling is equal with the time of thermal purging, and each adsorption tower is when regenerating for the time of absorption
Between summation half.
3. polysilicon tail gas purifying plant according to claim 2, it is characterised in that：First group of adsorption tower includes the
One adsorption tower, the second adsorption tower and third adsorption tower, wherein the first adsorption tower is in absorption, the second adsorption tower and third adsorption tower
In regenerative process；In absorption, the first adsorption tower is in third adsorption tower in regenerative process second adsorption tower；Third is inhaled
In absorption, the first adsorption tower and the second adsorption tower are in regenerative process attached tower.
4. polysilicon tail gas purifying plant according to claim 2, it is characterised in that：Second group of adsorption tower includes the
Four adsorption towers, the 5th adsorption tower and the 6th adsorption tower, wherein the 4th adsorption tower is in absorption, the 5th adsorption tower and the 6th adsorption tower
In regenerative process；In absorption, the 4th adsorption tower and the 6th adsorption tower are in regenerative process 5th adsorption tower；6th inhales
In absorption, the 4th adsorption tower and the 5th adsorption tower are in regenerative process attached tower.
5. polysilicon tail gas purifying plant according to claim 1, it is characterised in that：First group of adsorption tower and second
The hydrogen outlet end of group adsorption tower is separately installed with hydrogen filter combination.
6. polysilicon tail gas purifying plant according to claim 5, it is characterised in that：The hydrogen filter combination includes
Two hydrogen filters in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721183170.3U CN207478240U (en) | 2017-09-15 | 2017-09-15 | A kind of polysilicon tail gas purifying plant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721183170.3U CN207478240U (en) | 2017-09-15 | 2017-09-15 | A kind of polysilicon tail gas purifying plant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207478240U true CN207478240U (en) | 2018-06-12 |
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ID=62482201
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721183170.3U Active CN207478240U (en) | 2017-09-15 | 2017-09-15 | A kind of polysilicon tail gas purifying plant |
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| Country | Link |
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| CN (1) | CN207478240U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114852965A (en) * | 2022-06-27 | 2022-08-05 | 扬州大学 | Method for purifying circulating hydrogen for polycrystalline silicon |
-
2017
- 2017-09-15 CN CN201721183170.3U patent/CN207478240U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114852965A (en) * | 2022-06-27 | 2022-08-05 | 扬州大学 | Method for purifying circulating hydrogen for polycrystalline silicon |
| CN114852965B (en) * | 2022-06-27 | 2022-12-20 | 扬州大学 | Method for purifying circulating hydrogen for polycrystalline silicon |
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Legal Events
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201111 Address after: 015543 southeast of the intersection of jingsan road and Weisi Road, Qingshan Industrial Park, wulatehouqi, Bayannur City, Inner Mongolia Autonomous Region Patentee after: Bayannur concentrated Silicon Industry Co., Ltd Address before: 015543 the Inner Mongolia Autonomous Region Bayannaoer wulatehouqi Qingshan Industrial Park Patentee before: INNER MONGOLIA DUN'AN PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |