CN219956012U

CN219956012U - Airing groove

Info

Publication number: CN219956012U
Application number: CN202321082472.7U
Authority: CN
Inventors: 梁永朋; 李勇; 杨宗苓
Original assignee: Suzhou Qingyue Optoelectronics Technology Co Ltd
Current assignee: Suzhou Qingyue Optoelectronics Technology Co Ltd
Priority date: 2023-05-08
Filing date: 2023-05-08
Publication date: 2023-11-03
Anticipated expiration: 2033-05-08

Abstract

The utility model discloses an air drying groove which comprises a groove body, an air pipe and an air inlet, wherein the groove body is provided with a cavity for accommodating a piece to be dried, the air pipe is arranged on the bottom surface and/or the inner wall of the cavity, a plurality of air blowing holes are arranged on the air pipe at intervals, at least part of the air blowing holes face the surface of the piece to be dried, and the air inlet is arranged on the groove body and connected with one end of the air pipe. The drying groove adopts a blowing mode to assist in drying, so that the mask plate can be effectively prevented from rusting, and the service life of the mask plate is prolonged; meanwhile, the time of the whole cleaning procedure of the mask plate is shortened, the influence of the use of the mask plate which is not thoroughly dried on the subsequent production is avoided, and the device has the advantages of simple integral structure, low manufacturing cost and convenience in use.

Description

Airing groove

Technical Field

The utility model relates to the field of mask drying, in particular to an air-drying groove.

Background

The vapor deposition Mask is a mold for vapor deposition of a material onto a substrate fixing area, and is expensive, so that the mold needs to be cleaned after vapor deposition is completed for repeated use.

The Mask is cleaned by NMP1, NMP2, IPA1, pure water spray, IPA2, acetone and hanging and airing, and the concentration of the liquid medicine is gradually reduced along with the use process, so that the subsequent airing time is gradually prolonged, and the subsequent operation efficiency and use are affected.

If the Mask which is not thoroughly dried is directly placed into an MS cavity for vacuumizing, the damage to a cold pump and a dry pump is easy, the photoelectric performance of a product is influenced, and the Mask is easy to rust after being placed into a storage cabinet, so that the use is influenced.

Therefore, how to remove residual moisture on the surface of the Mask to the greatest extent, prolong the service life and improve the evaporation efficiency is a problem to be solved.

Disclosure of Invention

The utility model aims to provide an air drying groove which is used for drying residual moisture on the surface of a mask plate to the greatest extent and avoiding the influence of rust on the service life.

The utility model adopts the following technical scheme:

an air drying trough, comprising:

the device comprises a tank body, a drying device and a drying device, wherein the tank body is provided with a cavity for accommodating a piece to be dried;

the air pipe is arranged on the bottom surface and/or the inner wall of the cavity, a plurality of air blowing holes are formed in the air pipe at intervals, and at least part of the air blowing holes face the surface of the to-be-dried piece;

the air inlet is arranged on the groove body and connected with one end of the air pipe.

In an alternative scheme, a plurality of fixing frames are arranged in the cavity side by side along the transverse direction or the longitudinal direction.

In an alternative scheme, the tank body is also provided with an upper cover and an exhaust port;

the upper cover is arranged above the cavity opening of the cavity;

the exhaust port is connected with the other end of the air pipe.

In an alternative, the air tube is of an S-shaped or grid-shaped configuration.

In an alternative, the gas vent is a duckbill-type structure.

In an alternative, a wind speed regulator is provided at the air inlet.

In an alternative, a filter element is disposed at the air inlet.

In an alternative scheme, the filter element is of a cylindrical structure, external threads are arranged on the periphery of the filter element, internal threads are arranged in the air inlet, and the filter element is in threaded connection with the air inlet; or alternatively, the process may be performed,

the filter element is of a plate-shaped structure, a slot is formed in the air inlet, and the filter element is inserted into the slot of the air inlet.

In an alternative, a heating element is provided at the air inlet.

In an alternative embodiment, the cavity is provided with a temperature sensor, which is electrically connected to the heating element.

Compared with the prior art, the utility model has the beneficial effects that at least:

1. the auxiliary drying in a blowing mode can effectively avoid the mask from rusting and prolong the service life of the mask; meanwhile, the time of the whole cleaning procedure of the mask plate is shortened, and the influence of the use of the mask plate which is not thoroughly dried on the subsequent production is avoided.

2. Has the advantages of simple integral structure, low manufacturing cost and convenient use.

Drawings

Fig. 1 is a schematic structural view of an air-drying tank according to an embodiment of the present utility model.

Fig. 2 is a schematic view of another structure of the airing slot according to the embodiment of the present utility model.

In the figure: 1. a tank body; 101. a cavity; 2. an air pipe; 201. a blow hole; 3. an air inlet; 4. a fixing frame; 5. an upper cover; 6. an exhaust port; 7. a wind speed regulator; 8. a filter element; 9. a heating member; 10. a temperature sensor.

