CN220015936U - Vibration isolation supporting structure and vibration isolation device - Google Patents
Vibration isolation supporting structure and vibration isolation device Download PDFInfo
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- CN220015936U CN220015936U CN202320791972.1U CN202320791972U CN220015936U CN 220015936 U CN220015936 U CN 220015936U CN 202320791972 U CN202320791972 U CN 202320791972U CN 220015936 U CN220015936 U CN 220015936U
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- 238000002955 isolation Methods 0.000 title claims abstract description 63
- 230000003014 reinforcing effect Effects 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 abstract description 7
- 238000003754 machining Methods 0.000 abstract description 7
- 230000005489 elastic deformation Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Abstract
The utility model provides a vibration isolation supporting structure and a vibration isolation device, wherein the vibration isolation supporting structure comprises a supporting seat, a mounting groove is formed in the supporting seat, and an opening is formed in the top of the supporting seat; the upper end of the supporting rod passes through the opening in a contactless way and is connected with the supporting plate; at least two pull rods are uniformly distributed on the periphery of the support rod, the upper ends of the pull rods are fixedly connected with the top of the mounting groove, and the lower ends of the pull rods are fixedly connected with the lower ends of the support rod through connecting plates. Compared with the prior art, after the vibration isolation supporting structure provided by the utility model is displaced due to the vibration in the horizontal direction, the supporting rod and the pull rod are deformed in a coordinated manner, so that the supported workbench has only tiny displacement change in the vertical direction, and the machining precision of parts on the supported workbench is hardly affected; the vibration isolation in the horizontal direction can be realized by the elastic deformation of the pull rod in the horizontal direction. The cross sections of the middle sections of the support rod and the pull rod are larger than those of the upper section and the lower section of the support rod, so that the support main body has higher vertical support and better horizontal vibration isolation capability.
Description
Technical Field
The utility model relates to the technical field of vibration isolation, in particular to a vibration isolation supporting structure and a vibration isolation device.
Background
In the field of ultra-precision machining, the requirements for vibration isolation during the machining process of critical parts of semiconductors, optical lenses, instruments and meters and the like are very high, and the vibration isolation is required to isolate the vibration of an external environment on a machining workbench, and the interference of the vibration generated during the machining process on other measuring devices, such as a laser interferometer, so that the vibration isolation is satisfied for a workbench carrying a workpiece, and meanwhile, the vibration isolation is required to have high rigidity in the carrying direction (generally vertical direction), and a vibration isolator of an air bearing structure is usually adopted, but cannot be used in a vacuum environment. Accordingly, there is a need for a structure that provides load support and vibration isolation in a vacuum application scenario, instead of an air bearing.
Disclosure of Invention
In view of the foregoing deficiencies in the prior art, it is an object of the present utility model to provide a vibration isolation support structure that provides load support and vibration isolation in a vacuum application scenario.
The utility model provides a vibration isolation supporting structure which comprises a supporting main body, wherein the supporting main body comprises a supporting seat, a supporting rod and at least two pull rods; a mounting groove is formed in the support seat, and an opening communicated with the mounting groove is formed in the top of the support seat; the support rod passes through the opening in a non-contact manner, and the upper end of the support rod is fixedly connected with the support plate; the pull rods are uniformly distributed on the periphery of the support rod, the upper ends of the pull rods are fixedly connected with the top of the mounting groove, and the lower ends of the pull rods are fixedly connected with the lower ends of the support rod through connecting plates.
Preferably, the support rod is divided into an upper section, a middle section and a lower section from top to bottom, and the area of the cross section of the middle section of the support rod is larger than the area of the cross section of the upper section and/or the area of the cross section of the lower section.
Preferably, the lower section of the supporting rod is of a waist drum-shaped structure.
Preferably, the pull rod is divided into an upper section, a middle section and a lower section from top to bottom, and the area of the cross section of the middle section of the pull rod is larger than that of the cross section of the upper section and/or that of the cross section of the lower section.
Preferably, the upper section of the pull rod is of a waist drum-shaped structure.
Preferably, the support rod further comprises a limiting piece for limiting the horizontal movement of the support rod.
Preferably, the limiting member is a limiting screw, and the limiting screw at least partially extends into the mounting groove.
Preferably, the supporting seat is a rectangular frame structure formed by enclosing plate bodies, and the opening is arranged on the top frame of the rectangular frame structure.
Preferably, the frame structure further comprises two reinforcing plates, and the two reinforcing plates are respectively fixed on openings on two sides of the rectangular frame structure.
Preferably, the upper and lower parts of the reinforcing plate are respectively provided with viewing holes communicating with the mounting grooves.
Preferably, the supporting seat, the supporting rod, the pull rod, the connecting plate and the supporting plate are integrally formed.
The utility model also provides a vibration isolation device which comprises the vibration isolation supporting structure.
Compared with the prior art, after the vibration isolation supporting structure provided by the utility model is subjected to displacement caused by vibration in the horizontal direction, the supporting rod and the pull rod are deformed in a coordinated manner, so that a workbench supported by the vibration isolation supporting structure has only tiny displacement change in the vertical direction, and the tiny displacement change hardly affects the machining precision of parts on the supported workbench; the vibration isolation in the horizontal direction can be realized by the elastic deformation of the pull rod in the horizontal direction. The cross sections of the middle sections of the support rods and the pull rods are larger than those of the upper sections and the lower sections, so that the support main body has higher vertical support and better horizontal vibration isolation capability under the condition of not increasing the overall structural size of the support main body. The lower section of the support rod and the upper section of the pull rod are designed into a waist drum-shaped structure, so that the horizontal flexibility can be greatly increased, and meanwhile, the rigidity of the vertical support is weakened less. Reinforcing plates are respectively arranged on two sides of the support main body, so that the function of vertical bearing rigidity of the vibration isolation support structure can be further enhanced. The upper part and the lower part of the reinforcing plate are respectively provided with observation holes communicated with the mounting grooves for observing and detecting the stress conditions of the upper ends and the lower ends of the supporting rods and the pull rods. The supporting main body is integrally formed, and the connecting pieces of all the parts are more reliable in connection and compact in structural size, so that the supporting main body can be used in vibration isolation devices with severe requirements on space. The whole vibration isolation supporting structure is convenient to assemble and disassemble and simple to maintain, and meanwhile, the reliability of the structure can be improved.
The above-described features may be combined in various suitable ways or replaced by equivalent features as long as the object of the present utility model can be achieved.
Drawings
The utility model will be described in more detail hereinafter on the basis of an embodiment which is only non-limiting and with reference to the accompanying drawings. Wherein:
fig. 1 is a schematic structural view of a vibration isolation supporting structure according to an embodiment of the present utility model;
fig. 2 is an exploded view of a vibration isolation support structure according to an embodiment of the present utility model;
FIG. 3 is a front view of a support body according to an embodiment of the present utility model;
fig. 4 is a partial cross-sectional view of a support body according to an embodiment of the present utility model.
Reference numerals illustrate:
1. a support plate; 2. a support base; 3. a support rod; 4. a pull rod; 5. a connecting plate; 6. a limit screw; 7. a reinforcing plate; 8. an observation hole; 31. an upper section of the support rod; 32. a support rod middle section; 33. a lower section of the support rod; 41. an upper section of the pull rod; 42. a pull rod middle section; 43. the lower section of the pull rod.
Detailed Description
To make the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below, and all other embodiments obtained by those skilled in the art without making any inventive effort based on the specific embodiments of the present utility model are within the scope of the present utility model.
The terms "first," "second," and the like, as used herein do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises" and the like means that elements preceding the word encompass the elements recited after the word, and not exclude the possibility of also encompassing other elements. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
In the present utility model, when it is described that a specific device is located between a first device and a second device, an intervening device may or may not be present between the specific device and the first device or the second device. When it is described that a particular device is connected to other devices, the particular device may be directly connected to the other devices without intervening devices, or may be directly connected to the other devices without intervening devices.
All terms (including technical or scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs, unless specifically defined otherwise. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
As shown in fig. 1 to 4, the vibration isolation support structure includes a support body mainly including a support base 2, a support rod 3, and two tie rods 4. The supporting seat 2 is a rectangular frame structure formed by enclosing plate bodies, the inner space of the rectangular frame structure is a mounting groove, the mounting groove is used for accommodating the mounting supporting rod 3 and the pull rod 4, an opening is formed in the top frame of the rectangular frame structure, and the opening is communicated with the mounting groove. The supporting rod 3 passes through the opening in a non-contact way, the upper end of the supporting rod 3 is fixedly connected with the supporting plate 1, and the supporting plate 1 is used for supporting a workbench. The two pull rods 4 have the same structure, the two pull rods 4 are arranged in the mounting groove and uniformly distributed on the periphery of the support rod 3, the upper ends of the pull rods 4 are fixedly connected with the top of the mounting groove, and the lower ends of the pull rods 4 are fixedly connected with the lower ends of the support rod 3 through a connecting plate 5.