Detailed Description

Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus a repetitive description thereof will be omitted.

The words expressing the positions and directions described in the present utility model are described by taking the drawings as an example, but can be changed according to the needs, and all the changes are included in the protection scope of the present utility model.

Referring to fig. 1 to 2, the present utility model provides a drying tank for rapidly drying a workpiece to be dried with residual moisture, the drying tank comprising a tank body 1, an air pipe 2 and an air inlet 3.

The tank 1 has a cavity 101 for accommodating a member to be dried (such as a reticle, hereinafter, a reticle will be taken as an example), and the cavity 101 is preferably of a rectangular parallelepiped structure so as to sufficiently accommodate the reticle to be dried. Because the tank body 1 is in a wet working environment for a long time, the tank body 1 can be made of corrosion-resistant materials, for example, the tank body 1 can be made of stainless steel plates by welding; alternatively, a corrosion resistant layer (not shown), such as a galvanized layer, a paint layer, etc., may be provided on the inner side of the tank body 1, so as to isolate moisture from contacting the tank body 1, and prolong the service life. In addition, the feet can be arranged below the tank body 1 for leveling and maintenance, and a moving wheel can be arranged to facilitate the movement of the tank body 1 (not shown).

The air pipes 2 are arranged on the bottom surface and/or the inner wall of the cavity 101, for example, as shown in fig. 1, the air pipes 2 can be arranged on at least one inner wall of the cavity 101 in an S-shaped structure, preferably, the number of the air pipes 2 in the S-shaped structure is two, and the air pipes 2 are symmetrically arranged on the inner walls on two sides of the cavity 101, so that the mask plates arranged in the cavity 101 are subjected to opposite blowing, the drying efficiency is improved, and the drying effect is improved; alternatively, as shown in fig. 2, the air pipe 2 may be disposed on at least one inner wall of the cavity 101 in a grid-like structure, and the installation manner and effect of the air pipe 2 in the grid-like structure are similar to those of the air pipe 2 in the S-like structure, which is not described herein, and of course, the air pipe 2 may also be disposed on the bottom surface of the cavity 101, which may also be disposed in the S-like structure or the grid-like structure. The air pipes 2 are provided with a plurality of air blowing holes 201 at intervals, at least part of the air blowing holes 201 face the surface of the mask, the air blowing holes 201 can be arranged at equal intervals, or the intervals are reasonably arranged according to the width of blowing diffusion, for example, the air blowing holes 201 on the sections of the air pipes 2 close to the air inlet 3 can be loosely arranged due to relatively high air flow rate, and the air blowing holes 201 on the sections of the air pipes 2 far away from the air inlet 3 can be densely arranged (not shown) due to relatively low air flow rate. Whether the air pipe 2 is of an S-shaped structure or a grid-shaped structure, the purpose of the air pipe is to enable the air blowing holes 201 to comprehensively and uniformly air-dry the mask.

The air inlet 3 is arranged on the tank body 1 and connected with one end of the air pipe 2, and the air inlet 3 is connected with an air source, such as an air compressor, for conveying pure air to the air pipe 2 so as to realize an air drying function.

When the drying groove is used, the mask plates to be dried are placed in the cavity 101 of the groove body 1 at intervals, the air inlet 3 is used for inputting air, the air is blown out from the air blowing holes 201 towards the surface of the mask plates through the air pipes 2, and the air carries residual liquid and moisture to be discharged from the cavity mouth of the cavity 101, so that the effect of rapidly drying the mask plates is achieved, and compared with the existing natural drying mode, the mask plates can be effectively prevented from rusting, and the service life of the mask plates is prolonged; meanwhile, the time of the whole cleaning procedure of the mask plate is shortened, and the influence of the use of the mask plate which is not thoroughly dried on the subsequent production is avoided.

Referring to fig. 1 and fig. 2, in a specific embodiment, a plurality of fixing frames 4 are arranged in the cavity 101 side by side along a transverse direction or a longitudinal direction, the fixing frames 4 are used for temporarily fixing a mask to be dried, the transversely arranged fixing frames 4 can enable the mask to be in a horizontal state and be matched with an air pipe 2 on the inner wall of the cavity 101 for use, and the longitudinally arranged fixing frames 4 can enable the mask to be in a vertical state and be matched with the air pipe 2 on the bottom surface of the cavity 101 for use. Further, the distance between the adjacent fixing frames 4 is adjustable to meet the drying requirement of different numbers of masks, for example, a chute can be arranged on the inner wall and/or the bottom surface of the cavity 101, the fixing frames 4 are slidably arranged on the chute (not shown), the distance between the adjacent fixing frames 4 is reduced, the blowing strength of the blowing holes 201 is correspondingly adjusted, more masks can be dried at one time, and the operation efficiency of the cleaning procedure is further improved; alternatively, a row of adjustment holes may be provided on the inner wall and/or the bottom of the cavity 101, and the fixing frames 4 may be connected to corresponding adjustment holes (not shown) by screws, so that the interval between adjacent fixing frames 4 may be adjusted.