After the support main body is subjected to horizontal vibration to displace, the support rod 3 and the pull rod 4 are in coordinated deformation, so that a workbench supported by the support main body has only tiny displacement change in the vertical direction, and the tiny displacement change hardly affects the machining precision of parts on the supported workbench; elastic deformation of the tie rod 4 in the horizontal direction can realize vibration isolation in the horizontal direction.
The supporting body is usually smaller in load, if high bearing capacity is required, the horizontal vibration isolation capacity is sacrificed under the same size, if the horizontal vibration isolation capacity is improved, the bearing capacity is reduced under the same size, if the high bearing capacity and the high vibration isolation capacity are both required, the structural size is enlarged, and the supporting body is not suitable for a scene with installation space limitation. In order to solve the problem, the utility model optimizes the structures of the supporting rod 3 and the pull rod 4:
the support rod 3 is divided into an upper support rod section 31, a middle support rod section 32 and a lower support rod section 33 from top to bottom in sequence. The cross section area of the middle section 32 of the support rod is larger than the cross section area of the upper section 31 of the support rod and the cross section area of the lower section 33 of the support rod, the middle section 32 of the support rod becomes thicker, and the rigidity is enhanced; the upper and lower sections of the support rod 3 are thinned to enhance flexibility, so that the support body has higher vertical support and better horizontal vibration isolation capability under the condition of not increasing the overall structural size of the support body.
The tie rod 4 is divided into a tie rod upper section 41, a tie rod middle section 42 and a tie rod lower section 43 in order from top to bottom. The cross section area of the middle section 42 of the pull rod is larger than the cross section area of the upper section 41 of the pull rod and the cross section area of the lower section 43 of the pull rod, so that the middle section 42 of the pull rod is thicker, and the rigidity is enhanced; the upper and lower sections of the pull rod 4 are thinned, and the flexibility is enhanced, so that the support main body has higher vertical support and better horizontal vibration isolation capability under the condition of not increasing the overall structural size of the support main body.
The vertical support of the support main body can be improved and the horizontal vibration isolation capability can be enhanced by independently carrying out structural optimization on the support rod 3 or the pull rod 4. Of course, the two sections can be optimized simultaneously, that is, the cross section area of the middle section 32 of the support rod is larger than the cross section area of the upper section 31 of the support rod and the cross section area of the lower section 33 of the support rod, and the cross section area of the middle section 42 of the pull rod is larger than the cross section area of the upper section 41 of the pull rod and the cross section area of the lower section 43 of the pull rod, so that the support main body has higher vertical support and better horizontal vibration isolation capability.
The lower support rod section 33 and the upper pull rod section 41 are further designed into a waist drum-shaped structure, and the cross sectional area of two ends of the waist drum-shaped structure is larger than that of the middle part; the lower support rod section 33 and the upper pull rod section 41 are all the most sensitive parts to deformation, and the parts are designed into a waist drum-shaped structure, so that the horizontal flexibility can be greatly increased, and the rigidity of the vertical support is weakened less.
In a preferred scheme, the vibration isolation supporting structure further comprises two reinforcing plates 7, and the two reinforcing plates 7 are fixedly arranged on openings on two sides of the rectangular frame structure through screws respectively to further enhance the vertical bearing rigidity of the vibration isolation supporting structure. The upper part and the lower part of the reinforcing plate 7 are respectively provided with an observation hole 8 communicated with the mounting groove, and the observation holes 8 are used for observing and detecting the stress conditions of the upper end and the lower end of the supporting rod 3 and the pull rod 4; meanwhile, when the stress of the supporting body needs to be detected, the detection device can be mounted on the supporting rod 3 or the pull rod 4 of the supporting body through the observation hole 8.
In a preferred embodiment, the vibration isolation support structure further comprises a stopper for limiting the horizontal movement of the support rod 3. As shown in fig. 2, two opposite side surfaces of the supporting seat 2 are provided with a screw hole, a limit screw 6 is screwed in the screw hole, at least part of the limit screw 6 extends into the mounting groove, and the two limit screws 6 are used for limiting the movement of the supporting rod 3 in the horizontal X direction. Two reinforcing plates 7 are respectively provided with a screw hole, a limit screw 6 is screwed in the screw hole, at least part of the limit screw 6 extends into the mounting groove, and the two limit screws 6 are used for limiting the movement of the support rod 3 in the horizontal Y direction. Through setting up the locating part, can prevent effectively that vibration isolation bearing structure from leading to unstability destruction because of the too big displacement of level that the workstation produced in vibration isolation process.