Referring to fig. 2, in a specific embodiment, the tank body 1 is further provided with an upper cover 5 and an air outlet 6, the upper cover 5 is disposed above the cavity opening of the cavity 101, the upper cover 5 is in sealing and detachable connection with the cavity 101, the air outlet 6 is connected with the other end of the air pipe 2, so that the cavity 101 is closed to isolate dust and impurities outside the drying process from polluting the mask, and during drying, residual liquid moisture carried by air is output from the air outlet 6, so that the effect of rapidly drying the mask is achieved.

Preferably, the air blowing hole 201 has a duckbill structure, and the duckbill air blowing hole 201 can flatten the blown air and increase the contact area with the surface of the mask plate, thereby improving the drying effect.

Referring to fig. 1 and 2, in a specific embodiment, a wind speed regulator 7 is disposed at the air inlet 3, and the wind speed regulator 7 is used for controlling the flow rate of the air input into the air pipe 2, so as to avoid damage to the surface of the mask plate (the surface of the mask plate is thinner and easy to deform) caused by the excessive flow rate of the air. The wind speed regulator 7 may be an adjusting valve connected to the air inlet 3, and an adjusting switch is provided on the adjusting valve.

In addition, in some preferred embodiments, the air inlet 3 is further provided with a filter element 8, and the filter element 8 is used for filtering the air input into the air pipe 2, so as to avoid the impurity adhering to the mask plate to affect the use. Preferably, the filter element 8 is detachably connected with the air inlet 3, so as to facilitate regular cleaning and maintenance of the filter element 8, and the filter element 8 is in a cylindrical structure, and the periphery of the filter element 8 is provided with external threads, the air inlet 3 is internally provided with internal threads, and the filter element 8 is in threaded connection with the air inlet 3 (not shown); alternatively, the filter element 8 has a plate-like structure, the air inlet 3 is provided with a slot, and the filter element 8 is inserted into the slot (not shown) of the air inlet 3.

Further, the air inlet 3 is provided with a heating element 9, and the heating element 9 is used for heating air to improve the drying efficiency of the mask, and the heating element 9 may be a heating element such as an electric heating rod, an electric heating wire, a ceramic heating plate, etc. In addition, the cavity 101 is further provided with a temperature sensor 10, the temperature sensor 10 is electrically connected with the heating piece 9, the temperature sensor 10 is used for monitoring the temperature in the cavity 101 in real time, and feeding back temperature information to the heating piece 9 for temperature control adjustment, so that the temperature of gas blown out by the gas blowing hole 201 is always in a proper range, and damage to a mask plate due to high temperature is avoided.

While embodiments of the present utility model have been shown and described, it will be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that changes, modifications, substitutions and alterations may be made therein by those of ordinary skill in the art without departing from the spirit and scope of the utility model, all such changes being within the scope of the appended claims.

Claims

1. An airing groove, characterized by comprising:

a tank body (1), wherein the tank body (1) is provided with a cavity (101) for accommodating a piece to be dried;

the air pipe (2) is arranged on the bottom surface and/or the inner wall of the cavity (101), a plurality of air blowing holes (201) are formed in the air pipe (2) at intervals, and at least part of the air blowing holes (201) face the surface of the to-be-dried piece;

the air inlet (3) is arranged on the groove body (1) and is connected with one end of the air pipe (2).

2. The airing slot according to claim 1, characterized in that a plurality of fixing frames (4) are arranged in the cavity (101) side by side along the transverse direction or the longitudinal direction.

3. The airing groove according to claim 1, wherein the groove body (1) is further provided with an upper cover (5) and an air outlet (6);

the upper cover (5) is arranged above the cavity opening of the cavity (101);

the exhaust port (6) is connected with the other end of the air pipe (2).

4. The drying tank according to claim 1, characterized in that the air pipe (2) is of S-shaped structure or grid-like structure.

5. The drying trough according to claim 1, characterized in that the blow holes (201) are of duckbill configuration.

6. The airing slot according to claim 1, characterized in that an air speed regulator (7) is provided at the air inlet (3).

7. The drying trough according to claim 1, characterized in that a filter element (8) is provided at the air inlet (3).

8. The air drying groove according to claim 7, wherein the filter element (8) is of a cylindrical structure, external threads are arranged on the periphery of the filter element (8), internal threads are arranged in the air inlet (3), and the filter element (8) is in threaded connection with the air inlet (3); or alternatively, the process may be performed,

the filter element (8) is of a plate-shaped structure, the air inlet (3) is provided with a slot, and the filter element (8) is inserted into the slot of the air inlet (3).

9. The drying trough according to claim 1, characterized in that a heating element (9) is provided at the air inlet (3).

10. The drying tank according to claim 9, characterized in that the cavity (101) is provided with a temperature sensor (10), the temperature sensor (10) being electrically connected to the heating element (9).