The supporting main body is manufactured by adopting an integrated forming process, and the supporting seat 2, the supporting rod 3, the pull rod 4, the connecting plate 5 and the supporting plate 1 of the supporting main body are integrally formed, so that connecting pieces of parts of the supporting main body are omitted, the connection is more reliable, the structural size is more compact, and the vibration isolation device can be used in vibration isolation devices with severe requirements on space. The whole vibration isolation supporting structure is convenient to assemble and disassemble and simple to maintain, and meanwhile, the reliability of the structure can be improved.
In other embodiments, three tie rods 4 are provided, and the three tie rods 4 are symmetrically distributed in an equilateral triangle with the support rod 3 as a center. In the above embodiment, two or three tie rods 4 are provided, respectively, but this does not mean that the number of tie rods 4 in the vibration isolation support structure of the present utility model is limited to two or three, and the number of tie rods 4 may be 4, 5, 6, or the like in other embodiments.
Finally, it should be noted that: the above embodiments and examples are only for illustrating the technical solution of the present utility model, but not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments and examples, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments or examples can be modified or some of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the embodiments or examples.
Claims (12)
1. The vibration isolation supporting structure is characterized by comprising a supporting main body, wherein the supporting main body comprises a supporting seat, a supporting rod and at least two pull rods; a mounting groove is formed in the support seat, and an opening communicated with the mounting groove is formed in the top of the support seat; the support rod passes through the opening in a non-contact manner, and the upper end of the support rod is fixedly connected with the support plate; the pull rods are uniformly distributed on the periphery of the support rod, the upper ends of the pull rods are fixedly connected with the top of the mounting groove, and the lower ends of the pull rods are fixedly connected with the lower ends of the support rod through connecting plates.
2. The vibration isolation support structure of claim 1, wherein the support bar is divided into an upper section, a middle section and a lower section from top to bottom, and the cross-sectional area of the middle section of the support bar is larger than the cross-sectional area of the upper section and/or the cross-sectional area of the lower section.
3. The vibration isolation support structure of claim 2, wherein the lower section of the support bar is a kidney-drum structure.
4. A vibration isolation support according to any one of claims 1 to 3, wherein the tie rod is divided from top to bottom into an upper section, a middle section and a lower section, the cross-sectional area of the middle section of the tie rod being greater than the cross-sectional area of the upper section and/or the cross-sectional area of the lower section.
5. The vibration isolation support structure of claim 4, wherein the upper section of the tie rod is a kidney-drum structure.
6. The vibration isolation support structure of claim 1, further comprising a stop for limiting horizontal movement of the support rod.
7. The vibration isolation support structure of claim 6, wherein the stop is a stop screw, the stop screw extending at least partially into the mounting slot.
8. The vibration isolation support structure according to claim 1, wherein the support base is a rectangular frame structure formed by enclosing plate bodies, and the opening is arranged on a top frame of the rectangular frame structure.
9. The vibration isolation support structure of claim 8, further comprising two reinforcing plates, wherein the two reinforcing plates are respectively fixed to openings on both sides of the rectangular frame structure.
10. The vibration isolation support structure of claim 9, wherein the upper and lower portions of the reinforcing plate are respectively provided with a viewing hole in communication with the mounting groove.
11. The vibration isolation support structure according to any one of claims 1 to 3 or 6 to 10, wherein the support base, the support rod, the tie rod, the connection plate and the support plate are integrally formed.
12. A vibration isolation device comprising the vibration isolation support structure of any one of claims 1-11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320791972.1U CN220015936U (en) | 2023-04-11 | 2023-04-11 | Vibration isolation supporting structure and vibration isolation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320791972.1U CN220015936U (en) | 2023-04-11 | 2023-04-11 | Vibration isolation supporting structure and vibration isolation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220015936U true CN220015936U (en) | 2023-11-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320791972.1U Active CN220015936U (en) | 2023-04-11 | 2023-04-11 | Vibration isolation supporting structure and vibration isolation device |
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|---|---|
| CN (1) | CN220015936U (en) |
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- 2023-04-11 CN CN202320791972.1U patent/CN220015936U/en active Active
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